JP4478732B2 - Dicing apparatus, dicing apparatus unit, and dicing method - Google Patents

Description

  The present invention relates to a dicing apparatus, a dicing apparatus unit, and a dicing method for dividing a work such as a work on which a semiconductor device or an electronic component is formed into individual chips.

  A dicing machine for cutting and grooving a work such as a work on which a semiconductor device or electronic component is formed cleans a blade rotated at high speed by a spindle, a work table holding the work, and a work after dicing. Various moving shafts as moving means for changing the relative position between the cleaning means and the blade and the workpiece are provided (for example, see Patent Document 1).

  FIG. 1 shows an example of a dicing apparatus. The dicing apparatus 10 includes a high-frequency motor built-in spindles 22 and 22 that are disposed to face each other and have a blade 21 and a flange cover (not shown) attached to the tip, an imaging unit 23 that images the surface of the workpiece W, and a workpiece W. A processing unit 20 having a work table 31 for sucking and holding is provided.

  The dicing apparatus 10 includes, in addition to the processing unit 20, a cleaning unit 52 that spin-cleans the processed workpiece W, a load port 51 that mounts a cassette that stores a large number of workpieces W mounted on the frame F, and a workpiece W A display unit 24 that displays an image picked up by the image pickup unit 23 and inputs an operation to each unit, a controller (not shown) that controls the operation of each unit, and the like.

  As shown in FIG. 2, the structure of the processing unit 20 is guided by X guides 34, 34 provided on the X base 36, and an X table 33 driven in the X direction indicated by XX in the figure by a motor 35. The X table 33 is provided with a work table 31 via a rotary table 32 that rotates in the θ direction.

  On the other hand, Y tables 41 and 41 guided by Y guides 42 and 42 and driven in a Y direction indicated by YY in the figure by a motor and a ball screw (not shown) are provided on the side surface of the Y base 44. Each Y table 41 is provided with a Z table 43 that is driven in the Z direction indicated by ZZ in the drawing by driving means (not shown), and the Z table 43 is a built-in high-frequency motor with a blade 21 attached to the tip. The spindle 22 and the imaging means 23 (not shown in FIG. 2) are fixed. Since the structure of the processing unit 20 is as described above, the blade 21 is index-fed in the Y direction and cut and fed in the Z direction, and the work table 31 is cut and fed in the X direction (for example, Patent Document 2). reference.).

  Both spindles 22 are rotated at a high speed of 1,000 rpm to 80,000 rpm, and a supply nozzle (not shown) for supplying cutting fluid and cooling fluid to the workpiece W or the blade 21 is provided in the vicinity. The supplied cutting fluid and cooling fluid flow into the oil pan (not shown in FIG. 1) provided so as to surround the work table 31 as waste fluid after being used for machining. The used cutting fluid and cooling fluid that have flowed into the oil pan are discharged to the outside through a discharge pipe from a discharge port formed on the downstream side of the oil pan. In addition, a bellows cover that expands and contracts with the movement of the work table 31 is provided on the oil pan, and prevents the cutting water and cooling water from entering the driving mechanisms such as the X guides 34 and 34 (for example, Patent Documents). 3).

  The periphery of the processing unit 20 is surrounded by a protective cover 25 to prevent splashes and mist from being scattered around the processing (see, for example, Patent Document 4). Further, a discharge port (not shown) for discharging floating mist to the outside of the apparatus is provided in the processing unit 20 (see, for example, Patent Document 5).

  In recent years, in these dicing apparatuses, along with the mass production of semiconductor devices and electronic parts and the increase in the work size due to the reduction in price, the stroke of the moving shaft has become longer and the apparatus size has been increased.

JP 2002-280328 A JP-A-11-77461 JP 2002-103177 JP 2006-247760 A JP 2003-124150 A

  However, when the apparatus is increased in size, the installation area is increased, and the cost for the equipment is also increased, resulting in a problem that the cost cannot be reduced more effectively. For this reason, a dicing machine with a smaller installation area is required, but the moving axis of the conventional dicing machine is arranged parallel or perpendicular to the outer shape of the apparatus, and the length becomes longer if the stroke of the moving axis becomes longer. Therefore, it was necessary to lengthen the outer shape of the device.

