JP4545433B2 - 成膜方法 - Google Patents
成膜方法 Download PDFInfo
- Publication number
- JP4545433B2 JP4545433B2 JP2003434860A JP2003434860A JP4545433B2 JP 4545433 B2 JP4545433 B2 JP 4545433B2 JP 2003434860 A JP2003434860 A JP 2003434860A JP 2003434860 A JP2003434860 A JP 2003434860A JP 4545433 B2 JP4545433 B2 JP 4545433B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tin film
- film forming
- gas
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76846—Layer combinations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/7685—Barrier, adhesion or liner layers the layer covering a conductive structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
- H01L21/76864—Thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/7687—Thin films associated with contacts of capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/10—Applying interconnections to be used for carrying current between separate components within a device
- H01L2221/1068—Formation and after-treatment of conductors
- H01L2221/1073—Barrier, adhesion or liner layers
- H01L2221/1078—Multiple stacked thin films not being formed in openings in dielectrics
Description
Claims (1)
- 四塩化チタンとアンモニアを反応させることにより、被処理基板上に窒化チタン膜を成膜する成膜方法であって、
前記四塩化チタンと前記アンモニアを供給律速領域において反応させることにより、前記被処理基板上に第1の窒化チタン層を形成する第1のステップと、
前記第1の窒化チタン層を、窒素ガス又は水素ガスでアニールする第2のステップと、
前記四塩化チタンと前記アンモニアを反応律速領域において反応させることにより、アニールされた前記第1の窒化チタン層上に第2の窒化チタン層を形成する第3のステップと、
前記第2の窒化チタン層を、窒素ガス又は水素ガスでアニールする第4のステップと
を備え、
前記第1のステップにおける、前記アンモニアに対する前記四塩化チタンの分圧比は、前記第3のステップにおける当該分圧比より低く、
前記第1のステップにおける、前記被処理基板の温度は、前記第3のステップにおける前記被処理基板の温度より低い
ことを特徴とする成膜方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003434860A JP4545433B2 (ja) | 2003-12-26 | 2003-12-26 | 成膜方法 |
PCT/JP2004/019572 WO2005064041A1 (ja) | 2003-12-26 | 2004-12-27 | 窒化チタン膜の成膜 |
US10/584,642 US20080057344A1 (en) | 2003-12-26 | 2004-12-27 | Formation of Titanium Nitride Film |
EP04807927A EP1715079A4 (en) | 2003-12-26 | 2004-12-27 | Deposition of Titanium Titanium Film |
KR1020067012635A KR100885834B1 (ko) | 2003-12-26 | 2004-12-27 | 질화티타늄막의 성막 |
CN2004800389828A CN1898410B (zh) | 2003-12-26 | 2004-12-27 | 氮化钛膜的成膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003434860A JP4545433B2 (ja) | 2003-12-26 | 2003-12-26 | 成膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005194540A JP2005194540A (ja) | 2005-07-21 |
JP4545433B2 true JP4545433B2 (ja) | 2010-09-15 |
Family
ID=34736576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003434860A Expired - Fee Related JP4545433B2 (ja) | 2003-12-26 | 2003-12-26 | 成膜方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20080057344A1 (ja) |
EP (1) | EP1715079A4 (ja) |
JP (1) | JP4545433B2 (ja) |
KR (1) | KR100885834B1 (ja) |
CN (1) | CN1898410B (ja) |
WO (1) | WO2005064041A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060128127A1 (en) * | 2004-12-13 | 2006-06-15 | Jung-Hun Seo | Method of depositing a metal compound layer and apparatus for depositing a metal compound layer |
US20060234502A1 (en) * | 2005-04-13 | 2006-10-19 | Vishwanath Bhat | Method of forming titanium nitride layers |
US8257790B2 (en) | 2006-02-24 | 2012-09-04 | Tokyo Electron Limited | Ti-containing film formation method and storage medium |
JP5476269B2 (ja) * | 2010-09-29 | 2014-04-23 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US20120085284A1 (en) * | 2010-10-07 | 2012-04-12 | Dassel Mark W | Mechanically fluidized reactor systems and methods, suitable for production of silicon |
JP5617708B2 (ja) * | 2011-03-16 | 2014-11-05 | 東京エレクトロン株式会社 | 蓋体開閉装置 |
US8927059B2 (en) * | 2011-11-08 | 2015-01-06 | Applied Materials, Inc. | Deposition of metal films using alane-based precursors |
CN102766845B (zh) * | 2012-07-09 | 2015-02-25 | 珠海承鸥卫浴用品有限公司 | 一种金属表面pvd装饰性镀膜方法 |
WO2014056031A1 (en) * | 2012-10-12 | 2014-04-17 | Callidus Process Solutions Pty Ltd | Method of producing a hard facing material |
