CN100480929C - 在cmp/清洗系统中现场输送、控制和混合化学药剂和浆体的系统与方法 - Google Patents

在cmp/清洗系统中现场输送、控制和混合化学药剂和浆体的系统与方法 Download PDF

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Publication number
CN100480929C
CN100480929C CNB02828111XA CN02828111A CN100480929C CN 100480929 C CN100480929 C CN 100480929C CN B02828111X A CNB02828111X A CN B02828111XA CN 02828111 A CN02828111 A CN 02828111A CN 100480929 C CN100480929 C CN 100480929C
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China
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pump
chemical agent
output
mixture
flow
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Expired - Fee Related
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Chinese (zh)
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CN1620639A (zh
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彭旭源
图安·源
维安·夸池
周仁
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Lam Research Corp
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Lam Research Corp
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Accessories For Mixers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Control Of Non-Electrical Variables (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
CNB02828111XA 2002-02-15 2002-12-23 在cmp/清洗系统中现场输送、控制和混合化学药剂和浆体的系统与方法 Expired - Fee Related CN100480929C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/077,831 US6732017B2 (en) 2002-02-15 2002-02-15 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
US10/077,831 2002-02-15

Publications (2)

Publication Number Publication Date
CN1620639A CN1620639A (zh) 2005-05-25
CN100480929C true CN100480929C (zh) 2009-04-22

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CNB02828111XA Expired - Fee Related CN100480929C (zh) 2002-02-15 2002-12-23 在cmp/清洗系统中现场输送、控制和混合化学药剂和浆体的系统与方法

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US (2) US6732017B2 (enExample)
EP (1) EP1474729A1 (enExample)
JP (1) JP4646517B2 (enExample)
KR (1) KR20040085187A (enExample)
CN (1) CN100480929C (enExample)
AU (1) AU2002359867A1 (enExample)
WO (1) WO2003071369A1 (enExample)

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Also Published As

Publication number Publication date
WO2003071369A1 (en) 2003-08-28
AU2002359867A1 (en) 2003-09-09
US6732017B2 (en) 2004-05-04
JP4646517B2 (ja) 2011-03-09
US20040199293A1 (en) 2004-10-07
EP1474729A1 (en) 2004-11-10
CN1620639A (zh) 2005-05-25
KR20040085187A (ko) 2004-10-07
US7054719B2 (en) 2006-05-30
US20030158630A1 (en) 2003-08-21
JP2005518660A (ja) 2005-06-23

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