CN101870141B - Cutting device, cutting device having dewatering exhaust mechanism and environment control method - Google Patents
Cutting device, cutting device having dewatering exhaust mechanism and environment control method Download PDFInfo
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- CN101870141B CN101870141B CN201010158757.5A CN201010158757A CN101870141B CN 101870141 B CN101870141 B CN 101870141B CN 201010158757 A CN201010158757 A CN 201010158757A CN 101870141 B CN101870141 B CN 101870141B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 338
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- 238000012545 processing Methods 0.000 claims description 59
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- 238000009434 installation Methods 0.000 claims description 13
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- 238000004140 cleaning Methods 0.000 description 37
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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Abstract
The invention provides a cutting device, a cutting device having a dewatering exhaust mechanism and an environment control method. The cutting device can prevent cutting strips from accumulating, promote the exhausting efficiency, easily wash and maintain a workpiece exchanging part clean. The device comprises a workpiece table for loading the workpiece, a blade for cutting the workpiece, a workpiece table conveying mechanism for moving the workpiece on the workpiece table relative to the blade, a spindle rotatably assembled on the blade and a spindle moving mechanism for moveably supporting the spindle, wherein the spindle moving mechanism and the workpiece table conveying mechanism are mutually vertical to each other; a dewatering mechanism having a water outlet is arranged; when the workpiece is cut, the water outlet is on a prolonging line on the dewatering direction of the cutting water scattered from the blade; the dewatering mechanism is provided with a dewatering channel which is narrower and narrower by closing to the water outlet; and the cutting water increases the flow velocity while discharges the water.
Description
Technical field
The present invention relates to cutter sweep and the environment control method thereof of cutter sweep and band dewatering exhaust mechanism, the present invention be more particularly directed to the cutting workpiece of semiconductor wafer etc. be divided into the cutter sweep of small pieces and be with cutter sweep and the environment control method thereof of dewatering exhaust mechanism.
Background technology
In the past, being divided into chip to be cut off respectively by the workpiece of semiconductor wafer, electronic part material etc., adopting cutter sweep.Cutter sweep comprises the work stage of loading workpiece; Cut off the blade of this workpiece; Make the work stage conveyer of the relative insert of this workpiece and relative movement; The main shaft of insert is rotatably installed; Support the main axle moving mechanism of this main shaft in a movable manner.
As the representative of cutter sweep former example as shown in figure 11 (with reference to Japanese Unexamined Patent Publication 2002-280328 document).As shown in the drawing, at the rear portion, right side of quadra (main part of cutter sweep 10) 1, arrange and load turnover portion (load port) 2, and workpiece cleaning portion 3 is set at the right front of this quadra 1.
In addition, workpiece (wafer) is set at the left side pars intermedia of quadra 1 and cuts off processing department 4, and at the right side pars intermedia of quadra 1, work stage 5 is set, thus, the operating personnel M being positioned at the front face side of cutter sweep is formed according to contacting the mode of loading turnover portion 2 and workpiece cleaning portion 3.In addition, due to the fore-and-aft direction pars intermedia at quadra 1, work stage conveyer 6 is set, therefore workpiece W travels at the fore-and-aft direction pars intermedia of the quadra 1 away from operating personnel M in left-right direction.
In addition, cut off the blade 7 of workpiece W, be rotatably installed on main shaft 8.And, in main axle moving mechanism 9, the guide rail (scheming not shown) of supporting spindle 8 is set.
Add man-hour carrying out cut-out by cutter sweep to workpiece W, cutting water is supplied by cutting the machining center of (operating) water nozzle (scheming not shown) to blade 7 and workpiece W, thereafter, the cutting water of supply enters the food tray 11 arranged around work stage 5 as waste liquor stream.And, flow into the cutting water of food tray 11, from the discharge outlet 12 in downstream being formed at food tray 11 through drainpipe 13 draining to outside.Again, arrange support plate in food tray 11, this support plate loads wrinkle protective cover, the driving mechanism of unshowned X-axis guide rail etc. in wrinkle protective cover coverage diagram.
As the cutter sweep of former band drainage mechanism, known has Japanese Unexamined Patent Publication 2006-247760 (patent document 1), Japanese Unexamined Patent Publication 2002-103177 (patent document 2), Japanese Unexamined Patent Publication 2003-124150 (patent document 3), Japanese Patent 2694931 (patent document 4), Japanese Unexamined Patent Publication 2002-280328 (patent document 5).
Such as, in the invention of patent document 1, disperse in the inner face of protective cover in order to prevent because cut water, and make protective cover devitrification, hydrophilic film is formed at protective cover inner face, by the contact angle with water below 30 degree, make cutting shipwreck to form water droplet, so easily flow down cutting water from the surface of protective cover.
Again, in the invention of patent document 2, the water cover stopping and cut water is set, temporarily store according to the cutting water that this water cover stops, blowoff basin is set, and, the bottom of this blowoff basin is formed at the position lower than the bottom of water cover, further, in blowoff basin, discharge outlet is arranged the position higher than the bottom of above-mentioned water cover.
Further, in the invention of patent document 3, the mist occurred during being cut in processing department by workpiece, is discharged to outside processing department by air.But, now in any facility environment, in order to obtain the exhaust blast be applicable to, be configured to the mode of adjustable capacity for wind.Specifically, be provided with forced exhaust unit and air quantity guiding mechanism, the mist occurred in cutting is discharged to the outside of regulation enclosure space by this forced exhaust unit by air, this air quantity guiding mechanism adjusts the capacity for wind of this forced exhaust unit.
On the one hand, in the invention of patent document 4, arrange mist cover, this mist cover prevents and cuts water simultaneously, and mist towards periphery one side disperses.And the front of blade is installed and is prevented mist to disperse cover.
Again, in the invention of patent document 5, with following formation.In order to when not increasing ground space, guarantee safe configuration.Have in the rear side of cutter sweep and load turnover portion, the processing department cutting off wafer is configured in the left side of cutter sweep, and workbench is configured in the right side of cutter sweep, operating personnel can confirm to load turnover portion and wafer washing portion.
Prior art document
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2006-247760
Patent document 2: Japanese Unexamined Patent Publication 2002-103177
Patent document 3: Japanese Unexamined Patent Publication 2003-124150
Patent document 4: Japanese Patent 2694931
Patent document 5: Japanese Unexamined Patent Publication 2002-280328
Summary of the invention
Invention described in above-mentioned patent document 1-5 has following problem points.First, in the invention described in patent document 1, for the cutting direction of the workpiece based on blade, the wall of the quadra of cutter sweep is in the occasion being formed as right angle or basic right angle, cut the above-mentioned quadra of water slug or the wall portion suitable with quadra, the cutting water reflected back after impacting is at random in surrounding (with reference to Figure 14).From the cutting water that blade disperses, usually disperse at most in blade direction of rotation along on long line.Leave to horizontal along long line with from this, the cutting water dispersed reduces.These, as shown in Figure 14, its distribution of dispersing, in the probability distribution centered by the direction of rotation extended line of blade.The distance leaving blade is far away, and the distance of dispersing is more in wide region.Such as, even if form hydrophilic film on protective cover, cutting water at random is during slowly flowing down, and it is almost dried.
Its result, according to cutting swarf contained in cutting water, the wall polluting of protective cover, the part of pollution has the necessity of regularly carrying out cleaning.Contamination phenomenon so, is not limited only to the inwall of protective cover, and near food tray, discharge outlet too, cut hydropexic part and produce the moisture drying cutting water, cutting swarf is piled up.
Again, at random in the cutting water of surrounding, because do not rinsed by the cutting water dispersed next time, result, cutting hydropexis at random is in one side, slowly drying around, and cutting swarf is stacked.Therefore, the inboard portion of the cutter sweep that cutting swarf is piled up, must rinse with the carrying out that washings are meticulous.
Again, in the invention of patent document 2, water cover (or food tray) correspondence covers the shape of the wrinkle protective cover of chuck table conveyer mechanism, is formed as roughly rectangle, and the drain outlet portion of drainage mechanism is divided and is formed near rectangular basic summit.According to this formation, even if the occasion of the formation of how much tilting at water cover, because water covers on its length direction, whole region has identical width dimensions, cuts water and flows out with stable speed from water cover and discharge.
Particularly, at the upstream side of food tray, the amount of the cutting water dispersed is few, if so cut water drying half, cutting swarf easily becomes block.In this occasion, even if cutting swarf does not become block completely, if form the block of size to a certain degree, although this block can from the landing of water cover, now, water cover has in the certain size in the whole region of its length direction, and, because arrange Drainage Division at the terminal part of water cover, temporarily stop so cutting water near Drainage Division.
Its result, cuts cutting swarf contained in water and becomes block in the position left a little from Drainage Division, starts precipitation.And the cutting swarf of precipitation is slowly piled up, become greater to the degree of the flowing water path that can block water cover.Again, cutting swarf is by the pond near the discharge outlet that is deposited in water cover, and this deposit all has necessity of cleaning.
Particularly, discharging the occasion of the water containing the cutting swarf cutting water etc., this water is stagnated in Drainage Division, and therefore, the flow velocity of the water near Drainage Division reduces.Accordingly, the precipitation of cutting swarf or accumulation are carried out, and hinder mobilization.Therefore, cutting swarf is carried out the occasion of draining (seizure) by employing filter etc., if adopt the corresponding minimizing based on the flow velocity of draining, the mode that flow velocity increases naturally, stagnant flow effect near Drainage Division, cutting swarf precipitates, and sediment is slowly piled up.
And then, overstock the drainage channel of the water cover of cutting swarf, have necessity of regularly cleaning., the geomery corresponding to wrinkle protective cover that drainage channel is arranged on the upside of it restricted.Therefore, the width dimensions of the drainage channel of water cover narrows, and spatially easily stores cutting swarf, and the cleaning of drainage channel is very difficult.
The profile of above-mentioned water cover, in order to basically identical with the profile of cutter sweep, if the shape of water cover changes, then the profile of cutter sweep also must change.Again, if the occasion of the heavier machining object of processing ceramic etc., the situation that the cutting swarf (sludge) that pottery etc. can occur in the bottom of water cover is piled up.The cutting swarf of this accumulation blocks drainage channel, and the cutting water used flows into Drainage Division, has the problem of cutting water and overflowing from water cover.
Again, in the invention of patent document 3, during workpiece is cut in processing department occur mist by outside from air to processing department discharge time, in any environment, all require be configured to adjust the capacity for wind guaranteeing suitable exhaust blast, and, have forced exhaust unit, the mist occurred in cutting is discharged to the outside of enclosure space with air by it, and, arrange exhaust outlet, this exhaust outlet is arranged on from blade to the direction of dispersing of cutting water.
According to this structure, the mist cutting water becomes sinuous flow, and occur in the position that cutter sweep inside is detained, the not only downstream of the direction of rotation of blade, upstream side is also full of mist.Its result, the position that mist is detained is easily fixing cuts water, and fixing cutting swarf has the necessity having removing when safeguarding.
Further, the occasion of exhaust outlet is formed at the internal face of cutter sweep, although being collected along the mist atmosphere that long line is formed of this exhaust outlet, be not collected from the mist atmosphere of the above-mentioned exhaust outlet periphery misplaced along long line, but be deposited in the wall of exhaust outlet.Therefore, exhaust outlet periphery mist is rolled into whirlpool, result, along the wall periphery of exhaust outlet, remains mist, causes externally to be attracted with good efficiency by mist from exhaust outlet.
In that case, because fix cutting swarf at the wall remaining mist, as described above, special maintenance is not needed.Again, if cutting swarf is fixed, then solids shortly can peel off from wall, remains near discharge outlet, therefore, has the danger hindering drainage etc.
