JP5495911B2 - Dicing apparatus, dicing apparatus with drainage exhaust mechanism, and environmental control method thereof - Google Patents

Description

  The present invention relates to a dicing apparatus, a dicing apparatus with a drainage exhaust mechanism, and an environment control method thereof, and more particularly, to a dicing apparatus that cuts and divides a workpiece such as a semiconductor wafer into small pieces, a dicing apparatus with a drainage exhaust mechanism, and an environment control method thereof.

  Conventionally, a dicing apparatus is used to cut and divide a workpiece such as a semiconductor wafer or electronic component material into individual chips. The dicing apparatus includes a work table on which a work is placed, a blade for cutting the work, a work table feeding mechanism for moving the work relative to the blade, and a spindle on which the blade is rotatably attached. And a spindle moving mechanism that movably supports the spindle.

  A typical conventional example of a dicing apparatus is shown in FIG. 11 (see JP-A-2002-280328). As shown in the figure, a load port 2 is provided at the right rear portion of a rectangular housing (main body portion of the dicing apparatus 10), and a workpiece cleaning unit 3 is provided at the right front portion of the rectangular housing 1. ing.

  In addition, a workpiece (wafer) cutting portion 4 is disposed at the left central portion of the rectangular housing 1, and a work table 5 is disposed at the right central portion of the rectangular housing 1, whereby the front side of the dicing apparatus. The operator M located at can access the load port 2 and the workpiece cleaning unit 3. Since the work table feeding mechanism 6 is arranged at the center in the front-rear direction of the rectangular housing 1, the work W travels in the left-right direction at the center in the front-rear direction of the rectangular housing 1 far from the operator M.

  Further, the blade 7 for cutting the workpiece W is rotatably attached to the spindle 8. The spindle moving mechanism 9 is provided with a guide rail (not shown) that supports the spindle 8.

  When cutting the workpiece W by the dicing device, cutting water is supplied from a cutting water nozzle (not shown) toward the blade 7 and the processing point of the workpiece W, and the supplied cutting water is then used as the work table 5. Flows into the oil pan 11 arranged so as to surround the waste liquid. Then, the cutting water flowing into the oil pan 11 is drained to the outside through a drain pipe 13 from a drain port 12 formed on the downstream side of the oil pan 11. The oil pan 11 is provided with a support plate on which a bellows is placed, and the bellows covers a driving mechanism such as an X-axis guide rail (not shown).

  As a conventional dicing apparatus with a drainage mechanism, JP-A-2006-247760 (Patent Document 1), JP-A-2002-103177 (Patent Document 2), JP-A-2003-124150 (Patent Document 3), JP-A-2694931 (Patent Document 4) and Japanese Patent Application Laid-Open No. 2002-280328 (Patent Document 5) is known.

  For example, in the invention of Patent Document 1, in order to prevent cutting water from splashing on the inner surface of the protective cover and losing the transparency of the protective cover, a hydrophilic coating film is formed on the inner surface of the protective cover, By making the contact angle of 30 degrees or less, the cutting water is unlikely to become water droplets, so that the cutting water is likely to flow down from the surface of the protective cover.

  In the invention of Patent Document 2, a water case for receiving cutting water is provided, a pool for temporarily storing and draining the cutting water received by the water case is provided, and the bottom of the drainage pool is provided at the bottom of the water case. The drainage pool is formed at a position higher than the bottom of the water case.

  Further, the invention of Patent Document 3 discharges mist generated while cutting a workpiece in the processing portion to the outside of the processing portion by air, and at that time, obtains an appropriate exhaust air pressure in any equipment environment. So that the exhaust air volume can be adjusted. Specifically, a forced exhaust device that exhausts mist generated during cutting to the outside of a predetermined closed space by air and an air volume adjusting means that adjusts the exhaust air volume of the forced exhaust device are provided.

  On the other hand, in the invention of Patent Document 4, a mist cover for preventing the mist from being scattered on the entire surface together with the cutting water is attached, and a mist scattering prevention cover is attached in front of the blade.

  In addition, the invention of Patent Document 5 is provided with a load port on the back side of the dicing apparatus in order to ensure a safe arrangement without increasing the floor space, and a processing section for cutting the wafer is arranged on the left side of the dicing apparatus. The work table is installed on the right side of the dicing apparatus so that the operator can access both the load port and the wafer cleaning unit.

JP 2006-247760 A JP 2002-103177 A JP 2003-124150 A Patent 2694931 JP2002-280328

  The inventions described in Patent Documents 1 to 5 have the following problems. First, in the invention described in Patent Document 1, when the wall surface of the rectangular casing of the dicing device is formed at a right angle or a substantially right angle with respect to the cutting direction of the workpiece by the blade, it corresponds to the rectangular casing or the rectangular casing. Cutting water collides with the wall portion to be cut, and the cutting water bounced off after the collision is scattered around (see FIG. 14). The cutting water scattered from the blade is usually most scattered on the extension line in the rotation direction of the blade. The scattered cutting water decreases as the distance from the extension line increases. As shown in FIG. 14, the scattered distribution is a probability distribution centered on the extension line in the rotation direction of the blade. The greater the distance from the blade, the greater the distance that will be scattered. For example, even if a hydrophilic coating film is formed on the protective cover, most of the scattered cutting water is dried while gradually flowing down.

  As a result, the inner wall of the protective cover is contaminated by cutting waste contained in the cutting water, and it is necessary to periodically clean the contaminated portion. Such a contamination phenomenon is not limited to the inner wall of the protective cover, but also in the vicinity of the oil pan and the drain port. In the portion where the cutting water stays, the moisture of the cutting water dries and the cutting waste accumulates. .

  In addition, since the cutting water scattered around is not washed away by the cutting water that scatters next, as a result, the scattered cutting water stays on the entire surface and gradually dries to accumulate cutting waste. . For this reason, it is necessary to carefully wash away the inner part of the dicing apparatus on which cutting waste has accumulated with washing water.

  Further, in the invention of Patent Document 2, the water case (or oil pan) is formed in a substantially rectangular shape in accordance with the shape of the bellows covering the chuck table feeding device mechanism, and the drain port portion of the drainage mechanism has a substantially rectangular top. It is formed in the vicinity. According to this configuration, even when the water case is formed with a slight inclination, the water case has the same width dimension in the entire longitudinal direction, so that the cutting water flows through the water case at a gentle speed and is discharged. The

  In particular, since the amount of cutting water that scatters is small on the upstream side of the oil pan, when the cutting water is half dried, the cutting waste tends to form a lump. In this case, even if the cutting waste does not form a complete lump, if a certain size of mass is formed, the mass slides down the water case. At this time, the water case is spread over the entire longitudinal direction. Since the drain part is provided in the terminal part of the water case, the cutting water temporarily stagnate in the vicinity of the drain part.

  As a result, the cutting waste contained in the cutting water starts to precipitate as a lump at a location slightly away from the drain portion. And the settled cutting waste accumulates gradually and becomes large to the extent which dams the flowing water channel of a water case. In addition, the cutting waste accumulates in the water pool near the drain of the water case, and this deposit needs to be cleaned.

  In particular, when water containing cutting waste such as cutting water is discharged, the water stagnates in the drain portion, so the flow rate of water near the drain portion is reduced. Thereby, sedimentation or accumulation of cutting waste proceeds and the fluid action is inhibited. Therefore, when draining (capturing) cutting scraps with a filter or the like, unless a method in which the flow velocity naturally increases in accordance with the decrease in the flow velocity due to the drain is adopted, the fluid action stagnates near the drain and the cutting scraps are generated. It will settle and the deposit will gradually accumulate.

  Furthermore, it is necessary to periodically clean the drainage path of the water case where cutting waste accumulates. However, the drainage channel is restricted to the shape and dimension corresponding to the upper bellows portion. Therefore, since the width dimension of the drainage channel of the water case is narrow, it is easy to collect cutting waste in space, and it becomes very difficult to clean the drainage channel.

  Since the outer shape of the water case substantially coincides with the outer shape of the dicing apparatus, if the shape of the water case is changed, the outer shape of the dicing apparatus must also be changed. Further, when a relatively heavy workpiece such as ceramics is cut, cutting waste (sludge) such as ceramics may accumulate on the bottom of the water case. The accumulated cutting waste clogs the drainage channel, and there is a problem that the used cutting water does not flow to the drain portion and the cutting water overflows from the water case.

  Further, the invention of Patent Document 3 is intended to ensure an appropriate exhaust air pressure in any environment when discharging mist generated while cutting a workpiece in the processing portion to the outside of the processing portion by air. The exhaust air volume can be adjusted and equipped with a forced exhaust device for discharging mist generated during cutting to the outside of the closed space with air, and exhausted in the direction in which cutting water scatters from the blade A mouth is provided.

  According to this structure, the location where the mist of the cutting water becomes a turbulent flow and stays inside the dicing apparatus is generated, and the mist is filled not only on the downstream side in the rotation direction of the blade but also on the upstream side. As a result, the cutting water tends to solidify at the location where the mist stays, and the solidified cutting waste needs to be removed during maintenance.

  Furthermore, when an exhaust port is formed on the inner wall surface of the dicing apparatus, the mist atmosphere formed on the extension line of the exhaust port is collected, but the mist atmosphere around the exhaust port that is displaced from the extension line is collected. Instead, it crawls into the wall of the exhaust port. As a result, the mist swirls around the exhaust port, and as a result, the mist remains around the wall of the exhaust port, so that the mist cannot be efficiently sucked from the exhaust port to the outside.

  In this case as well, special maintenance is required in the same manner as described above because the cutting waste is hardened on the wall surface where the mist remains. In addition, when the cutting scraps are solidified, the solid matter is peeled off from the wall surface and remains in the vicinity of the drain outlet, so there is a concern that the drainage action is hindered.

