JP4576014B2 - 光学式エンコーダー - Google Patents

光学式エンコーダー Download PDF

Info

Publication number
JP4576014B2
JP4576014B2 JP36294199A JP36294199A JP4576014B2 JP 4576014 B2 JP4576014 B2 JP 4576014B2 JP 36294199 A JP36294199 A JP 36294199A JP 36294199 A JP36294199 A JP 36294199A JP 4576014 B2 JP4576014 B2 JP 4576014B2
Authority
JP
Japan
Prior art keywords
light receiving
receiving unit
light
unit
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP36294199A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001174287A5 (enExample
JP2001174287A (ja
Inventor
潤 羽根
英二 山本
岩男 駒崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP36294199A priority Critical patent/JP4576014B2/ja
Publication of JP2001174287A publication Critical patent/JP2001174287A/ja
Publication of JP2001174287A5 publication Critical patent/JP2001174287A5/ja
Application granted granted Critical
Publication of JP4576014B2 publication Critical patent/JP4576014B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Optical Transform (AREA)
JP36294199A 1999-12-21 1999-12-21 光学式エンコーダー Expired - Fee Related JP4576014B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36294199A JP4576014B2 (ja) 1999-12-21 1999-12-21 光学式エンコーダー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36294199A JP4576014B2 (ja) 1999-12-21 1999-12-21 光学式エンコーダー

Publications (3)

Publication Number Publication Date
JP2001174287A JP2001174287A (ja) 2001-06-29
JP2001174287A5 JP2001174287A5 (enExample) 2007-02-08
JP4576014B2 true JP4576014B2 (ja) 2010-11-04

Family

ID=18478122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36294199A Expired - Fee Related JP4576014B2 (ja) 1999-12-21 1999-12-21 光学式エンコーダー

Country Status (1)

Country Link
JP (1) JP4576014B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005128002A (ja) * 2003-10-01 2005-05-19 Olympus Corp エンコーダ
JP4508614B2 (ja) * 2003-11-26 2010-07-21 オリンパス株式会社 光学式エンコーダ
JP5668226B2 (ja) * 2010-10-26 2015-02-12 株式会社ミツトヨ 光電式エンコーダ
JP6074672B2 (ja) * 2011-10-28 2017-02-08 株式会社ミツトヨ 変位検出装置、変位検出方法及び変位検出プログラム
DE102012204572A1 (de) * 2012-03-22 2013-09-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
DE102016204313A1 (de) * 2016-03-16 2017-09-21 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optischer Abstandssensor und Positionsmesseinrichtung mit einem derartigen Abstandssensor
DE102021212224A1 (de) 2021-10-29 2023-05-04 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung und Verfahren zum Betrieb einer optischen Positionsmesseinrichtung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01284716A (ja) * 1988-05-10 1989-11-16 Canon Inc エンコーダー
JPH02103416A (ja) * 1988-10-12 1990-04-16 Mitsutoyo Corp 光電式変位検出器
JP2707749B2 (ja) * 1989-08-04 1998-02-04 株式会社デンソー 光学式エンコーダ
JPH0783612A (ja) * 1993-09-17 1995-03-28 Canon Inc 光学式変位センサ
JPH08254440A (ja) * 1995-03-17 1996-10-01 Olympus Optical Co Ltd 光学式エンコーダ
JP2001041730A (ja) * 1999-07-27 2001-02-16 Futaba Corp リニヤスケール

Also Published As

Publication number Publication date
JP2001174287A (ja) 2001-06-29

Similar Documents

Publication Publication Date Title
US6713756B2 (en) Optical encoder and optical rotary encoder
JP4399179B2 (ja) 光学式変位検出装置および方法
US8416424B2 (en) Laser self-mixing measuring device
US7002137B2 (en) Reference point talbot encoder
JP6245941B2 (ja) 変位検出装置
US9175987B2 (en) Displacement detecting device
US9303979B2 (en) Optical position measuring device
JP7112311B2 (ja) 変位計測装置
US6956654B2 (en) Displacement measuring device with interference grating
US6800842B2 (en) Optical encoder and sensor head of the same
US20090257066A1 (en) Optical displacement measuring device
JP4576014B2 (ja) 光学式エンコーダー
CN1293367C (zh) 参考点泰伯编码器
US9719809B2 (en) Optical unit and displacement measuring device
US7808649B2 (en) Fixed-point detector and displacement-measuring apparatus
US20180066966A1 (en) Displacement measuring device and method of measuring displacement
JP2003004487A (ja) 光学式検出装置
JP2824074B2 (ja) 光学ヘッドの製造方法
JP4416560B2 (ja) 光学式変位測定装置
JP4576013B2 (ja) 光学式エンコーダ
JP2007178281A (ja) チルトセンサ及びエンコーダ
JP2002372439A (ja) 光学式エンコーダ
JP4595697B2 (ja) 反射型光ギャップセンサ
JP2002188942A (ja) 光学式エンコーダ
JP2004037166A (ja) 光学式エンコーダ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061211

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061211

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090907

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100406

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100526

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100810

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100823

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130827

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees