JP2004273696A - Cutting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting apparatus which reliably removes cutting refuse stuck to a protection sheet covering the top surface of a bellows mechanism. <P>SOLUTION: The cutting apparatus is provided with a chuck table to be reciprocated, a cutting means for cutting a workpiece held on the chuck table while supplying working water, a draining means provided with a drain path arranged along the moving direction of the chuck table, the bellows mechanism 62 having its one end fitted to the chuck table and the other end fitted to a standstill member, the protection sheet 75 which covers the top surface of the bellows mechanism 62 and has its one end fitted to the chuck table, a winding means disposed on the front side for winding up or out the protection sheet with moving of the chuck table, and a cutting refuse collection means 90 for collecting the cutting refuse having fallen onto the protection sheet and carried by the protection sheet. In addition, the cutting refuse collection means 90 is provided with a water tub 91 housing water, and the winding means is constituted so that the protection sheet may pass through the inside of the water tub. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a cutting device, and more particularly, but not exclusively, to a cutting device suitable for cutting a chip size package substrate having a plurality of semiconductor chips arranged in a matrix along predetermined streets.
[0002]
[Prior art]
In a semiconductor device manufacturing process, circuits such as ICs and LSIs are formed in a large number of regions arranged in a lattice on the surface of a semiconductor wafer having a substantially disk shape, and each region where the circuits are formed is formed into a predetermined street. Individual semiconductor chips are manufactured by dicing along a cutting line called "cutting line". The semiconductor chips thus divided are packaged and widely used for electric devices such as mobile phones and personal computers.
[0003]
In recent years, electric devices such as mobile phones and personal computers have been required to be lighter and smaller, and a package technology of a semiconductor chip package called a chip size package (CSP) has been developed. In the CSP technique, a plurality of connection terminals corresponding to connection terminals of a semiconductor chip are formed, and a plurality of semiconductor chips are arranged in a matrix on a wiring board on which streets for each semiconductor chip are formed in a grid pattern. Then, the CSP substrate is formed by integrating the wiring substrate and the semiconductor chip with a resin layer in which resin is molded from the back surface side of the semiconductor chip. The CSP substrate is cut along the streets to be divided into individually packaged chip size packages (CSP).
[0004]
The CSP substrate is cut by a precision cutting device generally called a dicing device. This cutting device includes a chuck table that is reciprocated and cutting means for cutting a workpiece held on the chuck table. The cutting means is composed of a disk-shaped rotating blade containing diamond particles. Further, the cutting means is provided with processing water supply means for supplying processing water which may be pure water. When the chuck table moves forward and / or backward, a rotating blade acts on the CSP substrate on the chuck table, and the CSP substrate is cut. A reciprocating mechanism for reciprocating the chuck table includes a rotatable screw shaft extending in the reciprocating direction and a female screw member screwed to the screw shaft. It is installed. The screw shaft and the female screw member are so-called precision mechanical elements, and it is necessary to prevent chips and / or processing water from adhering to the mechanical elements. Due to the rotation direction of the rotating blade, the cutting chips and processing water mainly rotate in one direction when viewed in the reciprocating direction of the chuck table, for example, in a direction in which a portion acting on the CSP substrate moves in the forward direction of the chuck table. Is rotated, it is scattered downstream in the forward direction of the chuck table. Part of the processing water becomes fog and scatters upstream as viewed in the forward movement direction of the chuck table. Therefore, a bellows mechanism is provided on at least one side, usually both sides, as viewed in the reciprocating direction of the chuck table, and covers precision mechanical elements such as a screw shaft. When the chuck table moves forward or backward, the bellows mechanism arranged on the downstream side in the forward movement direction of the chuck table is contracted, and the bellows mechanism arranged on the upstream side is extended. When the chuck table moves back, the bellows mechanism arranged on the upstream side in the forward movement direction of the chuck table is contracted, and the bellows mechanism arranged on the downstream side is extended.
