JP4671858B2 - 外観検査装置 - Google Patents

外観検査装置 Download PDF

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Publication number
JP4671858B2
JP4671858B2 JP2005373371A JP2005373371A JP4671858B2 JP 4671858 B2 JP4671858 B2 JP 4671858B2 JP 2005373371 A JP2005373371 A JP 2005373371A JP 2005373371 A JP2005373371 A JP 2005373371A JP 4671858 B2 JP4671858 B2 JP 4671858B2
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Japan
Prior art keywords
inspection
hand
unit
wafer
substrate
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Expired - Fee Related
Application number
JP2005373371A
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English (en)
Japanese (ja)
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JP2006165586A5 (zh
JP2006165586A (ja
Inventor
規夫 丸山
大輔 横井
康雄 森
芳久 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2005373371A priority Critical patent/JP4671858B2/ja
Publication of JP2006165586A publication Critical patent/JP2006165586A/ja
Publication of JP2006165586A5 publication Critical patent/JP2006165586A5/ja
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Publication of JP4671858B2 publication Critical patent/JP4671858B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2005373371A 2000-09-06 2005-12-26 外観検査装置 Expired - Fee Related JP4671858B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005373371A JP4671858B2 (ja) 2000-09-06 2005-12-26 外観検査装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000270330 2000-09-06
JP2000280883 2000-09-14
JP2000285640 2000-09-20
JP2000285988 2000-09-20
JP2005373371A JP4671858B2 (ja) 2000-09-06 2005-12-26 外観検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002525910A Division JP3975164B2 (ja) 2000-09-06 2001-09-06 基板搬送装置及び外観検査装置

Publications (3)

Publication Number Publication Date
JP2006165586A JP2006165586A (ja) 2006-06-22
JP2006165586A5 JP2006165586A5 (zh) 2008-10-16
JP4671858B2 true JP4671858B2 (ja) 2011-04-20

Family

ID=36667152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005373371A Expired - Fee Related JP4671858B2 (ja) 2000-09-06 2005-12-26 外観検査装置

Country Status (1)

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JP (1) JP4671858B2 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4914761B2 (ja) * 2007-05-16 2012-04-11 オリンパス株式会社 外観検査装置
JP2010036467A (ja) * 2008-08-05 2010-02-18 Sharp Corp モジュール組立装置およびモジュール組立方法
JP2014035315A (ja) * 2012-08-10 2014-02-24 Hitachi High-Technologies Corp ディスク搬送ユニット及び検査装置
JP6422695B2 (ja) * 2014-07-18 2018-11-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
KR101987895B1 (ko) * 2017-02-02 2019-06-12 주식회사 투윈테크 반도체 또는 디스플레이 시스템 분야에서 사용되는 이송 위치 측정용 테스트 더미 및 상기 이송 위치 측정용 테스트 더미를 이용한 정밀 이송 측정 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09148391A (ja) * 1995-11-21 1997-06-06 Nikon Corp ウエハ観察装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09148391A (ja) * 1995-11-21 1997-06-06 Nikon Corp ウエハ観察装置

Also Published As

Publication number Publication date
JP2006165586A (ja) 2006-06-22

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