AU2002359867A1 - System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system - Google Patents

System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system

Info

Publication number
AU2002359867A1
AU2002359867A1 AU2002359867A AU2002359867A AU2002359867A1 AU 2002359867 A1 AU2002359867 A1 AU 2002359867A1 AU 2002359867 A AU2002359867 A AU 2002359867A AU 2002359867 A AU2002359867 A AU 2002359867A AU 2002359867 A1 AU2002359867 A1 AU 2002359867A1
Authority
AU
Australia
Prior art keywords
cmp
slurry
point
control
use delivery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002359867A
Other languages
English (en)
Inventor
Tuan Nguyen
Xuyen Pham
Vien Quach
Ren Zhou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU2002359867A1 publication Critical patent/AU2002359867A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Accessories For Mixers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Control Of Non-Electrical Variables (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
AU2002359867A 2002-02-15 2002-12-23 System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system Abandoned AU2002359867A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/077,831 US6732017B2 (en) 2002-02-15 2002-02-15 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
US10/077,831 2002-02-15
PCT/US2002/041533 WO2003071369A1 (en) 2002-02-15 2002-12-23 System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system

Publications (1)

Publication Number Publication Date
AU2002359867A1 true AU2002359867A1 (en) 2003-09-09

Family

ID=27732727

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002359867A Abandoned AU2002359867A1 (en) 2002-02-15 2002-12-23 System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system

Country Status (7)