[0005]
When the CSP substrate is cut by the above-described cutting device, there is a so-called ear portion on which no CSP is formed at the edge of the CSP substrate. When the rotary blade is rotated in a direction in which the portion acting on the CSP substrate moves in the forward direction of the chuck table, a bellows disposed on the downstream side in the forward direction of the chuck table. It is scattered on the mechanism. Relatively large cuttings scattered on the bellows mechanism tend to inhibit smooth contraction and extension of the bellows mechanism. Bellows mechanisms are usually made of cloth or similar sheet material because they need to be able to contract and stretch smoothly. Therefore, there is a possibility that relatively large cutting chips scattered on the bellows mechanism may cause damage such as a hole in the bellows means.
[0006]
In order to solve the above-mentioned problem, a protective sheet for covering the upper surface of the bellows mechanism is provided, and the protective sheet is appropriately wound up with the reciprocation of the chuck table, and thus with the contraction and extension of the bellows mechanism. And a cutting device configured to be unwound. (For example, refer to Patent Document 1.)
[0007]
[Patent Document 1]
Japanese Patent Application Laid-Open No. 2002-239888
[Problems to be solved by the invention]
Therefore, it is difficult to reliably remove the cutting debris attached to the protection sheet covering the upper surface of the bellows mechanism in the apparatus disclosed in the above publication.
[0009]
The present invention has been made in view of the above-described circumstances, and a main technical problem thereof is to provide a cutting device capable of reliably removing cutting debris attached to a protective sheet covering an upper surface of a bellows mechanism.
[0010]
[Means for Solving the Problems]
In order to solve the main technical problem, according to the present invention, a chuck table that is reciprocated, cutting means for cutting a workpiece held on the chuck table while supplying processing water, A drainage means having a drainage channel arranged along the direction of movement of the chuck table, a bellows mechanism having one end attached to the chuck table and the other end attached to a stationary member, and one end covering the upper surface of the bellows mechanism A protection sheet attached to the chuck table; winding means disposed in front of the drainage means for winding or unwinding the protection sheet with movement of the chuck table; And a cutting waste collecting means for collecting the cutting waste conveyed by the protection sheet,
The cutting waste collecting means includes a water tank containing water,
The winding means is configured such that a part of the protection sheet passes through the water tank.
A cutting device is provided.
[0011]
It is preferable that the drainage unit includes a cutting chip falling prevention unit for preventing cutting chips scattered on the protection sheet from falling into the drainage channel.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a preferred embodiment of a cutting apparatus configured according to the present invention will be described in more detail with reference to the accompanying drawings.
[0013]
FIG. 1 illustrates a preferred embodiment of a cutting machine constructed according to the present invention. The cutting device, generally designated by the numeral 2, comprises a housing 4 on which a waiting area 6, a chucking area 8, an alignment area 10, a cutting area 12, and a cleaning and drying area 14 are defined. . The workpiece to be cut is carried into the waiting area 6 by a suitable carrying means (not shown).
[0014]
FIG. 2 shows a typical example of a workpiece to be carried into the waiting area 6. The illustrated workpiece is a CSP substrate 16, and the CSP substrate 16 has a rectangular synthetic resin substrate 18. Streets 20 are arranged in a lattice on the synthetic resin substrate 18, and a plurality of (32 in the illustrated case) rectangular areas are defined by the streets 20. The CSP 22 is provided in each of the rectangular areas. At the four peripheral edges of the synthetic resin substrate 18, there are so-called ears 24 where no CSP is formed. In the illustrated embodiment, the CSP board 16 is not carried by itself into the waiting area 6, but the CSP board 16 is placed on a mounting jig 26 and carried into the waiting area 6. The mounting jig 26, which can be formed from an appropriate metal plate, has a rectangular plate shape somewhat larger than the CSP substrate 16. At the center of the upper surface of the mounting jig 26, grooves 28 are arranged in a lattice pattern, and a plurality of (32 in the illustrated case) rectangular areas 30 are defined by the grooves 28. Each of the rectangular regions 30 corresponds to each of the CSPs 22 on the CSP substrate 16, and the dimensions of the rectangular regions 30 in the plan view are substantially the same as the dimensions of the CSPs 22. Each of the rectangular areas 30 of the mounting jig 26 has a suction hole 32 penetrated in the thickness direction. A suction groove (not shown) connecting all the suction holes 32 is formed on the back surface of the mounting jig 26. The CSP board 16 is placed on the mounting jig 26 by aligning each of the plurality of CSPs 22 with each of the rectangular regions 30 of the mounting jig 26. Then, the mounting jig 26 on which the CSP substrate 16 is mounted is carried into the standby area 6 of the cutting device 2.