Further, in Dainshingu apparatus described in Patent Document 1 is present in the central portion of the blade in the workpiece travels through the upper housing in the lateral direction is far from the operator housing, one blade is viewed from the operator It will be hidden by the spindle. For this reason, there has been a problem that it is difficult to perform blade replacement work, accuracy check adjustment work, cutting water nozzle adjustment, and the like. In order to perform such work, it is necessary to go around the side or back of the apparatus according to the situation, and there is always a space between the apparatuses, and they are not installed closely. However, it has become difficult to secure a working space in the side part or behind the apparatus due to the increase in size of the apparatus.

  On the other hand, there is a method of biasing the drive mechanism to one side as in the cutting device described in Patent Document 2 in order to improve the accessibility to the machining part with a large-sized device, but the vibration generated during workpiece cutting processing In order to suppress this, the portion that supports the workpiece cutting portion has sufficient rigidity, so that the weight increases. If the heavy part is biased to one side with respect to the center of the dicing apparatus, the position of the center of gravity is displaced from the center of the dicing apparatus as a whole and becomes unbalanced. As a result, the dicing device loses the balance as a whole and is likely to vibrate, resulting in a problem that the cutting accuracy preset in the dicing device cannot be maintained.

Further, when the amount of machining due to mass production and workpiece size increases, a large amount of used cutting water and cooling water (hereinafter referred to as “contamination”) containing cutting waste and the like are generated. Contamination is mainly scattered in an extension along a rotational direction of the blade, if the walls of the rectangular housing of the dicing apparatus is a right angle or substantially right angle formed with respect to the blade, it corresponds to a rectangular housing or rectangular housing The cutting water that bounces off and hits the wall part is scattered around the wall as mist or mist. Contamination that has increased due to mass production and larger workpiece size will dry and accumulate in large quantities on the wall where it flows down and where it adheres as mist. For contamination of the workpiece to be processed next, clogging of the discharge path, and internal confirmation Various problems such as visibility degradation due to fogging of the cover surface. For this reason, it is necessary to suppress the generation of a large amount of generated contamination and quickly discharge it.

  The present invention has been made for such a problem, and in order to cope with an increase in workpiece size, even if the stroke of the moving shaft is increased, the apparatus does not increase in size, and various adjustment operations and maintenance operations can be performed. An object of the present invention is to provide a dicing apparatus, a dicing apparatus unit, and a dicing method capable of improving workability, stabilizing the center of gravity of the apparatus, and improving the discharge efficiency of contamination and mist.

To achieve the pre-Symbol object, a first aspect of the present invention, relative a work table mounted with the word over click, a blade for cutting the workpiece, the workpiece on the work table with respect to the blade A work table feeding mechanism for moving the workpiece, one or more spindles on which the blades are rotatably attached, and a spindle moving mechanism for supporting the spindle, the spindle moving mechanism and the work table feeding mechanism comprising: In the dicing apparatus arranged orthogonal to each other, the spindle moving mechanism and the work table feeding mechanism are arranged on a diagonal line of a rectangular casing of the dicing apparatus formed in a square in plan view, and the dicing apparatus of the dicing apparatus A workpiece cutting portion is disposed in a substantially central portion, and a work is provided on one end side where the work table feeding mechanism is disposed. Replacement part is provided, wherein the spindle moving mechanism, along a diagonal direction of the rectangular housing the spindle moving mechanism are arranged two spindles are arranged so as to face the workpiece of the workpiece table feed mechanism On the side opposite to the side where the replacement part is provided, a discharge mechanism having an outlet for discharging waste liquid or mist scattered along the rotation direction of the blade when cutting the workpiece to the outside of the apparatus is disposed, In the discharge mechanism, a pair of guide members for converging the waste liquid or mist to the outlet is provided on a substantially extended line in the scattering direction of the waste liquid or mist, and receives the waste liquid flowing out from the workpiece cutting portion. An oil pan is provided so as to surround the work table, and the discharge mechanism is disposed at one end of the oil pan. It is characterized in that the processing unit is formed to be narrower due to toward the discharge mechanism.

