JP4648341B2 - ２ｄ基板に基づく３ｄ構造 - Google Patents

２ｄ基板に基づく３ｄ構造 Download PDF

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Publication number
JP4648341B2
JP4648341B2 JP2007027614A JP2007027614A JP4648341B2 JP 4648341 B2 JP4648341 B2 JP 4648341B2 JP 2007027614 A JP2007027614 A JP 2007027614A JP 2007027614 A JP2007027614 A JP 2007027614A JP 4648341 B2 JP4648341 B2 JP 4648341B2
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layer
microfluidic
substrate
layers
microfluidic device
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Expired - Fee Related
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Japanese (ja)
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JP2007210094A (ja
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サンドツ ロジャー
エフェンハウザー カルロ
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F Hoffmann La Roche AG
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F Hoffmann La Roche AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/4317—Profiled elements, e.g. profiled blades, bars, pillars, columns or chevrons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/43197—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor characterised by the mounting of the baffles or obstructions
    • B01F25/431971—Mounted on the wall
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00497—Features relating to the solid phase supports
    • B01J2219/00511—Walls of reactor vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00889—Mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/08—Regulating or influencing the flow resistance
    • B01L2400/084—Passive control of flow resistance
    • B01L2400/086—Passive control of flow resistance using baffles or other fixed flow obstructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
JP2007027614A 2006-02-09 2007-02-07 ２ｄ基板に基づく３ｄ構造 Expired - Fee Related JP4648341B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06002630A EP1820571B1 (de) 2006-02-09 2006-02-09 Auf 2D-Substraten basierende 3D-Strukturen

Publications (2)

Publication Number Publication Date
JP2007210094A JP2007210094A (ja) 2007-08-23
JP4648341B2 true JP4648341B2 (ja) 2011-03-09

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Country Status (9)

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US (2) US7977122B2 (de)
EP (1) EP1820571B1 (de)
JP (1) JP4648341B2 (de)
CN (1) CN101037032A (de)
AT (1) ATE432125T1 (de)
CA (1) CA2577381A1 (de)
DE (1) DE602006006965D1 (de)
ES (1) ES2325740T3 (de)
PL (1) PL1820571T3 (de)

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EP2193844B1 (de) 2008-11-26 2012-03-14 Corning Incorporated Wärmetauscher für Mikrostrukturen
CN102188944B (zh) * 2011-05-16 2013-08-28 利穗科技(苏州)有限公司 一种混沌型多级涡流微反应器
JP6057166B2 (ja) * 2013-01-18 2017-01-11 大日本印刷株式会社 構造物、構造物の製造方法、及び成形品の製造方法
JP2014173934A (ja) * 2013-03-07 2014-09-22 Toshiba Corp 半導体マイクロ分析チップ及びその製造方法
JP5951527B2 (ja) 2013-03-07 2016-07-13 株式会社東芝 検体検出装置及び検出方法
JP5904958B2 (ja) 2013-03-07 2016-04-20 株式会社東芝 半導体マイクロ分析チップ及びその製造方法
CN103285798B (zh) * 2013-06-27 2015-04-22 利穗科技(苏州)有限公司 一种多层多级微反应器
JP5685630B2 (ja) * 2013-07-19 2015-03-18 Ｊｆｅエンジニアリング株式会社 マイクロチップ
JP6151128B2 (ja) 2013-08-12 2017-06-21 株式会社東芝 半導体マイクロ分析チップ及びその製造方法
CN103895226B (zh) * 2014-03-24 2016-05-11 浙江大学 基于3d打印的三维微流控芯片的加工方法及打印装置
CN104959174B (zh) * 2015-07-01 2017-01-18 北京工业大学 下壁面外凸的微通道的制作方法
CN105013547B (zh) * 2015-07-30 2016-09-28 天津大学 微气泡/液滴生成调控装置和方法
CN106215988B (zh) * 2016-08-19 2018-04-06 北京工业大学 一种双支路实现微液滴两次分裂功能的微通道
CN106513066B (zh) * 2016-10-13 2018-09-21 东南大学 一种三维多孔石墨烯微流控芯片及其石墨烯附着方法
US10590967B2 (en) * 2018-03-26 2020-03-17 City University Of Hong Kong Unidirectional liquid transport systems and methods of manufacture thereof
CN109455665B (zh) * 2018-10-22 2020-07-28 清华大学 一种非光刻的介观尺度结构力学组装成型方法
CN109464973B (zh) * 2018-12-19 2024-03-08 上海璨谊生物科技有限公司 微通道模块
CN112461768B (zh) * 2020-11-20 2021-11-05 武汉大学 海水硝酸盐检测装置

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JP2005537911A (ja) * 2001-12-21 2005-12-15 スリーエム イノベイティブ プロパティズ カンパニー サンプル処理装置の遠心充填
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JP2004016870A (ja) * 2002-06-13 2004-01-22 Atec Japan:Kk マイクロリアクター及びそれを用いた化学反応方法
JP2004261911A (ja) * 2003-02-28 2004-09-24 Mitsubishi Heavy Ind Ltd チャンネル構造体及びその製造方法
WO2005103663A1 (ja) * 2004-04-23 2005-11-03 Arkray, Inc. 分析用具およびその製造方法
JP2006062011A (ja) * 2004-08-25 2006-03-09 Fuji Xerox Co Ltd 微小構造体およびその製造方法

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Publication number Publication date
ES2325740T3 (es) 2009-09-15
EP1820571B1 (de) 2009-05-27
US20110223080A1 (en) 2011-09-15
ATE432125T1 (de) 2009-06-15
CN101037032A (zh) 2007-09-19
US20070184672A1 (en) 2007-08-09
US7977122B2 (en) 2011-07-12
DE602006006965D1 (de) 2009-07-09
PL1820571T3 (pl) 2009-11-30
JP2007210094A (ja) 2007-08-23
EP1820571A1 (de) 2007-08-22
CA2577381A1 (en) 2007-08-09

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