[0015]
Referring again to FIG. 1, the first transport means 34 is provided in association with the standby area 6, the chucking area 8, and the cleaning and drying area 14. The first transport unit 34 sucks the mounting jig 26 carried into the standby area 6 and transports the mounting jig 26 and the CSP board 16 placed on the upper surface thereof to the chucking area 8, It is placed on the chuck table 36 located in the chucking area 8. The chuck table 36 in the illustrated embodiment has a rectangular suction plate 38 that is slightly larger than the mounting jig 26. A rectangular suction opening 40 is formed in the center of the suction board 38, and the tip of a suction pipe 42 is opened in the suction opening 40. When the mounting jig 26 is carried into the suction table 38 of the chuck table 36, the suction pipe 42 is communicated with a vacuum source (not shown), whereby the mounting jig 26 is vacuum-sucked on the suction table 38. Then, since each of the suction holes 32 formed in the mounting jig 26 is connected to a vacuum source, the CSP substrate 16 (more specifically, each of the CSPs 22) is vacuum-sucked to the mounting jig 26.
[0016]
The chuck table 36 is reciprocally movable in the directions indicated by arrows 44 and 46 in FIG. 1 (the reciprocation of the chuck table 36 will be further described later), and is further centered on a substantially vertical center axis. It is arranged rotatably as. When the mounting jig 26 is placed on the chuck table 36 in the chucking area 8 and vacuum-sucked, the chuck table 36 is moved forward in the direction indicated by the arrow 44 and the CSP substrate 16 on the mounting jig 26 is aligned. It is located in area 10. An imaging unit 48 having a microscope or the like is provided in the alignment area 10, and the surface of the CSP substrate 16 is imaged by the imaging unit 48. By analyzing the captured image, the arrangement state of the CSP board 16, more specifically, the position of each of the streets 20 on the CSP board 16, that is, the X direction which is the reciprocating directions 44 and 46 of the chuck table 36 and the X direction Is recognized, and the inclination of the street 20 with respect to the reciprocating directions 44 and 46 of the chuck table 36 is recognized. The image picked up by the image pick-up means 48 is also displayed on a monitor 50 provided on the housing 4.
