JP2002169118A5 - - Google Patents

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Publication number
JP2002169118A5
JP2002169118A5 JP2000368332A JP2000368332A JP2002169118A5 JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5 JP 2000368332 A JP2000368332 A JP 2000368332A JP 2000368332 A JP2000368332 A JP 2000368332A JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000368332A
Other languages
Japanese (ja)
Other versions
JP4585684B2 (ja
JP2002169118A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000368332A priority Critical patent/JP4585684B2/ja
Priority claimed from JP2000368332A external-priority patent/JP4585684B2/ja
Publication of JP2002169118A publication Critical patent/JP2002169118A/ja
Publication of JP2002169118A5 publication Critical patent/JP2002169118A5/ja
Application granted granted Critical
Publication of JP4585684B2 publication Critical patent/JP4585684B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000368332A 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム Expired - Fee Related JP4585684B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000368332A JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000368332A JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

Publications (3)

Publication Number Publication Date
JP2002169118A JP2002169118A (ja) 2002-06-14
JP2002169118A5 true JP2002169118A5 (zh) 2007-12-27
JP4585684B2 JP4585684B2 (ja) 2010-11-24

Family

ID=18838604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000368332A Expired - Fee Related JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

Country Status (1)

Country Link
JP (1) JP4585684B2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007144951A (ja) * 2005-11-30 2007-06-14 Ricoh Co Ltd 画像形成装置
DE102007053199A1 (de) * 2007-11-06 2009-05-14 Leica Microsystems Cms Gmbh Vorrichtung und Verfahren zur Ansteuerung eines akustooptischen Bauteils
DE112012002844T5 (de) * 2011-07-05 2014-04-24 Electronic Scientific Industries, Inc. Verfahren zur Laserbearbeitung mit einem thermisch stabilisierten akustooptischen Strahlablenker und thermisch stabilisiertes Hochgeschwindigkeits-Laserbearbeitungssystem

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890539A (zh) * 1972-03-01 1973-11-26
JPS6173920A (ja) * 1984-09-19 1986-04-16 Fuji Photo Film Co Ltd レ−ザ露光量安定化装置
JPS61189575A (ja) * 1985-02-19 1986-08-23 Canon Inc 画像形成装置
JPS6319962A (ja) * 1986-07-12 1988-01-27 Konica Corp ステツピングモ−タを用いた画像記録装置
JPS63231313A (ja) * 1987-03-19 1988-09-27 Asahi Glass Co Ltd 音響光学素子
JPS63316877A (ja) * 1987-06-19 1988-12-26 Fujitsu Ltd 像形成装置
DE19827140C2 (de) * 1998-06-18 2002-12-12 Zeiss Carl Jena Gmbh Laserscanmikroskop mit AOTF
DE10029167B8 (de) * 2000-06-19 2015-07-02 Leica Microsystems Cms Gmbh Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile

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