JP6054202B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting device having at least four cutting blades.

  For example, in the semiconductor device manufacturing process, circuits such as IC and LSI are formed in a number of regions partitioned by dividing lines called streets formed in a lattice shape on the surface of a semiconductor wafer having a substantially disk shape, Semiconductor chips for each circuit are manufactured by dividing the semiconductor wafer along the division line. As a dividing device for dividing a semiconductor wafer, a cutting device is generally used.

  The cutting apparatus includes a chuck table that holds a workpiece, and a cutting unit that includes a cutting blade that cuts the workpiece held on the chuck table. The cutting blade and the chuck table are relatively moved relative to each other. The workpiece is cut by cutting and feeding the cutting blade into the workpiece.

  For example, a cutting apparatus described in Patent Document 1 below includes a support frame formed in a gate shape so as not to hinder the movement of the chuck table, and detects a position to be cut by imaging a workpiece. The alignment means is disposed on one side of the support frame, and the cutting means is disposed on the other side of the support frame.

  On the other hand, a cutting apparatus including four cutting means has been proposed in order to improve productivity in accordance with the recent increase in the diameter of semiconductor wafers (see, for example, Patent Document 2).

JP 2003-163178 A Japanese Patent Laid-Open No. 11-274109

  However, although the four cutting means can be disposed on both side surfaces of the support frame of Patent Document 1, in such a configuration, it takes time to adjust the positions of the four cutting means, and maintenance is required. It will also be difficult. On the other hand, in a configuration in which four cutting devices are arranged in parallel as in the device described in Patent Document 2, the device area increases and the moving distance of the chuck table during cutting increases. There is a problem that it takes time to cut the line to be divided.

  The present invention has been considered in view of such problems. The purpose of the present invention is to prevent the enlargement of the apparatus due to the increase in the diameter of the workpiece, to enable adjustment and maintenance of the cutting means, and to improve the productivity. There is to make it.

  The present invention relates to an X-axis guide rail extending in the X-axis direction, a chuck table having a holding surface that is movably disposed along the X-axis guide rail and holds a workpiece, and the chuck table as an X-axis. A cutting feed mechanism that cuts and feeds along the guide rail, a gate-type support frame that is disposed across the X-axis guide rail and has an opening that allows movement of the chuck table, and an X on the upper surface of the gate-type support frame A Y-axis guide rail extending in a direction orthogonal to the axis guide rail, and a first cutting unit for cutting a workpiece disposed on the chuck table so as to be movable along the Y-axis guide rail And a second cutting unit, wherein the first cutting unit includes a first cutting means having a first cutting blade and a second cutting means having a second cutting blade. Y axis guide The first cutting means includes a first index feed base movably disposed on the Y-axis guide rail and a first index. A first notch feed base disposed on a side of the support frame that hangs on one side of the support frame so as to be movable in a direction perpendicular to the holding surface of the chuck table; and a first notch feed A first spindle mounted on the base and provided with a first cutting blade, and the second cutting means moves along the Y-axis guide rail at a position not interfering with the first indexing base. The second index feed base that can be arranged and the side that hangs from the second index feed base to the other side of the support frame can move in the direction perpendicular to the holding surface of the chuck table. A second infeed feed base disposed in the A second spindle having a second cutting blade mounted on the cutting feed base, and the first index feed base and the second index feed base are relative to each other in a predetermined distance in the Y-axis direction. The first spindle and the second spindle are suspended and arranged in parallel to the opening of the gate-shaped support frame, with a predetermined interval so as to move to In the second cutting unit, a third cutting means having a third cutting blade and a fourth cutting means having a fourth cutting blade are arranged in parallel so as to be movable along the Y-axis guide rail. The third cutting means comprises a third indexing feed base movably disposed on the Y-axis guide rail, and hanging from the third indexing feed base to one side surface of the support frame. Perpendicular to the holding surface of the chuck table A third cutting feed base movably arranged in a direction, and a third spindle mounted on the third cutting feed base and provided with a third cutting blade, and a fourth cutting The means includes a fourth index feed base disposed so as to be movable along the Y-axis guide rail at a position not interfering with the third index feed base, and the other of the support frame from the fourth index feed base. A fourth notch feed base disposed on a side portion hanging down on the side surface of the chuck table so as to be movable in a direction perpendicular to the holding surface of the chuck table, and a fourth notch feed base mounted on the fourth notch feed base. A fourth spindle provided with a cutting blade, and the third index feed base and the fourth index feed base are spaced apart from each other by a predetermined distance in the Y-axis direction. Arranged on the Y-axis guide rail, and the third spindle and The fourth spindle is suspended and arranged in parallel with the opening of the gate-type support frame, and the first cutting unit and the second cutting unit are arranged facing each other along the Y-axis guide rail. It is installed.

