JP4645227B2 - 振動子構造体及びその製造方法 - Google Patents

振動子構造体及びその製造方法 Download PDF

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Publication number
JP4645227B2
JP4645227B2 JP2005052600A JP2005052600A JP4645227B2 JP 4645227 B2 JP4645227 B2 JP 4645227B2 JP 2005052600 A JP2005052600 A JP 2005052600A JP 2005052600 A JP2005052600 A JP 2005052600A JP 4645227 B2 JP4645227 B2 JP 4645227B2
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Prior art keywords
electrode
auxiliary
substrate
movable electrode
fixed
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Japanese (ja)
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JP2006238265A (ja
JP2006238265A5 (enrdf_load_stackoverflow
Inventor
徹 渡辺
彰 佐藤
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Seiko Epson Corp
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Seiko Epson Corp
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  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005052600A 2005-02-28 2005-02-28 振動子構造体及びその製造方法 Expired - Fee Related JP4645227B2 (ja)

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JP2005052600A JP4645227B2 (ja) 2005-02-28 2005-02-28 振動子構造体及びその製造方法

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JP2005052600A JP4645227B2 (ja) 2005-02-28 2005-02-28 振動子構造体及びその製造方法

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JP2006238265A JP2006238265A (ja) 2006-09-07
JP2006238265A5 JP2006238265A5 (enrdf_load_stackoverflow) 2008-04-10
JP4645227B2 true JP4645227B2 (ja) 2011-03-09

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Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4965962B2 (ja) * 2006-10-13 2012-07-04 学校法人立命館 マイクロメカニカル共振器
DE102006052414B4 (de) * 2006-11-07 2015-10-01 Robert Bosch Gmbh Mikromechanischer Aktor mit einer Welle
JP5167652B2 (ja) * 2007-02-16 2013-03-21 セイコーエプソン株式会社 Ｍｅｍｓ素子
JP2008200757A (ja) * 2007-02-16 2008-09-04 Seiko Epson Corp Ｍｅｍｓ素子およびその製造方法
JP4334581B2 (ja) * 2007-04-27 2009-09-30 株式会社東芝 静電型アクチュエータ
CN101919159B (zh) * 2008-01-24 2014-01-08 村田电子有限公司 微机械谐振器
JP5115244B2 (ja) * 2008-03-05 2013-01-09 セイコーエプソン株式会社 静電振動子及びその使用方法
JP2009006479A (ja) * 2008-09-30 2009-01-15 Seiko Epson Corp Ｍｅｍｓ素子およびその製造方法
JP5417851B2 (ja) * 2009-01-07 2014-02-19 セイコーエプソン株式会社 Ｍｅｍｓデバイス及びその製造方法
US8368473B2 (en) 2009-06-09 2013-02-05 Panasonic Corporation Resonator and oscillator using same
JP5398411B2 (ja) * 2009-08-10 2014-01-29 株式会社東芝 マイクロ可動デバイスおよびマイクロ可動デバイスの製造方法
JP5953980B2 (ja) * 2012-06-28 2016-07-20 セイコーエプソン株式会社 振動デバイス、電子機器
FR3022691B1 (fr) * 2014-06-23 2016-07-01 Stmicroelectronics Rousset Dispositif capacitif commandable integre
US9466452B1 (en) 2015-03-31 2016-10-11 Stmicroelectronics, Inc. Integrated cantilever switch
FR3034567B1 (fr) 2015-03-31 2017-04-28 St Microelectronics Rousset Dispositif metallique a piece(s) mobile(s) ameliore loge dans une cavite de la partie d'interconnexion (" beol ") d'un circuit integre
JP7418808B2 (ja) 2020-03-12 2024-01-22 国立大学法人東北大学 音叉型振動子および音叉型振動子の調整方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10013424A1 (de) * 2000-03-17 2001-09-20 Bosch Gmbh Robert Filter für elektrische Signale
WO2001082477A2 (en) * 2000-04-20 2001-11-01 The Regents Of The University Of Michigan Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
WO2004032320A1 (ja) * 2002-10-03 2004-04-15 Sharp Kabushiki Kaisha マイクロ共振装置、マイクロフィルタ装置、マイクロ発振器および無線通信機器
JP2004172504A (ja) * 2002-11-21 2004-06-17 Fujitsu Media Device Kk 可変キャパシタ、それを備えたパッケージ及び可変キャパシタの製造方法
JP4341288B2 (ja) * 2003-04-21 2009-10-07 ソニー株式会社 Ｍｅｍｓ型共振器及びその製造方法、並びにフィルタ

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