  Next, in the invention of Patent Document 4, a mist cover is provided in order to prevent mist from colliding with the cutting water and the mist from the entire surface when dicing, and a mist scattering prevention cover is provided in front of the blade. Although it is installed, the splash prevention cover (buffer material) prevents bouncing of the cutting water, and the cutting water dripped from the buffer material flows in the cutting direction along the inclined surface of the backing plate to the outside of the processing part. Led to.

  In this case, the cutting water remains in the buffer material itself that prevents the rebound, and the cutting water is dried and stagnated. Moreover, since the cutting water dripped from the buffer material does not have a sufficient flow rate and flow velocity on the inclined surface of the backing plate, the cutting water stays on the inclined surface and is dried as it is, so that cutting waste accumulates. The accumulated cutting waste must be cleaned by removing the anti-scattering cover and the like, and maintenance work such as washing must be carefully performed in order to keep the dicing apparatus clean.

  In the invention of Patent Document 5, the spindle moving mechanism and the work table moving mechanism are arranged in the orthogonal direction corresponding to the vertical and horizontal directions of the rectangular casing of the rectangular dicing apparatus. According to this configuration, an extra space portion is generated in a gap portion between two orthogonal moving mechanisms, so that the dicing apparatus not only increases in size but also when the dicing apparatus is exhausted, Since the internal space increases as the size increases, the exhaust efficiency decreases accordingly.

  In addition, the space area where the mist of the cutting water discharged from the work cutting part is scattered and contaminated, and the space area on the side where the work is transported or exchanged are not clearly separated in terms of atmosphere, and The contaminated part where mist is scattered has a structure that is difficult to exhaust efficiently.

  Therefore, the mist may be scattered from the contaminated space area into the space area on the side where the work is conveyed, and in some cases, the mist may also be scattered to the work exchange section to be kept clean. Therefore, in order to exhaust the mist efficiently, it is conceivable to provide a facility for sucking the mist to the outside as a laminar flow. In this case, the facility cost increases.

  In addition, as shown in FIGS. 12 and 13, in an oil pan (water case) 13 having a constant width dimension over the entire longitudinal direction, workpiece end materials and the like are scattered at the downstream end in the entire width direction of the downstream end. To do. Therefore, it is necessary to temporarily collect the end materials of the workpiece and collect and collect them after the processing. In this case, the scattered end materials and the like must be scraped, so that the maintenance work becomes complicated. In order to aggregate the scattered end materials and the like, it is necessary to increase an extra space S outside the existing maintenance area E as shown in FIG.

  Therefore, technical problems to be solved to prevent sedimentation and accumulation of cutting waste, increase cutting water and mist discharge efficiency, facilitate cleaning of oil pans, etc., and keep the work replacement part clean. The present invention aims to solve this problem.

The present invention has been proposed to achieve the above object, and the invention according to claim 1 comprises a work table on which a work is placed, a blade for cutting the work, and a work on the work table. A work table feed mechanism for moving the blade relative to the blade; a spindle on which the blade is rotatably mounted; and a spindle moving mechanism for supporting the spindle so as to be movable, the spindle moving mechanism and the work table In the dicing apparatus with a drainage exhaust mechanism in which the feed mechanism is disposed orthogonal to each other,
A drainage mechanism having a drainage port is disposed on a substantially extended line in the discharge direction of the cutting water scattered along the blade when the workpiece is cut, and the drainage mechanism has a width as it approaches the drainage port from the blade. There is provided a dicing apparatus with a drainage / exhaust mechanism, characterized by having an inner wall of the apparatus that becomes narrower .

  According to this configuration, when the workpiece is cut with the blade attached to the spindle moving mechanism, the cutting water scattered along the rotation of the blade flows directly into the drainage mechanism provided on the substantially extended line in the discharge direction. Thereafter, the cutting water flows so as to converge naturally toward the drainage port by passing through the inner wall of the device or the device housing which becomes narrower as it approaches the drainage port. As a result, the cutting water is drained while increasing the flow velocity.

According to a second aspect of the present invention, there is provided a work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and the blade A dicing apparatus with a drainage / exhaust mechanism comprising a spindle that is rotatably mounted, and a spindle moving mechanism that supports the spindle so that the spindle can move, wherein the spindle moving mechanism and the work table feed mechanism are disposed orthogonal to each other. In
An exhaust mechanism having an exhaust port is disposed on a substantially extended line in the discharge direction of cutting water and mist that scatters along the blade when the work is cut, and the exhaust mechanism approaches the exhaust port from the blade. A dicing apparatus with a drainage / exhaust mechanism is provided, characterized in that the apparatus has an inner wall that becomes narrower in width .

  According to this configuration, when the workpiece is cut by the blade attached to the spindle moving mechanism, the mist scattered along the rotation of the blade directly flows into the exhaust mechanism provided on the substantially extended line in the discharge direction. Thereafter, the mist flows so as to naturally converge toward the exhaust port by passing through the inner wall of the device or the device housing which becomes narrower as it approaches the exhaust port. Therefore, the mist is smoothly exhausted while increasing the flow velocity.

  According to a third aspect of the present invention, there is provided a work table on which a work is placed, a blade for cutting the work, a work table feeding mechanism for moving the work on the work table relative to the blade, and the blade A dicing apparatus with a drainage / exhaust mechanism comprising a spindle that is rotatably mounted, and a spindle moving mechanism that supports the spindle so that the spindle can move, wherein the spindle moving mechanism and the work table feed mechanism are disposed orthogonal to each other. The spindle moving mechanism and the work table feeding mechanism are arranged on two diagonal lines of a rectangular housing of the dicing device formed in a square shape in plan view, and cutting water splashes along the blade when the work is cut. A drainage mechanism having a drainage port and an exhaustion mechanism having an exhaust port on a substantially extended line in the discharge direction of the mist The drainage mechanism and the exhaust mechanism have a drainage passage that becomes narrower as they approach the drainage port, and the exhaust mechanism has an exhaust passage that becomes narrower as it approaches the exhaustage port. A dicing apparatus with a drainage / exhaust mechanism is provided, characterized in that a work exchanging portion is provided on a diagonal line on which the drainage mechanism is disposed and on the opposite side of the drainage mechanism.

  According to this configuration, when the workpiece is cut by the blade attached to the spindle moving mechanism, the cutting water and the mist scattered along the rotation of the blade are discharged on the substantially extended line in the discharge direction. Each flows directly into the mechanism. Thereafter, the cutting water passes through a drainage channel that becomes narrower as it approaches the drainage port, and then flows so as to converge toward the drainage port, and is drained while increasing the flow velocity. Also, the mist passes through the exhaust passage that becomes narrower as it approaches the exhaust port, and thus flows toward the exhaust port so as to converge, and is exhausted while increasing the flow velocity. Furthermore, since the work exchange part is provided on the same diagonal line as the drainage mechanism and on the opposite side of the drainage mechanism with the spindle movement mechanism as a boundary, the spindle movement mechanism has a mist scattered in the space area where the work exchange part is installed. It can exhibit a shielding function that isolates it from the space area.

  According to a fourth aspect of the present invention, there is provided a work table on which a work is placed, a blade for cutting the work, a work table feeding mechanism for moving the work on the work table relative to the blade, and the blade A dicing apparatus with a drainage / exhaust mechanism comprising a spindle that is rotatably mounted, and a spindle moving mechanism that supports the spindle so that the spindle can move, wherein the spindle moving mechanism and the work table feed mechanism are disposed orthogonal to each other. The spindle moving mechanism and the work table feeding mechanism are arranged on two diagonal lines of a rectangular housing of the dicing device formed in a square shape in plan view, and cutting water splashes along the blade when the work is cut. A drainage mechanism having a drainage port and an exhaustion mechanism having an exhaust port on a substantially extended line in the discharge direction of the mist The drainage mechanism and the exhaust mechanism have a drainage passage that becomes narrower as they approach the drainage port, and the exhaust mechanism has an exhaust passage that becomes narrower as it approaches the exhaustage port. And an oil pan that receives cutting water flowing out of the workpiece is provided so as to surround the work table feed mechanism, and the oil pan is formed wide at the workpiece cutting position, and the oil pan Provided is a dicing apparatus with a drainage exhaust mechanism which is formed so as to become narrower as it goes to the drainage mechanism connected to a pan.

  According to this configuration, during machining, the cutting water and the mist scattered along the blades directly flow into the drainage mechanism and the exhaust mechanism, respectively, and thus are prevented from being scattered around. Further, since the cutting water and the mist are discharged while increasing the flow velocity, drainage efficiency and exhaust efficiency can be improved. In particular, even if the cutting waste contained in the cutting water settles and accumulates on the bottom of the drainage channel, the sediment and sediment are pushed away by the cutting water that flows next. It becomes unnecessary. Furthermore, since the oil pan is formed wide at the workpiece cutting position, the cutting water flowing out or scattered from the work table is received in a wide range by the oil pan. Further, since the oil pan is formed so as to become narrower toward the drainage mechanism, the cutting water flows toward the drainage mechanism while increasing the flow velocity.

  According to a fifth aspect of the present invention, there is provided a work table on which a work is placed, a blade for cutting the work, a work table feeding mechanism for moving the work on the work table relative to the blade, and the blade And a spindle moving mechanism for movably supporting the spindle. The spindle moving mechanism and the work table feed mechanism are arranged orthogonal to each other, and the spindle moving mechanism and the workpiece The table feed mechanism is disposed on two diagonal lines of the rectangular housing of the dicing device formed in a square shape in plan view, and is on a substantially extended line in the discharge direction of cutting water and mist that scatters along the blade when the workpiece is cut. A dicing apparatus with a drainage exhaust mechanism in which a drainage mechanism having a drainage port and an exhaustion mechanism having an exhaust port are provided In this environmental control method, the spindle movement mechanism isolates the space area in which the workpiece replacement unit is installed from the space area where the mist scatters, and when the workpiece is cut by the blade, along with the rotation of the blade Equipped with a drainage exhaust mechanism that allows the scattered cutting water and mist to flow directly into the drainage mechanism and the exhaust mechanism, respectively, and then discharge the cutting water and mist while converging toward the drainage port and the exhaust port. An environment control method for a dicing apparatus is provided.