[0017]
Next, the chuck table 36 is moved to the cutting area 12, and the CSP substrate 16 is cut. A cutting means 52 is provided in connection with the cutting area 12. The cutting means 52 in the illustrated embodiment is composed of a rotating blade 56 fixed to the tip of a rotating shaft 54 extending substantially horizontally. The rotary blade 56 may be a thin disk-shaped cutting blade containing diamond particles. The cutting means 52 is also provided with a processing water supply means 58 for supplying processing water such as pure water. The cutting of the CSP substrate 16 is performed as follows. First, the extending direction of the plurality of streets 20 extending in the first direction on the CSP substrate 16 is set precisely parallel to the reciprocating directions 44 (X direction) and 46 of the chuck table 36, and Twenty specific one Y-direction positions are precisely aligned with the Y-direction position of the rotary cutting blade 56. At the time of this alignment, the analysis result of the image of the surface of the CSP board 16 imaged by the imaging means 48 is used. Thereafter, the rotating blade 56 positioned at a predetermined height is moved in the direction indicated by the arrow 60 (ie, the direction in which the lower end of the rotating blade 56 acting on the CSP substrate 16 moves in the forward movement direction 44 of the chuck table 36). And the chuck table 36 is moved forward in the direction indicated by the arrow 44, and the CSP substrate 16 is cut along the specific cutting street 20 by the action of the rotating blade 56 (the CSP substrate 16 by the rotating blade 56). Will be further mentioned later). A portion of the rotating blade 56 that cuts the CSP substrate 16 and protrudes downward beyond the lower surface of the CSP substrate 16 is located in a groove 28 provided on the upper surface of the mounting jig 26. When the CSP substrate 16 is cut by the rotating blade 56, the processing water supply unit 58 supplies processing water. When the cutting along one cutting street 20 is completed, the rotating shaft 54 to which the rotating blade 56 is fixed is raised to the inoperative position, and the chuck table 36 is moved back to the required position in the direction indicated by the arrow 46. Can be Then, the rotating blade 56 and the rotating shaft 54 are indexed and fed by a predetermined amount in the direction indicated by the arrow Y which is the indexing direction, and the rotating blade 56 and the rotating shaft 54 are lowered to a predetermined position. Thereafter, the chuck table 36 is moved forward again, and the CSP substrate 16 is cut along the next street 20. When the CSP substrate 16 is cut along the plurality of streets 20 extending in the first direction in this manner, the chuck table 36 is rotated over an angle range of 90 degrees, and the chuck table 36 is rotated in the second direction until then. The plurality of streets 20 extending in the second direction at right angles are positioned so as to extend in the X direction. Then, the CSP substrate 16 is cut along each of the plurality of streets 20 extending in the second direction.
[0018]
After the CSP substrate 16 is cut as required in the cutting area 12, the chuck table 36 is returned to the chucking area 8. A second transport means 61 is provided in connection with the chucking zone 8 and the washing and drying zone 14. The second transfer means 61 sucks and holds the mounting jig 26 on the chuck table 36, and cleans and mounts the mounting jig 26 and the CSP substrate 16 already cut along the street 20 placed thereon. The wafer is conveyed to the drying area 14 and placed on chuck means (not shown) disposed in the cleaning and drying area 14. Then, the mounting jig 26 and the cut CSP substrate 16 existing thereon are cleaned and dried by cleaning and drying means (not shown) provided in the cleaning and drying area 14. Thereafter, the mounting jig 26 and the cut CSP board 16 existing thereon are conveyed to the standby area 6 by the first conveying means 34. Then, the mounting jig 26 and the cut CSP board 16 thereon are transported, for example, individually cut CSPs 22 from the mounting jig 26 to the storage case by an appropriate carrying-out means (not shown). To a transfer device (not shown).
[0019]
Continuing the description with reference to FIG. 1, in the illustrated embodiment, the chuck table 36 is positioned at one end located upstream of the alignment area 10 shown in FIG. And the other end position is reciprocally movable in the directions indicated by arrows 44 and 46. The chuck table 36 is provided with a reciprocating mechanism (not shown) for reciprocating the chuck table 36. The reciprocating mechanism, which may be in a known form per se, includes a screw shaft rotatably mounted below the chuck table 36. The screw shaft extends in the reciprocating directions 44 and 46 of the chuck table 36. A female screw member is fixed to the chuck table 36, and the female female member is screwed to a screw shaft. Accordingly, the chuck table 36 moves forward in the direction indicated by the arrow 44 along the screw axis in accordance with the forward rotation of the screw shaft, and the chuck table 36 moves in the direction indicated by the arrow 46 in accordance with the reverse rotation of the screw axis. Is reactivated. The screw shaft and the female screw member in such a reciprocating mechanism are precision mechanical elements and need to be protected from cutting chips generated in the cutting area 12 and processing water supplied in the cutting area 12.
