JP4667731B2 - 故障しきい値を有する慣性センサの製造プロセス - Google Patents
故障しきい値を有する慣性センサの製造プロセス Download PDFInfo
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- JP4667731B2 JP4667731B2 JP2003307928A JP2003307928A JP4667731B2 JP 4667731 B2 JP4667731 B2 JP 4667731B2 JP 2003307928 A JP2003307928 A JP 2003307928A JP 2003307928 A JP2003307928 A JP 2003307928A JP 4667731 B2 JP4667731 B2 JP 4667731B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/04—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value
- G01P15/06—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses for indicating maximum value using members subjected to a permanent deformation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0891—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values with indication of predetermined acceleration values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H35/00—Switches operated by change of a physical condition
- H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
- H01H35/146—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch operated by plastic deformation or rupture of structurally associated elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Description
2 基板
6 サンプル
6a 脚部
6b 腕部
8 アンカーパッド
12 犠牲層
18 可動体(主体)
19 アンカー部
20 スプリング部
21 支持体
22 アンカーブロック
24 慣性センサ
Claims (7)
- 故障しきい値を有する慣性センサを製造するプロセスであって、
半導体ウエハ(1;43;60)の基板(2;42;61)の上に、前記基板(2;42;61)を覆う誘電体からなる第1の層(3;62)を形成する工程と、
前記第1の層(3;62)を覆う導電物質からなる第2の層(5;63)を形成する工程と、
フォトリソグラフィー処理によって前記第2の層(5;63)を選択的にエッチングし、それによって、サンプル要素(6;40;51;64;81;81′)を画定し、当該サンプル要素(6;40;51;64;81;81′)は、少なくとも1つのストリップ(6a、6b;37b)と、前記ストリップ(6a、6b;37b)より大きな幅を有する少なくとも1つのアンカーパッド(8;41;55;65)と、前記サンプル要素(6;40;51;64;81;81′)の優先的な破損部分を形成する少なくとも1つの弱化領域(9,10;38;42;58;66;82;82′)とを有する工程と、
前記第1の層(3;62)と前記サンプル要素(6;40;51;64;81;81′)とを覆う前記誘電体からなる第3の層(12;69)を形成し、それによって、前記サンプル要素(6;40;51;64;81;81′)は、前記第1の層(3;62)と前記第3の層(12;69)とにより画定される犠牲領域(3,12;62,69)に埋め込まれる工程と、
前記犠牲領域(3,12;62,69)を介して少なくとも1つの第1の開口部(14;68)と第2の開口部(15)とを作成し、前記第1の開口部(14;68)は前記サンプル要素(6)の一端部を露出し、前記第2の開口部(15)は前記基板(2;42;61)の一部分を露出する工程と、
前記第1の開口部(14;68)と前記第2の開口部(15)とを介して前記犠牲領域(3,12;62,69)の上部に延在する半導体層(16;70)を形成する工程と、
前記半導体層(16;70)を選択的にエッチングして、前記第1の開口部(14;68)を介して前記サンプル要素(6;40;51;64;81;81′)に接続された本体(18;71)と、前記基板(2;42;61)に接続されたアンカー部(19;52;72)と、前記本体(18;71)を前記アンカー部(19;52;72)に接続する弾性要素(20;53;73)とを形成する工程と、
前記犠牲領域(3,12;62,69)をエッチングし、それによって、前記本体(18;71)と前記サンプル要素(6;40;51;64;81;81′)とは自由にされ、前記本体(18;71)は前記基板(2;42;61)に対して相対的に可動にする工程とを備え、
前記犠牲領域(3,12;62,69)をエッチングする工程は、前記アンカーパッド(8;41;55;65)の下の前記犠牲領域(3,12;62,69)における残存部分(3′;62′)を除去する前に中断され、それにより、エッチングされなかった前記犠牲領域(3,12;62,69)における前記残存部分(3′;62′)は前記アンカーパッド(8;41;55;65)を前記基板(2;42;61)に固定し、結合要素として働き、前記サンプル要素(6;40;51;64;81;81′)は、前記本体(18;71)が前記基板(2;42;61)に対して相対的な静止位置からずれる場合に応力を受けることを特徴とする故障しきい値を有する慣性センサの製造プロセス。 - 請求項1に記載のプロセスにおいて、
前記誘電体は二酸化シリコンであり、前記導電物質は多結晶シリコンであることを特徴とする故障しきい値を有する慣性センサの製造プロセス。 - 請求項1または2に記載のプロセスにおいて、
少なくとも1つの弱化領域(9,10;38;42;58;66)を作成する工程が、前記サンプル要素(6;40;51;64)における前記ストリップ(6a、6b;37b)の小幅部分を画定する工程を備えることを特徴とする故障しきい値を有する慣性センサの製造プロセス。 - 請求項3に記載のプロセスにおいて、
前記小幅部分を画定する工程が、前記サンプル要素(6;40;51;64)にノッチ(11;39;42;57;67)を形成する工程を有することを特徴とする故障しきい値を有する慣性センサの製造プロセス。 - 請求項1または2に記載の製造プロセスにおいて、