Country Link
US (2) US6732017B2 (enExample)
EP (1) EP1474729A1 (enExample)
JP (1) JP4646517B2 (enExample)
KR (1) KR20040085187A (enExample)
CN (1) CN100480929C (enExample)
AU (1) AU2002359867A1 (enExample)
WO (1) WO2003071369A1 (enExample)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3426149B2 (ja) * 1998-12-25 2003-07-14 富士通株式会社 半導体製造における研磨廃液再利用方法及び再利用装置
US20050058016A1 (en) * 2003-09-15 2005-03-17 Smith Morris E. Method to blend two or more fluids
US7201179B2 (en) * 2003-09-23 2007-04-10 Air Liquide Industrial U.S. Lp Modular fluid supply system
US20060080041A1 (en) 2004-07-08 2006-04-13 Anderson Gary R Chemical mixing apparatus, system and method
US7281840B2 (en) * 2004-07-09 2007-10-16 Tres-Ark, Inc. Chemical mixing apparatus
US20060191871A1 (en) * 2005-02-25 2006-08-31 Sheng-Yu Chen Cmp slurry delivery system and method of mixing slurry thereof
US8399390B2 (en) 2005-06-29 2013-03-19 Exxonmobil Chemical Patents Inc. HVI-PAO in industrial lubricant and grease compositions
JP5635234B2 (ja) 2005-07-19 2014-12-03 エクソンモービル・ケミカル・パテンツ・インク ポリαオレフィン組成物およびこれを生成するためのプロセス
WO2007011462A1 (en) 2005-07-19 2007-01-25 Exxonmobil Chemical Patents Inc. Lubricants from mixed alpha-olefin feeds
US20070175511A1 (en) * 2006-02-01 2007-08-02 Doerrschnieder Llc Blending facility set-up and operation
JPWO2007097046A1 (ja) * 2006-02-24 2009-07-09 株式会社Ｉｈｉ回転機械 シリコン粒子の処理方法及び装置
US7368066B2 (en) * 2006-05-31 2008-05-06 Cabot Microelectronics Corporation Gold CMP composition and method
US8834705B2 (en) 2006-06-06 2014-09-16 Exxonmobil Research And Engineering Company Gear oil compositions
US8501675B2 (en) 2006-06-06 2013-08-06 Exxonmobil Research And Engineering Company High viscosity novel base stock lubricant viscosity blends
US8299007B2 (en) 2006-06-06 2012-10-30 Exxonmobil Research And Engineering Company Base stock lubricant blends
US8535514B2 (en) 2006-06-06 2013-09-17 Exxonmobil Research And Engineering Company High viscosity metallocene catalyst PAO novel base stock lubricant blends
US8921290B2 (en) 2006-06-06 2014-12-30 Exxonmobil Research And Engineering Company Gear oil compositions
KR100806841B1 (ko) * 2006-09-11 2008-02-22 세메스 주식회사 슬러리 공급장치에서의 버블 댐퍼
US20080185044A1 (en) * 2007-02-02 2008-08-07 Entegris, Inc. System and method of chemical dilution and dispense
NZ564047A (en) * 2007-12-03 2010-04-30 Airfoama Developments Ltd Mixing apparatus
US20090154288A1 (en) * 2007-12-13 2009-06-18 Heathman James F On-the-Fly Acid Blender with High-Rate, Single Pass, Emulsification Equipment
JP5266335B2 (ja) 2008-01-31 2013-08-21 エクソンモービル・ケミカル・パテンツ・インク メタロセン触媒によるポリ−アルファオレフィン類の生産におけるリニアアルファオレフィン類の改良された利用
US8865959B2 (en) 2008-03-18 2014-10-21 Exxonmobil Chemical Patents Inc. Process for synthetic lubricant production
CA2718894C (en) 2008-03-31 2013-01-15 Exxonmobil Chemical Patents Inc. Production of shear-stable high viscosity pao
US20090299709A1 (en) * 2008-06-03 2009-12-03 Chevron U.S.A. Inc. Virtual petroleum system
US9659796B2 (en) * 2008-07-24 2017-05-23 Taiwan Semiconductor Manufacturing Company, Ltd. Rinsing wafers using composition-tunable rinse water in chemical mechanical polish
US8394746B2 (en) 2008-08-22 2013-03-12 Exxonmobil Research And Engineering Company Low sulfur and low metal additive formulations for high performance industrial oils
KR100985861B1 (ko) * 2008-09-24 2010-10-08 씨앤지하이테크 주식회사 반도체용 슬러리 공급장치 및 슬러리 공급방법
US8476205B2 (en) 2008-10-03 2013-07-02 Exxonmobil Research And Engineering Company Chromium HVI-PAO bi-modal lubricant compositions
US20100215850A1 (en) * 2009-02-20 2010-08-26 Lung-Wen Chou Method of manufacturing an adhesive material that can be printed and repeatedly stuck and torn
US8297830B2 (en) 2009-03-04 2012-10-30 Taiwan Semiconductor Manufacturing Co., Ltd. Slurry system for semiconductor fabrication
US20100249968A1 (en) * 2009-03-25 2010-09-30 Andreas Neuber Factory resource optimization identification process and system
WO2010115123A2 (en) * 2009-04-02 2010-10-07 Purdue Research Foundation Variable volume mixing and automatic fluid management for programmable microfluidics
US8716201B2 (en) 2009-10-02 2014-05-06 Exxonmobil Research And Engineering Company Alkylated naphtylene base stock lubricant formulations
CN102666806B (zh) 2009-12-24 2015-09-16 埃克森美孚化学专利公司 用于生产新型合成基础油料的方法
US8926765B1 (en) * 2010-01-25 2015-01-06 Goodway Technologies Corp. Descaling system for heat exchange equipment
US8728999B2 (en) 2010-02-01 2014-05-20 Exxonmobil Research And Engineering Company Method for improving the fuel efficiency of engine oil compositions for large low and medium speed engines by reducing the traction coefficient
US8598103B2 (en) 2010-02-01 2013-12-03 Exxonmobil Research And Engineering Company Method for improving the fuel efficiency of engine oil compositions for large low, medium and high speed engines by reducing the traction coefficient
US8642523B2 (en) 2010-02-01 2014-02-04 Exxonmobil Research And Engineering Company Method for improving the fuel efficiency of engine oil compositions for large low and medium speed engines by reducing the traction coefficient
US8759267B2 (en) 2010-02-01 2014-06-24 Exxonmobil Research And Engineering Company Method for improving the fuel efficiency of engine oil compositions for large low and medium speed engines by reducing the traction coefficient
US8748362B2 (en) 2010-02-01 2014-06-10 Exxonmobile Research And Engineering Company Method for improving the fuel efficiency of engine oil compositions for large low and medium speed gas engines by reducing the traction coefficient
US20110218678A1 (en) * 2010-03-05 2011-09-08 Kurt Sebben Systems and Methods for Mixing a Solution
US9618376B2 (en) 2010-07-30 2017-04-11 Ecolab Usa Inc. Apparatus, method and system for calibrating a liquid dispensing system
US9815915B2 (en) 2010-09-03 2017-11-14 Exxonmobil Chemical Patents Inc. Production of liquid polyolefins
CA2849093C (en) 2011-10-10 2016-12-06 Exxonmobil Chemical Patents Inc. Poly alpha olefin compositions and process to produce poly alpha olefin compositions
JP6137780B2 (ja) * 2012-04-26 2017-05-31 株式会社Ｉｈｉエアロスペース 流体供給装置
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
TW201501784A (zh) * 2013-04-26 2015-01-16 Graco Minnesota Inc 複數組分比例調配系統及方法
WO2016057797A1 (en) * 2014-10-08 2016-04-14 Air Products And Chemicals, Inc. Low pressure fluctuation flow control apparatus and method
US9895708B2 (en) * 2014-10-20 2018-02-20 Akurate Dynamics LLC System for dispensing multiple component chemical sprays
JP2017177303A (ja) * 2016-03-31 2017-10-05 株式会社荏原製作所 基板研磨装置、その洗浄方法および基板研磨装置への液体供給装置
US20170333927A1 (en) * 2016-05-18 2017-11-23 Graco Minnesota Inc. Plural component dispensing system
JP2019042887A (ja) * 2017-09-05 2019-03-22 株式会社ディスコ 研磨液濃度調整方法
WO2019200237A1 (en) * 2018-04-12 2019-10-17 Nordson Corporation Systems and methods for dispensing multi-component materials
EP3814284B1 (en) 2018-08-29 2025-06-04 MKS Instruments, Inc. Ozonated water delivery system and method of use
WO2021003124A1 (en) * 2019-07-01 2021-01-07 Aaron Auberg Spray rig monitoring system
US11772234B2 (en) 2019-10-25 2023-10-03 Applied Materials, Inc. Small batch polishing fluid delivery for CMP
WO2021108739A1 (en) 2019-11-27 2021-06-03 Diversified Fluid Solutions, Llc On-demand in-line-blending and supply of chemicals
CA3103416C (en) 2019-12-30 2022-01-25 Marathon Petroleum Company Lp Methods and systems for inline mixing of hydrocarbon liquids
CA3104319C (en) 2019-12-30 2023-01-24 Marathon Petroleum Company Lp Methods and systems for spillback control of in-line mixing of hydrocarbon liquids
US11559774B2 (en) 2019-12-30 2023-01-24 Marathon Petroleum Company Lp Methods and systems for operating a pump at an efficiency point
US11607654B2 (en) 2019-12-30 2023-03-21 Marathon Petroleum Company Lp Methods and systems for in-line mixing of hydrocarbon liquids
US11578638B2 (en) 2021-03-16 2023-02-14 Marathon Petroleum Company Lp Scalable greenhouse gas capture systems and methods
US11578836B2 (en) 2021-03-16 2023-02-14 Marathon Petroleum Company Lp Scalable greenhouse gas capture systems and methods
US11655940B2 (en) 2021-03-16 2023-05-23 Marathon Petroleum Company Lp Systems and methods for transporting fuel and carbon dioxide in a dual fluid vessel
US12012883B2 (en) 2021-03-16 2024-06-18 Marathon Petroleum Company Lp Systems and methods for backhaul transportation of liquefied gas and CO2 using liquefied gas carriers
US11447877B1 (en) 2021-08-26 2022-09-20 Marathon Petroleum Company Lp Assemblies and methods for monitoring cathodic protection of structures
US12180597B2 (en) 2021-08-26 2024-12-31 Marathon Petroleum Company Lp Test station assemblies for monitoring cathodic protection of structures and related methods
US12129559B2 (en) 2021-08-26 2024-10-29 Marathon Petroleum Company Lp Test station assemblies for monitoring cathodic protection of structures and related methods
US12043905B2 (en) 2021-08-26 2024-07-23 Marathon Petroleum Company Lp Electrode watering assemblies and methods for maintaining cathodic monitoring of structures
US11686070B1 (en) 2022-05-04 2023-06-27 Marathon Petroleum Company Lp Systems, methods, and controllers to enhance heavy equipment warning
US12012082B1 (en) 2022-12-30 2024-06-18 Marathon Petroleum Company Lp Systems and methods for a hydraulic vent interlock
US12043361B1 (en) 2023-02-18 2024-07-23 Marathon Petroleum Company Lp Exhaust handling systems for marine vessels and related methods
US12006014B1 (en) 2023-02-18 2024-06-11 Marathon Petroleum Company Lp Exhaust vent hoods for marine vessels and related methods
US12297965B2 (en) 2023-08-09 2025-05-13 Marathon Petroleum Company Lp Systems and methods for mixing hydrogen with natural gas
US12402773B2 (en) 2023-08-29 2025-09-02 Haier Us Appliance Solutions, Inc. Multichannel dispenser assembly
US12597151B2 (en) 2023-09-18 2026-04-07 Marathon Petroleum Company Lp Systems and methods to determine vegetation encroachment along a right-of-way
CN118454376A (zh) * 2024-04-29 2024-08-09 山河智能特种装备有限公司 一种压制机的控制方法、系统、电子设备及存储介质