[0020]
Referring to FIGS. 3 to 5 together with FIG. 1, in the illustrated embodiment, bellows mechanisms 62 and 64 are disposed on both sides of the chuck table 36 when viewed in the reciprocating direction of the chuck table 36. Precision mechanical elements such as a screw shaft and a female screw member in the reciprocating mechanism are covered by a first bellows mechanism 62 and a second bellows mechanism 64 disposed on both sides thereof together with the chuck table 36 itself. The first bellows mechanism 62 has a plurality of peaks and valleys alternately formed by a foldable sheet member such as cloth and is configured to be stretchable. The connecting members 622 and 623 can be formed from a metal plate. The bellows member 621 thus configured is connected to a stationary member (not shown) located on the upstream side when the chuck table 36 is positioned at the one end position, and the connecting member 623 is connected to the connecting member 622. It is connected to the upstream side surface of the chuck table 36. The first bellows mechanism 62 constituted by the bellows member 621 and the connecting members 622 and 623 has an inverted channel-shaped cross section. The bellows member 621 of the first bellows mechanism 62 configured as described above, when the chuck table 36 is moved in the direction indicated by the arrow 44 from the one end position to the other end position, when the chuck table 36 is moved forward. When the chuck table 36 is moved backward from the other end position toward the one end position, the chuck table 36 is gradually contracted.
[0021]
Next, the second bellows mechanism 64 will be described with reference to FIG.
Similarly to the first bellows mechanism 62, the second bellows mechanism 64 includes a bellows member 641 and connection members 642, 643 mounted on both ends of the bellows member 641 and formed from a metal plate. I have. The bellows member 641 is formed of a plurality of ridges and valleys alternately by a foldable sheet member such as cloth similarly to the bellows member 621 of the first bellows mechanism 62, and is configured to be stretchable, and has an inverted channel shape. It has a cross-sectional shape. The connecting member 642 attached to one end of the bellows member 641 of the second bellows mechanism 64 configured as described above, that is, the end on the chuck table 36 side is connected to the downstream side surface of the chuck table 36. The connecting member 643 attached to the other end of the bellows member 641, that is, the end opposite to the chuck table 36 side is attached to a stationary member described later. Accordingly, the bellows member 641 constituting the second bellows mechanism 64 moves the chuck table 36 forward in the direction indicated by the arrow 44 from the one end position to the other end position. And the chuck table 36 is gradually extended when the chuck table 36 is moved backward from the other end position toward the one end position.
[0022]
Continuing the description with reference to FIGS. 3 to 5, on both sides of the chuck table 36, the first bellows mechanism 62, and the second bellows mechanism 64, drainage means 66 are provided along the moving direction of the chuck table 36. Are arranged. The drainage means 66 includes a partition member 67 and partition plates 681 and 682. The partition member 67 has a bottom wall 671 and both side walls 672 and 673 extending upward from both side edges thereof. A support mechanism (not shown) that supports the chuck table 36 in a reciprocating manner is provided on the bottom wall 671. Notch 671a is formed to allow the movement of. The partition plates 681 and 682 are mounted on the upper surface of the bottom wall 671 of the partition member 67 in parallel with the side walls 672 and 673, respectively, as shown in FIG. Accordingly, on the bottom wall 671 of the partition member 67, a drain passage 661 formed by the side wall 672 and the partition plate 681, and a drain passage 662 formed by the side wall 673 and the partition plate 682 are formed. The interval between the partition plates 681 and 682 is set to a value smaller than the width L1 of the bellows member 641 constituting the bellows mechanism 64. Therefore, the partition plates 681 and 682 are surrounded by the bellows member 641 whose cross-sectional shape is an inverted channel. As will be described later, the processing water scatters in the drainage channels 661 and 662. In order to cause the processing water to flow downstream as viewed in the forward movement direction 44 of the chuck table 36, the partition member 67 is moved forward and backward of the chuck table 36. It is desirable to be inclined slightly downward toward the downstream as viewed in the moving direction 44. Note that drain holes 671b, 671b are provided at the downstream end of the bottom wall 671. In the illustrated embodiment, a mounting plate 683 serving as a stationary member that connects the partition plates 681 and 682 is mounted on downstream end surfaces of the partition plates 681 and 682. The connecting member 645 attached to the bellows member 641 constituting the second bellows mechanism 64 is attached to the attachment plate 683 by the fastening bolt 69.