Then, in the invention of patent document 4, during cutting processing, while cutting water, mist also contacts with processing department, in order to prevent from simultaneously dispersing around mist, mist cover is set, and, prevent mist to disperse cover although the front of blade is arranged, but prevent cover (padded coaming) from preventing from cutting reflecting back of water according to dispersing, again, from the cutting water that fender drips, along the inclined plane of dash receiver, to cutting direction flowing, import to the outside of processing department.
In this occasion, for preventing the above-mentioned fender reflected back from itself remaining cutting water, this cutting water is dry and be detained.Again, from the cutting water that fender drips, because the inclined plane of dash receiver does not have sufficient flow and flow velocity, above-mentioned inclined plane is detained, so dry, be detained cutting swarf.The cutting swarf the be detained cover etc. that must prevent from dispersing takes off and could clean, in order to cutter sweep maintenance is cleaned, and the carrying out of upkeep operation carefulness that must will wash etc.
Again, the invention of patent document 5, main axle moving mechanism and work stage travel mechanism are arranged on the corresponding vertical direction in the direction in length and breadth of the quadra of square cutter sweep.According to this formation, the gap portion between vertical Liang Ge travel mechanism, because there is unnecessary spatial portion, not only makes cutter sweep maximize, and when being vented in cutter sweep, the part that cutter sweep maximizes causes the increase of inner space, and corresponding thereto, exhaust efficiency is low.
Again, the area of space that the mist of cutting water of discharging from cutting workpiece processing department disperses towards periphery and pollutes and workpiece is transported or exchange side area of space between do not carry out atmosphere clearly differentiation, and, define pollution part that mist disperses and be difficult to the structure that good efficiency is exhausted.
Therefore, there is the situation of the mist that disperses in the area of space transporting workpiece side from above-mentioned pollution space field, according to occasion, clean workpiece exchange part can occur maintain the situation that mist disperses also occurs.Therefore, in order to be vented with good efficiency by mist, although consider the equipment set up and externally attracted as laminar flow by mist, in this occasion, equipment cost can increase.
Again, as shown in Figure 12 and Figure 13, have in the whole region of length direction in the food tray (water cover) 13 of one fixed width size, in its downstream, the end material of workpiece etc. are dispersed in the whole region of this downstream width.Therefore, have following necessity, that is, the end material of above-mentioned workpiece etc. temporarily store, and process Final finishing, recycle.This occasion, because dispersed end material etc. must be collected, so upkeep operation also becomes numerous and diverse.In order to be collected by dispersed end material etc., as shown in Figure 11, unnecessary space S must be increased in the outside of known maintenance area E.
Therefore, while preventing the precipitation of cutting swarf, accumulation, improve the expulsion efficiency cutting water and mist, and, for making the washing of food tray etc. easy, clean to maintain workpiece exchange part and produce the technical problem that must solve, the present invention is to solve for the purpose of this problem.
The present invention is in order to reach above-mentioned purpose and motion, and the invention that technical scheme 1 is recorded provides a kind of cutter sweep with dewatering exhaust mechanism, and it comprises: the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, it is characterized in that: be equipped with drainage mechanism, this drainage mechanism has discharge outlet, this discharge outlet is when the cut-out of above-mentioned workpiece, be positioned at the basic along on long line of the discharge direction of the cutting water dispersed along insert, this drainage mechanism has the adjoint device inwall close to above-mentioned discharge outlet narrowed width and even device frame.
According to this formation, when cutting off workpiece with the blade be installed in main axle moving mechanism, the cutting water that the rotation along this blade is dispersed, flows directly into drainage mechanism, and this drainage mechanism is arranged on the basic along on long line of the discharge direction of cutting water.Thereafter, cut water by the adjoint device inwall close to discharge outlet narrowed width and even device frame, naturally narrow towards discharge outlet and flow out.Its result, cuts water and makes flow velocity become large draining.
The invention that technical scheme 2 is recorded, provide a kind of cutter sweep with dewatering exhaust mechanism, it comprises: the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, it is characterized in that: be equipped with exhaust gear, this exhaust gear has exhaust outlet, this exhaust outlet is when the cut-out of above-mentioned workpiece, be positioned at the basic along on long line of the discharge direction of cutting water and the mist dispersed along insert, this exhaust gear has the adjoint device inwall close to above-mentioned exhaust outlet narrowed width and even device frame.
According to this formation, when cutting off workpiece with the blade be installed in main axle moving mechanism, the mist that the rotation along this blade is dispersed, flows directly into exhaust gear, and this exhaust gear is arranged on the basic along on long line of the discharge direction of mist.Thereafter, mist, by the adjoint device inwall close to exhaust outlet narrowed width and even device frame, naturally narrows towards exhaust outlet and flows out.Its result, mist makes flow velocity change be vented smoothly greatly.
The invention that technical scheme 3 is recorded, provide a kind of cutter sweep with dewatering exhaust mechanism, it comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, it is characterized in that: above-mentioned main axle moving mechanism and work stage conveyer are configured in and are formed as on two diagonal of the quadra overlooking the cutter sweep be square, the cutting water dispersed along insert when the cut-out of above-mentioned workpiece and the discharge direction of mist basic along long line being equipped with the mouth drainage mechanism with draining, there is the exhaust gear of exhaust outlet, this drainage mechanism and exhaust gear have with the drainage channel close to above-mentioned discharge outlet narrowed width, and, above-mentioned exhaust gear has with the exhaust channel close to above-mentioned exhaust outlet narrowed width, on the diagonal of the above-mentioned drainage mechanism of configuration, the opposition side of this drainage mechanism arranges workpiece exchange part.
According to this formation, when cutting off workpiece with the blade be installed in main axle moving mechanism, the cutting water dispersed along the rotation of this blade and mist, flow directly into respectively and be arranged at the basic along the drainage mechanism on long line and exhaust gear of its discharge direction, then, cut water by with the drainage channel close to discharge outlet narrowed width, narrow towards discharge outlet and flow out.Flow velocity is made to become large while draining.Thereafter, mist, by with the exhaust channel close to exhaust outlet narrowed width, narrows towards exhaust outlet and flows out, and flow velocity is become and is vented greatly.Further, on the diagonal identical with drainage mechanism, main axle moving mechanism had workpiece exchange part as border in the opposition side of drainage mechanism, so, main axle moving mechanism can play shielding function, the area of space isolation that the area of space that workpiece exchange part is set up by this shielding function disperses from mist.
The invention that technical scheme 4 is recorded, provide a kind of cutter sweep with dewatering exhaust mechanism, it comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, it is characterized in that: above-mentioned main axle moving mechanism and work stage conveyer are configured in and are formed as on two diagonal of the quadra overlooking the cutter sweep be square, the cutting water dispersed along insert when the cut-out of above-mentioned workpiece and the discharge direction of mist basic along long line being equipped with the drainage mechanism with discharge outlet, there is the exhaust gear of exhaust outlet, this drainage mechanism and exhaust gear have with the drainage channel close to above-mentioned exhaust outlet narrowed width, and, above-mentioned exhaust gear has with the exhaust channel close to above-mentioned exhaust outlet narrowed width, further, receive the food tray of the cutting water flowed out from above-mentioned workpiece to arrange around the mode of above-mentioned work stage delivering mechanism, this food tray is formed as width at above-mentioned cutting workpiece Working position and broadens, simultaneously, formed in the mode of narrowed width with the above-mentioned drainage mechanism in the face of being connected with this food tray.
According to this formation, add man-hour, the cutting water dispersed along this blade and mist, flow directly into drainage mechanism and exhaust gear respectively, therefore, prevents at random around.Again, cutting water and mist are made flow velocity become and discharge greatly, so, drainage efficiency and exhaust efficiency can be improved.Particularly, precipitate in the bottom surface of drainage channel even if be contained in the cutting swarf cut in water, be detained, this precipitation, retentate also can wash away according to the cutting water then flowed into, so the removing operation of precipitation, retentate is unwanted.Further, food tray is formed as width at cutting workpiece Working position and broadens, so, from work stage flow out or the cutting water that disperses according to food tray being blocked at wide region.Again, food tray, along with the narrowed width and being formed to drainage mechanism, therefore, cuts water and flow velocity change is flowed out to drainage mechanism greatly.
The invention that technical scheme 5 is recorded, provide a kind of environment control method of the cutter sweep with dewatering exhaust mechanism, it comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, above-mentioned main axle moving mechanism and work stage conveyer are configured in and are formed as on two diagonal of the quadra overlooking the cutter sweep be square, the cutting water dispersed along insert when the cut-out of above-mentioned workpiece and the discharge direction of mist basic along long line being equipped with the drainage mechanism with discharge outlet, there is the exhaust gear of exhaust outlet, it is characterized in that, according to main axle moving mechanism, the area of space being provided with workpiece exchange part is isolated from the area of space of the mist that disperses, when cutting off workpiece with insert, after cutting water rotation along this blade dispersed and mist flow directly into above-mentioned drainage mechanism and exhaust gear respectively, narrow while discharge by cutting water and mist while in the face of above-mentioned discharge outlet and exhaust outlet.
According to the method, cut water and mist and to narrow discharge in the face of above-mentioned discharge outlet and exhaust outlet, now, make flow velocity change greatly while discharge.Again, main axle moving mechanism has played the shielding function of the area of space isolation of dispersing from mist at the area of space arranging workpiece exchange part, so cutting water and mist do not invade the danger in the region arranging workpiece exchange part side.
The invention that technical scheme 6 is recorded, provide a kind of cutter sweep, it comprises: the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, it is characterized in that: above-mentioned main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, there is device frame, this device frame is with in the face of substantially narrowing along long line width, and this is the basic along long line of the discharge direction of the cutting water dispersed along insert when the cut-out of above-mentioned workpiece substantially along long line.
According to this formation, in the work pieces process position that main axle moving mechanism and work stage conveyer report to the leadship after accomplishing a task, when cutting off workpiece with the blade that this main axle moving mechanism installs, along the cutting water that the rotation of this blade is dispersed, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Thereafter, faced by cutting water is adjoint, above-mentioned discharge direction is basic along long line, and device frame narrowed width, thus, flows out towards the discharge outlet in above-mentioned drainage mechanism in the mode narrowed.Its result, cuts water and makes flow velocity become large draining.
The invention that technical scheme 7 is recorded, provide a kind of cutter sweep, it comprises dress: the work stage of carrying workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, it is characterized in that: above-mentioned main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, the workpiece switch exchanging above-mentioned workpiece is positioned at one end of above-mentioned work stage conveyer, there is following apparatus framework, close wherein with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism, device frame width broadens, simultaneously, when cutting off above-mentioned workpiece from above-mentioned main axle moving mechanism, with discharge direction basic along long line of the cutting water dispersed in the face of insert, this device frame narrowed width.
According to this formation, in the work pieces process position that main axle moving mechanism and work stage conveyer report to the leadship after accomplishing a task, when cutting off workpiece with the blade that this main axle moving mechanism installs, along the cutting water that the rotation of this blade is dispersed, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Now, main axle moving mechanism plays the function of the covering of the area of space of workpiece switch side and following area of space being isolated.This area of space is the area of space that the cutting mist occurred together with above-mentioned cutting water and this cutting water disperses.Than the area of space of the workpiece switch side of this main axle moving mechanism front portion as cleaning area, than this main axle moving mechanism rear portion cutting water and cut the area of space that mist disperses and distinguish as unclean region.And in this unclean area side, device frame width is basic along long line with the discharge direction from cutting water, narrowed width, therefore, cut water and come together in drainage mechanism, from this drainage mechanism draining while increase flow velocity.Again, and cut the simultaneous cutting mist of water also while increasing flow velocity, come together in exhaust gear, be vented from this exhaust gear.
