JP4648341B2 - 2d基板に基づく3d構造 - Google Patents
2d基板に基づく3d構造 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 47
- 239000012530 fluid Substances 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 8
- 238000005452 bending Methods 0.000 claims description 7
- 238000003856 thermoforming Methods 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 90
- 238000005520 cutting process Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- 238000013461 design Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 230000001419 dependent effect Effects 0.000 description 4
- 238000004090 dissolution Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000003698 laser cutting Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 102000010637 Aquaporins Human genes 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 210000001124 body fluid Anatomy 0.000 description 1
- 239000010839 body fluid Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005370 electroosmosis Methods 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
- B01F25/4317—Profiled elements, e.g. profiled blades, bars, pillars, columns or chevrons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
- B01F25/43197—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor characterised by the mounting of the baffles or obstructions
- B01F25/431971—Mounted on the wall
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
- B01J2219/00511—Walls of reactor vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00889—Mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/08—Regulating or influencing the flow resistance
- B01L2400/084—Passive control of flow resistance
- B01L2400/086—Passive control of flow resistance using baffles or other fixed flow obstructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/019—Bonding or gluing multiple substrate layers
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- Microelectronics & Electronic Packaging (AREA)
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- Micromachines (AREA)
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Description
−サンプル液と1以上の溶媒および/または試薬とを均質化するための、2以上の成分を混合するための、サンプル液の流速を特定の流速にするための、あるいはチャネル内での流動抵抗を変更するための、混合用構造(例えば、いわゆる矢筈模様);
−サンプル液の流動方向に関して垂直方向で物質移動を引き起こすことができ、それにより、例えばマイクロ流体チャネルのチャネル底部に粘着して乾燥した成分をチャネルの断片全体にわたって均一に分散することができるようにする、溶解用構造。さらに、3Dマイクロ構造を用いることにより、一般的に、流動チャネル内の固体成分を液体サンプルによってより良く溶解でき、またはチャネル内の乾燥成分を溶媒により湿らせかつさらに溶解できるようになる;
−3Dマイクロ構造を用いることによる別の効果は、チャネル中の流体運動の流速(flow rate)、流動速度(flow velocity)または流動抵抗にそれぞれ作用すること、およびマイクロ流体チャネル内の特定の流動特性を実現することである。
Claims (6)
- 個別の薄層から作製される積層構造を包含し、かつ少なくとも1つのサンプル注入口および少なくとも1つのサンプル排出口を備えたサンプル分析用マイクロ流体デバイスを製造する方法であって、3D構造を包含する少なくとも1つの層を作製するために、平面的な基板2D層内に特定の2Dパターンまたは2D構造を作製すること、ならびにその後、機械的および/または熱的成形手順により、該2Dパターンまたは2D構造に対応する3D構造を作製することを含み、3D構造層を作製するための基板2D層が異方性材料からなり、かつ2Dパターンまたは2D構造が面外に押し出された結果として3D構造を生じるように、該2D層を機械的または熱的成形によって処理することを特徴とする、上記方法。
- 3D構造がマイクロ流体チャネルを通る流体流動の流れに作用するように、3D構造を備える少なくとも1つの層がマイクロ流体チャネル構成を含む層と組み合わされるかまたは該層の隣に配置されることを特徴とする、請求項1に記載の方法。
- 少なくとも4つの層が組み合わされてマイクロ流体デバイスが製造され、該4つの層が、基層、マイクロ流体チャネル構成を含む少なくとも1つの層、3D構造を含む少なくとも1つの追加層、および1つの頂層を含むことを特徴とする、請求項2に記載の方法。
- 少なくとも1つの層がマイクロ流体構造またはマイクロ流体チャネルを含む、複数の個別の層を含む積層構造を備え、かつ少なくとも1つのサンプル注入口および少なくとも1つのサンプル排出口を備えたサンプル分析用マイクロ流体デバイスであって、前記層の少なくとも片面に3D構造を含む追加層が配置され、それにより3D構造がマイクロ流体チャネル内の流体の流動特性に作用することができ、該追加層が異方性材料を含む2D基板から作製されることを特徴とする、上記マイクロ流体デバイス。
- 前記デバイスが、基層、3D構造を備える追加層、マイクロ流体構造を含む少なくとも1つの層、および頂層を含む少なくとも4つの層を含んでなることを特徴とする、請求項4に記載のマイクロ流体デバイス。