According to the first aspect of the present invention, the dicing apparatus has a work table on which a work is placed, a blade for cutting the work, and a work table for moving the work on the work table relative to the blade. A feed mechanism, one or more spindles rotatably mounted with blades, and a spindle moving mechanism for supporting the spindles are provided. The spindle moving mechanism and the work table feeding mechanism are arranged orthogonal to each other and are arranged on the diagonal line of the rectangular casing of the dicing apparatus formed in a plan view square shape. A workpiece cutting portion is disposed at a substantially central portion of the dicing apparatus in which the spindle moving mechanism and the work table feeding mechanism are orthogonal to each other. A work exchanging portion is provided on one end side where the work table feeding mechanism is arranged. The spindle moving mechanism is arranged so that two spindles face each other along a diagonal direction of a rectangular casing in which the spindle moving mechanism is arranged. A discharge mechanism having an outlet for discharging waste liquid or mist that scatters along the rotation direction of the blade when cutting the workpiece to the side opposite to the side on which the workpiece exchange unit is provided of the workpiece table feeding mechanism. Arranged. In the discharge mechanism, a pair of guide members for converging the waste liquid or mist to the outlet is provided on a substantially extended line in the scattering direction of the waste liquid or mist. An oil pan that receives the waste liquid flowing out from the workpiece cutting processing section is provided so as to surround the work table. A discharge mechanism is provided at one end of the oil pan, and the oil pan becomes narrower as it goes from the workpiece cutting processing section to the discharging mechanism. It is formed to become.

Thereby, the X moving axis and the Y moving axis that require the longest distance in the diagonal direction having a long distance in the apparatus are arranged, and it is possible to prevent the apparatus from becoming large and to make a dicing apparatus that saves space.
Also, when cutting a workpiece with a blade attached to the spindle moving mechanism, waste liquid (cutting water, washing water, etc.) and mist that scatter along the rotation direction of the blade are discharged on a substantially extended line in the scattering direction. Each flows directly into the mechanism, flows so as to converge toward the outlet (exhaust port or exhaust port) by a pair of guide members provided in the discharge mechanism, and is discharged from the outlet to the outside of the apparatus.
Furthermore, since the oil pan is formed wide at the workpiece cutting portion, the waste liquid flowing out from the workpiece cutting portion is received in a wide range by the oil pan, and the oil pan becomes narrower as it goes to the discharge mechanism. Therefore, the waste liquid that has flowed into the oil pan flows toward the discharge mechanism while increasing the flow velocity, and is discharged from the outlet to the outside of the apparatus.

  In addition, even when the workpiece cutting part has high rigidity and a large weight, since the heavy part matches the center of the dicing machine, the center of gravity of the dicing machine substantially matches the center of the dicing machine. The balance of the entire device is stabilized. As a result, it is possible to minimize the propagation of vibrations generated by the moving shaft during machining, thereby shortening the axis moving time and maintaining the machining accuracy set in the dicing apparatus.

  In addition, when replacing the blade, any blade facing the workpiece replacement unit can be easily replaced. Furthermore, it is possible to easily check and adjust the attachment state of the blade after replacing the blade.

According to a second aspect of the present invention, in the first aspect of the invention, the rectangular casing on the side on which the workpiece replacement portion is provided is cut obliquely in a direction substantially parallel to the spindle moving mechanism, and the rectangular casing is cut. An opening for performing work exchange and maintenance is provided at the notch.

According to the second aspect of the present invention, one corner of the rectangular housing of the dicing device formed in a square shape is cut obliquely in parallel with the spindle moving mechanism. An opening is provided in the notch. From the opening, the workpiece of the workpiece exchange unit can be easily exchanged, and the spindle facing the parallel or the blade attached to the spindle can be easily visually recognized, and the access distance is shortened.

According to the present invention , the moving shaft arranged in the diagonal direction of the outer shape of the device does not increase the size of the device even if the stroke of the moving shaft is increased in order to cope with an increase in the work size, and various adjustment operations and maintenance are performed. The workability of the work can be improved and the center of gravity of the apparatus can be stabilized, and the discharge efficiency of contamination and mist can be increased.

The perspective view which shows the external appearance of the conventional dicing apparatus. The perspective view which showed the structure of the process part of the dicing apparatus shown in FIG. The top view of the dicing apparatus concerning this invention. The top view which expanded the discharge mechanism. The top view of the dicing apparatus unit concerning this invention. The top view which showed another form of the dicing apparatus unit. The top view which showed another form of the dicing apparatus unit.

  Hereinafter, preferred embodiments of a dicing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. First, the configuration of the dicing apparatus according to the present invention will be described. FIG. 3 is a plan view of the dicing apparatus according to the present invention.