The invention that technical scheme 8 is recorded, provide a kind of cutter sweep, it comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, it is characterized in that: above-mentioned main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, the workpiece switch exchanging above-mentioned workpiece is positioned at one end of above-mentioned work stage conveyer, configuration drainage mechanism, on the basic extended line of the discharge direction of the cutting water dispersed along insert when it is positioned at the cut-out of above-mentioned workpiece, drainage collection is carried out near another side of above-mentioned work stage conveyer, there is curtain brush, the above-mentioned work stage conveyer of this curtain brush crosscut, between above-mentioned workpiece switch and above-mentioned work pieces process position, this curtain brush is when workpiece moves from above-mentioned Work treatment installation to above-mentioned workpiece switch, contact surface of the work, there is following apparatus framework, close wherein with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism, device frame width broadens, simultaneously, close with from above-mentioned main axle moving mechanism to above-mentioned drainage mechanism, this device frame narrowed width.
According to this formation, in the work pieces process position that main axle moving mechanism and work stage conveyer report to the leadship after accomplishing a task, when cutting off workpiece with the blade that this main axle moving mechanism installs, along the cutting water that the rotation of this blade is dispersed, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Now, main axle moving mechanism plays the function of the covering of the area of space of workpiece switch side and following area of space being isolated.This area of space is the area of space that the cutting mist occurred together with above-mentioned cutting water and this cutting water disperses.Than the area of space of the workpiece switch side of this main axle moving mechanism front portion as cleaning area, than this main axle moving mechanism rear portion cutting water and cut the area of space that mist disperses and distinguish as unclean region.And in this unclean area side, device frame width is adjoint close to drainage mechanism, narrowed width, therefore, cut water and come together in drainage mechanism, from this drainage mechanism draining while increase flow velocity.Again, cut mist also while increase flow velocity, come together in exhaust gear, be vented from this exhaust gear.Further, in above-mentioned work pieces process position, add man-hour in the cut-out carrying out workpiece, much cut water as above and splash in the drainage mechanism side as unclean region and be discharged., the cutting mist of a part, fly upward at cutting workpiece Working position, according to circumstances, the workpiece switch of side, cleaning area can occur the situation of convection current.To this, because there is curtain brush between work pieces process position and workpiece switch, so this curtain brush plays function as the covering of covering workpiece switch, be used for preventing from coming from dispersing of the cutting mist of an above-mentioned part, by work pieces process position with workpiece switch from being environmentally separated.Again, the contact of curtain brush to move to the surface of the workpiece of workpiece switch from work pieces process position, and thus, even if cutting swarf etc. piled up by the workpiece completed in machining, the cutting swarf of this accumulation etc. are cleared away, surface of the work cleanedization that machining completes.
The technical scheme invention of 9 years, provide a kind of cutter sweep, it comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, it is characterized in that: above-mentioned main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, the workpiece switch exchanging above-mentioned workpiece is positioned at one end of above-mentioned work stage conveyer, configuration drainage mechanism, on the basic extended line of the discharge direction of the cutting water dispersed along insert when it is positioned at the cut-out of above-mentioned workpiece, drainage collection is carried out near another side of above-mentioned work stage conveyer, there is curtain brush, the above-mentioned work stage conveyer of this curtain brush crosscut, between above-mentioned workpiece switch and above-mentioned work pieces process position, this curtain brush is when workpiece moves from above-mentioned Work treatment installation to above-mentioned workpiece switch, contact surface of the work, there is following apparatus framework, close wherein with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism, device frame width broadens, simultaneously, the above-mentioned work stage delivering mechanism of crosscut, with from curtain brush and above-mentioned main axle moving mechanism close to above-mentioned drainage mechanism, this device frame narrowed width.
According to this formation, in the work pieces process position that main axle moving mechanism and work stage conveyer report to the leadship after accomplishing a task, when cutting off workpiece with the blade that this main axle moving mechanism installs, along the cutting water that the rotation of this blade is dispersed, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Now, main axle moving mechanism plays the function of the covering of the area of space of workpiece switch side and following area of space being isolated.This area of space is the area of space that the cutting mist occurred together with above-mentioned cutting water and this cutting water disperses.Than the area of space of the workpiece switch side of this main axle moving mechanism front portion as cleaning area, than this main axle moving mechanism rear portion cutting water and cut the area of space that mist disperses and distinguish as unclean region.And in this unclean area side, device frame width is adjoint close to drainage mechanism, narrowed width, therefore, cut water and come together in drainage mechanism, from this drainage mechanism draining while increase flow velocity.Again, cut mist also while increase flow velocity, come together in exhaust gear, be vented from this exhaust gear.Further, in above-mentioned work pieces process position, add man-hour in the cut-out carrying out workpiece, much cut water as above and splash in the drainage mechanism side as unclean region and be discharged., the cutting mist of a part, fly upward at cutting workpiece Working position, according to circumstances, the workpiece switch of side, cleaning area can occur the situation of convection current.To this, because there is curtain brush between work pieces process position and workpiece switch, so this curtain brush plays function as the covering of covering workpiece switch, be used for preventing from coming from dispersing of the cutting mist of an above-mentioned part, by work pieces process position with workpiece switch from being environmentally separated.And, said apparatus frame width is adjoint close to draining, exhaust gear narrowed width from the part of this curtain brush and main axle moving mechanism, the cutting mist of an above-mentioned part of dispersing to workpiece switch of covering according to curtain brush is also while flow velocity increases, be pooled to exhaust gear, be vented from this exhaust gear.Again, the contact of curtain brush to move to the surface of the workpiece of workpiece switch from work pieces process position, and thus, even if cutting swarf etc. piled up by the workpiece completed in machining, the cutting swarf of this accumulation etc. are cleared away, surface of the work cleanedization that machining completes.
The technical scheme invention of 10 years, provide a kind of cutter sweep, it comprises: the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, it is characterized in that: above-mentioned main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, the workpiece switch exchanging above-mentioned workpiece is positioned at one end of above-mentioned work stage conveyer, there is following apparatus framework, close wherein with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism, device frame width broadens.
According to this formation, in the work pieces process position that main axle moving mechanism and work stage conveyer report to the leadship after accomplishing a task, when cutting off workpiece with the blade that this main axle moving mechanism installs, along the cutting water that the rotation of this blade is dispersed, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Now, main axle moving mechanism plays the function of the covering of the area of space of workpiece switch side and following area of space being isolated.This area of space is the area of space that the cutting mist occurred together with above-mentioned cutting water and this cutting water disperses.Than the area of space of the workpiece switch side of this main axle moving mechanism front portion as cleaning area, than this main axle moving mechanism rear portion cutting water and cut the area of space that mist disperses and distinguish.And, the side, cleaning area of workpiece switch side, device frame with from above-mentioned workpiece switch close to above-mentioned main axle moving mechanism, width broadens, therefore, according to the clean air that the part of the local from this workpiece switch is introduced, formed to the radial air stream of one direction from workpiece switch side direction main axle moving mechanism side, this workpiece switch can keep cleaning ambient at ordinary times.
The technical scheme invention of 11 years, provide a kind of cutter sweep, it comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, it is characterized in that: above-mentioned main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, the workpiece switch exchanging above-mentioned workpiece is positioned at one end of above-mentioned work stage conveyer, and, main shaft maintenance position is set, this main shaft maintenance position is positioned in above-mentioned main axle moving mechanism, from the left-right parts that the X-axis of mobile above-mentioned workpiece departs from, there is following apparatus framework, close wherein with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism, device frame width broadens.
According to this formation, in the work pieces process position that main axle moving mechanism and work stage conveyer report to the leadship after accomplishing a task, when cutting off workpiece with the blade that this main axle moving mechanism installs, along the cutting water that the rotation of this blade is dispersed, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Now, main axle moving mechanism plays the function of the covering of the area of space of workpiece switch side and following area of space being isolated.This area of space is the area of space that the cutting mist occurred together with above-mentioned cutting water and this cutting water disperses.Than the area of space of the workpiece switch side of this main axle moving mechanism front portion as cleaning area, than this main axle moving mechanism rear portion cutting water and cut the area of space that mist disperses and distinguish.And, in the cleaning area of workpiece switch side, device frame with from above-mentioned workpiece switch close to above-mentioned main axle moving mechanism, width broadens, therefore, according to the clean air that the part of the local from this workpiece switch is introduced, formed to the radial air stream of one direction from workpiece switch side direction main axle moving mechanism side, this workpiece switch can keep cleaning ambient at ordinary times.Again, as mentioned above, what arrange with from workpiece switch to above-mentioned main axle moving mechanism is close, the formation that device frame width broadens, and main shaft maintenance position is set, this main shaft maintenance position is positioned at the left-right parts departed from from the X-axis of travelling workpiece, therefore, carrying out main shaft, the mensuration of relative left and right blade, in adjustment, correspondence must carry out axiality respectively, circularity, the maintenance of the confirmation in the face side of the blade of linearity etc. and 2 directions of vertical side, on the other hand, at one, it can be safeguarded that side is carried out, the maintenance adjustment of main shaft and blade becomes very easy.
The technical scheme invention of 12 years, provide a kind of cutter sweep, it comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, it rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, it is characterized in that: above-mentioned main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, with main axle moving mechanism for frontier district is divided into the unclean region at the cleaning area of device front portion and device rear portion, the workpiece switch exchanging above-mentioned workpiece is positioned at above-mentioned cleaning area, by above-mentioned unclean area configurations when the cut-out of above-mentioned workpiece along the cutting water of insert and cut the mist direction of dispersing, with from above-mentioned workpiece switch close to above-mentioned main axle moving mechanism, the frame width of device increases, from above-mentioned main axle moving mechanism towards above-mentioned unclean region, the frame width of device reduces.
According to this formation, in the work pieces process position that main axle moving mechanism and work stage conveyer report to the leadship after accomplishing a task, when cutting off workpiece with the blade that this main axle moving mechanism installs, along the cutting water that the rotation of this blade is dispersed, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Now, main axle moving mechanism plays the function of the covering of the area of space of workpiece switch side and following area of space being isolated.This area of space is the area of space that the cutting mist occurred together with above-mentioned cutting water and this cutting water disperses.Than the area of space of the workpiece switch side of this main axle moving mechanism front portion as cleaning area, than this main axle moving mechanism rear portion cutting water and cut the area of space that mist disperses and distinguish as unclean region.And, in this unclean region, device frame width is adjoint close to draining, exhaust gear narrowed width, thus, the flow velocity cutting water increases while be pooled to drainage mechanism, from this drainage mechanism draining, cutting the flow velocity of mist increases and is pooled to exhaust gear, is vented from this exhaust gear.On the one hand, the side, cleaning area that Workpiece exchanging apparatus exists, close from above-mentioned workpiece switch to above-mentioned main axle moving mechanism of companion devices framework, width broadens and is formed, therefore, according to the clean air that the part of the local from this workpiece switch is introduced, formed to the radial air stream of one direction from workpiece switch side direction main axle moving mechanism side, this workpiece switch can keep cleaning ambient at ordinary times.
In the invention that technical scheme 1 is recorded, add man-hour, along the cutting water that blade disperses, flow directly into drainage mechanism, therefore, prevent at random towards periphery.Again, draining while making cutting water increase flow velocity, so the cutting swarf cut contained by water carries out the danger precipitating, be detained in drainage channel bottom surface.If even if cutting swarf precipitates, is detained, this precipitation, retentate are naturally flushed away according to the cutting water then flowed into.So, as with preceding example, do not carry out the necessity precipitated, retentate removes operation, the drainage efficiency cutting water can be improved.
In the invention that technical scheme 2 is recorded, add man-hour, the mist that the rotation along blade is dispersed flows directly into exhaust gear, therefore, prevents at random towards periphery.And, can make mist that flow velocity is become and discharge greatly, can exhaust efficiency be improved.
