JP4491888B2 - 振動アクチュエータ - Google Patents

振動アクチュエータ Download PDF

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Publication number
JP4491888B2
JP4491888B2 JP2000025873A JP2000025873A JP4491888B2 JP 4491888 B2 JP4491888 B2 JP 4491888B2 JP 2000025873 A JP2000025873 A JP 2000025873A JP 2000025873 A JP2000025873 A JP 2000025873A JP 4491888 B2 JP4491888 B2 JP 4491888B2
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JP
Japan
Prior art keywords
relative motion
vibrator
motion member
vibration
support portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000025873A
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English (en)
Japanese (ja)
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JP2001218482A (ja
JP2001218482A5 (enExample
Inventor
功 菅谷
光宏 岡崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2000025873A priority Critical patent/JP4491888B2/ja
Publication of JP2001218482A publication Critical patent/JP2001218482A/ja
Publication of JP2001218482A5 publication Critical patent/JP2001218482A5/ja
Application granted granted Critical
Publication of JP4491888B2 publication Critical patent/JP4491888B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2000025873A 2000-02-03 2000-02-03 振動アクチュエータ Expired - Lifetime JP4491888B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000025873A JP4491888B2 (ja) 2000-02-03 2000-02-03 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000025873A JP4491888B2 (ja) 2000-02-03 2000-02-03 振動アクチュエータ

Publications (3)

Publication Number Publication Date
JP2001218482A JP2001218482A (ja) 2001-08-10
JP2001218482A5 JP2001218482A5 (enExample) 2007-04-12
JP4491888B2 true JP4491888B2 (ja) 2010-06-30

Family

ID=18551668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000025873A Expired - Lifetime JP4491888B2 (ja) 2000-02-03 2000-02-03 振動アクチュエータ

Country Status (1)

Country Link
JP (1) JP4491888B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008054459A (ja) * 2006-08-28 2008-03-06 Matsushita Electric Ind Co Ltd 駆動装置
CN102176644A (zh) 2006-08-28 2011-09-07 松下电器产业株式会社 驱动装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146971A (ja) * 1988-11-28 1990-06-06 Hitachi Ltd 圧電モータおよび圧電モータの駆動方法
JPH06261565A (ja) * 1993-03-09 1994-09-16 Ricoh Co Ltd 振動アクチュエータ
JPH07111789A (ja) * 1993-10-08 1995-04-25 Tamura Electric Works Ltd 搬送装置
JPH07163159A (ja) * 1993-11-30 1995-06-23 Canon Inc 超音波リニアモータ
JPH07274559A (ja) * 1994-03-30 1995-10-20 Fanuc Ltd 圧電式リニアアクチュエータ
JPH09159672A (ja) * 1995-12-08 1997-06-20 Olympus Optical Co Ltd 分析装置
JPH11190339A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 静圧流体軸受

Also Published As

Publication number Publication date
JP2001218482A (ja) 2001-08-10

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