JP4585684B2 - レーザビーム描画装置における音響光学素子定常化システム - Google Patents

レーザビーム描画装置における音響光学素子定常化システム Download PDF

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Publication number
JP4585684B2
JP4585684B2 JP2000368332A JP2000368332A JP4585684B2 JP 4585684 B2 JP4585684 B2 JP 4585684B2 JP 2000368332 A JP2000368332 A JP 2000368332A JP 2000368332 A JP2000368332 A JP 2000368332A JP 4585684 B2 JP4585684 B2 JP 4585684B2
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Prior art keywords
laser beam
acousto
aom
modulation signal
optic
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Expired - Fee Related
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Japanese (ja)
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JP2002169118A5 (zh
JP2002169118A (ja
Inventor
裕之 鷲山
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Orc Manufacturing Co Ltd
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Orc Manufacturing Co Ltd
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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2000368332A 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム Expired - Fee Related JP4585684B2 (ja)

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JP2000368332A JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

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JP2000368332A JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

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JP2002169118A JP2002169118A (ja) 2002-06-14
JP2002169118A5 JP2002169118A5 (zh) 2007-12-27
JP4585684B2 true JP4585684B2 (ja) 2010-11-24

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007144951A (ja) * 2005-11-30 2007-06-14 Ricoh Co Ltd 画像形成装置
DE102007053199A1 (de) * 2007-11-06 2009-05-14 Leica Microsystems Cms Gmbh Vorrichtung und Verfahren zur Ansteuerung eines akustooptischen Bauteils
DE112012002844T5 (de) * 2011-07-05 2014-04-24 Electronic Scientific Industries, Inc. Verfahren zur Laserbearbeitung mit einem thermisch stabilisierten akustooptischen Strahlablenker und thermisch stabilisiertes Hochgeschwindigkeits-Laserbearbeitungssystem

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890539A (zh) * 1972-03-01 1973-11-26
JPS61189575A (ja) * 1985-02-19 1986-08-23 Canon Inc 画像形成装置
JPS6319962A (ja) * 1986-07-12 1988-01-27 Konica Corp ステツピングモ−タを用いた画像記録装置
JP2000047117A (ja) * 1998-06-18 2000-02-18 Carl Zeiss Jena Gmbh Ａｏｔｆを備えたレ―ザ―走査式顕微鏡
JP2002072160A (ja) * 2000-06-19 2002-03-12 Leica Microsystems Heidelberg Gmbh 光学部品の温度を安定化するための方法、装置および安定化手段を備えた走査型顕微鏡

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173920A (ja) * 1984-09-19 1986-04-16 Fuji Photo Film Co Ltd レ−ザ露光量安定化装置
JPS63231313A (ja) * 1987-03-19 1988-09-27 Asahi Glass Co Ltd 音響光学素子
JPS63316877A (ja) * 1987-06-19 1988-12-26 Fujitsu Ltd 像形成装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890539A (zh) * 1972-03-01 1973-11-26
JPS61189575A (ja) * 1985-02-19 1986-08-23 Canon Inc 画像形成装置
JPS6319962A (ja) * 1986-07-12 1988-01-27 Konica Corp ステツピングモ−タを用いた画像記録装置
JP2000047117A (ja) * 1998-06-18 2000-02-18 Carl Zeiss Jena Gmbh Ａｏｔｆを備えたレ―ザ―走査式顕微鏡
JP2002072160A (ja) * 2000-06-19 2002-03-12 Leica Microsystems Heidelberg Gmbh 光学部品の温度を安定化するための方法、装置および安定化手段を備えた走査型顕微鏡

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JP2002169118A (ja) 2002-06-14

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