In the invention that technical scheme 3 is recorded, add man-hour, along the cutting water dispersed and the mist of blade, flow directly into drainage mechanism and exhaust gear respectively, therefore, prevent peripherad at random.Again, cutting water and mist make flow velocity change discharge greatly, so can improve drainage efficiency and exhaust efficiency.Particularly, carry out in drainage channel bottom surface precipitating, being detained even if cut cutting swarf contained in water, this precipitation, retentate are naturally flushed away according to the cutting water then flowed into, and therefore, do not carry out the necessity precipitated, retentate removes operation.And main axle moving mechanism, can play the shielding function being carried out from the area of space that mist disperses by the area of space arranging workpiece exchange part isolating.Therefore, the area of space of workpiece exchange part side does not invade the danger of mist, and the area of space of this workpiece exchange part side can remain clean at ordinary times.
In the invention that technical scheme 4 is recorded, add man-hour, along the cutting water dispersed and the mist of blade, flow directly into drainage mechanism and exhaust gear respectively, therefore, prevent peripherad at random.Again, cutting water and mist make flow velocity change discharge greatly, so can improve drainage efficiency and exhaust efficiency.Particularly, carry out in drainage channel bottom surface precipitating, being detained even if cut cutting swarf contained in water, this precipitation, retentate are naturally flushed away according to the cutting water then flowed into, and therefore, do not carry out the necessity precipitated, retentate removes operation.And main axle moving mechanism, can play the shielding function being carried out from the area of space that mist disperses by the area of space arranging workpiece exchange part isolating.Therefore, the area of space of workpiece exchange part side does not invade the danger of mist, and the area of space of this workpiece exchange part side can remain clean at ordinary times.Again, flow out from workbench or disperse cut water not only can the good collection of efficiency according to food tray, cutting water makes flow velocity become large while by draining, so near discharge outlet, even if the cutting swarf precipitation in cutting water, according to the mobilization of the cutting water continuously flowed into, sediment can rinse to discharge outlet side, remove.Further, when carrying out food tray cleaning, the gap between work stage (and wrinkle protection mechanism) and food tray broadens, and therefore, the upkeep operation of food tray is easily implemented.
In the invention that technical scheme 5 is recorded, add man-hour, along the cutting water dispersed and the mist of blade, flow directly into drainage mechanism and exhaust gear respectively, therefore, prevent peripherad at random.Again, cutting water and mist make flow velocity change be discharged greatly, so can improve drainage efficiency and exhaust efficiency.Particularly, carry out in drainage channel bottom surface precipitating, being detained even if cut cutting swarf contained in water, this precipitation, retentate are naturally flushed away according to the cutting water then flowed into, and therefore, do not carry out the necessity precipitated, retentate removes operation.And main axle moving mechanism, can play the shielding function being carried out from the area of space that mist disperses by the area of space arranging workpiece exchange part isolating.Therefore, the area of space of workpiece exchange part side does not invade the danger of mist, and the area of space of this workpiece exchange part side can remain clean at ordinary times.
In the invention that technical scheme 6 is recorded, add man-hour in the cut-out of workpiece, along the cutting water dispersed of blade, flow directly into the basic drainage mechanism along long line is arranged in the discharge direction of cutting water.Therefore, prevent in the framework around processing part at random.Again, cut water and make flow velocity become large draining, so cut the danger that cutting swarf contained in water does not precipitate, is stranded in the framework bottom surface of water discharging part.Even if cutting swarf carries out precipitating, being detained, the cutting water that this precipitation, retentate are large according to the flow velocity then flowed into naturally is flushed away.Like this, necessity that carrying out such in former example is precipitated, retentate removes operation is not had.The drainage efficiency cutting water can be improved.
In the invention that technical scheme 7 is recorded, man-hour is added in the cut-out of workpiece, the cutting water dispersed along the rotation of blade and simultaneously cutting swarf occurs with this cutting water, in unclean area side, increase flow velocity while be pooled to draining, exhaust gear, therefore, can efficiently remove from this draining, exhaust gear.Again, cutting water makes flow velocity become large by draining, so cut the danger that cutting swarf contained in water does not precipitate, is stranded in framework bottom surface.Even if cutting swarf carries out precipitating, being detained, the cutting water that this precipitation, retentate are large according to the flow velocity then flowed into naturally is flushed away.Again, in the cleaning area that the workpiece switch more anterior than main axle moving mechanism exists, do not cut the danger that mist disperses, workpiece switch can remain clean at ordinary times.
In the invention that technical scheme 8 is recorded, add man-hour in the cut-out of workpiece, cutting water, cutting mist that the rotation along blade is dispersed, in unclean area side, increase flow velocity while be pooled to draining, exhaust gear, therefore, can efficiently remove from this draining, exhaust gear.Again, cut water and make flow velocity become large by draining, the cutting swarf cut contained by water does not precipitate, is stranded in the danger of framework bottom surface.Even if cutting swarf carries out precipitating, being detained, the cutting water that this precipitation, retentate are large according to the flow velocity then flowed into naturally is flushed away.Again, in the cleaning area that the workpiece switch more anterior than main axle moving mechanism exists, do not cut the danger that mist disperses, workpiece switch can remain clean at ordinary times.And then, cutting workpiece adds man-hour, even if the cutting swarf of a part flies upward, curtain brush plays function as the covering of covering workpiece switch, be used for preventing from coming from dispersing of the cutting mist of an above-mentioned part, even so the cutting mist of a part, also can prevent from dispersing to workpiece switch, the clean of workpiece switch can be maintained.Again, the contact of curtain brush to move to the surface of the workpiece of workpiece switch from work pieces process position, and thus, even if cutting swarf etc. piled up by the workpiece completed in machining, the cutting swarf of this accumulation etc. are cleared away, and the surface of the work that machining completes can be cleaned.
In the invention that technical scheme 9 is recorded, add man-hour in the cut-out of workpiece, cutting water, cutting mist that the rotation along blade is dispersed, in unclean area side, increase flow velocity while be pooled to draining, exhaust gear, therefore, can efficiently remove from this draining, exhaust gear.Again, cut water and make flow velocity become large by draining, the cutting swarf cut contained by water does not precipitate, is stranded in the danger of framework bottom surface.Even if cutting swarf carries out precipitating, being detained, the cutting water that this precipitation, retentate are large according to the flow velocity then flowed into naturally is flushed away.Again, in the cleaning area that the workpiece switch more anterior than main axle moving mechanism exists, do not cut the danger that mist disperses, workpiece switch can remain clean at ordinary times.And then, cutting workpiece adds man-hour, even if the cutting mist of a part flies upward, curtain brush plays function as the covering of covering workpiece switch, is used for preventing from coming from dispersing of the cutting mist of an above-mentioned part, even the cutting mist of part so, also can prevent from dispersing to workpiece switch, can exhaust gear be pooled to simultaneously, remove from this exhaust gear, the clean of workpiece switch can be maintained.Again, the contact of curtain brush to move to the surface of the workpiece of workpiece switch from work pieces process position, and thus, even if cutting swarf etc. piled up by the workpiece completed in machining, the cutting swarf of this accumulation etc. are cleared away, and the surface of the work that machining completes is cleaned.
In the invention that technical scheme 10 is recorded, close with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism of device frame, width broadens and is formed, so the clean air introduced according to the part of the local from this workpiece switch, import while its cut-out processing department side (main axle moving mechanism side) appropriateness to workpiece is dispersed.Its result, formed to the radial air stream of one direction from workpiece switch side direction main axle moving mechanism side, this workpiece switch can keep cleaning ambient at ordinary times.
In the invention that technical scheme 11 is recorded, close with from above-mentioned workpiece switch to main axle moving mechanism of device frame, width broadens and is formed, so the clean air introduced according to the part of the local from this workpiece switch, import while its cut-out processing department side (main axle moving mechanism side) appropriateness to workpiece is dispersed.Its result, formed to the radial clean air stream of one direction from workpiece switch side direction main axle moving mechanism side, this workpiece switch can keep cleaning ambient at ordinary times.Again, as described above, close with from above-mentioned workpiece switch to main axle moving mechanism, device frame width broadens, on the basis of this formation, from the left-right parts that the X-axis of travelling workpiece departs from, main shaft maintenance position is set, therefore, carry out main shaft, relative left and right blade mensuration, adjustment in, at one, the corresponding maintenance must carrying out the face side of blade of axiality, circularity, linearity etc. and the confirmation in 2 directions of vertical side respectively, can safeguard that side is easily carried out by it.
In the invention that technical scheme 12 is recorded, man-hour is added in the cut-out of workpiece, along the cutting water dispersed of the rotation of blade and occur to cut mist with this cutting water simultaneously, in unclean area side, device frame width, with close to draining, exhaust gear narrowed width, thus, increases flow velocity and is pooled to draining, exhaust gear, therefore, can efficiently remove from this draining, exhaust gear.Again, cutting water makes flow velocity become large by draining, so cut the danger that cutting swarf contained in water does not precipitate, is stranded in framework bottom surface.Even if cutting swarf carries out precipitating, being detained, the cutting water that this precipitation, retentate are large according to the flow velocity then flowed into naturally is flushed away.Again, in the side, cleaning area that the workpiece switch more anterior than main axle moving mechanism exists, device framework with from above-mentioned workpiece switch close to above-mentioned main axle moving mechanism, width broadens and is formed, therefore, can be formed and form the radial clean air stream of one direction from workpiece switch side direction main axle moving mechanism side, this workpiece switch can keep clean at ordinary times.
Accompanying drawing explanation
Fig. 1 represents one embodiment of the present of invention, and the configuration top view of each several part configuration of cutter sweep is described.
Fig. 2 represents the stereogram of the configuration example of the dewatering exhaust mechanism of the cutter sweep relevant to embodiments of the invention.
Fig. 3 illustrates the effect key diagram of the dewatering exhaust mechanism of the cutter sweep relevant to embodiments of the invention.
Fig. 4 is the key diagram of the collection effect of end material in the triangle corner portion of the drainage mechanism of key diagram 3.
Fig. 5 is the key diagram of the environment control method that the cutter sweep that embodiments of the invention are correlated with is described.
Fig. 6 (a), 6 (b), 6 (c) and 6 (d) are the irrigation water distribution map that the cutting water that the blade of being correlated with from the embodiment of the present invention disperses is described, the key diagram in the direction of dispersing of this cutting water is described, the irrigation water distribution map of the cutting water reflected from wall is described and the key diagram of this cutting water reflection direction is described.
Fig. 7 is in an embodiment of the present invention, and the top view of the exchange of main shaft etc. is described, the figure of Fig. 7 (a) to be figure, the Fig. 7 (b) of the exchange etc. that principal axis A is described be exchange of explanation main shaft B etc.
Fig. 8 is for showing in an embodiment of the present invention, by the both sides otch of the workpiece exchange part in device frame, slowly width is expanded to main axle moving mechanism and the top view of the configuration example set from workpiece exchange part, 8 (a) is the device frame before otch, and Fig. 8 (b) is the device frame configuration example after otch.
Fig. 9 is for showing in an embodiment of the present invention, by the both sides otch of the dewatering exhaust mechanism in device frame, slowly width is reduced to dewatering exhaust mechanism and the top view of the configuration example set from main axle moving mechanism, 9 (a) is the device frame before otch, and Fig. 9 (b) is the device frame configuration example after otch.
Figure 10 is for showing in an embodiment of the present invention, the top turning back to the work stage delivering mechanism of the midway of workpiece exchange part from main axle moving mechanism arranges the figure of the configuration example of curtain brush, Figure 10 (a) is top view, Figure 10 (b) is the sectional view along the Y-Y line in Figure 10 (a), the figure of Figure 10 (c) for being shown in detail by Figure 10 (b) partial enlargement.
