JP4724495B2 - 光学式エンコーダ - Google Patents

光学式エンコーダ Download PDF

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Publication number
JP4724495B2
JP4724495B2 JP2005247664A JP2005247664A JP4724495B2 JP 4724495 B2 JP4724495 B2 JP 4724495B2 JP 2005247664 A JP2005247664 A JP 2005247664A JP 2005247664 A JP2005247664 A JP 2005247664A JP 4724495 B2 JP4724495 B2 JP 4724495B2
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JP
Japan
Prior art keywords
light
scale
diffraction grating
main scale
gap
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JP2005247664A
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English (en)
Japanese (ja)
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JP2007064664A5 (enExample
JP2007064664A (ja
Inventor
正彦 井垣
暁生 熱田
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005247664A priority Critical patent/JP4724495B2/ja
Priority to US11/467,697 priority patent/US7385179B2/en
Publication of JP2007064664A publication Critical patent/JP2007064664A/ja
Publication of JP2007064664A5 publication Critical patent/JP2007064664A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2005247664A 2005-08-29 2005-08-29 光学式エンコーダ Expired - Fee Related JP4724495B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005247664A JP4724495B2 (ja) 2005-08-29 2005-08-29 光学式エンコーダ
US11/467,697 US7385179B2 (en) 2005-08-29 2006-08-28 Optical encoder for measuring displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005247664A JP4724495B2 (ja) 2005-08-29 2005-08-29 光学式エンコーダ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011007094A Division JP2011075581A (ja) 2011-01-17 2011-01-17 光学式エンコーダ

Publications (3)

Publication Number Publication Date
JP2007064664A JP2007064664A (ja) 2007-03-15
JP2007064664A5 JP2007064664A5 (enExample) 2008-10-09
JP4724495B2 true JP4724495B2 (ja) 2011-07-13

Family

ID=37927052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005247664A Expired - Fee Related JP4724495B2 (ja) 2005-08-29 2005-08-29 光学式エンコーダ

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US (1) US7385179B2 (enExample)
JP (1) JP4724495B2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7659996B2 (en) * 2006-11-08 2010-02-09 Ricoh Company, Ltd. Relative position detection device and detector for rotary body and image forming apparatus including the relative position detection device
EP1959674A1 (de) * 2007-02-08 2008-08-20 Texmag GmbH Vertriebsgesellschaft Kamera und Verfahren zu deren Betrieb
JP2010256081A (ja) * 2009-04-22 2010-11-11 Fujifilm Corp 光学式位置検出器及び光学装置
JP5679643B2 (ja) * 2009-09-11 2015-03-04 キヤノン株式会社 光学式エンコーダ
JP5170045B2 (ja) * 2009-09-18 2013-03-27 株式会社安川電機 リニアエンコーダ、リニアモータ、リニアモータシステム、メインスケール及びリニアエンコーダの製造方法
CN101872065B (zh) * 2010-06-11 2012-04-18 南京中科天文仪器有限公司 一种光电角轴编码器的组合式光栅扫描系统
JP5393925B2 (ja) * 2011-02-21 2014-01-22 三菱電機株式会社 光学式エンコーダ
JP6032924B2 (ja) * 2011-04-13 2016-11-30 キヤノン株式会社 エンコーダ
US9029757B2 (en) * 2011-12-23 2015-05-12 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
DE102012222077A1 (de) * 2012-12-03 2014-06-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP6593868B2 (ja) * 2015-07-28 2019-10-23 株式会社ミツトヨ 変位検出装置
US9683869B1 (en) 2015-12-11 2017-06-20 Mitutoyo Corporation Electronic absolute position encoder
TWI623200B (zh) * 2016-04-27 2018-05-01 財團法人工業技術研究院 定位絕對碼的解碼裝置及解碼方法
US10243668B2 (en) 2016-04-27 2019-03-26 Industrial Technology Research Institute Positioning measurement device and the method thereof
CN106500606B (zh) * 2016-12-26 2022-02-25 清华大学深圳研究生院 一种多码道光栅尺
US10274344B2 (en) 2016-12-27 2019-04-30 Mitutoyo Corporation Displacement encoder
US10094685B2 (en) * 2016-12-27 2018-10-09 Mitutoyo Corporation Displacement encoder
EP3593092B1 (en) * 2017-03-07 2023-07-26 Renishaw PLC Encoder apparatus
US10295648B2 (en) * 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals
TWI798331B (zh) * 2018-02-02 2023-04-11 日商三共製作所股份有限公司 檢測移動體之運動之位置變化量的方法及裝置
CN109916598A (zh) * 2019-04-26 2019-06-21 北京航空航天大学 一种基于衍射光栅的显微物镜数值孔径测量方法
JP7475973B2 (ja) * 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
DE102021208006A1 (de) * 2021-07-26 2023-01-26 Siemens Aktiengesellschaft Druckmessvorrichtung und Messverfahren zur nicht-invasiven Druckmessung und Computerprogrammprodukt
US11823406B1 (en) * 2023-07-19 2023-11-21 Mloptic Corp. Moiré-based distance measurement system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3616144A1 (de) * 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
US4979827A (en) * 1988-02-26 1990-12-25 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder
JP2539269B2 (ja) * 1989-07-17 1996-10-02 オークマ株式会社 光学式エンコ―ダ
DE4323712C2 (de) * 1993-07-15 1997-12-11 Heidenhain Gmbh Dr Johannes Lichtelektrische Längen- oder Winkelmeßeinrichtung
DE4404564A1 (de) * 1994-02-12 1995-08-17 Henkel Kgaa Verwendung von 1,2,3,4-Tetrahydrochinoxalinen als Oxidationsfarbstoffvorprodukte in Oxidationsfärbemitteln
JP2695623B2 (ja) * 1994-11-25 1998-01-14 株式会社ミツトヨ 光学式エンコーダ
DE19511068A1 (de) * 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
JP3215289B2 (ja) * 1995-04-17 2001-10-02 オークマ株式会社 スケール及びエンコーダ
JPH09196705A (ja) * 1996-01-23 1997-07-31 Mitsutoyo Corp 変位測定装置
JP3209914B2 (ja) * 1996-03-19 2001-09-17 オークマ株式会社 光学式エンコーダ
US6094307A (en) * 1996-05-17 2000-07-25 Okuma Corporation Optical grating and encoder
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
CN100445698C (zh) * 2004-03-03 2008-12-24 三菱电机株式会社 光学式编码器
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression

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Publication number Publication date
US20070102630A1 (en) 2007-05-10
US7385179B2 (en) 2008-06-10
JP2007064664A (ja) 2007-03-15

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