[0023]
The drainage means 66 in the illustrated embodiment is provided with cutting chip fall prevention means 70 for preventing cutting chips scattered on a protective sheet described later from falling into the drainage channels 661 and 662. The cutting chip falling prevention means 70 includes shielding members 71 and 72 disposed on both side walls 672 and 673 of the partition member 67, respectively. The shielding members 71 and 72 are respectively provided with mounting portions 711 and 721 provided with fitting grooves 711 a and 721 a that are fitted to upper ends of both side walls 672 and 673 of the partition member 67, and from the upper ends of the mounting portions 711 and 721, respectively. The cover parts 712 and 722 extend horizontally inward, and the chip control parts 713 and 723 extend obliquely downward from the inner edges of the cover parts 712 and 722, and are integrally formed of an appropriate synthetic resin. The shielding members 71 and 72 formed in this manner fit the fitting grooves 711a and 721a of the mounting portions 711 and 721 into the upper end portions of both side walls 672 and 673 of the partition member 67 as shown in FIGS. By doing so, it is mounted on the partition member 67.
[0024]
Referring to FIGS. 3 and 6, in the illustrated embodiment, in order to protect the bellows member 641 of the second bellows mechanism 64 from cuttings including relatively large cuttings, the second bellows mechanism is used. A protection sheet 75 that covers the upper surface of the light guide 64 is provided. A connecting member 76 is fixed to one end of the protection sheet 75, and the connecting member 76 is attached to one edge of the upper surface of the chuck table 36 by an appropriate fixing means. The protective sheet 75 can be formed from a flexible synthetic resin sheet such as a polyester sheet or a polyethylene terephthalate sheet. The connecting member 76 is also formed of a suitable synthetic resin having flexibility. The width L2 of the protection sheet 75 is formed larger than the width L1 of the bellows member 641 constituting the bellows mechanism 64.
[0025]
As shown in FIGS. 3 and 6, both sides of the protective sheet 75 configured as described above are below the cutting chip regulating portions 713 and 723 constituting the shielding members 71 and 72 of the cutting chip falling prevention means 70. Arranged along the side. The cutting device in the illustrated embodiment includes a winding means 80 disposed in front of the drainage means 66 for winding or unwinding the protection sheet as the chuck table moves. The winding means 80 in the illustrated embodiment includes a support plate 81 mounted on the front end of the partition member 67 constituting the drainage means 66. The support plate 81 has a predetermined interval on the front surface thereof. A pair of support brackets 82 and 83 are mounted by appropriate fixing means. The pair of support brackets 82 and 83 are rotatably supported by a take-up roll 84 to which the other end of the protection sheet 75 is attached and which winds and unwinds the protection sheet 75. Support rollers 85 and 86 are attached to the front upper end portions of the pair of support brackets 82 and 83 so as to protrude inward. The support rollers 85 and 86 are disposed so as to be inclined downward as they go inward. A guide roll 87 is rotatably supported at the front lower end of the pair of support brackets 82 and 83.
[0026]
The other end of the protective sheet 75 is attached to the winding roll 84 of the winding means 80 configured as described above. That is, the protection sheet 75 is lowered downward through the upper sides of the support rollers 85 and 86, is inverted through the guide roll 87, and the other end is attached to the take-up roll 84. The take-up roll 84 has a built-in coil spring acting in the direction in which the protection sheet 75 is taken up. That is, when the chuck table 36 moves forward in the direction indicated by the arrow 44 in FIG. 3, one end of the protection sheet 75 is moved in the direction indicated by the arrow 44 accompanying the forward movement of the chuck table 36, and this movement is performed. , The protective sheet 75 is gradually wound up by the winding roll 84. On the other hand, when the chuck table 36 moves forward in the direction indicated by the arrow 46 in FIG. 3, one end of the protection sheet 75 is moved in the direction indicated by the arrow 46 accompanying the forward movement of the chuck table 36, and this movement is performed. The protective sheet 75 is gradually unwound from the take-up roll 84 in accordance with. When the protection sheet 75 is wound or unwound as described above, the support rollers 85 and 86 and the guide roll 87 guide the movement of the protection sheet 75. It is to be noted that the support rollers 85 and 86 are disposed so as to be inclined downward as they go inward because the protection sheet 75 located above the second bellows mechanism 64 is wound as shown in FIG. This is because the shape is maintained because the central portion is curved downward due to the habit, the own weight, and the weight of the processing water.