Example before Figure 11 shows, for illustrating the configuration top view of the configuration of each several part of cutter sweep.
The detailed top view of the configuration example of the drainage mechanism of the cutter sweep that Figure 12 display is relevant to former example.
Figure 13 illustrates the key diagram of the collection effect of the end material of the drainage mechanism of the cutter sweep relevant to former example.
Figure 14 (a), 14 (b), 14 (c) and 14 (d) be illustrate from before the irrigation water distribution map of cutting water that disperses of the example blade of being correlated with, the key diagram in the direction of dispersing of this cutting water is described, the irrigation water distribution map of the cutting water reflected from wall is described and the key diagram of this cutting water reflection direction is described.
Detailed description of the invention
The present invention is in order to reach: while the accumulation preventing cutting swarf, the washing that improves the expulsion efficiency, food tray etc. that cut water and exhaust easily and workpiece (wafer) exchange part is maintained clean object, realization is formed with following, with a cutter sweep for dewatering exhaust mechanism, it comprises the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, it is characterized in that: be equipped with drainage mechanism, this drainage mechanism has discharge outlet, this discharge outlet is when the cut-out of above-mentioned workpiece, be positioned at the basic along on long line of the discharge direction of the cutting water dispersed along insert, this drainage mechanism has with the drainage channel close to above-mentioned discharge outlet narrowed width, and above-mentioned cutting water makes flow velocity change large by draining.
Embodiment 1
Below the preferred embodiment of the invention is described according to Fig. 1 and even Fig. 6.Fig. 1 shows cutter sweep 21 top view related to the present embodiment.As shown in this figure, be formed as the quadra 22 of the main part overlooked as square cutter sweep 21, in its forward right side corner portion incision right angled isosceles triangle part, before relative cutter sweep 21, form the hypotenuse edge in miter angle.This hypotenuse edge is arranged the opening portion 23 of band shutter, formed in the mode can implementing workpiece exchange and upkeep operation on quadra 22 from this opening portion 23.
Again, on quadra 22, the rotatable work stage 24 that the wafer W being provided as workpiece is loaded; Cut off the blade 25,25 of this wafer W; Work stage conveyer 26, this mechanism 26 makes work stage 24 opposing blades 25,25 of loaded with wafers W and moves.Work stage conveyer 26 is arranged on and connects on the forward right side corner portion of quadra 22 and the 1st diagonal in left rear side corner portion.
And then arrange main axle moving mechanism 28 on quadra 22, this main axle moving mechanism 28 has guide rail 29.Main axle moving mechanism 28 is arranged at and connects on the front left side corner portion of quadra 22 and the 2nd diagonal in right lateral side corner portion.Therefore, main axle moving mechanism 28 is so that relative to work stage conveyer 26, vertical mode configures.Therefore, the guide rail 29 of main axle moving mechanism 28 is at right angles reported to the leadship after accomplishing a task according to the workpiece carriage direction of work stage conveyer 26 relatively.
In guide rail 29, two main shafts 30,30 are supported in a movable manner, and this main shaft 30,30 arranges in mutually relative mode on the same axis.Blade 25,25 rotatably installed by each main shaft 30,30.
Again, at the basic pars intermedia of cutter sweep 21, namely, the part that main axle moving mechanism 28 in quadra 22 is vertical with work stage conveyer 26, arrange cutting workpiece processing department 32, in this cutting workpiece processing department 32, formed in the mode can cutting off wafer W according to blade 25,25.
In the cutting workpiece processing department 32 of the present embodiment, keep the displacement of the main shaft 30,30 of blade 25,25 can corresponding cornerwise length and elongated, even so bigbore wafer W, also it can be cut off with good efficiency.Again, main axle moving mechanism 28 (or being guide rail 29) can form the high door shape structure of intensity, and in the present embodiment, the pillar of supporting spindle travel mechanism 28 shapes, is formed in the mode that the pillar of the quadra 22 with cutter sweep 21 shares.
Therefore, even if the door shape pillar of the high main axle moving mechanism 28 of rigidity is not arranged especially, also can good efficiencies configuration main axle moving mechanism 28 and guide rail 29 in cutter sweep 21, high rigidity and high-precision cutter sweep 21 can be formed.
Further, the forward right side part of cutter sweep 21, arranges workpiece exchange part 33, the opening portion 23 that this workpiece exchange part 33 forward right side hypotenuse edge that is close, that be configured at quadra 22 is arranged.In this workpiece exchange part 33, the wafer W be loaded in work stage 24 can be easy to exchange.Symbol 34 in figure is food tray, and it receives and flows out from cutting workpiece processing department 32 waste liquid cutting water, washings, and this food tray 34 is formed in the mode of surrounding work stage conveyer 26.
Further, in the left rear side bight of quadra 22, as shown in Figure 2, the drainage mechanism 36 with discharge outlet 35, the exhaust gear 38 with exhaust outlet 37 is equipped.Above-mentioned discharge outlet 35, when cutting off wafer W with the blade 25,25 of High Rotation Speed, is configured on the extended line cutting the direction that water and washings disperse along the direction of rotation of this blade 25,25.Again, above-mentioned exhaust outlet 37 is formed in the roughly positive top corresponding with discharge outlet 35.Again, the assigned position setting operation of cutter sweep 21, display part, image mechanism, surveillance television, display lamp and controller (not shown) etc.
Then, to adopting the cutting process method of above-mentioned cutter sweep 21 to be described.First, while main shaft 30,30 is installed blade 25,25, work stage 24 is loaded fixed wafer W.Then, along the first diagonal of quadra 22, work stage 24 is transported to the basic central portion of quadra 22 by work stage conveyer 26, wafer W is moved into the speed of regulation by cutting workpiece processing department 32.
Then, main shaft 30,30 is moved at the center towards cutting workpiece processing department 32, carries out High Rotation Speed to the blade 25,25 be arranged on this main shaft 30,30, meanwhile, carries out the cut-out processing of wafer W.In processing, the cutting water nozzle arranged in the front end of main shaft 30,30 and washing nozzle (not shown) supply respectively cuts water and the washing water machining center to wafer W.
And the cutting water (containing washings, identical below) be supplied to receives according to food tray 34.After this, cut water after the downstream flowing to food tray 34, be externally discharged by the discharge outlet 35 of drainage mechanism 36 that is connected with food tray 34 and drainpipe (not shown).Again, adding man-hour, together with cutting water, the direction of rotation of mist along blade 25,25 is being dispersed, the left rear side corner portion flowing of the mist dispersed from cutting workpiece processing department 32 to quadra 22.After this, mist is externally discharged by blast pipe (not shown) according to the exhaust outlet 37 of exhaust gear 38.
Then, if completed along the cutting processing of a cutting line to wafer W, then, the indexed adjacent cutting line delivering to processing of blade 25,25, positions, order same as described above, carries out cutting processing along this cutting line.
And, repeatedly carried out by above-mentioned cutting processing, if all completed along the cutting processing of the cutting line of stated number, together with work stage 24, wafer W is carried out 90 degree of rotations, by processing sequence similar to the above, carry out cutting processing along the cutting line with above-mentioned cutting line vertical direction.
Then, if completed completely along the cutting processing of this cutting line, then wafer W is cut-off is divided into multiple chip.After this, the work stage 24 of loaded with wafers W is transported to workpiece exchange part 33 according to work stage conveyer 26, then, is exchanged by the wafer W that should process.After this, by above-mentioned processing sequence, the cutting processing of this wafer W is implemented again.
If carry out cutting processing to the wafer W of regulation sheet number, then the neighbouring accumulation lapping rejects (containing grounds travel) of discharge outlet 35 set bottom the most downstream side of food tray 34, therefore the running of cutter sweep 21 regularly stops, and carries out the cleaning of food tray 34.
Then, the draining of the cutter sweep 21 that the present embodiment is correlated with, exhaust gear are described in detail.In the present embodiment, when cutting off wafer W with blade 25,25, on the basic extended line of the discharge direction of the cutting water dispersed along this blade 25,25, configuration has the drainage mechanism 36 of discharge outlet 35, has the exhaust gear 38 of exhaust outlet 37.
Drainage mechanism 36 as shown in Figure 3, has drainage channel, and this drainage channel is with discharge outlet 35 narrowed width successively set by the most downstream side close to drainage mechanism 36.Such as, as shown in Figure 1, arrange the current deflecting parts 43,43 of pair of right and left in the downstream of drainage mechanism 36, current deflecting parts 43,43 are connected with the downstream in food tray 34.These current deflecting parts 43,43 are formed with parallel water route portion by overlooking rectangular leg-of-mutton corner portion, and this parallel water route portion is connected with the inflow side in corner portion and arranges, and the first diagonal along quadra 22 extends.Therefore, be constructed as follows, cut water with close to discharge outlet 35, increase flow velocity, while towards discharge outlet 35 draining smoothly.
Again, exhaust gear 38 is formed as follows, has exhaust channel, the exhaust outlet 37 that this exhaust channel is arranged with the inner face close to the left rear side corner portion of quadra 22, narrowed width successively.Flow velocity, with the action of not shown air blast etc., increases, while discharge towards exhaust outlet 37 by mist.
Again, receive the food tray 34 of the cutting water flowed out from work stage 24, arrange to surround the mode of the periphery of work stage conveyer 26.And the mode that food tray 34 broadens with width in cutting workpiece processing department 32 is formed, meanwhile, with the drainage mechanism 36 that the downstream towards this food tray 34 connects, the width dimensions width of food tray 34 reduces gradually.
According to the present invention as above, cut water according to discharge outlet 35 efficiently to collect.Again, the mist that the direction of rotation along blade 25,25 is dispersed with cutting water simultaneously, is also collected efficiently according to exhaust outlet 37.That is, when blade 25,25 rotation, mist are dispersed, in the travel direction (arrow P with reference to Fig. 3) of mist, internal face 22L, 22R of contact quadra 22, within it central authorities, mist is by constriction.And, the mist of constriction according to exhaust outlet 37 efficiently to collect.
Further, receive the food tray 34 of the cutting water flowing out from the blade 25,25 of cutting workpiece processing department 32 or disperse, formed carrying out with wafer off-position the mode that corresponding part broadens with width.Therefore, the waste liquid cutting water etc. is prevented from wide scope according to food tray 34.
Again, on the downstream of food tray 34, connect drainage mechanism 36.With the discharge outlet 35 to this drainage mechanism 36, the duct width of food tray 34 is formed in the mode narrowed gradually.Therefore, flow, efficiently to collect to discharge outlet 35 with cutting the water surface.
And then when cleaning food tray 34, the gap of food tray 34 between work stage and wrinkle protective cover (coating workpieces transports the parts of drive division) broadens, and therefore, upkeep operation can be easy to implement.And, cut water and flow out in mode very smoothly from food tray 34 to the drainage channel of discharge outlet 35.Again, the opening narrows of the neighbouring upstream side of discharge outlet 35, therefore, the flow velocity cutting the waste liquid of water etc. accelerates relatively.Its result, the collection efficiency of waste liquid can further improve.
Further, about part near the discharge outlet 35 of food tray 34, close with discharge outlet 35, opening narrows successively, so the flow velocity cutting water slowly increases near discharge outlet 35.Therefore, even if cutting swarf contained in waste liquid precipitates near discharge outlet 35, this sediment, according to the continuous print mobilization cutting water, is washed away by discharge outlet 35.
So, on the basis of the flow velocity increaseization of the cutting water produced in the narrowed width of drainage channel, add the revolving force of cutter 25,25 and the cutting water of the advantage obtained constantly continuously flows into, thus, cutting swarf is washed away forcibly by the direction to discharge outlet 35.