As shown in FIG. 3, the rectangular housing 2 that is the main body of the dicing apparatus 1 is formed in a square shape in plan view. On rectangular housing 2, the work table 3 where the workpiece W is placed, an X-movement shaft 4 as a work table feed mechanism for moving the work table 3 in the arrow X direction shown in FIG. 3, the spindle 22 A Y base 6 provided with a Y moving shaft 5 as a spindle moving mechanism for moving the head in the direction of arrow Y, an oil pan 7 provided around the X moving shaft 4 so as to surround the work table 3, and cutting after use And a discharge mechanism 8 for discharging water, cooling water discharge, mist and the like out of the apparatus.

  The X moving shaft 4 is a linear drive shaft using a ball screw, a linear motor, or the like, and is installed on the first diagonal line connecting the lower right portion and the upper left portion of the rectangular housing 2 in FIG. A movement table (not shown) is provided on the X movement axis, and the work table 3 attached to a θ rotation axis (not shown) provided on the table reciprocates in the X direction and rotates.

  The Y moving shaft 5 is provided on a Y base 6 having a portal structure, and is provided on a second diagonal line connecting the lower left portion and the upper right portion in FIG. At this time, the X movement axis 4 and the Y movement axis 5 are orthogonal to each other at the substantially central portion of the dicing apparatus 1 so that the Y base 6 straddles the X movement axis 4.

  Thereby, since the position of the center of gravity substantially coincides with the center position of the dicing apparatus 1, the balance of the entire dicing apparatus 1 is stabilized. Therefore, since the generation of vibration due to the unbalance of the center of gravity of the dicing apparatus 1 is suppressed as much as possible during workpiece cutting, the machining accuracy set in the dicing apparatus 1 is stably maintained.

  Spindles 22 and 22 having blades 21 and 21 attached to the tip are attached to the Y moving shaft 5 so as to face each other. A workpiece cutting portion 9 is provided at a portion where the X moving shaft 4 and the Y moving shaft 5 are orthogonal to each other at a substantially central portion of the dicing apparatus 1, and the workpiece W is cut by the blades 21, 21 in the workpiece cutting portion 9. . In the workpiece cutting portion 9 of this embodiment, the moving distance of the spindles 22 and 22 that hold the blades 21 and 21 can be increased according to the length of the diagonal line. It can cut well.

  The periphery of the rectangular housing 2 and the periphery of the workpiece cutting portion 9 are surrounded by various covers (not shown) for shielding the inside.

  Further, the Y base provided with the Y moving shaft 5 may share the pillars at the four corners that support the rectangular housing 2, and the Y moving shaft is provided in the dicing apparatus 1 without specially providing a highly rigid portal structure. 5 can be efficiently arranged, and it is possible to configure the dicing apparatus 1 with high rigidity and high accuracy.

  The oil pan 7 is an oil pan that receives waste liquid of used cutting water and washing water that flows out from the work cutting processing unit 9, and is provided around the X movement shaft 4 so as to surround the work table 3. A discharge mechanism 8 is provided at one end of the oil pan 7 which is on an extension line along the rotation direction of the blade 21 indicated by an arrow A in FIG.

  The oil pan 7 is formed to be wide at the workpiece cutting portion 9, and is formed so as to narrow and incline downward toward the discharge mechanism 8. Thereby, waste liquid such as cutting water is received by the oil pan 7 in a wide range. Moreover, since it becomes narrow gradually as it goes to this discharge mechanism 8 in the downstream of the oil pan 7, the flow rate of waste liquids, such as cutting water, becomes relatively quick, and the collection efficiency of waste liquid can be improved further.

The bottom of the oil pan 7 is formed at a position higher than the X movement shaft 4, and the X movement shaft 4 is covered with a bellows cover (not shown) that expands and contracts in accordance with the movement of the work table 31 installed on the oil pan. ing. This prevents cutting water and cooling water from entering the X moving shaft 4. The discharge mechanism 8 has a discharge port 11. When the discharge port 11 cuts the workpiece W with the blades 21, 21 rotating at high speed, Along the arrow A which is the rotation direction of the blade 21, the blade 21 is disposed on a substantially extended line in the direction in which the cutting water and cleaning water are scattered. An exhaust port 12 for discharging mist is formed immediately above the discharge port 11.