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642766A (en) * 1985-03-06 1987-02-10 Phillips Petroleum Company Method and means of control for multi-source feedstock distribution system including optimization of supplies
JPS61216721A (ja) * 1985-03-20 1986-09-26 Matsui Seisakusho:Kk 粉粒体材料の混合輸送方法と粉粒体材料の混合輸送装置
US4781467A (en) * 1986-04-09 1988-11-01 Cca, Inc. Foam-generating apparatus
US4976546A (en) * 1989-05-12 1990-12-11 Beattie Lewis J Two component fluid mixing and dispensing system
US5803599A (en) 1990-09-17 1998-09-08 Applied Chemical Solutions Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures
US5240324A (en) * 1992-06-05 1993-08-31 Bluffton Agri/Industrial Corp. Continuous flow system for mixing and processing bulk ingredients
US5642756A (en) 1996-02-29 1997-07-01 Bio-Chem Valve Inc. Valve manifold assembly
JPH1133471A (ja) 1997-07-23 1999-02-09 Tokyo Electron Ltd 塗布装置
US6056431A (en) * 1997-09-05 2000-05-02 Eastman Kodak Company Modified passive liquefier batch transition process
US6089242A (en) * 1998-02-10 2000-07-18 Babson Bros. Co. Dairy harvesting facility wash system
JP2000071172A (ja) 1998-08-28 2000-03-07 Nec Corp 化学機械研磨用スラリーの再生装置及び再生方法
KR20000006595A (ko) * 1998-09-22 2000-02-07 유현식 반도체소자 cmp용 금속산화물 슬러리의 제조방법
CN1422200A (zh) 2000-04-07 2003-06-04 卡伯特微电子公司 整合型化学机械式研磨
JP2002170792A (ja) * 2000-11-29 2002-06-14 Mitsubishi Electric Corp 研磨液供給装置及び研磨液供給方法、研磨装置及び研磨方法、並びに、半導体装置の製造方法
US6496781B1 (en) * 2001-06-29 2002-12-17 Appleton Papers Inc. Mixture concentration control in manufacturing processes
US6675840B2 (en) * 2001-09-20 2004-01-13 Ecolab, Inc. Fill probe with in-line mixer
KR100454120B1 (ko) * 2001-11-12 2004-10-26 삼성전자주식회사 화학적 기계적 연마 장비의 슬러리 공급 장치 및 방법

