JP4590082B2 - 回折光学素子及びそれを用いた光学系 - Google Patents

回折光学素子及びそれを用いた光学系 Download PDF

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Publication number
JP4590082B2
JP4590082B2 JP2000302605A JP2000302605A JP4590082B2 JP 4590082 B2 JP4590082 B2 JP 4590082B2 JP 2000302605 A JP2000302605 A JP 2000302605A JP 2000302605 A JP2000302605 A JP 2000302605A JP 4590082 B2 JP4590082 B2 JP 4590082B2
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JP
Japan
Prior art keywords
grating
optical element
diffraction
diffractive optical
diffraction gratings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000302605A
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English (en)
Japanese (ja)
Other versions
JP2002107523A5 (enExample
JP2002107523A (ja
Inventor
孝幸 杉山
浩 佐藤
秀和 下村
求 深澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2000302605A priority Critical patent/JP4590082B2/ja
Priority to US09/961,422 priority patent/US6683718B2/en
Publication of JP2002107523A publication Critical patent/JP2002107523A/ja
Publication of JP2002107523A5 publication Critical patent/JP2002107523A5/ja
Application granted granted Critical
Publication of JP4590082B2 publication Critical patent/JP4590082B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4211—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant correcting chromatic aberrations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • G02B27/4277—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path being separated by an air space
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
    • G02B5/1823—Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2000302605A 2000-10-02 2000-10-02 回折光学素子及びそれを用いた光学系 Expired - Fee Related JP4590082B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000302605A JP4590082B2 (ja) 2000-10-02 2000-10-02 回折光学素子及びそれを用いた光学系
US09/961,422 US6683718B2 (en) 2000-10-02 2001-09-25 Diffractive optical element and image reader using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000302605A JP4590082B2 (ja) 2000-10-02 2000-10-02 回折光学素子及びそれを用いた光学系

Publications (3)

Publication Number Publication Date
JP2002107523A JP2002107523A (ja) 2002-04-10
JP2002107523A5 JP2002107523A5 (enExample) 2007-11-08
JP4590082B2 true JP4590082B2 (ja) 2010-12-01

Family

ID=18783931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000302605A Expired - Fee Related JP4590082B2 (ja) 2000-10-02 2000-10-02 回折光学素子及びそれを用いた光学系

Country Status (2)

Country Link
US (1) US6683718B2 (enExample)
JP (1) JP4590082B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1918500B (zh) * 2004-02-19 2010-10-13 汤姆逊许可证公司 适应性强的微显示投影透镜族
JP2008058907A (ja) 2006-09-04 2008-03-13 Canon Inc 回折光学素子及びこれを有する光学系
EP2233959B1 (en) * 2007-12-20 2016-11-16 Nikon Corporation Eyepiece system and optical device
WO2011148579A1 (ja) * 2010-05-24 2011-12-01 株式会社ニコン 望遠鏡光学系及びこれを備える光学装置
US10241244B2 (en) 2016-07-29 2019-03-26 Lumentum Operations Llc Thin film total internal reflection diffraction grating for single polarization or dual polarization
JP7346278B2 (ja) * 2019-12-20 2023-09-19 キヤノン株式会社 回折光学素子、光学機器および撮像装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2752669B2 (ja) * 1988-11-25 1998-05-18 株式会社リコー ２重回折格子
US5044706A (en) 1990-02-06 1991-09-03 Hughes Aircraft Company Optical element employing aspherical and binary grating optical surfaces
JPH06324262A (ja) 1993-05-11 1994-11-25 Olympus Optical Co Ltd 撮像光学系
JP3239598B2 (ja) * 1994-02-25 2001-12-17 キヤノン株式会社 回折光学素子の製造方法
JP3618464B2 (ja) * 1995-08-29 2005-02-09 オリンパス株式会社 回折光学素子、およびそれを用いる光学装置
JP3618465B2 (ja) * 1996-05-31 2005-02-09 オリンパス株式会社 回折光学素子、およびそれを用いる光学装置
JP3472097B2 (ja) * 1997-08-20 2003-12-02 キヤノン株式会社 回折光学素子及びそれを用いた光学系
JP3472154B2 (ja) * 1998-09-17 2003-12-02 キヤノン株式会社 回折光学素子及びこれを有する光学系
JP3581569B2 (ja) * 1998-06-01 2004-10-27 キヤノン株式会社 複層回折光学素子及びその作製方法
JP3290631B2 (ja) * 1998-10-02 2002-06-10 キヤノン株式会社 光学ユニット、光学ユニットの製造方法、光学ユニットを用いた光学系、光学ユニットを用いた露光装置及びこの露光装置を用いたデバイスの製造方法
JP2000147226A (ja) * 1998-11-16 2000-05-26 Canon Inc 光学素子の製造方法及び光学素子
JP3787474B2 (ja) * 1998-12-24 2006-06-21 キヤノン株式会社 回折光学素子における２つの設計波長の設定方法

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Publication number Publication date
JP2002107523A (ja) 2002-04-10
US6683718B2 (en) 2004-01-27
US20020039233A1 (en) 2002-04-04

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