JP4731714B2 - 発光装置 - Google Patents
発光装置 Download PDFInfo
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- JP4731714B2 JP4731714B2 JP2001118527A JP2001118527A JP4731714B2 JP 4731714 B2 JP4731714 B2 JP 4731714B2 JP 2001118527 A JP2001118527 A JP 2001118527A JP 2001118527 A JP2001118527 A JP 2001118527A JP 4731714 B2 JP4731714 B2 JP 4731714B2
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- type impurity
- film
- gate electrode
- pair
- light
- Prior art date
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- 239000010408 film Substances 0.000 claims description 259
- 239000012535 impurity Substances 0.000 claims description 131
- 239000000758 substrate Substances 0.000 claims description 24
- 230000015572 biosynthetic process Effects 0.000 claims description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 19
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 19
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 13
- 229910052721 tungsten Inorganic materials 0.000 claims description 13
- 239000010937 tungsten Substances 0.000 claims description 13
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 3
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- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 description 2
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- YMWUJEATGCHHMB-UHFFFAOYSA-N dichloromethane Substances ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 2
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- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
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- 239000011787 zinc oxide Substances 0.000 description 2
- YLYPIBBGWLKELC-RMKNXTFCSA-N 2-[2-[(e)-2-[4-(dimethylamino)phenyl]ethenyl]-6-methylpyran-4-ylidene]propanedinitrile Chemical compound C1=CC(N(C)C)=CC=C1\C=C\C1=CC(=C(C#N)C#N)C=C(C)O1 YLYPIBBGWLKELC-RMKNXTFCSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
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- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
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- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
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- 229910052785 arsenic Inorganic materials 0.000 description 1
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- 229910001882 dioxygen Inorganic materials 0.000 description 1
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- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
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- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
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- 238000011068 loading method Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- VOFUROIFQGPCGE-UHFFFAOYSA-N nile red Chemical compound C1=CC=C2C3=NC4=CC=C(N(CC)CC)C=C4OC3=CC(=O)C2=C1 VOFUROIFQGPCGE-UHFFFAOYSA-N 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- 230000003068 static effect Effects 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Landscapes
- Thin Film Transistor (AREA)
- Electroluminescent Light Sources (AREA)
- Electrodes Of Semiconductors (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001118527A JP4731714B2 (ja) | 2000-04-17 | 2001-04-17 | 発光装置 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000115699 | 2000-04-17 | ||
| JP2000-115699 | 2000-04-17 | ||
| JP2000115699 | 2000-04-17 | ||
| JP2001118527A JP4731714B2 (ja) | 2000-04-17 | 2001-04-17 | 発光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002057162A JP2002057162A (ja) | 2002-02-22 |
| JP2002057162A5 JP2002057162A5 (enExample) | 2008-04-10 |
| JP4731714B2 true JP4731714B2 (ja) | 2011-07-27 |
Family
ID=26590262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001118527A Expired - Fee Related JP4731714B2 (ja) | 2000-04-17 | 2001-04-17 | 発光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4731714B2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4731715B2 (ja) * | 2000-04-19 | 2011-07-27 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP4718677B2 (ja) | 2000-12-06 | 2011-07-06 | 株式会社半導体エネルギー研究所 | 半導体装置及びその作製方法 |
| US6909240B2 (en) | 2002-01-18 | 2005-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
| JP4493933B2 (ja) * | 2002-05-17 | 2010-06-30 | 株式会社半導体エネルギー研究所 | 表示装置 |
| US7256421B2 (en) | 2002-05-17 | 2007-08-14 | Semiconductor Energy Laboratory, Co., Ltd. | Display device having a structure for preventing the deterioration of a light emitting device |
| US7592980B2 (en) | 2002-06-05 | 2009-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| JP4408012B2 (ja) * | 2002-07-01 | 2010-02-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2004220907A (ja) * | 2003-01-15 | 2004-08-05 | Dainippon Printing Co Ltd | 有機elディスプレイおよびディスプレイ用透明電極基板 |
| JP4574130B2 (ja) | 2003-06-18 | 2010-11-04 | 株式会社半導体エネルギー研究所 | 半導体装置、電子機器 |
| JP4522904B2 (ja) * | 2004-04-19 | 2010-08-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US7692378B2 (en) * | 2004-04-28 | 2010-04-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device including an insulating layer with an opening |
| US7268498B2 (en) * | 2004-04-28 | 2007-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| US7550769B2 (en) | 2004-06-11 | 2009-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting element, light emitting device and semiconductor device |
| JP4741286B2 (ja) * | 2004-06-11 | 2011-08-03 | 株式会社半導体エネルギー研究所 | 半導体装置及びその作製方法 |
| US8148895B2 (en) * | 2004-10-01 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method of the same |
| JP4947910B2 (ja) * | 2005-02-28 | 2012-06-06 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| US7888702B2 (en) | 2005-04-15 | 2011-02-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method of the display device |
| US8999836B2 (en) | 2005-05-13 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing display device |
| JP4924293B2 (ja) * | 2007-08-29 | 2012-04-25 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP5459142B2 (ja) * | 2010-08-11 | 2014-04-02 | セイコーエプソン株式会社 | 有機el装置、有機el装置の製造方法、及び電子機器 |
| CN114899346B (zh) * | 2017-06-13 | 2025-07-29 | 堺显示器制品株式会社 | 有机el设备的制造方法及薄膜密封结构形成装置 |
| JP6567121B2 (ja) * | 2018-03-28 | 2019-08-28 | 堺ディスプレイプロダクト株式会社 | 薄膜封止構造形成装置 |
| JP6872586B2 (ja) * | 2019-07-30 | 2021-05-19 | 堺ディスプレイプロダクト株式会社 | 有機elデバイスの製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3086579B2 (ja) * | 1993-12-28 | 2000-09-11 | シャープ株式会社 | 薄膜トランジスタの製造方法 |
| JPH08274336A (ja) * | 1995-03-30 | 1996-10-18 | Toshiba Corp | 多結晶半導体薄膜トランジスタ及びその製造方法 |
| JPH1074951A (ja) * | 1996-08-29 | 1998-03-17 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
| JPH11345978A (ja) * | 1998-04-03 | 1999-12-14 | Toshiba Corp | 薄膜トランジスタおよびその製造方法、液晶表示装置 |
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2001
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