Even if the cutting swarf in cutting water so some be trapped in drainage channel, according to the cutting water that rotation limit, limit so continuously flows into, well play a position by the so-called self purification concentrated down, significantly minimizing cleaning work that thus may be regular.
So, according to the present invention, the cut-out machining of workpiece W produces cutting swarf and automatically cleans outflow, cutting swarf can be collected removing with good efficiency.Again, in discharge outlet 35, the filter that erection space is large, filter screen, can collect more efficiently so cut cutting swarf contained in the waste liquid of water etc.
On the one hand, with the rotation of blade 25,25, about the mist dispersed together with cutting water, for the travel direction that mist disperses, faced by the corner portion both sides inner face of quadra 22, travel direction is formed as the shape narrowed gradually, and, the extended line direction of blade direction of rotation (wafer cutting direction) forms exhaust outlet 37, therefore, the exhaust of mist can be carried out efficiently according to this exhaust outlet 37.
The present invention is not only the inner face of quadra 22, at the left rear side adjacent corner configuration exhaust outlet 37 of quadra 22, thus, the internal face of the periphery of exhaust outlet 37 precipitates with mist, there is the danger of polluting this internal face, from all directions to exhaust outlet 37, mist can be collected efficiently.
Again, at the inner face of quadra 22, the direction of dispersing in the face of the mist that disperses according to cutting and even water droplet narrows successively, is formed in the mode of narrowed width.Accordingly, the water droplet dispersed, after reflecting back to inner face, is collected automatically in the corner portion of the front end of narrowed width.Situation in the water droplet polluting device that basis such before there will not be is dispersed, all cutting water, water droplet, mist, cutting swarfs dispersed, overlook as square angle part is collected, therefore, can cutting water, mist reclaimed efficiently, discharge.
Further, to be arranged on second cornerwise main axle moving mechanism 28 for border, different from the region of the discharge directions side in quadra 22, the region of side moved into by the workpiece had in the workpiece exchange part 33 of its opposition side, has to do one's utmost to avoid the dispersing of mist, keeps necessity of cleaning.Especially, workpiece exchange part 33 has the situation having workpiece wash mill concurrently, has the necessity of the intrusion preventing mist.This point, according to the present invention, be arranged on main axle moving mechanism 28 on the second diagonal as shown in Figure 5, there is isolation features, by mutually isolated for the discharge directions side field ME and workpiece exchange side region WE remaining on the mist that the second diagonal L 2 of clean atmosphere is border with workpiece exchange side region WE.
Particularly, be the occasion of the wafer W of heavy caliber at workpiece, accurate cut-out must be carried out from an end of wafer W to the other end, there is the necessity operating range of main axle moving mechanism 28 expanded to the maximum, corresponding with it, the opening between the blade 25,25 of main axle moving mechanism 28 becomes large.
On the one hand, in order to not invade mist in workpiece exchange part 33, the opening of main axle moving mechanism 28 is best less.Because, from the necessity of the air that the area of space with clean atmosphere cleans to the non-clean atmosphere one direction feeding producing mist.From the part of the openings get smaller of main axle moving mechanism 28, to enlist the services of the state of the wafer W of cutting workpiece processing department 32, by clean air with one direction or radial supply, thus, stop mist intrusion as the upstream region of workpiece exchange part 33 side.
So, by air stream with in one direction or radial supply, arrange from the mechanism of the air of workpiece exchange part 33 side supplying clean as well.Again, even if do not arranging the mechanism of supplying clean air from workpiece exchange part 33 side, if device is arranged at clean room from the exhaust outlet 37 of device with sufficient pressure reduction by the mist atmosphere exhaust in device, then suck clean atmosphere gas successively from the opening portion 23 before device, natural air stream can be produced in device.
Again, in main axle moving mechanism 28, if the guide rail of mobile main shaft 30 29 itself has sufficient width, then can cover wafer exchange position and exhaust, discharge outlet region, this wafer exchange position has the necessity keeping clean atmosphere gas, and this exhaust, discharge outlet region are the region of cutting water splashing, discharging cutting swarf.This screening effect, can only have main axle moving mechanism 28, just possess the occasion of abundant function, but on the basis of main axle moving mechanism 28, additional shield etc. as illustrated in the symbol SP of Fig. 5, has the function of separated region further.
About the width, highly of this shield SP, also can produce because of the pressure reduction of exhaust cutting swarf, neither quantitatively specify without exception, but, if the structure be separated as area part, for giving full play to the parts of function.Further, from main axle moving mechanism 28 to the situation of exhaust outlet 37 and discharge outlet 35 narrowed width gradually, preferably while the framework that narrows, wafer exchange position workpiece exchange part 33 had also is set to the state of narrowed width.Again, the symbol 51 in Fig. 5 is for drenching atomizing nozzle.
Wafer exchange position, preferably has while keeping clean environment, carries out convection current, not around necessity that auto levelizer front face side enters from the mist of exhaust outlet 37.If by wafer exchange position expand arrange, cut mist around entering, before device along wall around entering, the device wall face portion being equivalent to wafer exchange position also has the possibility of pollution.
From the wafer exchange position of main axle moving mechanism 28, or, by the state of narrowed width, formed the state of the clean air dispersion to main axle moving mechanism 28 being supplied to wafer exchange position.By so, the cutting water dispersed is carried out from the back part of the work pieces process position auto levelizer in device, can efficiently discharge from device back part, cover easily with main axle moving mechanism 28 simultaneously, and then, from there to wafer exchange position, by being restricted to narrowed width state, the cutting mist arriving wafer exchange position exists hardly.
As a result, cleaning area and non-clean region can be separated in device.What the convection current of cutting mist produced occurs hardly in the pollution of workpiece switch.And then, when cleaning area so is separated with non-clean region, Lin Wu mechanism (drenching atomizing nozzle 51) is set between workpiece switch and off-position.
Wafer W, when moving from cutting workpiece position to wafer exchange position, by this pouring mist part, thus, while can the transport of wafer being not difficult to carry out physically, can carry out blocking cutting mist not being invaded the atmosphere gas of wafer exchange position efficiently.By the screening effect also with main axle moving mechanism 28, further region disconnecting can be carried out.
In the present embodiment, guide rail 29, main axle moving mechanism 28 and main shaft 30,30 itself, there is part and cover the region of workpiece exchange part 33 side and the effect of maintenance position, this workpiece exchange part 33 has the necessity of the atmosphere gas keeping clean, and this maintenance position is disperse to cut the position of water and its mist.
Again, as shown in Figure 4, the drainage channel lower end side of the drainage mechanism 36 that the present invention is correlated with, have and overlook viewing for leg-of-mutton bight 45, therefore, even if such as with cutting end material 44 grade of the workpiece that to flow together with water when, this end material etc. is collected automatically by the top corner portion in leg-of-mutton bight 45.Therefore, as former example, carry out after having processing arranging, carry out necessity of recycling.
As described above, the cutter sweep that embodiments of the invention are relevant, while the cutting draining of water and the exhaust of mist are carried out efficiently, part isolation carry out the exhaust of mist atmosphere gas region, wafer W is remained on clean atmosphere gas region, and, in the upstream side of this segregate position, by by clean air supply guide rail 29 etc., can keep clean further by overall for the inside of cutter sweep 21.
At this, in former example, as shown in Figure 14, the cutting water directly sprayed from blade, as shown in this Figure 14 (C) usually, is wider probability distribution., it is arranged to the wall at right angle, then its cutting water sprayed reflects back further, cuts water so useless that to broaden.If injected cutting water broadens, only this surface area increases, becomes easy drying.Its result, around simultaneously the upper cutting water containing cutting swarf is dry, and cutting swarf is residual, pollution.
This point, the present invention as shown in Fig. 6 (b), device frame in blade direction of rotation along long line carrying out collect (narrowed width becomes far away successively), thus, the cutting water dispersed collects in discharge outlet 35 naturally.
Such as, be formed as radial line (Y=X shown in Fig. 6 (d) like that
2) occasion, to the parallel cutting water dispersed of this axle, all concentrate on initial point.
About the generation of mist, there are following two kinds of situations, are respectively and between blade 25,25 and workpiece (machined object), enter cutting water at cut-out point, produce the situation of mist; Water droplet disperses, contact width narrows away from framework inwall reflect back time, become mist.Particularly, the occasion that contact framework reflects back, the mist of volume occurs, and therefore, mist rises always.The mist risen, in the occasion be not vented, passes to the top of device, before access to plant, in addition, by small gap, can invade electrical correlation part.If enter mist in the electrical correlation part in device, then can produce get rusty, short circuit etc.Therefore, can efficiency good carry out the collection of mist while, the mist of this collection has the requirement of high-efficiency exhaust.
According to the present invention, according to the cutting swarf dispersed from cutting portion that blade 25,25 produces, concentrate on a position efficiently at the internal face of quadra 22.This cutting water concentrated reflects back, mist dances in the air when scattering, and the part that this mist is aggregated rises rapidly., in this place because arrange exhaust outlet 37, become possibility so picked up by mist efficiently.Mist, with increasing close to exhaust outlet 37 negative pressure, therefore, can not produce the convection current of mist in device.That is, the mist dispersed at cutting tip is all pooled to a position and forms.
And then main axle moving mechanism 28 plays effect wafer exchange position and cutting aqueous waste solution mouth and cutting mist exhaust position being carried out being separated.That is, main axle moving mechanism 28 suitably sets with the width dimensions of this guide rail 29, and thus, the cleaning area of device front face is separated mutually to interdict with the waste liquid in bight after device, exhaust portion.According to this blocking effect, the front face side of device and rear side are distinguished into the pressure reduction with appropriateness.
In above formation, the basic diagonal of square framework 22 has main axle moving mechanism 28, perpendicular have work stage conveyer 26, according to the main axle moving mechanism 28 of work stage conveyer 26, have the workpiece switch based on workpiece exchange part 33 near oneself side, inner side is equivalent to the occasion of the exhaust outlet 37 with discharge outlet 35 and mist., will so form in other words, then not be that the tight square framework of formation is also passable, if the feature shown in having then, then can obtain following action effect.That is, as formation, from Workpiece exchanging apparatus to the part of main axle moving mechanism 28, formed slowly by formation that the frame width of device expands.According to formation so, effect as follows can be played.
As previously mentioned, clean region is introduced from the part of the local of workpiece switch, while it moderately can be disperseed to the wafer process portion produced by cutting workpiece processing department 32, imports.Its result, forms the radial air stream of one direction, keeps clean environment incessantly.The introducing of air is the workpiece switch of local, so the cutting mist rolled while wafer cut-out is added man-hour, invades workpiece switch and becomes difficulty.Because, the fastest from the flow velocity of the clean air of workpiece switch introducing, cut mist and be difficult to carry out adverse current.
And then, from workpiece switch to the part of main axle moving mechanism 28, being expanded by device frame width on the basis of the structure of going down, from the left-right parts X-axis of workpiece movable offset, main shaft maintenance position is set.By formation like this, produce following action effect.
In the occasion that the blade 25,25 of relative left and right is carried out exchanging, in the occasion of carrying out safeguarding and the occasion etc. of carrying out precision determination, blade 25,25 is staggered also passable from the position of workpiece exchange part 33 to the left and right.Fig. 7 (a), (b) show this concrete condition.Such as, from the viewing of workpiece switch, the exchange of the B blade on right side, adjustment is carried out; The occasion of the end surface grinding of B main shaft, as shown in Fig. 7 (a), first, moves to the left side of workpiece switch, that is, main shaft maintenance position 1 (SP, MT1) by the subtend principal axis A of both sides, B.The Wall board of the main shaft maintenance position 1 (SP, MT1) in the left side of workpiece switch is taken off.