  As shown in FIG. 4, the discharge mechanism 8 is formed to become narrower as it approaches the discharge port 11 and the exhaust port 12 provided on the most downstream side. For example, the wall surface of one corner of the rectangular housing 2 is configured as a pair of left and right water flow guide members 8A and 8A.

  As a result, the used cutting fluid or mist that has flowed in from the oil pan 7 is smoothly discharged toward the discharge port 11 and the exhaust port 12 while increasing the flow velocity as it approaches the discharge port 11 and the exhaust port 12. . Moreover, the cutting water and mist which scatters along the rotation direction of the blades 21 and 21 hit the water flow guide members 8A and 8A as shown by an arrow P in FIG. Then, the converged cutting water and mist are efficiently collected by the discharge port 11 and the exhaust port 12.

  A workpiece exchanging portion 13 is provided at one end of the X moving shaft 4 opposite to the side on which the discharge mechanism 8 is provided, and the corner of the rectangular housing 2 on the side on which the workpiece exchanging portion 13 is provided is indicated by the Y moving shaft 5. And is cut diagonally so as to be substantially parallel to. An opening 14 with an opening / closing cover for exchanging the workpiece W of the workpiece exchanging portion 13 and performing maintenance around the workpiece cutting processing portion 9 is formed in the notched portion of the rectangular housing 2 in the cover surrounding the dicing apparatus 1. ing.

  As a result, since the opening 14 formed substantially parallel to the Y movement shaft 5 is provided in the workpiece replacement unit 13, when replacing the blades 21, 21, the operator M uses the two blades from the opening 14. Both 21 and 21 can be easily exchanged. In addition, confirmation / adjustment of the mounting state of the blades 21, 21 after replacement, for example, adjustment / confirmation of the coaxiality of the blades 21, 21, and confirmation / adjustment of the straightness of the blades 21, 21 with respect to the workpiece W are also possible. 14 can be carried out easily. In this case, the straightness of the blades 21 and 21 with respect to the workpiece W can be accurately and easily visually recognized from the front side in the cutting direction of the workpiece W.

  Further, the coaxiality of attachment of the blades 21 and 21 to the spindles 22 and 22 can be visually recognized from a direction perpendicular to the cutting direction of the workpiece W. Further, both the adjustment of the coaxiality of the blades 21 and 21 and the confirmation and adjustment of the straightness of the blades 21 and 21 with respect to the workpiece W can be viewed in the direction of 45 degrees obliquely from the opening 14 of the dicing apparatus 1. Thus, when checking and adjusting the coaxiality and straightness of the blades 21 and 21, the operator M can execute from the opening 14 of the dicing apparatus 1, so that the side or back side of the dicing apparatus 1 as in the conventional example can be performed. There is no need to turn around.

  Further, the periodic adjustment of the end faces of the spindles 22 and 22 can be executed only on the side where the opening 14 is formed, so that the work can be easily performed without turning to the side surface or the back surface side of the dicing apparatus 1 as in the prior art. Can be done. Further, the nozzle 14 for supplying the cutting water, the cleaning water, and the cooling water can be simply adjusted at the opening 14 in the same manner.

  Note that an operation / display unit, an imaging unit, a monitor television, an indicator lamp, a controller (not shown), and the like are provided at predetermined positions of the dicing apparatus 1.

Furthermore, as shown in FIG. 5 , the dicing apparatus 1 according to the present embodiment can constitute a dicing apparatus unit 16 by installing an even number of sets in a form of abutting each other as a set of two units. In this case, the cut-out oblique side edges (openings 14, 14) of the rectangular housings 2 of the respective dicing apparatuses 1 and 1 are arranged so as to be adjacent to each other.

According to the dicing device unit 16, two or four dicing devices 1 as shown in FIG. 6 are arranged to face each other, so that the productivity of dicing can be improved even if the number of workpieces W is large. Can be improved.

In the present invention, it is possible to install the loader 17 in common between the two dicing device 1,1 as shown in FIG. If comprised in this way, the loader 17 can be shared by the two dicing apparatuses 1 and 1, and the installation cost can be reduced. Further, as shown in FIG. 6 , a piping area 18 including the discharge port 11 and the discharge pipe 15 can be shared outside the adjacent portion of the dicing apparatus unit 16. If comprised in this way, with sharing of the piping area 18, the space saving of a dicing equipment and the reduction of piping cost will be attained.