FR2997557B1 (fr) | 2012-10-26 | 2016-01-01 | Commissariat Energie Atomique | Dispositif electronique a nanofil(s) muni d'une couche tampon en metal de transition, procede de croissance d'au moins un nanofil, et procede de fabrication d'un dispositif |
FR2997420B1 (fr) * | 2012-10-26 | 2017-02-24 | Commissariat Energie Atomique | Procede de croissance d'au moins un nanofil a partir d'une couche d'un metal de transition nitrure obtenue en deux etapes |
CN103165439A (zh) * | 2013-03-15 | 2013-06-19 | 上海华力微电子有限公司 | 接触孔中的阻隔层及其制造方法 |
CN109755244B (zh) * | 2017-11-06 | 2021-03-23 | 联华电子股份有限公司 | 一种制作动态随机存储器的埋入式字符线的方法 |
CN109132995A (zh) * | 2018-08-20 | 2019-01-04 | 上海华虹宏力半导体制造有限公司 | 应用于MEMS器件的TiN薄膜刻蚀方法 |
KR102563925B1 (ko) * | 2018-08-31 | 2023-08-04 | 삼성전자 주식회사 | 반도체 제조 장치 |
JP2021022597A (ja) * | 2019-07-24 | 2021-02-18 | 東京エレクトロン株式会社 | キャパシタ形成システム及びキャパシタ形成方法 |
CN112779516B (zh) * | 2020-12-22 | 2024-03-08 | 苏州恒之清生物科技有限公司 | 具有硬质涂层保护的晶硅微针及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001291682A (ja) * | 2000-02-01 | 2001-10-19 | Applied Materials Inc | 化学気相堆積により形成された窒化チタン膜のプラズマ処理 |
JP2002217133A (ja) * | 2000-12-25 | 2002-08-02 | Applied Materials Inc | バリアメタル膜の形成方法 |
JP2003221671A (ja) * | 2002-01-30 | 2003-08-08 | Tokyo Electron Ltd | ガス処理方法 |
JP2004149892A (ja) * | 2002-10-31 | 2004-05-27 | Applied Materials Inc | 窒化チタン膜の形成方法 |
Family Cites Families (12)
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US5420072A (en) * | 1994-02-04 | 1995-05-30 | Motorola, Inc. | Method for forming a conductive interconnect in an integrated circuit |
JPH088212A (ja) * | 1994-06-22 | 1996-01-12 | Sony Corp | プラズマcvd方法 |
US5567483A (en) * | 1995-06-05 | 1996-10-22 | Sony Corporation | Process for plasma enhanced anneal of titanium nitride |
US5895267A (en) * | 1997-07-09 | 1999-04-20 | Lsi Logic Corporation | Method to obtain a low resistivity and conformity chemical vapor deposition titanium film |
JP2956693B1 (ja) * | 1998-05-27 | 1999-10-04 | 日本電気株式会社 | 金属窒化膜形成方法 |
KR100331545B1 (ko) * | 1998-07-22 | 2002-04-06 | 윤종용 | 다단계 화학 기상 증착 방법에 의한 다층 질화티타늄막 형성방법및 이를 이용한 반도체 소자의 제조방법 |
US6188512B1 (en) * | 1998-11-02 | 2001-02-13 | Southwall Technologies, Inc. | Dual titanium nitride layers for solar control |
KR100347400B1 (ko) * | 1998-11-27 | 2002-08-03 | 닛뽕덴끼 가부시끼가이샤 | 반도체 장치의 제조 방법 |
US6548402B2 (en) * | 1999-06-11 | 2003-04-15 | Applied Materials, Inc. | Method of depositing a thick titanium nitride film |
JP4178776B2 (ja) * | 2001-09-03 | 2008-11-12 | 東京エレクトロン株式会社 | 成膜方法 |
KR100439028B1 (ko) * | 2001-12-27 | 2004-07-03 | 삼성전자주식회사 | 2단계 증착방식을 이용한 반도체 장치의 제조방법 |
US6893963B2 (en) * | 2003-04-04 | 2005-05-17 | Powerchip Semiconductor Corp. | Method for forming a titanium nitride layer |
-
2003
- 2003-12-26 JP JP2003434860A patent/JP4545433B2/ja not_active Expired - Fee Related
-
2004
- 2004-12-27 WO PCT/JP2004/019572 patent/WO2005064041A1/ja active Application Filing
- 2004-12-27 US US10/584,642 patent/US20080057344A1/en not_active Abandoned
- 2004-12-27 KR KR1020067012635A patent/KR100885834B1/ko not_active IP Right Cessation
- 2004-12-27 EP EP04807927A patent/EP1715079A4/en not_active Withdrawn
- 2004-12-27 CN CN2004800389828A patent/CN1898410B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001291682A (ja) * | 2000-02-01 | 2001-10-19 | Applied Materials Inc | 化学気相堆積により形成された窒化チタン膜のプラズマ処理 |
JP2002217133A (ja) * | 2000-12-25 | 2002-08-02 | Applied Materials Inc | バリアメタル膜の形成方法 |
JP2003221671A (ja) * | 2002-01-30 | 2003-08-08 | Tokyo Electron Ltd | ガス処理方法 |
JP2004149892A (ja) * | 2002-10-31 | 2004-05-27 | Applied Materials Inc | 窒化チタン膜の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1715079A4 (en) | 2008-03-05 |
CN1898410A (zh) | 2007-01-17 |
JP2005194540A (ja) | 2005-07-21 |
CN1898410B (zh) | 2010-09-29 |
KR100885834B1 (ko) | 2009-02-26 |
US20080057344A1 (en) | 2008-03-06 |
KR20060107818A (ko) | 2006-10-16 |
WO2005064041A1 (ja) | 2005-07-14 |
EP1715079A1 (en) | 2006-10-25 |
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