Taken off by B blade, the occasion etc. that the end face of B main shaft is dirty, according to the left side of main shaft maintenance position 1 (SP, MT1), 45 degree of directions viewing B main shafts from the right side shown in (1), the end surface grinding of B main shaft is minute surface.After installation B blade, the axiality of the B main shaft of relative B blade, the circularity of B blade are in the occasion of carrying out measuring, adjusting, according to the left side of main shaft maintenance position 1 (SP, MT1), 45 degree of direction viewing B main shafts shown in (1), also can carry out measuring, adjusting.
Then, according to the mode of not biting foreign matter, B blade is installed on B axle, be whether the straight occasion carrying out measuring adjustment at B blade relative to workpiece, from the right side of main shaft maintenance position 1 (SP, MT1), 45 degree, a left side shown in (2) direction viewing B main shaft, carries out measuring, adjusting.Thus, can visual B blade relative to the situation etc. of location of workpiece deviation, thus, adjustment work becomes very simple.
Like this, in the mensuration, adjustment of main shaft and blade, for the maintenance that must confirm respective axiality, circularity, linearity etc. from the face side of blade and vertical side 2 direction, must intert between 2 sides of this device in front and side in the past, as the present invention, side can be safeguarded from one, namely, the place of same main shaft maintenance position 1 (SP, MT1), confirm on right 45 degree of directions, left 45 degree of directions respectively, safeguard, thus, the maintenance adjustment of main shaft and blade becomes very easy simultaneously.
In addition, watch from workpiece switch, when measuring, adjusting the A blade in left side, as shown in Fig. 7 (b), with front end symmetrically, make two principal axis A, B mobile as main shaft maintenance position 2 (SP, MT2), from main shaft maintenance position 2 (SP, MT2), adjust as described above, thus, can easily confirm.To sum up, become easy from the outside confirmation to blade of device, and, all become easy from two kinds of situations during the viewing blade of front and when watching from the side.To blade axiality or install the end face of blade grind time, needing from front viewing blade, during position deviation when confirming that blade is installed, needing to watch blade from the side.
Then, the part depth as main axle moving mechanism 28 confirms width to a certain degree, cutting water, the draining of cutting mist, exhaust efficiency, can adopt and the frame width of device is set to the scheme narrowed gradually to improve.Like this, action effect as follows can be obtained.The work pieces process part intersected from main axle moving mechanism 28 and work stage connecting gear 26 is dispersed the cutting water that or cut mist, and because frame width narrows, flow velocity increases, and can effectively get rid of.The portion discharge that cutting mist narrows in framework is fastest, therefore, can prevent cutting mist and form convection current in device.Above effect can be obtained.
Such structure is briefly following structure.With main axle moving mechanism 28 for border, be divided into the non-clean region at the cleaning area of its front portion and its rear portion, in the clear area of this front portion, from the position of workpiece exchange part 33 to main axle moving mechanism 28, the frame width of device increases gradually, and the width of the inwall of device inside also increases.In main axle moving mechanism 28, width becomes maximum.In the non-clean region at this rear portion, from this main axle moving mechanism 28 to the draining at the rear portion with workpiece switch opposition side, exhaust gear 36,38, the mode narrowed gradually according to the frame width of device is formed, the form that the draining of formation frame width at rear portion, exhaust gear 36,38 narrow.
That is, the front portion as the workpiece switch side of device is clear area, adjoins with servicing area.On the other hand, clamp the rear portion of main axle moving mechanism 28, the non-clean region that sludge or cutting water, cutting mist etc. for the workpiece of cutting processing generation disperse.The cutting water etc. of supply blade, be supplied to non-clean area side from side, clear area, the supply of water also forms one-way flow.Thus, collect all water carry out drainage exhaust by the draining in non-clean region, exhaust gear 36,38.
In addition, also can in the sludge near food tray 34, make by wall from side, clear area the mechanism for feedwater.Further, be not only draining, in exhaust, also can be used as following structure: near workpiece exchange part 33, arrange the mouth sucking cleaned air, the groove flow through by the cutting water of food tray 34 and nearby wafer surface, be exhausted by the exhaust gear 38 at rear portion.Thus, the not only flowing of water, the flowing of gas is also the one-way trip from workpiece switch to exhaust outlet 37, and air and water together flow, and can form the atmosphere that constantly can supply cleaner air continuously in wafer cutting processing position.
Such result, the sludge splashed by wafer cutting processing is rebuffed and reflects back, and it drops in the wafer W in cutting processing, can not enter blade 25, between 25 and wafer W.Further, disperse owing to cutting water, cut mist and be rebuffed and continue to spread in device, positively spread the part to cutting, the mist of high humidity enters the bearing portions of the main shaft 30 of High Rotation Speed, prevents the lost of life of main shaft 30.Wafer W is processed in the border part in clear area and non-clean region.Sludge and the cutting water of machining disperse to non-clean area side.
In order to zoning like this, substantially linearly configure workpiece switch, work pieces process position and cut water draining, exhaust position, with work pieces process position for border, workpiece switch and the draining of cutting water, exhaust position are configured in basic opposition side.Thus, even if be not that strict square framework is good.Such as, also can be bight and be divided into fillet, framework is the device of basic 8 limit shapes or basic 7 limit shapes.In result, the not too large change of above-mentioned action effect.
Framework is the occasion of basic 8 limit shapes, and wherein Each part can be as follows.That is, main axle moving mechanism 28 and work stage conveyer 26 have certain width respectively, can by they arranged perpendicular.The both ends of the surface be made up of the width segments of main axle moving mechanism 28 form 2 limits of 8 limit shapes.The end face be made up of the width segments of work stage conveyer 26 forms 1 limit, and the end face that the width of draining, exhaust gear 36,38 part is formed forms 1 limit.Remaining 4 limit is formed according to the mode be connected with these limits.2 limits in 8 limit shapes can be equivalent to main shaft maintenance position SP, MT1 and SP, MT2.In addition, in the occasion of 7 limit shapes, draining, exhaust gear 36,38 part in order to central portion collect cut water, specially not as limit, and as summit, outside same with the occasion of 8 limit shapes.
In addition, following application examples can be considered.Such as, in order to improve the maintainability of main shaft 30 part, as shown in Fig. 8 (a) ~ (b), in the workpiece exchange part 33 in device, by the both sides otch of this workpiece exchange part 33.Thus, as mentioned above, when safeguarding one-sided main shaft 30 and blade 25, can confirm relative to the vertical direction of blade 25 and two directions of frontal from the same face of device.Such adjustment to a blade in the past can be cancelled, in the front of device and the side interspersed operation carrying out confirming back and forth, thus, blade adjustment can be carried out easily.
And then, in workpiece exchange part 33, otch both sides, be set as that from workpiece exchange part 33 to main axle moving mechanism 28 width becomes large gradually, thus, the clean air received from workpiece exchange part 33 is radially diffused into main axle moving mechanism 28, thus, the air stream in device can not be detained.Further, mist adverse current when the workpiece that main axle moving mechanism 28 produces cuts or convection current etc., can not arrive workpiece exchange part 33, workpiece exchange part 33 can remain peace and quiet environment.
And, in order to the efficiency of the exhausts such as the waste water that produces when improving wafer cutting processing or mist, as as shown in Fig. 9 (a) ~ (b), in the exhaust gear 38 in device and even drainage mechanism 36, by the both sides otch of this exhaust gear 38 or drainage mechanism 36.Thus, as mentioned above, the cutting water splashed by wafer cutting processing or mist etc. are from Road narrows on both sides, touch the inwall that width is narrower, easily focus in exhaust gear 38, in addition, water vent narrows equally, touches the inwall that width is narrower, easily focuses in drainage mechanism 36.
In addition, in Fig. 8 (b), Fig. 9 (b), device framework is formed as dotted line, and the wall of device inside as shown in the figure, also can narrow in draining, exhaust gear 36,38 part according to from main axle moving mechanism 28, the mode of narrowed width is formed.Although the occupied area of device becomes large, drainage efficiency, exhaust efficiency in, the action effect of essence does not change.
Then, in drainage efficiency, in order to improve drainage efficiency further, then more effective as the structure shown in Figure 10 (a), 10 (b), 10 (c).This Figure 10 (b) is the sectional view along the Y-Y line in this Figure 10 (a), and this Figure 10 (c) is the local wide figure partly representing this Figure 10 (b) in detail.As shown in this Figure 10 (b), according to along work stage conveyer 26, the mode of drainage mechanism 36 side step-down tilts.The position of workpiece exchange part 33 is positioned at highest point, and from here through main axle moving mechanism 28, and then tilt through drainage mechanism 36, drainage mechanism 36 is positioned at lowest part.Workpiece drops in workpiece exchange part 33, carries out the cutting processing of workpiece in the place of reporting to the leadship after accomplishing a task with main axle moving mechanism 28.After work piece cut process finishing, return workpiece exchange part 33.
Returning in the way of workpiece switch from main axle moving mechanism 28, there is curtain brush 39.And from curtain brush 39 to workpiece switch, there is pouring atomizing nozzle (multiple nozzles) 51.As the action effect of curtain brush 39, there are following 2 points.
An action effect is, by curtain brush 39, carries out Environmental blocking to main axle moving mechanism 28 part of processing work and certain workpiece switch of workpiece exchange part 33.Particularly when the cutting processing of workpiece, most cutting water is splashed to drainage mechanism 36 part and is recovered.But the mist of a part flies upward cutting processing part, according to circumstances, likely can be by convection into the workpiece switch before device.Between main axle moving mechanism 28 part and workpiece switch, have curtain brush 39, this curtain brush 39 blocks and cuts the mist of water and makes it can not arrive workpiece switch, is separated in work pieces process position and the Environmental ground of workpiece switch.
In addition, here, be provided with the occasion of above-mentioned curtain brush 39, in the schemes such as above-mentioned Fig. 9 (b), with the part from this curtain brush 39 and main axle moving mechanism 28 close to draining, exhaust gear 36,38, according to the width of narrower width setting device framework, thus, to workpiece switch disperse above-mentioned a part of mist of being blocked by curtain brush 39 also flow velocity increase, be pooled to exhaust gear 38 simultaneously, effectively can be vented from this exhaust gear 38.
Second action effect is, at the workpiece that main axle moving mechanism 28 part cutting processing completes, piles up on the workpiece and has chip or sludge.The effect that the chip of piling up like this brushes off by the brush with curtain brush 39.But, if brush front end continues, with this state contacts wafer (workpiece) surface, wafer surface to be injured.Particularly, the state brush with sludge on wafer rubs, and sludge can scratch wafer surface, by damage to wafers.
In order to avoid this situation, from the upstream side of curtain brush 39, namely near workpiece switch, with pouring atomizing nozzle 51, spraying is dropped on wafer, along the work stage 24 being loaded with workpiece, and along surface of the work, namely wafer surface forms current, simultaneously by below curtain brush 39, wafer is returned workpiece switch.Thus, the front end of curtain brush 39 is contacted by water, therefore can not because of the sludge friction wafer surface on wafer, and curtain brush 39 is while brushing lightly sludge, and sludge flows away downstream.As a result, can not damage wafers surface, can effectively remove chip and sludge.
Here, from the water spray drenching atomizing nozzle 51 ejection, from the more upstream side of curtain brush 39, supply along wafer or along work stage 24, but also can, from the upside of curtain brush 39, this curtain brush 39 be supplied containing while water.In this occasion, on wafer, be not strictly along the current of wafer, rinse with the water comprised in curtain brush 39, not direct friction wafer surface when sludge is cleared away by curtain brush 39, is removed sludge by water, in this point, obtains same action effect.
In addition, make pouring atomizing nozzle 51 relative to wafer support with favored policy, to make current direction drainage mechanism 36 side, thus, also have the situation that need not tilt from workpiece switch to drainage mechanism 36.But in order to remove the sludge of wafer surface, the water yield is more, has water in a way and reflects back back wafer surface, the situation of sludge effectively cannot be rinsed.
By wafer inclination, here, as the system making the same inclination from workpiece switch to drainage mechanism 36, for the sludge that wafer surface is adhered to, from the upstream of curtain brush 39 along wafer for feedwater, thus, even if a small amount of water also can cover wafers surface effectively, and mobile landing.In this state, by using curtain brush 39 to rinse, the situation on curtain brush 39 contact wafer surface gently in current can be formed ingeniously, have and effectively remove sludge.
As a result, even if a small amount of water, also as Figure 10 (c) expands expression, by the surface tension of wafer surface, water spreads on wafer, because gravity is from landing wafer, thus, and cover wafers surface effectively, and intactly landing.Further, by using such water cover wafers surface, the sludge that curtain brush 39 scans out effectively can be rinsed.
As the material of curtain brush 39, use nylon fiber etc.In addition, because the workpiece after cutting processing is sometimes with electrostatic, so also can carbon fiber etc. be used.In the occasion of carbon fiber, except removing the sludge on wafer, also need to remove the electrostatic in wafer surface, so one end ground connection be absolutely necessary.
Nylon fiber can use such as, by the nylon bruss of 0.1mm diameter or 0.2mm diameter, to pass across the form of work stage conveyer 26, is linearly bundled in the mode etc. on curtain densely.The length of nylon bruss is about 100mm, and preferably on work stage conveyer 26, the front end of workpiece (wafer) surface contact brush, workpiece automatically slides into workpiece switch simultaneously.
The supply of pure water be from workpiece switch to curtain brush 39 supply, be provided with and drench atomizing nozzle 51 crossing the such place of workpiece, from here, to hide form below curtain brush 39 for feedwater.Such as, in the occasion of 300mm wafer, the flow of the water of use is 2L/min degree.By the supply of the water of this degree, not only can enlist the services of whole of wafer, and pass through the supply of this water, moisture film can be formed in wafer surface.
And then, by making work stage conveyer 26 tilt, compared with horizontal plane, essence can shorten plan range.Thus, even the distance of identical work stage conveyer 26, topple over up and down, make it tilt, can seek to save space.As the angle making work stage conveyer 26 tilt, if water will be made slowly to move, only tilt 3 ° ~ about 5 ° just effective, but the occasion etc. of a small amount of water high velocity effect to be made, the wide-angles such as 45 ° ~ 60 ° can be set.
As long as the cutter sweep with dewatering exhaust mechanism that the present invention's main axle moving mechanism and work stage conveyer mutually intersect vertically and configure, all applicable.
Claims (7)
1. the cutter sweep with dewatering exhaust mechanism, it comprises the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, it is characterized in that: be equipped with drainage mechanism, this drainage mechanism has discharge outlet, this discharge outlet is when the cut-out of above-mentioned workpiece, be positioned at the basic along on long line of the discharge direction of the cutting water dispersed by insert in edge, this drainage mechanism has the device inwall with narrowing gradually from insert close to above-mentioned discharge outlet width.
2. the cutter sweep with dewatering exhaust mechanism, it comprises: the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer arranged mutual vertically, it is characterized in that:
Be equipped with exhaust gear, this exhaust gear has exhaust outlet, this exhaust outlet is when the cut-out of above-mentioned workpiece, be positioned at discharge direction basic along on long line along the cutting water dispersed by insert and mist, this exhaust gear has the device inwall with narrowing gradually from insert close to above-mentioned exhaust outlet width.
3. the cutter sweep with dewatering exhaust mechanism, it comprises: the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, it rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer arranged mutual vertically, it is characterized in that:
Above-mentioned main axle moving mechanism and work stage conveyer are configured in and are formed as on two diagonal of the quadra overlooking the cutter sweep be square, the discharge direction along the cutting water dispersed by insert and mist when the cut-out of above-mentioned workpiece basic along long line being equipped with the drainage mechanism with discharge outlet, there is the exhaust gear of exhaust outlet, this drainage mechanism and exhaust gear have the drainage channel with narrowing gradually close to above-mentioned discharge outlet width, and, above-mentioned exhaust gear has the exhaust channel with narrowing gradually close to above-mentioned exhaust outlet width, on the diagonal of the above-mentioned drainage mechanism of configuration, the opposition side of this drainage mechanism arranges workpiece exchange part.
4. the cutter sweep with dewatering exhaust mechanism, it comprises: the work stage of loading workpiece; Cut off the blade of this workpiece; Work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert; Main shaft, rotatably installs insert; Support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer arranged mutual vertically, it is characterized in that:
Above-mentioned main axle moving mechanism and work stage conveyer are configured in and are formed as on two diagonal of the quadra overlooking the cutter sweep be square, the discharge direction along the cutting water dispersed by insert and mist when the cut-out of above-mentioned workpiece basic along long line being equipped with the drainage mechanism with discharge outlet, there is the exhaust gear of exhaust outlet, this drainage mechanism and exhaust gear have the drainage channel with narrowing gradually close to above-mentioned exhaust outlet width, and, above-mentioned exhaust gear has the exhaust channel with narrowing gradually close to above-mentioned exhaust outlet width, further, receive the food tray of the cutting water flowed out from above-mentioned workpiece to arrange around the mode of above-mentioned work stage delivering mechanism, this food tray is formed as width at above-mentioned cutting workpiece Working position and broadens, simultaneously, the mode narrowed gradually with width with the above-mentioned drainage mechanism in the face of being connected with this food tray is formed.
5. an environment control method for the cutter sweep with dewatering exhaust mechanism, this cutter sweep comprises: the work stage of loading workpiece, cut off the blade of this workpiece, work stage conveyer, this mechanism makes the workpiece in above-mentioned work stage move relative to insert, main shaft, rotatably installs insert, support the main axle moving mechanism of this main shaft in a movable manner, this main axle moving mechanism and above-mentioned work stage conveyer are arranged mutual vertically, above-mentioned main axle moving mechanism and work stage conveyer are configured in and are formed as on two diagonal of the quadra overlooking the cutter sweep be square, the discharge direction along the cutting water dispersed by insert and mist when the cut-out of above-mentioned workpiece basic along long line being equipped with the drainage mechanism with discharge outlet, there is the exhaust gear of exhaust outlet, it is characterized in that, according to main axle moving mechanism, the area of space being provided with workpiece exchange part is isolated from the area of space of the mist that disperses, when cutting off workpiece with insert, after flowing directly into above-mentioned drainage mechanism and exhaust gear respectively along the cutting water dispersed by the rotation of this blade and mist, narrow while discharge by cutting water and mist while in the face of above-mentioned discharge outlet and exhaust outlet.
6. the cutter sweep of the band dewatering exhaust mechanism according to any one of Claims 1 to 4, it is characterized in that: while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, the workpiece switch exchanging above-mentioned workpiece is positioned at one end of above-mentioned work stage conveyer, above-mentioned drainage mechanism is positioned at the other end of above-mentioned work stage conveyer, above-mentioned cutter sweep also has curtain brush, the above-mentioned work stage conveyer of this curtain brush crosscut, between above-mentioned workpiece switch and above-mentioned work pieces process position, this curtain brush is when workpiece moves from above-mentioned Work treatment installation to above-mentioned workpiece switch, contact surface of the work, there is following apparatus framework, close wherein with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism, device frame width broadens, simultaneously, close with from above-mentioned main axle moving mechanism to above-mentioned drainage mechanism, this device frame narrowed width.
7. the cutter sweep of the band dewatering exhaust mechanism according to any one of Claims 1 to 4, it is characterized in that: while the Work treatment installation processing above-mentioned workpiece is positioned at basic device central portion, the workpiece switch exchanging above-mentioned workpiece is positioned at one end of above-mentioned work stage conveyer, above-mentioned drainage mechanism is positioned at the other end of above-mentioned work stage conveyer, above-mentioned cutter sweep also has curtain brush, the above-mentioned work stage conveyer of this curtain brush crosscut, between above-mentioned workpiece switch and above-mentioned work pieces process position, this curtain brush is when workpiece moves from above-mentioned Work treatment installation to above-mentioned workpiece switch, contact surface of the work, there is following apparatus framework, close wherein with from above-mentioned workpiece switch to above-mentioned main axle moving mechanism, device frame width broadens, simultaneously, the above-mentioned work stage delivering mechanism of crosscut, with from curtain brush and above-mentioned main axle moving mechanism close to above-mentioned drainage mechanism, this device frame narrowed width.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009107129 | 2009-04-24 | ||
| JP2009-107129 | 2009-04-24 | ||
| JP2010092565A JP5495911B2 (en) | 2009-04-24 | 2010-04-13 | Dicing apparatus, dicing apparatus with drainage exhaust mechanism, and environmental control method thereof |
| JP2010-092565 | 2010-04-13 |
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| Publication Number | Publication Date |
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| CN101870141A CN101870141A (en) | 2010-10-27 |
| CN101870141B true CN101870141B (en) | 2015-07-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201010158757.5A Active CN101870141B (en) | 2009-04-24 | 2010-04-23 | Cutting device, cutting device having dewatering exhaust mechanism and environment control method |
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| JP5660903B2 (en) * | 2011-01-19 | 2015-01-28 | 株式会社ディスコ | Processing equipment |
| JP6441704B2 (en) * | 2015-02-10 | 2018-12-19 | 株式会社ディスコ | Cutting equipment |
| CN117901279A (en) * | 2024-03-07 | 2024-04-19 | 山东赫宸智能装备有限公司 | Automatic stone machining device and machining method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0474607A (en) * | 1990-07-17 | 1992-03-10 | Disco Abrasive Syst Ltd | Cutting device |
| JPH06275712A (en) * | 1993-03-24 | 1994-09-30 | Nec Kansai Ltd | Dicing apparatus |
| JPH07106284A (en) * | 1993-10-01 | 1995-04-21 | Sony Corp | Dicing equipment |
| JPH10263984A (en) * | 1997-03-28 | 1998-10-06 | Disco Abrasive Syst Ltd | Cutting water splash preventing device |
| JP2007088157A (en) * | 2005-09-21 | 2007-04-05 | Disco Abrasive Syst Ltd | Cutting device |
| JP2007130730A (en) * | 2005-11-11 | 2007-05-31 | Disco Abrasive Syst Ltd | Cutting device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5127825B2 (en) * | 2006-09-28 | 2013-01-23 | コーニングジャパン株式会社 | Edge processing apparatus and method for sheets made of brittle materials |
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2010
- 2010-04-23 CN CN201010158757.5A patent/CN101870141B/en active Active
- 2010-04-23 KR KR1020100037895A patent/KR101560357B1/en active IP Right Grant
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0474607A (en) * | 1990-07-17 | 1992-03-10 | Disco Abrasive Syst Ltd | Cutting device |
| JPH06275712A (en) * | 1993-03-24 | 1994-09-30 | Nec Kansai Ltd | Dicing apparatus |
| JPH07106284A (en) * | 1993-10-01 | 1995-04-21 | Sony Corp | Dicing equipment |
| JPH10263984A (en) * | 1997-03-28 | 1998-10-06 | Disco Abrasive Syst Ltd | Cutting water splash preventing device |
| JP2007088157A (en) * | 2005-09-21 | 2007-04-05 | Disco Abrasive Syst Ltd | Cutting device |
| JP2007130730A (en) * | 2005-11-11 | 2007-05-31 | Disco Abrasive Syst Ltd | Cutting device |
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| CN101870141A (en) | 2010-10-27 |
| KR101560357B1 (en) | 2015-10-14 |
| KR20100117534A (en) | 2010-11-03 |
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