  According to this method, the cutting water and the mist are discharged while converging toward the drain port and the exhaust port, and at that time, are discharged while increasing the flow velocity. Also, the spindle moving mechanism exerts a shielding function that isolates the space area where the work changer is installed from the space area where the mist is scattered, so the cutting water and mist are the area on the side where the work changer is installed. There is no risk of intrusion.

According to a sixth aspect of the present invention, there is provided a work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and the blade A dicing apparatus comprising: a spindle rotatably mounted; and a spindle moving mechanism that movably supports the spindle.
The spindle moving mechanism and the work table feed mechanism are disposed orthogonally to each other, and the work machining position for machining the work is substantially at the center of the apparatus, and the work exchange position for the work is a position for replacing the work. There is a drainage mechanism that is at one end of the table feed mechanism and is substantially extended in the discharge direction of the cutting water that scatters along the blade when the workpiece is cut, and collects drainage near the multi-end side of the worktable feed mechanism. A curtain brush disposed between the workpiece exchange position and the workpiece machining position across the workpiece table feed mechanism, and the curtain brush moves the workpiece from the workpiece machining position to the workpiece exchange position. As the apparatus comes in contact with the surface and approaches the spindle moving mechanism from the workpiece replacement position, the device housing becomes wider. Together, to provide a wastewater pumping mechanism with a dicing apparatus characterized by having a device enclosure comprising a narrow along with approaching the drainage mechanism from the spindle moving mechanism.

  According to this configuration, when the workpiece is cut by the blade attached to the spindle moving mechanism at the workpiece machining position where the spindle moving mechanism and the work table feeding mechanism intersect, the cutting water splashes along the rotation of the blade. Flows directly into a drainage mechanism provided on a substantially extended line in the discharge direction. At this time, the spindle moving mechanism functions as a shield that isolates the space area on the workpiece exchange position side from the space area where the cutting water and the cutting mist generated together with the cutting water scatter, The space area on the workpiece exchange position side is defined as a clean zone, and the space area where the cutting water and cutting mist on the rear side of the spindle moving mechanism are scattered is classified as a dirty zone. Then, on the dirty zone side, the width of the device housing becomes narrower as it approaches the drainage mechanism, so that the cutting water is concentrated in the drainage mechanism and drained from the drainage mechanism while increasing the flow velocity. Further, the cutting mist is also collected in the exhaust mechanism while being increased in flow velocity, and is exhausted from the exhaust mechanism. Furthermore, when the workpiece is cut at the workpiece machining position, as described above, a large amount of cutting water is blown to the drainage mechanism side, which is a dirty zone, and drained. However, a part of the cutting mist soars at the workpiece cutting position and may convect to the workpiece replacement position on the clean zone side in some cases. On the other hand, since the curtain brush exists between the workpiece machining position and the workpiece exchange position, the curtain brush functions as a shield that shields the workpiece exchange position from scattering of the part of the cutting mist. Environmentally separate the position and workpiece change position. The curtain brush contacts the surface of the workpiece that moves from the workpiece processing position to the workpiece replacement position, so that even if chips are accumulated on the workpiece that has been cut, these accumulated chips Etc. are removed, and the surface of the workpiece that has been cut is cleaned.

The invention according to claim 7 is a work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and the blade A dicing apparatus comprising: a spindle rotatably mounted; and a spindle moving mechanism that movably supports the spindle.
The spindle moving mechanism and the work table feed mechanism are disposed orthogonally to each other, and the work machining position for machining the work is substantially at the center of the apparatus, and the work exchange position for the work is a position for replacing the work. It is located at one end of the table feed mechanism and is substantially on a line extending in the discharge direction of the cutting water that scatters along the blade when the workpiece is cut, and crosses the work table feed mechanism and the workpiece exchange position and the workpiece machining position. A curtain brush is provided between the workpiece machining position and the workpiece brush when the workpiece moves from the workpiece machining position to the workpiece exchange position. As the body widens, the curtain brush and the spine cross the work table feeding mechanism. Providing drainage pumping mechanism with a dicing apparatus characterized by the dollar moving mechanism has a device enclosure comprising a width narrower along with approaching the drainage mechanism.

  According to this configuration, when the workpiece is cut by the blade attached to the spindle moving mechanism at the workpiece machining position where the spindle moving mechanism and the work table feeding mechanism intersect, the cutting water splashes along the rotation of the blade. Flows directly into a drainage mechanism provided on a substantially extended line in the discharge direction. At this time, the spindle moving mechanism functions as a shield that isolates the space area on the workpiece exchange position side from the space area where the cutting water and the cutting mist generated together with the cutting water scatter, The space area on the workpiece exchange position side is defined as a clean zone, and the space area where the cutting water and cutting mist on the rear side of the spindle moving mechanism are scattered is classified as a dirty zone. Then, on the dirty zone side, the width of the device housing becomes narrower as it approaches the drainage mechanism, so that the cutting water is concentrated in the drainage mechanism and drained from the drainage mechanism while increasing the flow velocity. Further, the cutting mist is also collected in the exhaust mechanism while being increased in flow velocity, and is exhausted from the exhaust mechanism. Furthermore, when the workpiece is cut at the workpiece machining position, as described above, a large amount of cutting water is blown to the drainage mechanism side, which is a dirty zone, and drained. However, a part of the cutting mist soars at the workpiece cutting position and may convect to the workpiece replacement position on the clean zone side in some cases. On the other hand, since the curtain brush exists between the workpiece machining position and the workpiece exchange position, the curtain brush functions as a shield that shields the workpiece exchange position from scattering of the part of the cutting mist. Environmentally separate the position and workpiece change position. The width of the apparatus housing is narrowed as the curtain brush and the spindle moving mechanism approach the drainage / exhaust mechanism, so that the scattering to the workpiece replacement position is shielded by the curtain brush. The cutting mist of the part is also collected in the exhaust mechanism while being increased in flow velocity, and is exhausted from the exhaust mechanism. The curtain brush contacts the surface of the workpiece that moves from the workpiece processing position to the workpiece replacement position, so that even if chips are accumulated on the workpiece that has been cut, these accumulated chips Etc. are removed, and the surface of the workpiece that has been cut is cleaned.

  According to the first aspect of the present invention, since the cutting water scattered along the blade flows directly into the drainage mechanism at the time of machining, it is prevented from being scattered around. Further, since the cutting water is drained while increasing the flow velocity, there is no possibility that the cutting waste contained in the cutting water settles or accumulates on the bottom surface of the drainage channel. Even if the cutting waste settles and stagnates, the sediment and stagnant material is naturally swept away by the cutting water that flows next. Thus, it is not necessary to perform the sedimentation / accumulated matter removal work as in the conventional example, and the drainage efficiency of the cutting water can be improved.

  According to the second aspect of the present invention, the mist scattered along the blade directly flows into the exhaust mechanism during processing, so that it is prevented from being scattered around. Further, since the mist is discharged while increasing the flow velocity, the exhaust efficiency can be improved.

  According to the third aspect of the present invention, the cutting water and the mist that scatter along the blade directly flow into the drainage mechanism and the exhaust mechanism at the time of processing, respectively, and thus are prevented from being scattered around. Further, since the cutting water and the mist are discharged while increasing the flow velocity, drainage efficiency and exhaust efficiency can be improved. In particular, even if the cutting waste contained in the cutting water settles and accumulates on the bottom of the drainage channel, the sediment and sediment are naturally swept away by the cutting water that flows next. Work becomes unnecessary. Further, the spindle moving mechanism can exhibit a shielding function for isolating the space area where the workpiece exchanging unit is installed from the space area where the mist is scattered. Accordingly, since there is no possibility that mist enters the space area on the workpiece exchange side, the space area on the workpiece exchange side can be kept clean at all times.

  According to the fourth aspect of the present invention, the cutting water and the mist that scatter along the blade directly flow into the drainage mechanism and the exhaust mechanism at the time of machining, respectively, and thus are prevented from being scattered around. Further, since the cutting water and the mist are discharged while increasing the flow velocity, drainage efficiency and exhaust efficiency can be improved. In particular, even if the cutting waste contained in the cutting water settles and accumulates on the bottom of the drainage channel, the sediment and sediment are naturally swept away by the cutting water that flows next. Work becomes unnecessary. Further, the spindle moving mechanism can exhibit a shielding function for isolating the space area where the workpiece exchanging unit is installed from the space area where the mist is scattered. Accordingly, since there is no possibility that mist enters the space area on the workpiece exchange side, the space area on the workpiece exchange side can be kept clean at all times. In addition, cutting water that flows out or scatters from the work table can be efficiently collected by the oil pan, and the cutting water is drained while increasing the flow velocity. However, the sediment can be removed by pushing it toward the drainage port by the flow action of the cutting water that flows continuously. Furthermore, when the oil pan is cleaned, the gap between the work table (and the bellows mechanism) and the oil pan is widened, so that the maintenance operation of the oil pan can be easily performed.

  According to the fifth aspect of the present invention, since the cutting water and the mist splashed along the blades directly flow into the drainage mechanism and the exhaust mechanism at the time of machining, scattering to the surroundings is prevented. Further, since the cutting water and the mist are discharged while increasing the flow velocity, drainage efficiency and exhaust efficiency can be improved. In particular, even if the cutting waste contained in the cutting water settles and accumulates on the bottom of the drainage channel, the sediment and sediment are naturally swept away by the cutting water that flows next. Work becomes unnecessary. Further, the spindle moving mechanism can exhibit a shielding function for isolating the space area where the workpiece exchanging unit is installed from the space area where the mist is scattered. Accordingly, since there is no possibility that mist enters the space area on the workpiece exchange side, the space area on the workpiece exchange side can be kept clean at all times.