[0027]
Continuing the description with reference to FIG. 3, a cutting waste collecting means 90 is disposed below the downstream end of the partition member 67 constituting the draining means 66. The cutting waste collecting means 90 in the illustrated embodiment includes a water tank 91 through which a part of the protection sheet 75 is passed, a cutting waste conveying means 92, and a cutting waste collecting container 93. The water tank 91 is formed in a box shape having an open upper surface, and a drain hose 912 is connected to an upper portion of the front wall 911. The water tank 91 thus configured is disposed below the downstream end of the partition member 67 constituting the drainage means 66. In the water tank 91, water drained from the drainage ports 671b provided in the drainage channels 661 and 662 is stored, and the guide roll 87 and a part of the protection sheet 75 constituting the winding means 80 are submerged. It has become.
[0028]
The cutting waste conveying means 92 is composed of an endless conveying belt mechanism extending in the width direction of the drainage means 66, and includes a driving roller 921, a driven roller 922, rolling rollers 923, 924, and these rollers. And an endless belt 925 wound around the endless belt. The drive roller 921 is operatively connected to the drive shaft of the electric motor 926, and is driven to rotate in the direction indicated by the arrow 927, whereby the endless belt 825 is driven in the direction indicated by the arrow 927. It is desirable that the endless belt 925, which can be formed of an appropriate material such as synthetic rubber, have a large number of drain holes 925a. In the cutting waste transporting means 92 thus configured, the driven roller 922 and the rolling roller 924 side are disposed below the guide roll 87 constituting the winding means 80 in the water tank 91, and the driving roller 921 side is disposed from the water tank 91. It is arranged to protrude laterally on the upper side. Then, a cutting waste collecting container 93 is arranged below the cutting waste conveying means 92 which is arranged to protrude laterally from the water tank 91.
[0029]
Mainly referring to FIG. 3 together with FIG. 1, the cutting scattered to the downstream side of the chuck table 36 in the forward movement direction 44 of the chuck table 36 due to the cutting of the CSP substrate 16 in the cutting area 12. The debris 95 and the processing water fall onto the protection sheet 75 that covers the upper part of the bellows mechanism 64. Therefore, the cutting waste 95 does not fall directly on the bellows member 641. Therefore, breakage of the bellows member 641 due to the cutting waste 95 is prevented. A part of the processing water dropped on the protection sheet 75 is drained from the gap between the protection sheet 75 and the shielding portions 713 and 723 constituting the shielding members 71 and 72 of the cutting chip falling prevention means 70, and drainage channels 661 and 662. And flows downstream as viewed in the forward movement direction 44 of the chuck table 36. Then, the processing water flows down into the water tank 91 from drain ports 671b, 671b provided at the downstream end of the bottom wall 671 forming the partition member 67. On the other hand, the movement of the cutting waste 95 dropped on the protection sheet 75 to the drainage channels 661 and 662 is restricted by the cutting waste restricting portions 713 and 723 constituting the shielding members 71 and 72 of the cutting waste falling prevention means 70. . Therefore, it is possible to prevent the cutting waste 95 from dropping into the drainage channels 661 and 662.
