JP4493139B2 - 電離真空計 - Google Patents

電離真空計 Download PDF

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Publication number
JP4493139B2
JP4493139B2 JP2000025165A JP2000025165A JP4493139B2 JP 4493139 B2 JP4493139 B2 JP 4493139B2 JP 2000025165 A JP2000025165 A JP 2000025165A JP 2000025165 A JP2000025165 A JP 2000025165A JP 4493139 B2 JP4493139 B2 JP 4493139B2
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JP
Japan
Prior art keywords
vacuum gauge
measurement unit
grid
ionization
pressure
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Expired - Lifetime
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JP2000025165A
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English (en)
Japanese (ja)
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JP2001215163A5 (https=
JP2001215163A (ja
Inventor
洋補 川崎
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Canon Anelva Corp
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Canon Anelva Corp
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Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP2000025165A priority Critical patent/JP4493139B2/ja
Priority to US09/770,656 priority patent/US6515482B2/en
Publication of JP2001215163A publication Critical patent/JP2001215163A/ja
Publication of JP2001215163A5 publication Critical patent/JP2001215163A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2000025165A 2000-02-02 2000-02-02 電離真空計 Expired - Lifetime JP4493139B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000025165A JP4493139B2 (ja) 2000-02-02 2000-02-02 電離真空計
US09/770,656 US6515482B2 (en) 2000-02-02 2001-01-29 Ionization vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000025165A JP4493139B2 (ja) 2000-02-02 2000-02-02 電離真空計

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009278248A Division JP4926233B2 (ja) 2009-12-08 2009-12-08 複合型真空計

Publications (3)

Publication Number Publication Date
JP2001215163A JP2001215163A (ja) 2001-08-10
JP2001215163A5 JP2001215163A5 (https=) 2007-01-25
JP4493139B2 true JP4493139B2 (ja) 2010-06-30

Family

ID=18551061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000025165A Expired - Lifetime JP4493139B2 (ja) 2000-02-02 2000-02-02 電離真空計

Country Status (2)

Country Link
US (1) US6515482B2 (https=)
JP (1) JP4493139B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107407611A (zh) * 2015-03-03 2017-11-28 株式会社爱发科 三极管型电离真空计