- 追加層内の3D構造が、3D構造を生じさせるために曲げ力またはねじり力を適用することによって該構造が2D平面外に押し出されるように、層の両面で異なる物理的および/または熱的挙動を示す平面的な2D構造層に曲げ力またはねじり力を適用することによってもたらされ得ることを特徴とする、請求項4または5に記載のマイクロ流体デバイス。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06002630A EP1820571B1 (en) | 2006-02-09 | 2006-02-09 | 3D structures based on 2D substrates |
Publications (2)
Publication Number | Publication Date |
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JP2007210094A JP2007210094A (ja) | 2007-08-23 |
JP4648341B2 true JP4648341B2 (ja) | 2011-03-09 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007027614A Expired - Fee Related JP4648341B2 (ja) | 2006-02-09 | 2007-02-07 | 2d基板に基づく3d構造 |
Country Status (9)
Country | Link |
---|---|
US (2) | US7977122B2 (ja) |
EP (1) | EP1820571B1 (ja) |
JP (1) | JP4648341B2 (ja) |
CN (1) | CN101037032A (ja) |
AT (1) | ATE432125T1 (ja) |
CA (1) | CA2577381A1 (ja) |
DE (1) | DE602006006965D1 (ja) |
ES (1) | ES2325740T3 (ja) |
PL (1) | PL1820571T3 (ja) |
Families Citing this family (19)
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EP2193844B1 (en) | 2008-11-26 | 2012-03-14 | Corning Incorporated | Heat exchanger for microstructures |
CN102188944B (zh) * | 2011-05-16 | 2013-08-28 | 利穗科技(苏州)有限公司 | 一种混沌型多级涡流微反应器 |
JP6057166B2 (ja) * | 2013-01-18 | 2017-01-11 | 大日本印刷株式会社 | 構造物、構造物の製造方法、及び成形品の製造方法 |
JP5904958B2 (ja) | 2013-03-07 | 2016-04-20 | 株式会社東芝 | 半導体マイクロ分析チップ及びその製造方法 |
JP5951527B2 (ja) | 2013-03-07 | 2016-07-13 | 株式会社東芝 | 検体検出装置及び検出方法 |
JP2014173934A (ja) * | 2013-03-07 | 2014-09-22 | Toshiba Corp | 半導体マイクロ分析チップ及びその製造方法 |
CN103285798B (zh) * | 2013-06-27 | 2015-04-22 | 利穗科技(苏州)有限公司 | 一种多层多级微反应器 |
JP5685630B2 (ja) * | 2013-07-19 | 2015-03-18 | Jfeエンジニアリング株式会社 | マイクロチップ |
JP6151128B2 (ja) | 2013-08-12 | 2017-06-21 | 株式会社東芝 | 半導体マイクロ分析チップ及びその製造方法 |
CN103895226B (zh) * | 2014-03-24 | 2016-05-11 | 浙江大学 | 基于3d打印的三维微流控芯片的加工方法及打印装置 |
CN104959174B (zh) * | 2015-07-01 | 2017-01-18 | 北京工业大学 | 下壁面外凸的微通道的制作方法 |
CN105013547B (zh) * | 2015-07-30 | 2016-09-28 | 天津大学 | 微气泡/液滴生成调控装置和方法 |
US10442494B2 (en) | 2016-02-22 | 2019-10-15 | Arctic Cat Inc. | Snow vehicle |
CN106215988B (zh) * | 2016-08-19 | 2018-04-06 | 北京工业大学 | 一种双支路实现微液滴两次分裂功能的微通道 |
CN106513066B (zh) * | 2016-10-13 | 2018-09-21 | 东南大学 | 一种三维多孔石墨烯微流控芯片及其石墨烯附着方法 |
US10590967B2 (en) * | 2018-03-26 | 2020-03-17 | City University Of Hong Kong | Unidirectional liquid transport systems and methods of manufacture thereof |
CN109455665B (zh) * | 2018-10-22 | 2020-07-28 | 清华大学 | 一种非光刻的介观尺度结构力学组装成型方法 |
CN109464973B (zh) * | 2018-12-19 | 2024-03-08 | 上海璨谊生物科技有限公司 | 微通道模块 |
CN112461768B (zh) * | 2020-11-20 | 2021-11-05 | 武汉大学 | 海水硝酸盐检测装置 |
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- 2007-02-06 CA CA002577381A patent/CA2577381A1/en not_active Abandoned
- 2007-02-07 JP JP2007027614A patent/JP4648341B2/ja not_active Expired - Fee Related
- 2007-02-08 CN CNA2007100054463A patent/CN101037032A/zh active Pending
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Also Published As
Publication number | Publication date |
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CA2577381A1 (en) | 2007-08-09 |
CN101037032A (zh) | 2007-09-19 |
ES2325740T3 (es) | 2009-09-15 |
US20070184672A1 (en) | 2007-08-09 |
US20110223080A1 (en) | 2011-09-15 |
DE602006006965D1 (de) | 2009-07-09 |
ATE432125T1 (de) | 2009-06-15 |
JP2007210094A (ja) | 2007-08-23 |
PL1820571T3 (pl) | 2009-11-30 |
US7977122B2 (en) | 2011-07-12 |
EP1820571B1 (en) | 2009-05-27 |
EP1820571A1 (en) | 2007-08-22 |
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