According to a sixth aspect of the invention, when cutting the workpiece, cutting water-cutting mist scattered along the rotation of the blades, in the dirty zone side, since the aggregated into wastewater and exhaust mechanism while increasing the flow rate, the It can be efficiently removed from the drainage / exhaust mechanism. Moreover, since the cutting waste contained in the cutting water is drained while increasing the flow velocity, there is no possibility of sedimentation or stagnation on the bottom surface of the housing. Even if the cutting waste settles and accumulates, the sediment and sediment are naturally swept away by cutting water having a large flow velocity. Further, there is no possibility that the cutting mist is scattered in the clean zone where the workpiece exchange position in front of the spindle moving mechanism exists, and the workpiece exchange position can be kept clean. Furthermore, even if a part of the cutting mist rises during workpiece cutting, the curtain brush also functions as a shield that shields the part replacement position for the part of cutting mist. It is possible to prevent the workpiece from being scattered at the exchange position and to keep the workpiece exchange position clean. The curtain brush contacts the surface of the workpiece moving from the workpiece processing position to the workpiece replacement position, and even if chips are accumulated on the workpiece that has been cut, such accumulated chips etc. It is possible to clean the workpiece surface after cutting is completed.

The invention of claim 7, wherein, at the time of cutting the workpiece, cutting water-cutting mist scattered along the rotation of the blades, in the dirty zone side, since the aggregated into wastewater and exhaust mechanism while increasing the flow rate, the It can be efficiently removed from the drainage / exhaust mechanism. Moreover, since the cutting waste contained in the cutting water is drained while increasing the flow velocity, there is no possibility of sedimentation or stagnation on the bottom surface of the housing. Even if the cutting waste settles and accumulates, the sediment and sediment are naturally swept away by cutting water having a large flow velocity. Further, there is no possibility that the cutting mist is scattered in the clean zone where the workpiece exchange position in front of the spindle moving mechanism exists, and the workpiece exchange position can be kept clean. Furthermore, even if some cutting mist rises during workpiece cutting, the curtain brush functions as a shield that shields the workpiece replacement position from scattering of the cutting mist. It is possible to prevent scattering to the workpiece replacement position, and it is possible to collect the exhaust mechanism and remove it from the exhaust mechanism so that the workpiece replacement position can be kept clean. The curtain brush contacts the surface of the workpiece moving from the workpiece processing position to the workpiece replacement position, and even if chips are accumulated on the workpiece that has been cut, such accumulated chips etc. It is possible to clean the workpiece surface after cutting is completed.

The arrangement | positioning top view which shows one Example of this invention and demonstrates the layout of each part of a dicing apparatus. The perspective view which shows the structural example of the waste_water | drain exhaust mechanism of the dicing apparatus which concerns on the Example of this invention. Explanatory drawing explaining the effect | action of the waste_water | drain exhaust mechanism of the dicing apparatus which concerns on the Example of this invention. Explanatory drawing explaining the collection operation of the end material in the triangular corner part of the drainage mechanism of FIG. Explanatory drawing explaining the environmental control method of the dicing apparatus which concerns on the Example of this invention. (A), (b), (c) and (d) is a water amount distribution diagram for explaining the cutting water scattered from the blade according to the embodiment of the present invention, an explanatory diagram for explaining the scattering direction of the cutting water, and a wall The amount distribution figure explaining the cutting water reflected from, and the explanatory view explaining the reflection direction of the cutting water. In the Example of this invention, it is a top view for demonstrating replacement | exchange of a spindle, etc., (a) is a figure for demonstrating replacement | exchange of a spindle A, (b) is for demonstrating replacement | exchange of a spindle B, etc. Illustration. In the Example of this invention, it is a top view which shows the example of a structure which notched both sides of the workpiece | work exchange part in an apparatus housing | casing, and set gradually the workpiece | work exchange part to a spindle moving mechanism widely, (a) is notched (B) is a structural example of the device housing after being cut out. In the Example of this invention, it is a top view which shows the structural example which notched the both sides of the drainage / exhaust mechanism in an apparatus housing | casing, and set the width | variety from a spindle moving mechanism to a drainage / exhaust mechanism gradually narrowly, (a) Is a device housing before notching, and (b) is a device housing configuration example after notching. In the Example of this invention, it is a figure which shows the structural example which installed the curtain brush above the work table feed mechanism in the middle of returning to a workpiece | work exchange part from a spindle moving mechanism, (a) is a top view, (b) is a figure. Sectional drawing which follows the YY line in (a), (c) is a figure which expands figure (b) partially and shows it in detail. The arrangement | positioning top view which shows a prior art example and demonstrates the layout of each part of a dicing apparatus. The detailed top view which shows the structural example of the drainage mechanism of the dicing apparatus which concerns on a prior art example. Explanatory drawing explaining the collection effect | action of the end material in the drainage mechanism of the dicing apparatus which concerns on a prior art example. (A), (b), (c), and (d) are water amount distribution diagrams for explaining the cutting water scattered from the blade according to the conventional example, an explanatory diagram for explaining the scattering direction of the cutting water, and a cutting water reflected from the wall. The water amount distribution diagram explaining the above and the explanatory diagram explaining the reflection direction of the cutting water.

  The present invention achieves the objects of preventing the accumulation of cutting waste, increasing the efficiency of discharging cutting water and exhaust, facilitating cleaning of an oil pan, etc., and maintaining the work (wafer) replacement part clean. Therefore, a work table on which a work is placed, a blade for cutting the work, a work table feeding mechanism for moving the work on the work table relative to the blade, and the blade are rotatably mounted. A dicing apparatus with a drainage / exhaust mechanism in which the spindle movement mechanism and the work table feed mechanism are arranged orthogonal to each other. A drainage mechanism having a drain outlet is arranged on a substantially extended line in the discharge direction of the cutting water that scatters along the blade during cutting. Is, drainage mechanism comprises a drainage channel to become narrower along with approaching the drain outlet, the cutting water was achieved by having the structure described is drained while increasing the flow rate.

  A preferred embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a plan view showing a dicing apparatus 21 according to the present embodiment. As shown in the figure, a rectangular housing 22 that is a main body portion of the dicing device 21 formed in a square shape in plan view has a right-angled isosceles triangular portion cut out at the right front corner, and is formed on the front surface of the dicing device 21. A hypotenuse edge is formed at an angle of 45 degrees. An opening 23 with an opening / closing cover is provided at the oblique edge, and the work replacement and maintenance work can be performed on the rectangular housing 22 from the opening 23.

  On the rectangular housing 22, a rotatable work table 24 on which a wafer W as a work is placed, blades 25 and 25 for cutting the wafer W, and a work table 24 on which the wafer W is placed. A work table feed mechanism 26 that is moved relative to the blades 25 is provided. The work table feed mechanism 26 is installed on a first diagonal line connecting the right front corner and the left rear corner of the rectangular housing 22.

  Further, a spindle moving mechanism 28 is installed on the rectangular housing 22, and the spindle moving mechanism 28 includes a guide rail 29. The spindle moving mechanism 28 is installed on a second diagonal line connecting the left front corner and the right rear corner of the rectangular housing 22. For this reason, the spindle moving mechanism 28 is arranged so as to be orthogonal to the work table feeding mechanism 26. Accordingly, the guide rail 29 of the spindle moving mechanism 28 intersects the work feed direction by the work table feed mechanism 26 at a right angle.

  Two spindles 30, 30 are movably supported on the guide rail 29, and the spindles 30, 30 are arranged opposite to each other on the same axis. Blades 25 and 25 are rotatably attached to the spindles 30 and 30, respectively.

  In addition, a workpiece cutting processing portion 32 is disposed at a substantially central portion of the dicing device 21, that is, a portion where the spindle moving mechanism 28 and the work table feeding mechanism 26 are orthogonal to each other in the rectangular housing 22. In FIG. 2, the wafer W can be cut by the blades 25, 25.

  In the workpiece cutting unit 32 of the present embodiment, the moving distance of the spindles 30 and 30 holding the blades 25 and 25 can be increased according to the length of the diagonal line. This can be cut efficiently. In addition, the spindle moving mechanism 28 (or the guide rail 29) can have a portal structure in terms of strength. In this embodiment, the portal column supporting the spindle moving mechanism 28 is a square rod of the dicing apparatus 21. It is comprised so that it may share with the support | pillar of the body 22. FIG.

  Therefore, the spindle moving mechanism 28 and the guide rail 29 can be efficiently arranged in the dicing device 21 without specially providing a portal-type column for the spindle moving mechanism 28 having high rigidity, and the dicing device 21 having high rigidity and high accuracy can be provided. Can be configured.

  Further, a work exchanging portion 33 is provided at the right front side portion of the dicing device 21, and the work exchanging portion 33 is disposed in proximity to the opening 23 provided at the right front oblique side edge of the rectangular housing 22. Yes. In this work exchanging portion 33, the wafer W placed on the work table 24 can be easily exchanged. Reference numeral 34 in the drawing is an oil pan that receives waste liquid of cutting water and cleaning water flowing out from the workpiece cutting processing section 32, and the oil pan 34 is formed so as to surround the work table feeding mechanism 26.

  Further, as shown in FIG. 2, a drainage mechanism 36 having a drainage port 35 and an exhaustion mechanism 38 having an exhaust port 37 are disposed at the left rear corner of the rectangular housing 22. When the wafer W is cut by the blades 25 and 25 that rotate at high speed, the drain port 35 is disposed on an extension line in a direction in which cutting water and cleaning water scatter along the rotation direction of the blades 25 and 25. . Further, the exhaust port 37 is formed at a substantially upper portion corresponding to the drain port 35. Note that an operation / display unit, an imaging unit, a monitor TV, an indicator lamp, a controller (not shown), and the like are provided at predetermined positions of the dicing device 21.