前記少なくとも1つの弱化領域(82;82′)を作成する工程が、前記サンプル要素(81;81′)の対向する側部(83)の間に延在する溝を作成する工程を備えることを特徴とする故障しきい値を有する慣性センサの製造プロセス。 - 請求項5に記載のプロセスにおいて、
前記溝を作成する工程が、制御時間持続する前記サンプル要素(81;81′)のエッチング工程を備えることを特徴とする故障しきい値を有する慣性センサの製造プロセス。 - 請求項6に記載のプロセスにおいて、
前記溝を作成する工程が、
前記サンプル要素(81′)の内部にストッパ層(86)を形成する工程と、
前記ストッパ層(86)に達するまで前記サンプル要素(81′)をエッチングする工程とを備えることを特徴とする故障しきい値を有する慣性センサの製造プロセス。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02425539A EP1394554B1 (en) | 2002-08-30 | 2002-08-30 | Process for the fabrication of a threshold acceleration sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004134763A JP2004134763A (ja) | 2004-04-30 |
JP4667731B2 true JP4667731B2 (ja) | 2011-04-13 |
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Application Number | Title | Priority Date | Filing Date |
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JP2003307928A Expired - Lifetime JP4667731B2 (ja) | 2002-08-30 | 2003-08-29 | 故障しきい値を有する慣性センサの製造プロセス |
Country Status (3)
Country | Link |
---|---|
US (2) | US20040121504A1 (ja) |
EP (1) | EP1394554B1 (ja) |
JP (1) | JP4667731B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1394554B1 (en) * | 2002-08-30 | 2011-11-02 | STMicroelectronics Srl | Process for the fabrication of a threshold acceleration sensor |
JP2007298408A (ja) * | 2006-04-28 | 2007-11-15 | Matsushita Electric Works Ltd | 静電容量式センサ |
US8682606B2 (en) * | 2008-10-07 | 2014-03-25 | Qualcomm Incorporated | Generating virtual buttons using motion sensors |
US8351910B2 (en) * | 2008-12-02 | 2013-01-08 | Qualcomm Incorporated | Method and apparatus for determining a user input from inertial sensors |
EP2275384B1 (en) * | 2009-07-15 | 2012-02-22 | Nxp B.V. | Threshold acceleration sensor and method of manufacturing |
US9297824B2 (en) * | 2012-09-14 | 2016-03-29 | Intel Corporation | Techniques, systems and devices related to acceleration measurement |
US9222956B2 (en) * | 2013-11-26 | 2015-12-29 | Raytheon Company | High bandwidth linear flexure bearing |
CN106076460B (zh) * | 2016-06-15 | 2018-04-13 | 亚洲硅业(青海)有限公司 | 一种处理多晶硅棒的装置及其使用方法 |
US10670825B2 (en) | 2018-08-23 | 2020-06-02 | Raytheon Company | Mounting devices with integrated alignment adjustment features and locking mechanisms |
TWI756860B (zh) * | 2020-10-08 | 2022-03-01 | 緯創資通股份有限公司 | 訊號傳輸之通道結構 |
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2002
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-
2003
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- 2003-08-29 JP JP2003307928A patent/JP4667731B2/ja not_active Expired - Lifetime
-
2006
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05142243A (ja) * | 1991-11-22 | 1993-06-08 | Omron Corp | 衝撃センサ及び衝撃感知装置 |
JPH08138307A (ja) * | 1994-09-16 | 1996-05-31 | Toshiba Corp | 情報記憶装置 |
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Publication number | Publication date |
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EP1394554B1 (en) | 2011-11-02 |
US20040121504A1 (en) | 2004-06-24 |
JP2004134763A (ja) | 2004-04-30 |
US7678599B2 (en) | 2010-03-16 |
EP1394554A1 (en) | 2004-03-03 |
US20070175865A1 (en) | 2007-08-02 |
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