JP4541675B2 - 回折光学素子の製造方法 - Google Patents

回折光学素子の製造方法 Download PDF

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Publication number
JP4541675B2
JP4541675B2 JP2003347654A JP2003347654A JP4541675B2 JP 4541675 B2 JP4541675 B2 JP 4541675B2 JP 2003347654 A JP2003347654 A JP 2003347654A JP 2003347654 A JP2003347654 A JP 2003347654A JP 4541675 B2 JP4541675 B2 JP 4541675B2
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Prior art keywords
shape
optical element
diffractive optical
base surface
molding
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JP2003347654A
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Japanese (ja)
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JP2005114939A (ja
JP2005114939A5 (https=
Inventor
信義 岩倉
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Canon Inc
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Canon Inc
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Priority to JP2003347654A priority Critical patent/JP4541675B2/ja
Publication of JP2005114939A publication Critical patent/JP2005114939A/ja
Publication of JP2005114939A5 publication Critical patent/JP2005114939A5/ja
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  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
JP2003347654A 2003-10-06 2003-10-06 回折光学素子の製造方法 Expired - Fee Related JP4541675B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003347654A JP4541675B2 (ja) 2003-10-06 2003-10-06 回折光学素子の製造方法

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Application Number Priority Date Filing Date Title
JP2003347654A JP4541675B2 (ja) 2003-10-06 2003-10-06 回折光学素子の製造方法

Publications (3)

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JP2005114939A JP2005114939A (ja) 2005-04-28
JP2005114939A5 JP2005114939A5 (https=) 2006-11-24
JP4541675B2 true JP4541675B2 (ja) 2010-09-08

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JP2003347654A Expired - Fee Related JP4541675B2 (ja) 2003-10-06 2003-10-06 回折光学素子の製造方法

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4881941B2 (ja) * 2008-12-27 2012-02-22 キヤノン株式会社 光学素子設計製造支援システム
JP5936336B2 (ja) * 2011-12-02 2016-06-22 キヤノン株式会社 形状評価方法、形状評価装置、プログラム及び記録媒体
JP5936337B2 (ja) * 2011-12-02 2016-06-22 キヤノン株式会社 形状評価方法、形状評価装置、プログラム及び記録媒体
DE102022214434A1 (de) 2022-01-17 2023-07-20 Carl Zeiss Smt Gmbh Verfahren zur Herstellung einer optischen Gitterstruktur zur gezielten Beugung von Licht mindestens einer Ziel-Wellenlänge

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2898197B2 (ja) * 1993-06-18 1999-05-31 キヤノン株式会社 光学素子及びその成形方法及びレーザー走査光学系
JPH10133104A (ja) * 1996-10-31 1998-05-22 Matsushita Electric Ind Co Ltd 回折手段一体型レンズ
JPH10332918A (ja) * 1997-06-04 1998-12-18 Olympus Optical Co Ltd レリーフ型回折光学素子、およびレリーフ型回折光学素子製造用の型
JPH1152114A (ja) * 1997-08-08 1999-02-26 Asahi Optical Co Ltd 微細凹凸パターンを有する素子の製造方法

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JP2005114939A (ja) 2005-04-28

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