  Next, a dicing method using the dicing apparatus 21 will be described. First, the blades 25, 25 are attached to the spindles 30, 30, and the wafer W is mounted and fixed on the work table 24. Next, the work table 24 is transported to the substantially central portion of the rectangular housing 22 along the first diagonal direction of the rectangular housing 22 by the work table feeding mechanism 26, and the wafer W is transferred to the work cutting processing section 32 at a predetermined moving speed. Bring it in.

  Thereafter, the spindles 30 and 30 are moved toward the center of the workpiece cutting unit 32, and the wafer W is cut while the blades 25 and 25 attached to the spindles 30 and 30 are rotated at high speed. During the processing, cutting water and cleaning water are supplied to the processing points of the wafer W from a cutting water nozzle and a cleaning nozzle (not shown) provided at the tips of the spindles 30 and 30, respectively.

  The supplied cutting water (including cleaning water; the same applies hereinafter) is received by the oil pan 34. Thereafter, the cutting water flows downstream of the oil pan 34, passes through a drain port 35 and a drain pipe (not shown) of the drain mechanism 36 connected to the oil pan 34, and is discharged to the outside. Further, at the time of machining, the mist is scattered along with the cutting water along the rotation direction of the blades 25, 25, and the scattered mist flows from the workpiece cutting portion 32 toward the left rear corner of the rectangular housing 22. Thereafter, the mist passes through an exhaust pipe (not shown) from the exhaust port 37 of the exhaust mechanism 38 and is discharged to the outside.

  Thus, when the dicing process along one cutting line for the wafer W is completed, the blades 25 and 25 are indexed and positioned to the next cutting line to be processed next, and the cutting is performed in the same procedure as described above. Dicing along the line is performed.

  Then, by repeating the dicing process, when all the dicing processes along a predetermined number of cutting lines are completed, the wafer W is rotated 90 degrees together with the work table 24, and the above-described cutting line is performed by the same processing procedure as described above. Dicing is performed along a cutting line in a direction perpendicular to the line.

  Thus, when all the dicing along the cutting line is completed, the wafer W is cut and divided into a large number of chips. Thereafter, the work table 24 on which the wafer W is placed is transported to the work exchanging unit 33 by the work table feeding mechanism 26 and exchanged with the wafer W to be processed next. Thereafter, dicing of the wafer W is newly performed according to the above-described processing procedure.

  When a predetermined number of wafers W are diced, grinding dust (including grinding powder) accumulates in the vicinity of the drain port 35 provided at the bottom of the most downstream side of the oil pan 34, so that the operation of the dicing device 21 is periodically stopped. Then, the oil pan 34 is cleaned.

  Next, the drainage / exhaust mechanism of the dicing apparatus 21 according to the present embodiment will be described in detail. In the present embodiment, when the wafer W is cut by the blades 25 and 25, the drainage mechanism 36 having the drainage port 35 on the substantially extended line in the discharge direction of the cutting water scattered along the blades 25 and 25, the exhaust An exhaust mechanism 38 having a port 37 is disposed.

  As shown in FIG. 3, the drainage mechanism 36 has a drainage channel that gradually becomes narrower as it approaches the drainage port 35 provided on the most downstream side. For example, as shown in FIG. 1, a pair of left and right water flow guide members 43, 43 are provided on the downstream side of the drainage mechanism 36, and the water flow guide members 43, 43 are connected to the downstream side of the oil pan 34. The water flow guide members 43, 43 can be constituted by a corner portion having a right triangle in plan view, and a parallel water channel portion that is connected to the inflow side of the corner portion and extends in the first diagonal direction of the rectangular casing 22. For this reason, the cutting water is configured to be smoothly drained toward the drain port 35 while increasing the flow velocity as it approaches the drain port 35.

  The exhaust mechanism 38 has an exhaust passage that gradually becomes narrower as it approaches the exhaust port 37 provided in the inner surface of the left rear corner of the rectangular housing 22, and the mist is activated by an operation of a blower (not shown). The exhaust gas is discharged toward the exhaust port 37 while increasing the flow velocity.

  An oil pan 34 that receives cutting water flowing out of the work table 24 is provided so as to surround the outer periphery of the work table feed mechanism 26. The oil pan 34 is formed wide at the workpiece cutting portion 32, and the width dimension of the oil pan 34 gradually becomes wider toward the drainage mechanism 36 connected to the downstream side of the oil pan 34. It is formed to be narrow.

  As described above, according to the present invention, the cutting water is efficiently collected by the drain port 35. Also, the mist scattered along with the cutting water along the rotation direction of the blades 25, 25 is also efficiently collected by the exhaust port 37. That is, when the blades 25 and 25 are rotated and the mist is scattered, the mist converges on the inner center of the rectangular casing 22 by hitting the inner wall surfaces 22L and 22R of the rectangular casing 22 in the traveling direction of the mist (see arrow P in FIG. 3). The converged mist is efficiently collected by the exhaust port 37.

  Furthermore, the oil pan 34 that receives the cutting water that flows out or scatters from the blades 25 of the workpiece cutting unit 32 is formed wide at a portion corresponding to the wafer cutting position. Therefore, waste liquid such as cutting water is received in a wide range by the oil pan 34.

  Further, a drainage mechanism 36 is connected to the downstream side of the oil pan 34, and the passage width of the oil pan 34 is gradually narrowed toward the drainage port 35 of the drainage mechanism 36. Therefore, the cutting water is efficiently collected as it flows toward the drain port 35.

  Furthermore, when the oil pan 34 is cleaned, the oil pan 34 has a wide gap between the work table and the bellows (a member that covers the work feed driving unit), so that maintenance work can be easily performed. The drainage channel from the oil pan 34 to the drainage port 35 flows very smoothly. In addition, since the front upstream port in the vicinity of the drain port 35 is gradually narrowed, the flow rate of waste liquid such as cutting water becomes relatively high. As a result, the collection efficiency of the waste liquid can be further increased.

  Furthermore, as for the portion near the drainage port 35 of the oil pan 34, the flow rate gradually increases in the vicinity of the drainage port 35 because the frontage gradually becomes narrower as it approaches the drainage port 35. Therefore, even if the cutting waste contained in the waste liquid settles in the vicinity of the drain port 35, the precipitate is pushed toward the drain port 35 by the continuous flow action of the cutting water.

  Thus, in addition to the increase in the flow rate of the cutting water due to the narrowing of the drainage channel, the cutting water with the momentum continuously flowing in due to the rotational force of the blades 25, 25 flows into the cutting waste. It is forced away toward the drainage port 35.

  Even if some of the cutting waste in the cutting water stays in the drainage channel, the self-cleaning action that is collected in one place by the cutting water that continuously flows in from the circumference works effectively. Regular cleaning work can be greatly reduced.

  Thus, according to the present invention, the cutting waste generated by the cutting process of the wafer W can be automatically washed away, and the cutting waste can be efficiently collected and removed. In addition, since the drain port 35 is provided with a filter or strainer having a large area, cutting waste contained in waste liquid such as cutting water can be collected more efficiently.

  On the other hand, with respect to the mist that scatters with the cutting water as the blades 25 and 25 rotate, the inner surfaces on both sides of the corners of the rectangular housing 22 are gradually converged toward the traveling direction with respect to the traveling direction in which the mist is scattered. Moreover, since the exhaust port 37 is formed on the extended line in the blade rotation direction (wafer cutting direction), the mist can be efficiently exhausted by the exhaust port 37.

  In the present invention, the exhaust port 37 is disposed not near the inner surface of the rectangular housing 22 but in the vicinity of the left rear corner of the rectangular housing 22, so that the inner wall surface is muffled by the mist around the inner wall surface around the exhaust port 37. Mist can be efficiently collected from all directions toward the exhaust port 37 without fear of being contaminated.

  Further, the inner surface of the rectangular casing 22 is formed so as to gradually converge toward the direction in which mist or water droplets scattered by dicing scatter and become narrow. According to this, after the splashed water droplet bounces back to the inner surface, it is automatically collected at the narrow corner. The sprayed water, water droplets, mist and cutting debris are all collected in the corners of the square in a plan view without contaminating the inside of the device with the water droplets scattered as before. Can be recovered and discharged.

  Further, unlike the region on the exhaust direction side in the rectangular housing 22 with the spindle moving mechanism 28 provided on the second diagonal line as a boundary, the region on the workpiece carry-in side where the workpiece exchanging portion 33 on the opposite side is scattered is scattered mist. It is necessary to keep it as clean as possible. In particular, since the workpiece changer 33 may also serve as a workpiece cleaning position, it is necessary to prevent mist from entering. In this regard, according to the present invention, the spindle moving mechanism 28 installed on the second diagonal line, as shown in FIG. 5, has the second diagonal line L2 as a boundary in order to keep the workpiece exchange side region WE in a clean atmosphere. The mist exhaust direction side region ME and the workpiece exchange side region WE have a function of isolating from each other.

  In particular, when the workpiece is a large-diameter wafer W, the operation range of the spindle moving mechanism 28 needs to be increased as much as possible because the wafer W must be precisely cut from one end to the other end. Correspondingly, the opening between the blades 25 and 25 of the spindle moving mechanism 28 is also widened.

  On the other hand, in order to prevent the mist from entering the work exchanging portion 33, it is preferable that the front end of the spindle moving mechanism 28 is small. This is because it is necessary to feed clean air in one direction from a space region having a clean atmosphere to an unclean atmosphere in which mist is generated. By supplying clean air in one direction or radially in a state in which the wafer W of the workpiece cutting processing unit 32 is covered from a portion where the front end of the spindle moving mechanism 28 is reduced, the upstream side where the mist is on the workpiece exchanging unit 33 side. Intrusion into the area is prevented.