  Furthermore, since the four adjacent dicing devices 1, 1, 1, 1 are arranged in contact with each other, the effective use of the arrangement space becomes possible, so the exclusive area per dicing device is small. As a result, the space of the equipment can be greatly reduced.

  Even when the even number of dicing apparatuses 1 and 1 are juxtaposed in one place, the operator M can improve the workability because the space of the adjacent notch portion is increased, and each of the two openings 14 and 14 on the left and right sides can be improved. The access distance to both the blades 21 and 21 of the dicing apparatuses 1 and 1, the spindles 22 and 22, and the nozzles is shortened. Therefore, when the blades 21 and 21 are replaced, the coaxiality or straightness of the blades 21 and 21 is confirmed and adjusted, the end surfaces of the spindles 22 and 22 are adjusted, and the nozzle positions are adjusted, the confirmation and adjustment operations, the end surface adjustment operations, Position adjustment work can be carried out more easily, and maintenance and inspection workability can be greatly improved.

  Next, a dicing method using the dicing apparatus 1 will be described. First, the blades 21 and 21 are attached to the spindles 22 and 22, and the work W is placed and fixed on the work table 3. Next, the work table 3 is transported to the substantially central side of the rectangular housing 2 along the first diagonal direction of the rectangular housing 2 by the X moving shaft 4, and the workpiece W is moved to the workpiece cutting processing section 9 at a predetermined moving speed. Bring it in.

  Subsequently, the spindles 22 and 22 are moved toward the center of the workpiece cutting unit 9, and the workpieces W are cut while the blades 21 and 21 attached to the spindles 22 and 22 are rotated at high speed. During processing, cutting water, cleaning water, and cooling water are supplied to a processing point of the workpiece W from a cutting water nozzle and a cleaning nozzle (not shown) provided at the tips of the spindles 22 and 22, respectively.

  Subsequently, the supplied cutting water (including cleaning water and cooling water; the same applies hereinafter) flows to the downstream side of the oil pan 7 and passes through the discharge pipe 15 from the discharge port 11 after being received by the oil pan 7. And discharged to the outside of the device. Also, during machining, the mist is scattered along with the cutting water along the arrow A, which is the rotation direction of the blades 21, 21, and the scattered mist rises toward the discharge mechanism 8 side of the rectangular housing 2 from the workpiece cutting processing portion 9. Flowing. The mist that has flowed to the discharge mechanism 8 side of the rectangular casing 2 passes through an exhaust pipe (not shown) from an exhaust port 12 provided above the discharge port 11 and is discharged to the outside.

  Subsequently, when the dicing process along one cutting line for the workpiece W is completed, the blades 21 and 21 are indexed and positioned to the next cutting line to be processed next, and along the cutting line by the same processing procedure. Dicing is performed.

  By repeating the dicing process, when all the dicing processes along the predetermined number of cutting lines are completed, the work W is rotated 90 degrees together with the work table 3, and the cutting process is performed in a direction orthogonal to the cutting line by the same processing procedure. A dicing process is performed along the line.

  Subsequently, when all the dicing processes along the cutting line are completed, the workpiece W is cut and divided into a large number of chips. Thereafter, the work table 3 on which the work W is placed is transported to the work exchanging unit 13 by the X moving shaft 4 and exchanged with the work W to be processed next. Thereafter, dicing of the workpiece W is newly performed according to the above-described processing procedure.

  When a predetermined number of workpieces W are diced, grinding dust (including grinding powder) accumulates in the vicinity of the discharge mechanism 8 provided at the bottom of the most downstream side of the oil pan 7, so that the operation of the dicing apparatus 1 is periodically performed. Stop and the oil pan 7 is cleaned.

  As a result, the operator M shortens the access distance from the opening 14 to the blades 21 and 21, the spindles 22 and 22 and the nozzle (not shown) for supplying cutting water and the like, even when the outer dimension of the rectangular casing 2 is large. The work of replacing the blades 21 and 21, the confirmation of the coaxiality or straightness of the blades 21 and 21, the adjustment work, the end face adjustment work of the spindles 22 and 22, and the nozzle position adjustment work can be easily and quickly performed. The characteristics are greatly improved as compared with the conventional example.

  As described above, according to the dicing apparatus, the dicing apparatus unit, and the dicing method according to the present invention, the X moving axis and Y that require the longest distance in the diagonal direction having a long distance in the rectangular casing of the dicing apparatus. A moving shaft is arranged to save space by preventing the apparatus from becoming large, and it is possible to improve the workability of various adjustment operations and maintenance operations and to make the dicing device stable in the center of gravity of the device.

