JP2006165586A5 - - Google Patents

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Publication number
JP2006165586A5
JP2006165586A5 JP2005373371A JP2005373371A JP2006165586A5 JP 2006165586 A5 JP2006165586 A5 JP 2006165586A5 JP 2005373371 A JP2005373371 A JP 2005373371A JP 2005373371 A JP2005373371 A JP 2005373371A JP 2006165586 A5 JP2006165586 A5 JP 2006165586A5
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JP
Japan
Prior art keywords
substrate
hand
unit
inspection apparatus
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005373371A
Other languages
English (en)
Japanese (ja)
Other versions
JP4671858B2 (ja
JP2006165586A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005373371A priority Critical patent/JP4671858B2/ja
Priority claimed from JP2005373371A external-priority patent/JP4671858B2/ja
Publication of JP2006165586A publication Critical patent/JP2006165586A/ja
Publication of JP2006165586A5 publication Critical patent/JP2006165586A5/ja
Application granted granted Critical
Publication of JP4671858B2 publication Critical patent/JP4671858B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005373371A 2000-09-06 2005-12-26 外観検査装置 Expired - Fee Related JP4671858B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005373371A JP4671858B2 (ja) 2000-09-06 2005-12-26 外観検査装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000270330 2000-09-06
JP2000280883 2000-09-14
JP2000285640 2000-09-20
JP2000285988 2000-09-20
JP2005373371A JP4671858B2 (ja) 2000-09-06 2005-12-26 外観検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002525910A Division JP3975164B2 (ja) 2000-09-06 2001-09-06 基板搬送装置及び外観検査装置

Publications (3)

Publication Number Publication Date
JP2006165586A JP2006165586A (ja) 2006-06-22
JP2006165586A5 true JP2006165586A5 (zh) 2008-10-16
JP4671858B2 JP4671858B2 (ja) 2011-04-20

Family

ID=36667152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005373371A Expired - Fee Related JP4671858B2 (ja) 2000-09-06 2005-12-26 外観検査装置

Country Status (1)

Country Link
JP (1) JP4671858B2 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4914761B2 (ja) * 2007-05-16 2012-04-11 オリンパス株式会社 外観検査装置
JP2010036467A (ja) * 2008-08-05 2010-02-18 Sharp Corp モジュール組立装置およびモジュール組立方法
JP2014035315A (ja) * 2012-08-10 2014-02-24 Hitachi High-Technologies Corp ディスク搬送ユニット及び検査装置
JP6422695B2 (ja) * 2014-07-18 2018-11-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
KR101987895B1 (ko) * 2017-02-02 2019-06-12 주식회사 투윈테크 반도체 또는 디스플레이 시스템 분야에서 사용되는 이송 위치 측정용 테스트 더미 및 상기 이송 위치 측정용 테스트 더미를 이용한 정밀 이송 측정 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09148391A (ja) * 1995-11-21 1997-06-06 Nikon Corp ウエハ観察装置

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