  In this way, when supplying the air flow in one direction or radially, a mechanism for supplying clean air from the work replacement unit 33 side may be provided. Even if a mechanism for supplying clean air to the workpiece replacement unit 33 is not provided, if the apparatus is placed in a clean room and the mist atmosphere in the apparatus is exhausted from the exhaust port 37 of the apparatus with a sufficient differential pressure, the opening at the front of the apparatus A clean atmosphere is sucked in order from the unit 23, and air can flow naturally in the apparatus.

  Further, in the spindle moving mechanism 28, if the guide rail 29 itself for moving the spindle 30 has a sufficient width, the wafer exchange position that needs to be kept in a clean atmosphere and the cutting water jumps and the cutting waste is discharged. It is possible to shield the exhaust / drain area. This shielding effect may function sufficiently only by the presence of the spindle moving mechanism 28, but in addition to the spindle moving mechanism 28, a shielding plate exemplified by reference numeral SP in FIG. The function of separation may be enhanced.

  The width and height of the shielding plate SP depend on the differential pressure for exhausting the cutting mist, and thus are not generally quantitatively determined. However, a structure that is partially separated as a region is sufficient. It will function. Further, it is preferable that the width from the spindle moving mechanism 28 to the exhaust port 37 and the drain port 35 is gradually narrowed so that the housing is converged while the wafer exchange position where the workpiece exchange unit 33 is located is also narrow. . In addition, the code | symbol 51 in FIG. 5 is a mist shower nozzle.

  The wafer exchange position needs to prevent the mist from the exhaust port 37 from convection and turning to the front side of the apparatus while making the cleanest environment. If the wafer exchange position is set wide, the cutting mist may circulate, circulate along the wall in front of the apparatus, and may contaminate the apparatus wall surface corresponding to the wafer exchange position.

  In the wafer exchange position from the spindle moving mechanism 28, the narrow air state is formed, so that clean air supplied to the wafer exchange position is dispersed in the spindle moving mechanism 28. By doing so, the cutting water splashed from the work processing position in the apparatus to the back part of the apparatus is efficiently discharged from the back part of the apparatus, while being simply shielded by the spindle moving mechanism 28 and further from there. The cutting mist that reaches the wafer replacement position is almost nonexistent by making the state narrower toward the wafer replacement position.

  As a result, a clean area and a dirty area can be separated in the apparatus. Contamination at the work exchange position due to convection of cutting mist hardly occurs. Furthermore, when separating such a clean area and a dirty area, a mist shower mechanism (mist shower nozzle 51) is provided between the workpiece replacement position and the cutting position.

  When the wafer W moves from the workpiece cutting position to the wafer exchange position, the wafer can be physically transported without difficulty by passing through the mist shower portion, while the cutting mist does not enter the wafer exchange position. It is possible to effectively block the atmosphere. When combined with the shielding effect of the spindle moving mechanism 28, further region separation can be performed.

  In this embodiment, the guide rail 29, the spindle moving mechanism 28, and the spindles 30 and 30 themselves are in the region on the workpiece changing unit 33 side that needs to be maintained in a clean atmosphere, and the maintenance position where the cutting water and its mist are scattered. It has the effect | action which shields partially.

  Also, as shown in FIG. 4, the drainage channel lower end side of the drainage mechanism 36 according to the present invention has a triangular corner portion 45 in a plan view. In the end material, the apex angle portion of the triangular corner portion 45 is automatically collected. Therefore, unlike the conventional example, there is no need to collect and collect after processing.

  As described above, the dicing apparatus according to the embodiment of the present invention efficiently drains the cutting water and exhausts the mist, and partially includes the atmosphere area that exhausts the mist and the atmosphere area that keeps the wafer W clean. By isolating and supplying the clean air to the guide rail 29 or the like on the upstream side of the isolated position, the entire interior of the dicing apparatus 21 can be kept even cleaner.

  Here, in the conventional example, as shown in FIG. 14, the cutting water directly injected from the blade usually has a relatively broad probability distribution as shown in FIG. However, if the wall is positioned at a right angle to it, the injected cutting water will rebound further, and the cutting water will spread more. When the sprayed cutting water spreads, the surface area increases and the drying becomes easier. As a result, the cutting water containing cutting waste on one surface is dried, and the cutting waste remains and is contaminated.

  In that respect, as shown in FIG. 6B, the present invention converges the apparatus housing on the extension line in the blade rotation direction (the width gradually decreases), so that the scattered cutting water is naturally discharged into the drain port 35. Get together.

For example, as shown in FIG. 4D, when formed in a parabolic shape (Y = X ² ), all of the cutting water scattered in parallel to this axis is collected at the origin.

  Regarding the generation of mist, when cutting water enters between the blades 25, 25 and the workpiece (workpiece) at the cutting point, it becomes a small mist, and when the water droplets scatter and bounce off the wall of the body where the width is far away, May become a mist. In particular, when bounces off the body, a large amount of mist is generated, and the mist rises at once. When the mist that has risen does not exhaust, the mist travels through the upper part of the apparatus and enters the front of the apparatus, and may also pass through a small gap and enter the electrical components. If mist enters the electrical equipment-related parts in the device, rusting or short-circuiting may occur. Therefore, it is required to collect mist efficiently and exhaust the collected mist efficiently.

  According to the present invention, the cutting waste scattered from the cutting part by the blades 25, 25 is efficiently collected at one place on the inner wall surface of the rectangular housing 22. When the collected cutting water bounces back and scatters, the mist rises and this mist rises rapidly from the collected part. However, since the exhaust port 37 is provided at that location, it is possible to efficiently suck up the mist. Since the mist increases in negative pressure as it approaches the exhaust port 37, mist convection does not occur in the apparatus. That is, it is configured such that all mists scattered at the cutting portion can be collected at one place.

  Further, the spindle moving mechanism 28 serves to separate the wafer exchange position from the cutting water waste liquid outlet and the cutting mist exhaust position. That is, by properly setting the width dimension of the spindle moving mechanism 28 and its guide rail 29, the clean area at the front of the apparatus and the waste liquid / exhaust part at the rear corner of the apparatus are separated from each other. Due to the blocking effect, the device is defined with an appropriate differential pressure between the front side and the back side of the apparatus.

  In the above configuration, the spindle moving mechanism 28 is provided on a substantially diagonal line of the rectangular housing 22, and the work table feeding mechanism 26 is perpendicular to the spindle moving mechanism 26. This corresponds to the case where there is a workpiece replacement position by and there is a drain port 35 and a mist exhaust port 37 on the back side. However, in other words, in other words, the structure does not have to be a rectangular enclosure, and the following functions and effects can be obtained if the following features are provided. That is, as a configuration, a portion from the workpiece replacement position to the spindle moving mechanism 28 is configured to gradually widen the casing width of the apparatus. According to such a configuration, the following effects can be exhibited.

  As described above, it is possible to introduce clean air from a local portion at the workpiece replacement position and introduce it into the wafer processing portion by the workpiece cutting processing portion 32 while appropriately dispersing it. As a result, a one-way radial air flow is formed, and a clean environment is constantly maintained. Since the intake of air is at a local workpiece exchange position, it becomes difficult for the cutting mist that is simultaneously wound during the cutting of the wafer to enter the workpiece exchange position. This is because the flow rate of clean air taken in from the workpiece replacement position is the fastest, so that the cutting mist hardly flows back.

  Further, in addition to the configuration in which the casing width of the apparatus is widened from the work replacement position to the spindle moving mechanism 28, spindle maintenance positions are provided on the left and right parts off the X axis for moving the work. By doing so, the following effects are produced.

  When exchanging the left and right blades 25, 25 facing each other, when performing maintenance, or when measuring accuracy, the blades 25, 25 may be shifted from the position of the workpiece replacement unit 33 to the left or right. 7A and 7B show the details. For example, when exchanging and adjusting the B blade on the right side as viewed from the workpiece exchange position, or when polishing the end face of the B spindle, first, as shown in FIG. To the left side, that is, the spindle maintenance position 1 (SP · MT1). Remove the wall panel at the spindle maintenance position 1 (SP / MT1) on the left side of the workpiece replacement position.

  When the B blade is removed and the end surface of the B spindle is dirty, the B spindle is viewed from the left side of the spindle maintenance position 1 (SP • MT1) in the 45 ° right direction shown in (1). Is polished to a mirror surface. When measuring / adjusting the concentricity of the B blade with respect to the B spindle and the roundness of the B blade after mounting the B blade, 45 degrees to the right shown in (1) from the left side of the spindle maintenance position 1 (SP / MT1). Look at the B spindle in the direction and measure and adjust.

  Next, when the B blade is mounted without biting foreign matter with respect to the B spindle and the B blade is straight with respect to the workpiece, the right side of the spindle maintenance position 1 (SP / MT1) is measured and adjusted. (2), the B spindle is viewed in the 45 degree direction to the left, and measurement and adjustment may be performed. By doing so, it is possible to visually recognize the case where the B blade is swinging with respect to the workpiece, so that the adjustment becomes very easy.

  In this way, in the measurement and adjustment of the spindle and blade, for maintenance that must be accessed from the front and vertical sides of the blade, such as coaxiality, roundness, and straightness, respectively, conventionally, The two sides of the device, front and side, had to be adjusted back and forth, but as in the present invention, one maintenance side, i.e. the same spindle maintenance position 1 (SP / MT1) location Therefore, the maintenance adjustment of the spindle and the blade becomes very easy because it can be performed while confirming in the direction of 45 degrees to the right and 45 degrees to the left.

  When measuring / adjusting the left A blade as viewed from the workpiece replacement position, as shown in FIG. 7 (b), both spindles A and B are symmetrically moved to the spindle maintenance position 2 (SP / MT2). Can be easily confirmed by adjusting the same as described above from the spindle maintenance position 2 (SP · MT2). As described above, it is easy to access the blade from the outside of the apparatus, and it is also easy to perform two cases of viewing the blade from the front and from the side. When the blade is viewed from the front, it is necessary for polishing the concentricity of the blade and the end surface to which the blade is attached, and when the blade is viewed from the side, it is necessary for confirming the vibration at the time of blade attachment.