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US6566884B2 (en) * 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge
US7483001B2 (en) * 2001-11-21 2009-01-27 Seiko Epson Corporation Active matrix substrate, electro-optical device, and electronic device
US6756785B2 (en) * 2002-07-25 2004-06-29 Mks Instruments, Inc. Pressure controlled degas system for hot cathode ionization pressure gauges
ITTO20030626A1 (it) * 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.
ITTO20030627A1 (it) 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.
US6909975B2 (en) * 2003-11-24 2005-06-21 Mks Instruments, Inc. Integrated absolute and differential pressure transducer
CN100426440C (zh) * 2004-04-21 2008-10-15 清华大学 冷阴极电子枪和采用该冷阴极电子枪的真空规管
US7313966B2 (en) * 2004-12-14 2008-01-01 Brooks Automation, Inc. Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure
EP1698878A1 (en) * 2005-03-04 2006-09-06 Inficon GmbH Electrode configuration and pressure measuring apparatus
EP1890124A4 (en) * 2005-05-09 2012-08-22 Ampere Inc IONISIERUNGSUNTERDRUCKMESSVORRICHTUNG
US7207224B2 (en) 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7418869B2 (en) * 2005-06-10 2008-09-02 Brooks Automation, Inc. Wide-range combination vacuum gauge
KR100844513B1 (ko) 2006-04-14 2008-07-08 한국표준과학연구원 탄소나노튜브의 전계효과를 이용한 압력센서
JP4983087B2 (ja) * 2006-04-27 2012-07-25 富士通セミコンダクター株式会社 成膜方法、半導体装置の製造方法、コンピュータ可読記録媒体、スパッタ処理装置
US20080003377A1 (en) * 2006-06-30 2008-01-03 The Board Of Regents Of The Nevada System Of Higher Ed. On Behalf Of The Unlv Transparent vacuum system
US7429863B2 (en) * 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
US7456634B2 (en) 2006-10-26 2008-11-25 Brooks Automation, Inc. Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
US7613586B2 (en) * 2007-01-16 2009-11-03 Honeywell International Inc. Thermal vacuum gauge
KR101541273B1 (ko) * 2007-12-19 2015-08-03 엠케이에스 인스트루먼츠, 인코포레이티드 전자 멀티플라이어 냉 방출 소스를 갖는 이온화 게이지
CN101990630B (zh) * 2008-02-21 2013-08-14 布鲁克机械公司 具有设计用于高压操作的操作参数和几何形状的电离计
CN101576423B (zh) * 2008-05-07 2010-12-29 清华大学 电离规
CN102159929A (zh) * 2008-09-19 2011-08-17 布鲁克机械公司 具有发射电流及偏压电位控制的电离计
US7906971B2 (en) * 2008-10-14 2011-03-15 Itt Manufacturing Enterprises, Inc. Molecular shield for an ionizaton vacuum gauge
JPWO2011099238A1 (ja) * 2010-02-12 2013-06-13 株式会社アルバック トランスデューサ型真空計
JP5371057B2 (ja) * 2010-08-05 2013-12-18 キヤノンアネルバ株式会社 電離真空計
WO2013016551A1 (en) * 2011-07-26 2013-01-31 Mks Instruments, Inc. Cold cathode gauge fast response signal circuit
US9593996B2 (en) 2012-02-08 2017-03-14 Mks Instruments, Inc. Ionization gauge for high pressure operation
CN103311085B (zh) * 2013-06-27 2016-03-16 成都国光电气股份有限公司 一种小型化复合真空规管
JP6200840B2 (ja) * 2014-03-20 2017-09-20 株式会社アルバック 熱陰極電離真空計
US20160116360A1 (en) * 2014-10-24 2016-04-28 Timothy G. Collins Portable Graphing Vacuum Pressure Gauge
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
WO2019244826A1 (ja) * 2018-06-18 2019-12-26 株式会社アルバック 電離真空計及び制御装置
US11428596B2 (en) * 2020-09-16 2022-08-30 Wisenstech Ltd. Vacuum gauge with an extended dynamic measurement range

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JPS6162393A (ja) 1984-08-31 1986-03-31 Mitsubishi Electric Corp インバ−タ装置
JPS62218834A (ja) * 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd 気体圧力計
US4739664A (en) * 1987-02-20 1988-04-26 Ford Motor Company Absolute fluid pressure sensor
JPH03197832A (ja) * 1989-12-26 1991-08-29 Fujitsu Ltd 真空測定装置
US5422573A (en) * 1990-04-11 1995-06-06 Granville-Phillips Company Ionization gauge and method of using and calibrating same
JPH0797060B2 (ja) * 1990-08-10 1995-10-18 バキュームプロダクツ株式会社 音叉型水晶振動子を用いた圧力の測定方法
JP3069975B2 (ja) * 1991-09-06 2000-07-24 アネルバ株式会社 電離真空計
CH688210A5 (de) * 1993-12-15 1997-06-13 Balzers Hochvakuum Druckmessverfahren und Druckmessanordnung zu dessen Ausfuehrung
JPH07306109A (ja) * 1994-05-13 1995-11-21 Hitachi Ltd 光ファイバ筒内圧センサおよび該センサを用いたエンジン制御システム
JP3400885B2 (ja) * 1995-03-06 2003-04-28 アネルバ株式会社 フランジマウント型熱陰極電離真空計
JP3580967B2 (ja) * 1996-11-21 2004-10-27 株式会社アルバック 真空計
JPH10213509A (ja) * 1997-01-27 1998-08-11 Ulvac Japan Ltd 圧力測定装置
US5962791A (en) * 1998-07-16 1999-10-05 Balzers Aktiengellschaft Pirani+capacitive sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107407611A (zh) * 2015-03-03 2017-11-28 株式会社爱发科 三极管型电离真空计

Also Published As

Publication number Publication date
US20010011890A1 (en) 2001-08-09
US6515482B2 (en) 2003-02-04
JP2001215163A (ja) 2001-08-10

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