JP2005518660A5 - - Google Patents

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Publication number
JP2005518660A5
JP2005518660A5 JP2003570199A JP2003570199A JP2005518660A5 JP 2005518660 A5 JP2005518660 A5 JP 2005518660A5 JP 2003570199 A JP2003570199 A JP 2003570199A JP 2003570199 A JP2003570199 A JP 2003570199A JP 2005518660 A5 JP2005518660 A5 JP 2005518660A5
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JP
Japan
Prior art keywords
chemical solution
pump
mixture
output
mixing point
Prior art date
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Application number
JP2003570199A
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English (en)
Japanese (ja)
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JP4646517B2 (ja
JP2005518660A (ja
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Publication date
Priority claimed from US10/077,831 external-priority patent/US6732017B2/en
Application filed filed Critical
Publication of JP2005518660A publication Critical patent/JP2005518660A/ja
Publication of JP2005518660A5 publication Critical patent/JP2005518660A5/ja
Application granted granted Critical
Publication of JP4646517B2 publication Critical patent/JP4646517B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003570199A 2002-02-15 2002-12-23 Ｃｍｐ／洗浄システム用の化学剤およびスラリをユースポイント方式で配送、制御、混合するためのシステムならびに方法 Expired - Fee Related JP4646517B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/077,831 US6732017B2 (en) 2002-02-15 2002-02-15 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
PCT/US2002/041533 WO2003071369A1 (en) 2002-02-15 2002-12-23 System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system

Publications (3)

Publication Number Publication Date
JP2005518660A JP2005518660A (ja) 2005-06-23
JP2005518660A5 true JP2005518660A5 (enExample) 2005-12-22
JP4646517B2 JP4646517B2 (ja) 2011-03-09

Family

ID=27732727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003570199A Expired - Fee Related JP4646517B2 (ja) 2002-02-15 2002-12-23 Ｃｍｐ／洗浄システム用の化学剤およびスラリをユースポイント方式で配送、制御、混合するためのシステムならびに方法

Country Status (7)

Country Link
US (2) US6732017B2 (enExample)
EP (1) EP1474729A1 (enExample)
JP (1) JP4646517B2 (enExample)
KR (1) KR20040085187A (enExample)
CN (1) CN100480929C (enExample)
AU (1) AU2002359867A1 (enExample)
WO (1) WO2003071369A1 (enExample)

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