  Next, assuming that the partial depth of the spindle moving mechanism 28 is a certain width, in order to improve the drainage / exhaust efficiency of the cutting water and cutting mist, the width of the casing of the apparatus is gradually reduced. Good. By doing so, the following effects can be obtained. Cutting water and cutting mist scattered from a workpiece machining portion where the spindle moving mechanism 28 and the work table feeding mechanism 26 cross each other can be efficiently eliminated because the casing width is narrowed to increase the flow velocity. Since the exhaust speed is the fastest at the portion where the housing width of the cutting mist is narrow, it is possible to prevent the cutting mist from convection inside the apparatus. The above effects can be obtained.

  In other words, the following configuration is obtained. The spindle moving mechanism 28 is divided into a clean zone in front of the spindle moving mechanism 28 and a dirty zone in front of the spindle moving mechanism 28. In the front clean zone, the position of the workpiece changer 33 to the spindle moving mechanism 28 is separated. The housing width of the device gradually increases, and the width of the inner wall inside the device also increases. The spindle moving mechanism 28 has the largest width. In the dirty zone at the rear part, the casing width of the apparatus is gradually narrowed from the spindle moving mechanism 28 to the rear drain / exhaust mechanisms 36, 38 on the opposite side to the workpiece replacement position. The casing width is formed so as to converge at the rear drain / exhaust mechanisms 36 and 38.

  In other words, the front part of the apparatus on the workpiece exchange position side is a clean zone, and a maintenance zone is also adjacent. On the other hand, the rear part across the spindle moving mechanism 28 becomes a dirty zone where workpiece sludge, cutting water, cutting mist, and the like are scattered by dicing. Cutting water or the like supplied to the blade is supplied from the clean zone side to the dirty zone side, and the water supply also forms a one-way flow. As a result, all the water is collected and drained and exhausted by the drainage / exhaust mechanisms 36 and 38 in the dirty zone.

  In addition, a mechanism for supplying water from the clean zone side through the wall surface may also be formed in the sludge near the oil pan 34. In addition to drainage as well as exhaust, an opening for sucking clean air is provided in the vicinity of the work changer 33 and passes through the groove where the cutting water of the oil pan 34 flows and the vicinity of the wafer surface. It is set as the structure exhausted. As a result, not only the flow of water but also the flow of gas flows in one-way from the workpiece exchange position to the exhaust port 37 together with water and air flows, and relatively clean air is continuously supplied continuously at the wafer cutting position. An atmosphere can be formed.

  As a result, sludge blown off by the wafer cutting process hits the wall and bounces off, and does not get on the wafer W being cut and enter between the blades 25 and 25 and the wafer W. Also, the cutting water scatters and the cutting mist hits the wall and spreads in the apparatus as it is, spreading even to the cutting part, and high-humidity mist is generated at the bearing portion of the spindle 30 that rotates at high speed. This prevents the life of the spindle 30 from being shortened. The wafer W is processed at the boundary between the clean zone and the dirty zone. Cutting sludge and cutting water are blown to the dirty zone.

  In order to divide these areas, the workpiece exchange position, workpiece machining position, and cutting water drain / exhaust position are arranged in a substantially straight line, and the workpiece exchange position and cutting water drain / exhaust position are separated from the workpiece machining position. However, what is necessary is just to be arrange | positioned at the substantially other side. Strictly speaking, it does not have to be a rectangular enclosure. For example, the corner portion may be chamfered, and the casing may be a substantially octagonal or substantially heptagonal device. As a result, the effects described above do not change significantly.

  When the casing is substantially octagonal, the configuration of each part in the casing can be shown as follows. That is, the spindle moving mechanism 28 and the work table feeding mechanism 26 each have a certain width and are arranged orthogonally. Two sides of the octagon are formed at both end faces formed by the width portion of the spindle moving mechanism 28. One end is formed by the end surface formed by the width portion of the work table feeding mechanism 26, and one end is formed by the end surface formed by the width of the drainage / exhaust mechanisms 36 and 38. The remaining four sides are configured to connect these sides. Two sides of the octagon may correspond to the spindle maintenance positions SP · MT1 and SP · MT2. In the case of a heptagon, the drainage / exhaust mechanisms 36 and 38 are configured not as sides but as apexes in order to collect cutting water at the center, and the rest may be the same as in the octagon.

  The following application examples are also conceivable. For example, in order to improve the maintainability at the spindle 30 portion, as shown in FIG. 8 (a) → (b), the work changer 33 in the apparatus is notched on both sides of the work changer 33. Good. Thereby, as described above, when maintaining the spindle 30 and the blade 25 on one side, both the vertical direction and the front direction with respect to the blade 25 can be confirmed from the same surface of the apparatus. For adjustment of one blade as in the past, the blade adjustment can be easily performed by moving back and forth between the front and side of the apparatus and eliminating the confirmation work.

  Furthermore, in the work changer 33, the both sides of the work changer 33 are notched and gradually set from the work changer 33 to the spindle moving mechanism 28, so that clean air taken in from the work changer 33 spreads radially, Since it goes to the spindle moving mechanism 28, the air flow in the apparatus does not stay. Further, the mist generated by the spindle moving mechanism 28 at the time of cutting the workpiece does not flow back or convect to reach the workpiece changer 33, and the workpiece changer 33 can keep a clean environment constantly. .

  Further, in order to increase the efficiency of exhausting waste water or mist generated during wafer cutting processing, as shown in FIGS. 9A to 9B, the exhaust mechanism 38 or the drain mechanism 36 in the apparatus uses the The exhaust mechanism 38 or the drainage mechanism 36 may be cut out on both sides. As a result, as described above, cutting water or mist jumped by the wafer cutting process hits the narrow wall by converging from both sides and easily collects in the exhaust mechanism 38, and the drainage also converges in the same manner. It becomes easy to gather in the drainage mechanism 36 by hitting the narrowed inner wall.

  8 (b) and 9 (b), the apparatus housing is formed as shown by a broken line, and the wall surface inside the apparatus is separated from the spindle moving mechanism 28 to the drain / exhaust mechanisms 36 and 38 as shown in FIG. It may be configured to converge and narrow. Although the area occupied by the apparatus increases, the substantial operational effect does not change in terms of drainage efficiency and exhaust efficiency.

  Next, in terms of drainage efficiency, in order to further increase drainage efficiency, it is more effective to take the configuration shown in FIGS. 10 (a), (b), and (c). FIG. 4B is a cross-sectional view taken along line YY in FIG. 4A, and FIG. 4C is a partially enlarged view partially showing FIG. As shown in FIG. 6B, the drainage mechanism 36 is inclined along the work table feed mechanism 26 so that the drainage mechanism 36 side is lowered. The work exchanging portion 33 is at the highest position, and is inclined from the spindle moving mechanism 28 to the drainage mechanism 36, and the drainage mechanism 36 is at the lowest position. The workpiece is loaded at the workpiece exchanging section 33, and the workpiece is cut at a position where it intersects with the spindle moving mechanism. After the workpiece cutting process is completed, the workpiece is returned to the workpiece exchanging unit 33.

  On the way from the spindle moving mechanism 28 to the workpiece replacement position, there is a curtain brush 39. Further, a mist shower nozzle (multiple shower nozzle) 51 is present at a workpiece replacement position than the curtain brush 39. The following two effects are provided by the curtain brush 39.

  The first function and effect are for environmentally shielding the part of the spindle moving mechanism 28 for machining the workpiece and the workpiece exchange position where the workpiece exchange unit 33 is located by the curtain brush 39. In particular, when the workpiece is cut, a large amount of cutting water is discharged to the drainage mechanism 36 and collected. However, a part of the mist rises at the cutting portion and may convect to the workpiece replacement position on the front surface of the apparatus depending on the case. If the curtain brush 39 exists between the spindle moving mechanism 28 and the workpiece exchange position, the curtain brush 39 shields the cutting water mist without coming to the workpiece exchange position, and the workpiece machining position and the workpiece exchange position are separated from each other. Will be separated.

  Here, in the case where the curtain brush 39 is provided, in the configuration shown in FIG. 9B and the like, the width of the apparatus housing is changed from the curtain brush 39 and the spindle moving mechanism 28 to the drain / exhaust mechanism 36, By setting the width narrower as it approaches 38, the part of the mist, which is shielded from scattering to the workpiece replacement position by the curtain brush 39, is also concentrated in the exhaust mechanism 38 while increasing the flow velocity. It becomes possible to exhaust efficiently.

  As a second function and effect, chips and sludge are accumulated on a workpiece that has been cut by the spindle moving mechanism 28. There is an effect that the brush of the curtain brush 39 can remove such accumulated chips. However, if the brush tip is in contact with the wafer (work) surface, the wafer surface may be damaged. In particular, if the sludge is rubbed with a brush while it is on the wafer, the surface of the wafer is scratched by the sludge and the wafer is damaged.

  In order to avoid such a situation, the shower is dropped on the wafer by the mist shower nozzle 51 from the upstream side of the curtain brush 39, that is, near the workpiece exchange position, and along the workpiece table 24 on which the workpiece is placed, the workpiece surface, that is, the wafer surface. The wafer is returned to the workpiece replacement position through the bottom of the curtain brush 39 while forming a water flow along the surface. By doing so, the tip of the curtain brush 39 comes into contact via water, so that the sludge on the wafer does not rub the wafer surface, and at the same time the curtain brush 39 dispels the sludge, the sludge rides on the water flow. It will be washed away. As a result, chips and sludge can be effectively removed without damaging the wafer surface.

  Here, the shower from the mist shower nozzle 51 is supplied along the wafer from the upstream side of the curtain brush 39 or along the work table 24, but water is supplied to the curtain brush 39 from the upper side of the curtain brush 39. It may be supplied while being included. In this case, strictly speaking, on the wafer, the water does not flow along the wafer but is washed away with the water contained in the curtain brush 39. However, when the curtain brush 39 scrapes sludge, the wafer surface is rubbed directly. The same effect is obtained in that the sludge is removed through water.