[0030]
As described above, when the chuck table 36 is moved forward in the forward movement direction 44, one end of the protection sheet 75 holding the cutting waste 95 and the processing water on the upper surface is moved in the forward movement direction 44 accordingly. When one end of the protection sheet 75 moves in the forward movement direction 44, the protection sheet 75 is taken up by the take-up roll 84 of the take-up means 80, so that the cutting waste 95 and the processing water held on the protection sheet 75 are removed from the protection sheet 75. It moves in the forward movement direction 44 together with 75, and falls into the water tank 91 when it passes over the support rollers 85 and 86. At this time, the cutting debris that has adhered to the protection sheet 75 and does not fall is passed through the water tank 91 by the winding of the protection sheet 75 further by the winding roll 84, so that it is reliably removed. The cutting waste 95 dropped in the water tank 91 in this manner is dropped on the endless belt 925 of the cutting waste conveying means 92. The cutting waste 95 dropped on the endless belt 925 is conveyed in the direction indicated by the arrow 927 in association with the movement of the endless belt 925, and is dropped into the cutting waste collection container 93 at a portion where the direction of the endless belt 925 changes.
[0031]
As described above, the present invention has been described based on the illustrated embodiments. However, it is needless to say that the present invention is not limited to the embodiments, and various changes and modifications can be made without departing from the scope of the present invention. No. For example, in the illustrated embodiment, an example in which the present invention is applied to one of the bellows mechanisms arranged on both sides of the chuck table is shown. However, in a case where there is a possibility that cutting chips may scatter to both bellows mechanisms. The present invention may be applied to both bellows mechanisms.
[0032]
As described above, the cutting device according to the present invention is configured as described above, so that the cutting debris adhering to the protective sheet covering the upper surface of the bellows mechanism is removed by winding the protective sheet on a winding roll. Since it passes through the inside and is submerged, it is reliably removed.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an entire cutting apparatus configured according to the present invention.
FIG. 2 is an exploded perspective view showing a CSP substrate cut by the cutting device of FIG. 1 and a mounting jig used to mount the CSP substrate on a chuck table.
FIG. 3 is a partial oblique view showing a bellows mechanism and related means in the cutting apparatus of FIG. 1;
FIG. 4 is an exploded perspective view showing the bellows mechanism and the related means in the cutting device of FIG. 1;
FIG. 5 is a sectional view taken along line AA in FIG. 3;
FIG. 6 is a perspective view showing a protective sheet and a winding means in the cutting device of FIG. 1;
[Explanation of symbols]
2: Cutting device 4: Housing 6: Standby region 8: Chucking region 10: Alignment region 12: Cutting region 14: Cleaning and drying region 16: CSP substrate 20: Cutting street 22: CSP
24: ear 26: mounting jig 36: chuck table 52: cutting means 56: rotating blade 58: processing water supply means 62: first bellows mechanism 621: bellows members 622, 623: connecting member 64: second bellows Mechanism 641: Bellows members 644, 645: Connecting member 66: Drainage means 661, 662: Drainage channel 70: Cutting chip falling prevention means 71, 72: Shielding member 75: Protective sheet 80: Winding means 81: Support plates 82, 83 : Support bracket 84: take-up rolls 85 and 86: support roller 87: guide roll 90: cutting waste collecting means 91: water tank 92: cutting waste conveying means 93: cutting waste collecting container

Claims (2)

A chuck table that is reciprocated; cutting means for cutting the workpiece held on the chuck table while supplying processing water; and a drainage channel disposed along the moving direction of the chuck table. A draining means, a bellows mechanism having one end attached to the chuck table and the other end attached to a stationary member, a protection sheet covering the upper surface of the bellows mechanism and one end attached to the chuck table, and the drainage means. Winding means for winding or unwinding the protection sheet with the movement of the chuck table, and cutting chips falling on the protection sheet and collecting cutting chips conveyed by the protection sheet And a collecting means.
The cutting waste collecting means includes a water tank containing water,
The winding means is configured such that a part of the protection sheet passes through the water tank.
A cutting device characterized by the above-mentioned. The cutting device according to claim 1, wherein the drainage unit includes a chipfall prevention unit configured to prevent chippings scattered on the protection sheet from falling into the drainage channel.

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