JP4632797B2 - 半導体装置、半導体装置の製造方法 - Google Patents
半導体装置、半導体装置の製造方法 Download PDFInfo
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- JP4632797B2 JP4632797B2 JP2005013755A JP2005013755A JP4632797B2 JP 4632797 B2 JP4632797 B2 JP 4632797B2 JP 2005013755 A JP2005013755 A JP 2005013755A JP 2005013755 A JP2005013755 A JP 2005013755A JP 4632797 B2 JP4632797 B2 JP 4632797B2
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JP2005013755A JP4632797B2 (ja) | 2005-01-21 | 2005-01-21 | 半導体装置、半導体装置の製造方法 |
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JP2005013755A JP4632797B2 (ja) | 2005-01-21 | 2005-01-21 | 半導体装置、半導体装置の製造方法 |
Publications (3)
Publication Number | Publication Date |
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JP2006203028A JP2006203028A (ja) | 2006-08-03 |
JP2006203028A5 JP2006203028A5 (hu) | 2006-11-24 |
JP4632797B2 true JP4632797B2 (ja) | 2011-02-16 |
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JP2005013755A Expired - Fee Related JP4632797B2 (ja) | 2005-01-21 | 2005-01-21 | 半導体装置、半導体装置の製造方法 |
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JP (1) | JP4632797B2 (hu) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5130843B2 (ja) * | 2007-09-19 | 2013-01-30 | 富士電機株式会社 | 半導体装置 |
CN102403351A (zh) * | 2010-09-14 | 2012-04-04 | 无锡华润上华半导体有限公司 | 沟槽型垂直双扩散晶体管 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001111050A (ja) * | 1999-10-13 | 2001-04-20 | Toyota Central Res & Dev Lab Inc | 縦型半導体装置 |
JP2003152182A (ja) * | 2001-11-14 | 2003-05-23 | Nissan Motor Co Ltd | 炭化珪素半導体装置及びその製造方法 |
JP2004064051A (ja) * | 2002-06-05 | 2004-02-26 | Shindengen Electric Mfg Co Ltd | トランジスタとその製造方法、及びダイオード |
JP2004327815A (ja) * | 2003-04-25 | 2004-11-18 | Shindengen Electric Mfg Co Ltd | 半導体装置、半導体装置の製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2917922B2 (ja) * | 1996-07-15 | 1999-07-12 | 日本電気株式会社 | 半導体装置及びその製造方法 |
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- 2005-01-21 JP JP2005013755A patent/JP4632797B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001111050A (ja) * | 1999-10-13 | 2001-04-20 | Toyota Central Res & Dev Lab Inc | 縦型半導体装置 |
JP2003152182A (ja) * | 2001-11-14 | 2003-05-23 | Nissan Motor Co Ltd | 炭化珪素半導体装置及びその製造方法 |
JP2004064051A (ja) * | 2002-06-05 | 2004-02-26 | Shindengen Electric Mfg Co Ltd | トランジスタとその製造方法、及びダイオード |
JP2004327815A (ja) * | 2003-04-25 | 2004-11-18 | Shindengen Electric Mfg Co Ltd | 半導体装置、半導体装置の製造方法 |
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JP2006203028A (ja) | 2006-08-03 |
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