  In addition, since the discharge mechanism is arranged in a vacant space between the moving shaft arranged in the diagonal direction of the rectangular casing and the outer peripheral edge of the apparatus and becomes narrower toward the discharge port, the flow rate of the waste liquid is increased. Are collected efficiently and discharged smoothly.

  In this embodiment, the dicing apparatus in which two spindles are provided to face the Y movement axis is described. However, the present invention is not limited to this, and dicing in which only one spindle is provided on the Y movement axis. Also in the apparatus, it can be implemented by arranging the Y movement axis and the X movement axis in the diagonal direction of the dicing apparatus.

  In the present embodiment, the X moving shaft 4 and the Y moving shaft 5 are arranged to be inclined at 45 degrees with respect to the outer shape of the dicing apparatus 1, but the present invention is not limited to this, and the outer shape of the dicing apparatus 1 is not limited to this. As long as it runs along the diagonal direction, the tilt angle may be about 40 to 50 degrees.

DESCRIPTION OF SYMBOLS 1, 10 ... Dicing apparatus, 2 ... Square housing, 3, 31 ... Work table, 4 ... X movement axis, 5 ... Y movement axis, 6 ... Y base, 7 ... Oil pan, 8 ... Discharge mechanism, 9 ... Workpiece Cutting unit, 11 ... discharge port, 12 ... exhaust port, 13 ... work exchange unit, 14 ... opening unit, 15 ... discharge pipe, 16 ... dicing unit, 17 ... loader, 20 ... working unit, 21 ... blade, 22 ... Spindle, 23 ... Imaging means, 24 ... Display means, 32 ... Rotary table, 33 ... X table, 41 ... Y table, 43 ... Z table, 51 ... Load port, 52 ... Cleaning section, 53 ... Conveying means, W ... work

Claims (4)

A work table on which a work is placed, a blade that cuts the work, a work table feed mechanism that moves the work on the work table relative to the blade, and a blade that is rotatably attached to the blade In a dicing apparatus comprising the above spindle and a spindle moving mechanism that supports the spindle, wherein the spindle moving mechanism and the work table feed mechanism are arranged orthogonal to each other.
The spindle moving mechanism and the work table feeding mechanism are arranged on a diagonal line of a rectangular housing of the dicing device formed in a square shape in plan view, and a work cutting processing unit is arranged at a substantially central portion of the dicing device. And a work exchanging portion is provided on one end side where the work table feeding mechanism is arranged ,
The spindle moving mechanism is arranged such that two spindles face each other along the diagonal direction of the rectangular casing on which the spindle moving mechanism is arranged,
On the opposite side of the work table feeding mechanism from the side on which the work exchanging part is provided, there is an outlet for discharging waste liquid or mist that scatters along the rotation direction of the blade when the work is cut. A discharge mechanism having
In the discharge mechanism, a pair of guide members for converging the waste liquid or mist to the outlet is provided on a substantially extended line in the scattering direction of the waste liquid or mist,
An oil pan that receives the waste liquid flowing out from the workpiece cutting section is provided so as to surround the work table, and the discharge mechanism is disposed at one end of the oil pan,
The dicing apparatus according to claim 1, wherein the oil pan is formed so as to become narrower as it goes from the workpiece cutting portion to the discharge mechanism . The rectangular casing on the side where the workpiece changer is provided is cut obliquely in parallel with the spindle moving mechanism, and an opening for exchanging and maintaining the workpiece is provided at the cutout portion of the rectangular casing. The dicing apparatus according to claim 1, wherein the dicing apparatus is provided. It is a dicing apparatus unit in which an even number of dicing apparatuses according to claim 1 or 2 are installed, and the two units are arranged as a set so that the cutout portions of the rectangular casing are adjacent to each other. A dicing device unit comprising: 3. A dicing method using the dicing apparatus according to claim 1 or 2 , wherein the work is transported along one diagonal direction of the rectangular casing and is positioned at a substantially central portion of the rectangular casing. After the spindle moving mechanism and the work table feed mechanism are stopped at the work cutting processing section orthogonal to each other, the work is cut by moving the rotating blade and the work relatively. A characteristic dicing method.

Images