JP4646517B2 - Ｃｍｐ／洗浄システム用の化学剤およびスラリをユースポイント方式で配送、制御、混合するためのシステムならびに方法 - Google Patents

Ｃｍｐ／洗浄システム用の化学剤およびスラリをユースポイント方式で配送、制御、混合するためのシステムならびに方法 Download PDF

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JP4646517B2
JP4646517B2 JP2003570199A JP2003570199A JP4646517B2 JP 4646517 B2 JP4646517 B2 JP 4646517B2 JP 2003570199 A JP2003570199 A JP 2003570199A JP 2003570199 A JP2003570199 A JP 2003570199A JP 4646517 B2 JP4646517 B2 JP 4646517B2
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mixer
mixture
chemical
pump
output
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JP2005518660A5 (enExample
JP2005518660A (ja
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ファム・スエン
グエン・トゥアン
ユーク・ビエン
チョウ・レン
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Lam Research Corp
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Accessories For Mixers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Control Of Non-Electrical Variables (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP2003570199A 2002-02-15 2002-12-23 Ｃｍｐ／洗浄システム用の化学剤およびスラリをユースポイント方式で配送、制御、混合するためのシステムならびに方法 Expired - Fee Related JP4646517B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/077,831 US6732017B2 (en) 2002-02-15 2002-02-15 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
PCT/US2002/041533 WO2003071369A1 (en) 2002-02-15 2002-12-23 System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system

Publications (3)

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JP2005518660A JP2005518660A (ja) 2005-06-23
JP2005518660A5 JP2005518660A5 (enExample) 2005-12-22
JP4646517B2 true JP4646517B2 (ja) 2011-03-09

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JP2003570199A Expired - Fee Related JP4646517B2 (ja) 2002-02-15 2002-12-23 Ｃｍｐ／洗浄システム用の化学剤およびスラリをユースポイント方式で配送、制御、混合するためのシステムならびに方法

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US (2) US6732017B2 (enExample)
EP (1) EP1474729A1 (enExample)
JP (1) JP4646517B2 (enExample)
KR (1) KR20040085187A (enExample)
CN (1) CN100480929C (enExample)
AU (1) AU2002359867A1 (enExample)
WO (1) WO2003071369A1 (enExample)

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Publication number Publication date
WO2003071369A1 (en) 2003-08-28
AU2002359867A1 (en) 2003-09-09
US6732017B2 (en) 2004-05-04
US20040199293A1 (en) 2004-10-07
EP1474729A1 (en) 2004-11-10
CN1620639A (zh) 2005-05-25
CN100480929C (zh) 2009-04-22
KR20040085187A (ko) 2004-10-07
US7054719B2 (en) 2006-05-30
US20030158630A1 (en) 2003-08-21
JP2005518660A (ja) 2005-06-23

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