JP4650619B2 - 駆動ユニット、光学ユニット、光学装置、並びに露光装置 - Google Patents

駆動ユニット、光学ユニット、光学装置、並びに露光装置 Download PDF

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Publication number
JP4650619B2
JP4650619B2 JP2005064687A JP2005064687A JP4650619B2 JP 4650619 B2 JP4650619 B2 JP 4650619B2 JP 2005064687 A JP2005064687 A JP 2005064687A JP 2005064687 A JP2005064687 A JP 2005064687A JP 4650619 B2 JP4650619 B2 JP 4650619B2
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Japan
Prior art keywords
mirror
scale
optical
reticle
projection optical
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Expired - Lifetime
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JP2005064687A
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Japanese (ja)
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JP2006250587A5 (enExample
JP2006250587A (ja
Inventor
仁 西川
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Nikon Corp
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Nikon Corp
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Publication of JP2006250587A5 publication Critical patent/JP2006250587A5/ja
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  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2005064687A 2005-03-09 2005-03-09 駆動ユニット、光学ユニット、光学装置、並びに露光装置 Expired - Lifetime JP4650619B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005064687A JP4650619B2 (ja) 2005-03-09 2005-03-09 駆動ユニット、光学ユニット、光学装置、並びに露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005064687A JP4650619B2 (ja) 2005-03-09 2005-03-09 駆動ユニット、光学ユニット、光学装置、並びに露光装置

Publications (3)

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JP2006250587A JP2006250587A (ja) 2006-09-21
JP2006250587A5 JP2006250587A5 (enExample) 2010-04-22
JP4650619B2 true JP4650619B2 (ja) 2011-03-16

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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101547077B1 (ko) 2003-04-09 2015-08-25 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TWI569308B (zh) 2003-10-28 2017-02-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法
TWI385414B (zh) 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法
TWI379344B (en) 2004-02-06 2012-12-11 Nikon Corp Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method
KR101762083B1 (ko) 2005-05-12 2017-07-26 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
EP1981066B1 (en) 2006-01-30 2014-01-22 Nikon Corporation Optical member holding apparatus and exposure apparatus
JP2009026862A (ja) 2007-07-18 2009-02-05 Canon Inc 光学素子位置決めシステム、投影光学系及び露光装置
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US8792079B2 (en) * 2007-12-28 2014-07-29 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body
JP6478593B2 (ja) * 2014-11-28 2019-03-06 キヤノン株式会社 投影光学系の製造方法、および、デバイス製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6011458Y2 (ja) * 1981-12-29 1985-04-16 サムタク株式会社 ロ−タリ−エンコ−ダ−
JPS60107722U (ja) * 1983-12-26 1985-07-22 株式会社ニコン モジユラ−型エンコ−ダ
JPH01291101A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｎ次元エンコーダ
JPH075361Y2 (ja) * 1990-05-08 1995-02-08 株式会社ミツトヨ 検出ヘッドの取付姿勢調整装置
JP3142355B2 (ja) * 1992-03-11 2001-03-07 敏男 福田 パラレルリンク機構の運動姿勢演算装置
JPH08115128A (ja) * 1993-07-15 1996-05-07 Agency Of Ind Science & Technol パラレルリンク機構
JPH08178701A (ja) * 1994-12-27 1996-07-12 Canon Inc 変位センサ
JPH10267603A (ja) * 1996-11-22 1998-10-09 Eizou Nishimura 位置姿勢検出装置
JPH10267642A (ja) * 1997-03-25 1998-10-09 Eizou Nishimura 位置姿勢検出装置
JPH1133944A (ja) * 1997-07-24 1999-02-09 Olympus Optical Co Ltd マイクロパラレルリンク機構
JPH11274031A (ja) * 1998-03-20 1999-10-08 Canon Inc 露光装置およびデバイス製造方法ならびに位置決め装置
AU5653699A (en) * 1999-09-20 2001-04-24 Nikon Corporation Parallel link mechanism, exposure system and method of manufacturing the same, and method of manufacturing devices
JP4311524B2 (ja) * 2002-04-26 2009-08-12 株式会社ミツトヨ 検出器位置調整機構
JP2004103740A (ja) * 2002-09-06 2004-04-02 Canon Inc 露光装置

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