Also Published As

Publication number Publication date
WO2003071369A1 (en) 2003-08-28
US6732017B2 (en) 2004-05-04
JP4646517B2 (ja) 2011-03-09
US20040199293A1 (en) 2004-10-07
EP1474729A1 (en) 2004-11-10
CN1620639A (zh) 2005-05-25
CN100480929C (zh) 2009-04-22
KR20040085187A (ko) 2004-10-07
US7054719B2 (en) 2006-05-30
US20030158630A1 (en) 2003-08-21
JP2005518660A (ja) 2005-06-23

Similar Documents

Publication Publication Date Title
AU2003234514A1 (en) Chemical mix and delivery systems and methods thereof
AU2002352822A1 (en) Hose-end chemical delivery system
AU2002229023A1 (en) Methods, apparatus and slurries for chemical mechanical planarization
AU2003299638A1 (en) Method and apparatus for mixed mode personal communication
AU2003284210A1 (en) Method and apparatus for mixing fluids
AU2002341583A1 (en) Chemical mechanical polishing tool, apparatus and method
AU2003265298A1 (en) Bioprocess container, bioprocess container mixing device and method of use thereof
GB2394683B (en) Chemical-mechanical polishing apparatus and method for controlling the same
GB0318099D0 (en) Mixing devices,systems and methods
AU2002301260A1 (en) Multi-component, on site foaming system and its use
AU2003296082A1 (en) Liquid mixture, structure, and method for forming structure
AU2001259699A1 (en) Method and system for controlling mixing processes
AU2003299952A1 (en) Apparatus, and an associated method, for reserving resources in a mobile communication system through the use of historical indic ia
AU2003243424A1 (en) Deep-well, continuous-coiled-tubing apparatus and method of use
AU2002324354A1 (en) Mixing apparatus
AU2003216401A1 (en) Rotary blending apparatus and system
AU2003298691A1 (en) Mixed kappa/mu opioids and uses thereof
AU2003218165A1 (en) Methods and apparatus for mixing fluids
AU2003276945A1 (en) Tool apparatus, system and method of use
AU2003254305A1 (en) Systems and methods for thawing, mixing, and processing biopharmaceutical materials
AU2003237273A1 (en) Methods and apparatus for mixing and distributing fluids
SG118207A1 (en) Slurry flow control and monitor system for chemical mechanical polisher
AU2003227168A1 (en) Rotary apparatus for emulsifying liquid or particle uniformly
AU2002246049A1 (en) Water-absorbing agent, method for the production thereof and use of the same
AU2002368451A1 (en) Method and apparatus for mixing fluids, separating fluids, and separating solids from fluids

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase