JP4559327B2 - レンズを用いた光モジュールのアラインメント方法およびその方法で作成した光モジュール - Google Patents

レンズを用いた光モジュールのアラインメント方法およびその方法で作成した光モジュール Download PDF

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Publication number
JP4559327B2
JP4559327B2 JP2005266402A JP2005266402A JP4559327B2 JP 4559327 B2 JP4559327 B2 JP 4559327B2 JP 2005266402 A JP2005266402 A JP 2005266402A JP 2005266402 A JP2005266402 A JP 2005266402A JP 4559327 B2 JP4559327 B2 JP 4559327B2
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Japan
Prior art keywords
optical element
lens member
lens
optical
alignment mark
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Expired - Fee Related
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JP2005266402A
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English (en)
Japanese (ja)
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JP2007079090A5 (https=
JP2007079090A (ja
Inventor
卓磨 坂
康信 松岡
正人 宍倉
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Hitachi Ltd
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Hitachi Ltd
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Publication date
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Priority to JP2005266402A priority Critical patent/JP4559327B2/ja
Priority to US11/501,047 priority patent/US7612881B2/en
Publication of JP2007079090A publication Critical patent/JP2007079090A/ja
Publication of JP2007079090A5 publication Critical patent/JP2007079090A5/ja
Application granted granted Critical
Publication of JP4559327B2 publication Critical patent/JP4559327B2/ja
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4221Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
    • G02B6/4224Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4234Passive alignment along the optical axis and active alignment perpendicular to the optical axis
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0225Out-coupling of light
    • H01S5/02253Out-coupling of light using lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/541Dispositions of bond wires
    • H10W72/5445Dispositions of bond wires being orthogonal to a side surface of the chip, e.g. parallel arrangements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/753Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2005266402A 2005-09-14 2005-09-14 レンズを用いた光モジュールのアラインメント方法およびその方法で作成した光モジュール Expired - Fee Related JP4559327B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005266402A JP4559327B2 (ja) 2005-09-14 2005-09-14 レンズを用いた光モジュールのアラインメント方法およびその方法で作成した光モジュール
US11/501,047 US7612881B2 (en) 2005-09-14 2006-08-09 Method of alignment of an optical module and an optical module using thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005266402A JP4559327B2 (ja) 2005-09-14 2005-09-14 レンズを用いた光モジュールのアラインメント方法およびその方法で作成した光モジュール

Publications (3)

Publication Number Publication Date
JP2007079090A JP2007079090A (ja) 2007-03-29
JP2007079090A5 JP2007079090A5 (https=) 2008-05-08
JP4559327B2 true JP4559327B2 (ja) 2010-10-06

Family

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Family Applications (1)

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JP2005266402A Expired - Fee Related JP4559327B2 (ja) 2005-09-14 2005-09-14 レンズを用いた光モジュールのアラインメント方法およびその方法で作成した光モジュール

Country Status (2)

Country Link
US (1) US7612881B2 (https=)
JP (1) JP4559327B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9366832B2 (en) 2014-04-08 2016-06-14 Sumitomo Electric Industries, Ltd. Optical connection structure

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3768901B2 (ja) * 2002-02-28 2006-04-19 松下電器産業株式会社 立体光導波路の製造方法
EP1750506A4 (en) * 2004-05-14 2010-03-17 Flowmedica Inc BILATERAL LOCAL RENAL DELIVERY FOR THE TREATMENT OF CONGESTIVE HEART FAILURE AND BNP THERAPY
US7324717B2 (en) * 2005-11-22 2008-01-29 Palo Alto Research Center Incorporated Photonic device with integrated hybrid microlens array
JP4477677B2 (ja) 2008-01-16 2010-06-09 古河電気工業株式会社 光モジュールおよびその作製方法
JP2010072435A (ja) * 2008-09-19 2010-04-02 Fuji Xerox Co Ltd 光導波路フィルム
US8390930B2 (en) * 2008-11-20 2013-03-05 Omnivision Technologies, Inc. Optical element and manufacture method thereof
US8351794B2 (en) * 2009-03-10 2013-01-08 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Parallel optical transceiver module having a heat dissipation system that dissipates heat and protects components of the module from particulates and handling
KR101097306B1 (ko) * 2009-03-30 2011-12-23 삼성모바일디스플레이주식회사 얼라인 마크를 포함하는 디스플레이 장치
JP5641056B2 (ja) * 2010-12-21 2014-12-17 日本電気株式会社 光モジュール及びその製造方法
JP2012155215A (ja) * 2011-01-27 2012-08-16 Nitto Denko Corp 光導波路の製法およびそれに用いられる光導波路体
EP2581776A1 (en) 2011-10-13 2013-04-17 Tyco Electronics Svenska Holdings AB Optical connector with alignment element, optical unit and assembly method
JP2013200550A (ja) 2012-02-20 2013-10-03 Sumitomo Electric Ind Ltd レンズ部品及びそれを備えた光モジュール
TWI546979B (zh) * 2012-03-05 2016-08-21 晶元光電股份有限公司 對位接合之發光二極體裝置與其製造方法
AT513362B1 (de) * 2012-08-23 2014-06-15 Zizala Lichtsysteme Gmbh Verfahren zum Positionieren eines Licht formenden Körpers
TWI461775B (zh) * 2012-09-26 2014-11-21 Delta Electronics Inc 光通訊模組及其耦光組接方法
US20140086533A1 (en) * 2012-09-27 2014-03-27 Ezra GOLD Method for alignment between two optical components
GB2506406A (en) * 2012-09-28 2014-04-02 Ibm Optical adaptor with horizontal and vertical reference surfaces
CN102980109B (zh) * 2012-12-10 2015-07-01 京东方科技集团股份有限公司 背光源及背光源的组装方法
JP2014137410A (ja) * 2013-01-15 2014-07-28 Furukawa Electric Co Ltd:The 光モジュール、光モジュールの製造方法
TW201439631A (zh) * 2013-04-02 2014-10-16 Hon Hai Prec Ind Co Ltd 光纖連接器
US9547231B2 (en) * 2013-06-12 2017-01-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Device and method for making photomask assembly and photodetector device having light-collecting optical microstructure
CN104280834A (zh) * 2013-07-10 2015-01-14 鸿富锦精密工业(深圳)有限公司 光通讯装置
JP6475911B2 (ja) * 2013-12-16 2019-02-27 住友電気工業株式会社 光コネクタ保持具、光コネクタモジュール、光学基板モジュール及び光モジュール
US9417411B2 (en) * 2014-02-21 2016-08-16 Aurrion, Inc. Optical and thermal interface for photonic integrated circuits
RU2698945C2 (ru) * 2014-05-23 2019-09-02 Нанопресижен Продактс, Инк. Основанная на визуальном наблюдении пассивная юстировка оптоволоконного узла относительно оптоэлектронного устройства
KR102192572B1 (ko) * 2014-06-09 2020-12-18 삼성전자주식회사 광원 모듈의 불량 검사방법, 광원 모듈의 제조 방법 및 광원 모듈 검사장치
JP6140670B2 (ja) * 2014-11-17 2017-05-31 株式会社フジクラ 半導体レーザ装置及びその製造方法
JP2016170276A (ja) * 2015-03-12 2016-09-23 富士通コンポーネント株式会社 光コネクタ
JP6248244B1 (ja) * 2016-08-09 2017-12-20 ナルックス株式会社 位置測定部を備えた部品
JPWO2018042984A1 (ja) * 2016-08-31 2019-06-24 住友電気工業株式会社 光接続構造
WO2019035653A1 (ko) * 2017-08-18 2019-02-21 엘지이노텍 주식회사 표면발광레이저 패키지
KR20190019594A (ko) * 2017-08-18 2019-02-27 엘지이노텍 주식회사 반도체 소자 패키지
JP2020008758A (ja) 2018-07-10 2020-01-16 三菱電機株式会社 表示装置
US11353767B2 (en) * 2018-07-30 2022-06-07 Facebook Technologies, Llc Varifocal system using hybrid tunable liquid crystal lenses
JP7277737B2 (ja) * 2018-09-06 2023-05-19 日亜化学工業株式会社 発光装置
US11525967B1 (en) 2018-09-28 2022-12-13 Apple Inc. Photonics integrated circuit architecture
JP2021002541A (ja) * 2019-06-19 2021-01-07 株式会社リコー 光学装置、光源装置、検出装置及び電子機器
US11881678B1 (en) 2019-09-09 2024-01-23 Apple Inc. Photonics assembly with a photonics die stack
US11500154B1 (en) 2019-10-18 2022-11-15 Apple Inc. Asymmetric optical power splitting system and method
US12218479B2 (en) 2020-07-20 2025-02-04 Apple Inc. Photonic integrated circuits with controlled collapse chip connections
US11686906B1 (en) * 2020-10-12 2023-06-27 Poet Technologies, Inc. Self-aligned structure and method on interposer-based PIC
WO2022087386A1 (en) * 2020-10-23 2022-04-28 Sense Photonics, Inc. Methods and systems for self-aligned vertical cavity surface emitting laser (vcsel)-array beam shaping
JP7593814B2 (ja) * 2021-01-21 2024-12-03 矢崎総業株式会社 光送受信モジュール
WO2022163481A1 (ja) * 2021-01-29 2022-08-04 京セラ株式会社 光回路基板およびそれを用いた電子部品実装構造体
US20230011177A1 (en) 2021-07-08 2023-01-12 Apple Inc. Light Source Modules for Noise Mitigation
US11914201B2 (en) 2021-09-23 2024-02-27 Apple Inc. Mechanisms that transfer light between layers of multi-chip photonic assemblies
US12111207B2 (en) 2022-09-23 2024-10-08 Apple Inc. Despeckling in optical measurement systems

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3741911B2 (ja) 1999-10-19 2006-02-01 日本オプネクスト株式会社 光素子アレイモジュールおよびその製造方法
JP2001174671A (ja) * 1999-12-16 2001-06-29 Japan Aviation Electronics Industry Ltd 光素子モジュール
JP2001088148A (ja) 2000-08-24 2001-04-03 Omron Corp スタンパ及びそれを用いたマイクロレンズアレイの製造方法
US6838689B1 (en) * 2002-02-14 2005-01-04 Finisar Corporation Backside alignment and packaging of opto-electronic devices
US6757308B1 (en) * 2002-05-22 2004-06-29 Optical Communication Products, Inc. Hermetically sealed transmitter optical subassembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9366832B2 (en) 2014-04-08 2016-06-14 Sumitomo Electric Industries, Ltd. Optical connection structure

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Publication number Publication date
US7612881B2 (en) 2009-11-03
US20070058904A1 (en) 2007-03-15
JP2007079090A (ja) 2007-03-29

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