  In some cases, it is not necessary to tilt the mist shower nozzle 51 from the workpiece replacement position to the drainage mechanism 36 by appropriately tilting the mist shower nozzle 51 so that water flows to the drainage mechanism 36 side. However, in order to remove the sludge on the wafer surface, there are cases where the amount of water increases and the water rebounds to some extent on the wafer surface, and the sludge cannot be washed away effectively.

  The wafer is tilted. Here, the system is uniformly tilted from the workpiece replacement position to the drainage mechanism 36, and water is supplied along the wafer from the upstream of the curtain brush 39 to the sludge attached to the wafer surface. Even with a small amount of water, it effectively moves and slides down while covering the wafer surface. In this state, by using the curtain brush 39 to wash away, it is possible to skillfully form a situation where the curtain brush 39 is in light contact with the wafer surface in the flow, and sludge can be efficiently removed. .

  As a result, even with a small amount of water, as shown in an enlarged view in FIG. 10 (c), the water spreads on the wafer due to the interfacial tension on the wafer surface, and is effective by sliding down on the wafer due to gravity. Covers the wafer surface and slides down. Further, by covering the wafer surface with such water, it becomes possible to effectively wash away the sludge swept out by the curtain brush 39.

  As a material of the curtain brush 39, nylon fiber or the like may be used. Moreover, since the workpiece after cutting may be charged with static electricity, carbon fiber or the like may be used. In the case of carbon fiber, it is indispensable to remove one end of the wafer to the ground because removing the sludge on the wafer and removing the surface of the wafer for an additional purpose.

  As the nylon fiber, for example, a nylon brush having a diameter of 0.1 mm or 0.2 mm and finely bundled in a straight line on a curtain so as to cross the work table feeding mechanism 26 is preferably used. The length of the nylon brush may be about 100 mm, and it is desirable that the workpiece automatically slides to the workpiece replacement position while the workpiece (wafer) surface is in contact with the tip of the brush on the work table feeding mechanism 26. .

  Pure water is supplied from the workpiece exchange position between the curtain brushes 39, and a mist shower nozzle 51 is installed at a location that crosses the workpieces. Supply. For example, in the case of a 300 mm wafer, the flow rate of water used is about 2 L / min. The entire surface of the wafer can be covered by this amount of water supply, and a water film is formed on the wafer surface by the water supply.

  Further, by tilting the work table feeding mechanism 26, the distance in the planar shape can be substantially shortened compared to the horizontal plane. Thereby, even if it is the distance of the same worktable feed mechanism 26, if it inclines up and down and inclines, it can attain space saving. As the angle at which the work table feed mechanism 26 is inclined, if it is desired to move the water gently, it is effective to incline about 3 ° to 5 °. It may be set at a steep angle such as 60 °.

  The present invention can be applied to any dicing apparatus with a drainage / exhaust mechanism in which a spindle moving mechanism and a work table feeding mechanism are disposed orthogonal to each other.

DESCRIPTION OF SYMBOLS 21 Dicing apparatus 22 Rectangular housing 23 Opening part 24 Worktable 25 Blade 26 Worktable feed mechanism 28 Spindle movement mechanism 29 Guide rail 30 Spindle 32 Workpiece cutting part 33 Work exchange part 34 Oil pan 35 Drainage port 36 Drainage mechanism 37 Exhaust port 38 Exhaust mechanism 39 Curtain brush 43 Water flow guide member 44 Work piece material 45 Corner portion 51 Mist shower nozzle

Claims (7)

A work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and a spindle on which the blade is rotatably mounted A dicing apparatus with a drainage / exhaust mechanism comprising a spindle movement mechanism that movably supports the spindle, wherein the spindle movement mechanism and the work table feed mechanism are disposed orthogonal to each other.
A drainage mechanism having a drainage port is disposed on a substantially extended line in the discharge direction of the cutting water scattered along the blade when the workpiece is cut, and the drainage mechanism has a width as it approaches the drainage port from the blade. A dicing apparatus with a drain / exhaust mechanism, characterized in that the inner wall of the apparatus becomes narrow . A work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and a spindle on which the blade is rotatably mounted A dicing apparatus with a drainage / exhaust mechanism comprising a spindle movement mechanism that movably supports the spindle, wherein the spindle movement mechanism and the work table feed mechanism are disposed orthogonal to each other.
An exhaust mechanism having an exhaust port is disposed on a substantially extended line in the discharge direction of cutting water and mist that scatters along the blade when the work is cut, and the exhaust mechanism approaches the exhaust port from the blade. A dicing apparatus with a drainage / exhaust mechanism, characterized in that the apparatus has an inner wall that becomes narrower in width . A work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and a spindle on which the blade is rotatably mounted A dicing apparatus with a drainage / exhaust mechanism comprising a spindle movement mechanism that movably supports the spindle, wherein the spindle movement mechanism and the work table feed mechanism are disposed orthogonal to each other.
The spindle moving mechanism and the work table moving mechanism are disposed on two diagonal lines of a rectangular housing of the dicing device formed in a square shape in plan view, and discharge of cutting water and mist scattered along the blade when the work is cut. On the approximate extension of the direction,
A drainage mechanism having a drain port and an exhaust mechanism having an exhaust port are disposed, the drainage mechanism and the exhaust mechanism have a drainage channel that becomes narrower as they approach the drainage port, and the exhaust mechanism Has an exhaust passage that becomes narrower as it approaches the exhaust port, and is provided with a workpiece replacement part on the diagonal line on which the exhaust mechanism is disposed and on the opposite side of the drainage mechanism. Dicing device with drainage and exhaust mechanism. A work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and a spindle on which the blade is rotatably mounted A dicing apparatus with a drainage / exhaust mechanism comprising a spindle movement mechanism that movably supports the spindle, wherein the spindle movement mechanism and the work table feed mechanism are disposed orthogonal to each other.
The spindle moving mechanism and the work table moving mechanism are disposed on two diagonal lines of a rectangular housing of the dicing device formed in a square shape in plan view, and discharge of cutting water and mist scattered along the blade when the work is cut. On the approximate extension of the direction,
A drainage mechanism having a drain port and an exhaust mechanism having an exhaust port are disposed, the drainage mechanism and the exhaust mechanism have a drainage channel that becomes narrower as they approach the drainage port, and the exhaust mechanism Has an exhaust passage that becomes narrower as it approaches the exhaust port, and
An oil pan that receives cutting water flowing out from the workpiece is provided so as to surround the work table feeding mechanism, and the oil pan is formed wide at the workpiece cutting processing position and connected to the oil pan. A dicing apparatus with a drainage exhaust mechanism, wherein the dicing apparatus is formed so as to become narrower toward the drainage mechanism. A work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and a spindle on which the blade is rotatably mounted A spindle moving mechanism that movably supports the spindle, and the spindle moving mechanism and the work table feed mechanism are arranged orthogonal to each other,
The spindle moving mechanism and the work table feeding mechanism are disposed on two diagonal lines of a rectangular housing of the dicing device formed in a square shape in plan view, and cutting water and mist that scatter along the blade when the work is cut. An environmental control method of a dicing apparatus with a drainage exhaust mechanism in which a drainage mechanism having a drainage port and an exhaustion mechanism having an exhaust port are arranged on a substantially extended battle in the discharge direction of
The spindle movement mechanism isolates the space area where the workpiece replacement unit is installed from the space area where the mist scatters, and when cutting the workpiece with the blade, the cutting water and mist scattered along the rotation of the blade, An environmental control method for a dicing apparatus with a drainage / exhaust mechanism, wherein the cutting water and the mist are discharged while converging toward the drainage port and the exhaust port after directly flowing into the drainage mechanism and the exhaust mechanism. A work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and a spindle on which the blade is rotatably mounted In a dicing apparatus comprising a spindle moving mechanism that movably supports the spindle,
The spindle moving mechanism and the work table feed mechanism are disposed orthogonally to each other, and the work machining position for machining the work is substantially at the center of the apparatus, and the work exchange position for the work is a position for replacing the work. There is a drainage mechanism that is at one end of the table feed mechanism and is substantially extended in the discharge direction of the cutting water that scatters along the blade when the workpiece is cut, and collects drainage near the multi-end side of the worktable feed mechanism. A curtain brush disposed between the workpiece exchange position and the workpiece machining position across the workpiece table feed mechanism, and the curtain brush moves the workpiece from the workpiece machining position to the workpiece exchange position. As the apparatus comes in contact with the surface and approaches the spindle moving mechanism from the workpiece replacement position, the device housing becomes wider. With drainage exhaust system with a dicing apparatus characterized by having a device enclosure comprising a narrow along with approaching the drainage mechanism from the spindle moving mechanism. A work table on which a work is placed, a blade for cutting the work, a work table feed mechanism for moving the work on the work table relative to the blade, and a spindle on which the blade is rotatably mounted In a dicing apparatus comprising a spindle moving mechanism that movably supports the spindle,
The spindle moving mechanism and the work table feed mechanism are disposed orthogonally to each other, and the work machining position for machining the work is substantially at the center of the apparatus, and the work exchange position for the work is a position for replacing the work. It is located at one end of the table feed mechanism and is substantially on a line extending in the discharge direction of the cutting water that scatters along the blade when the workpiece is cut, and crosses the work table feed mechanism and the workpiece exchange position and the workpiece machining position. A curtain brush is provided between the workpiece machining position and the workpiece brush when the workpiece moves from the workpiece machining position to the workpiece exchange position. As the body widens, the curtain brush and the spine cross the work table feeding mechanism. Wastewater pumping mechanism with a dicing apparatus characterized by the dollar moving mechanism has a device enclosure comprising a width narrower along with approaching the drainage mechanism.

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