JP4734090B2 - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法 Download PDF

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Publication number
JP4734090B2
JP4734090B2 JP2005317704A JP2005317704A JP4734090B2 JP 4734090 B2 JP4734090 B2 JP 4734090B2 JP 2005317704 A JP2005317704 A JP 2005317704A JP 2005317704 A JP2005317704 A JP 2005317704A JP 4734090 B2 JP4734090 B2 JP 4734090B2
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JP
Japan
Prior art keywords
aluminum
acid
film
aluminum film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005317704A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007123787A (ja
Inventor
宜弘 魚住
孝司 平山
明 釘田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2005317704A priority Critical patent/JP4734090B2/ja
Priority to TW095139021A priority patent/TW200729346A/zh
Priority to US11/589,979 priority patent/US7884027B2/en
Publication of JP2007123787A publication Critical patent/JP2007123787A/ja
Application granted granted Critical
Publication of JP4734090B2 publication Critical patent/JP4734090B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
    • H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
    • H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP2005317704A 2005-10-31 2005-10-31 半導体装置の製造方法 Expired - Fee Related JP4734090B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005317704A JP4734090B2 (ja) 2005-10-31 2005-10-31 半導体装置の製造方法
TW095139021A TW200729346A (en) 2005-10-31 2006-10-23 Method of manufacturing semiconductor device
US11/589,979 US7884027B2 (en) 2005-10-31 2006-10-31 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005317704A JP4734090B2 (ja) 2005-10-31 2005-10-31 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2007123787A JP2007123787A (ja) 2007-05-17
JP4734090B2 true JP4734090B2 (ja) 2011-07-27

Family

ID=38004333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005317704A Expired - Fee Related JP4734090B2 (ja) 2005-10-31 2005-10-31 半導体装置の製造方法

Country Status (3)

Country Link
US (1) US7884027B2 (enExample)
JP (1) JP4734090B2 (enExample)
TW (1) TW200729346A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2149147A1 (en) * 2007-05-14 2010-02-03 Basf Se Method for removing etching residues from semiconductor components
US8222160B2 (en) * 2010-11-30 2012-07-17 Kabushiki Kaisha Toshiba Metal containing sacrifice material and method of damascene wiring formation
KR102659176B1 (ko) 2020-12-28 2024-04-23 삼성디스플레이 주식회사 은 함유 박막의 식각 조성물, 이를 이용한 패턴 형성 방법 및 표시장치의 제조 방법

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7144848B2 (en) * 1992-07-09 2006-12-05 Ekc Technology, Inc. Cleaning compositions containing hydroxylamine derivatives and processes using same for residue removal
JPH0645296A (ja) 1992-07-24 1994-02-18 Nippon Steel Corp 半導体装置の洗浄方法
US5858813A (en) * 1996-05-10 1999-01-12 Cabot Corporation Chemical mechanical polishing slurry for metal layers and films
JPH10303197A (ja) 1997-04-24 1998-11-13 Matsushita Electron Corp 半導体装置の製造方法
US7135445B2 (en) * 2001-12-04 2006-11-14 Ekc Technology, Inc. Process for the use of bis-choline and tris-choline in the cleaning of quartz-coated polysilicon and other materials
JP4224652B2 (ja) * 1999-03-08 2009-02-18 三菱瓦斯化学株式会社 レジスト剥離液およびそれを用いたレジストの剥離方法
US6248704B1 (en) * 1999-05-03 2001-06-19 Ekc Technology, Inc. Compositions for cleaning organic and plasma etched residues for semiconductors devices
US6235693B1 (en) * 1999-07-16 2001-05-22 Ekc Technology, Inc. Lactam compositions for cleaning organic and plasma etched residues for semiconductor devices
JP2001168077A (ja) * 1999-12-06 2001-06-22 Seiko Epson Corp サイドウォール除去剤、サイドウォールの除去方法および半導体素子の製造方法
JP2002050607A (ja) * 2000-08-03 2002-02-15 Kaijo Corp 基板処理方法
JP4044296B2 (ja) 2001-03-22 2008-02-06 株式会社東芝 半導体装置の製造方法
JP2003005388A (ja) * 2001-06-26 2003-01-08 Mitsubishi Gas Chem Co Inc 半導体素子の製造方法。
US6916772B2 (en) * 2001-07-13 2005-07-12 Ekc Technology, Inc. Sulfoxide pyrolid(in)one alkanolamine cleaner composition
US7252718B2 (en) * 2002-05-31 2007-08-07 Ekc Technology, Inc. Forming a passivating aluminum fluoride layer and removing same for use in semiconductor manufacture
US20040112409A1 (en) * 2002-12-16 2004-06-17 Supercritical Sysems, Inc. Fluoride in supercritical fluid for photoresist and residue removal
JP2006054251A (ja) 2004-08-10 2006-02-23 Toshiba Corp 半導体装置の製造方法
KR100630737B1 (ko) * 2005-02-04 2006-10-02 삼성전자주식회사 금속 ｃｍｐ 후 세정액 및 이를 이용한 반도체 소자의금속 배선 형성 방법

Also Published As

Publication number Publication date
US7884027B2 (en) 2011-02-08
TW200729346A (en) 2007-08-01
US20070105378A1 (en) 2007-05-10
JP2007123787A (ja) 2007-05-17
TWI313034B (enExample) 2009-08-01

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