In the cutting apparatus according to the present invention, the first cutting unit and the second cutting unit are configured to be movable along the Y-axis guide rail disposed on the upper surface of the portal-type support frame. Does not become enormous and the rigidity is improved. Therefore, one cutting unit can be configured to include two cutting means, and the apparatus as a whole can be provided with four cutting means. By providing the four cutting means, productivity of cutting can be improved. Can be made.
In addition, the spindles that make up each cutting means are arranged in parallel at the opening of the gate-shaped support frame in a suspended state, so that position adjustment and maintenance are easy, and the time required for such work is reduced. can do.
Further, since the first cutting unit and the second cutting unit are arranged facing each other along the Y-axis guide rail, the moving distance of the chuck table is not increased, and the chuck table can be cut once. A plurality of portions of the workpiece can be cut in parallel, and productivity can be improved.

It is a perspective view which shows an example of this invention. It is sectional drawing along the AA line of FIG. It is a top view which shows an example of a semiconductor wafer. It is a top view which shows the example of the positional relationship of a semiconductor wafer and a cutting blade.

  A cutting apparatus 1 shown in FIG. 1 includes a chuck table 2 that holds a workpiece. The chuck table 2 includes a planar holding surface 20 for holding a workpiece on the upper portion thereof.

  The chuck table 2 is driven by the cutting feed mechanism 3 and can move in the X-axis direction. The cutting feed mechanism 3 includes a pair of X-axis guide rails 30 extending in the X-axis direction, a ball screw 31 extending in a direction parallel to the X-axis guide rail 30, a motor 32 connected to one end of the ball screw 31, An X-axis moving base 33 having a nut (not shown) screwed to the ball screw 31 and having a lower portion slidably contacting the X-axis guide rail 30 is configured. The X-axis moving base 33 supports the chuck table 2 in a rotatable manner. In the cutting feed mechanism 3, the motor 32 rotates the ball screw 32 to move the X-axis movement base 33 along the X-axis guide rail 30, and accordingly, the chuck table 2 is moved in the X-axis direction.

  A gate-shaped support frame 4 is disposed above the movement path of the chuck table 2. The support frame 4 is disposed in a state of straddling the X-axis guide rail 30 and the ball screw 31, and is installed between a pair of wall portions 40 that stand and face each other in the Y-axis direction, and an upper end of the wall portion 40. An opening 42 that allows movement of the chuck table 2 in the X-axis direction is formed below the erection unit 41.

  The erection part 41 is formed in a plate shape, and a unit feed mechanism 7 that moves the first cutting unit 5 and the second cutting unit 6 for cutting the workpiece in the Y-axis direction on the upper surface thereof. It is arranged.

  The unit feed mechanism 7 includes a pair of Y-axis guide rails 70 extending in a direction orthogonal to the X-axis guide rails 30 on the upper surface of the installation portion 41 of the support frame 4, and parallel to the Y-axis guide rails 70. Two ball screws 71a and 71b extending in the direction, and motors 72a and 72b connected to one ends of the ball screws 71a and 71b, respectively.

  The first cutting unit 5 includes a first cutting means 51 and a second cutting means 52 that are supported in a suspended state by the support frame 4.

  The first cutting means 51 has a nut (not shown) that is screwed into the ball screw 71a, and a lower portion is slidably in contact with the Y-axis guide rail 70 and is movably disposed on the Y-axis guide rail 70. An index feed base 510; a first notch feed base 511 arranged to be movable in a direction perpendicular to the holding surface 20 of the chuck table 2 with respect to the first index feed base 510; And a first spindle 512 that is mounted on a cutting feed base 511 and includes a first cutting blade 512a.

  As shown in FIGS. 1 and 2, the first index feed base 510 is formed in an inverted L-shaped cross section in which a side portion 510 b hangs down from the flat plate portion 510 a to one side surface of the support frame 4. A first notch feed mechanism 53 that drives the first notch feed base 511 in the notch feed direction is disposed on the side portion 510b. A nut (not shown) provided in the flat plate portion 510a is screwed into the ball screw 71a, the lower portion of the flat plate portion 510a is in sliding contact with the Y-axis guide rail 70, and the motor 72a rotates the ball screw 71a to make the first. The index feed base 510 is guided by the Y-axis guide rail 70 and moves in the Y-axis direction, and the first spindle 512 also moves in the Y-axis direction.

  The first cutting feed mechanism 53 includes a pair of Z-axis guide rails 530 extending in the Z-axis direction, a ball screw 531 disposed in a direction parallel to the Z-axis guide rail 530, and one end of the ball screw 531. The motor 532 is connected. A nut (not shown) provided in the first cut feed base 511 is screwed to the ball screw 531, and one side surface side of the first cut feed base 511 is connected to the Z-axis guide rail 530. It is in sliding contact. The first notch feed mechanism 53 can move the first notch feed base 511 in the Z-axis direction along the Z-axis guide rail 530 when the motor 532 rotates the ball screw 531, thereby One spindle 512 can be cut and fed in the Z-axis direction.

  The flat plate portion 510a of the first index feed base 510 in plan view is perpendicular to the base end side 513 having the Y axis direction as the longitudinal direction and the base end side 513 from one end of the base end side 513 in the horizontal direction. The first long side 514 that projects in the X-axis direction that is the direction and the longitudinal direction is the X-axis direction, and projects from the other end of the base end side 513 in the same direction as the first long side 514 and that the X-axis direction is the longitudinal direction The second long side 515 is formed.

  The second cutting means 52 has a lower portion slidably in contact with the Y-axis guide rail 70 and is movably disposed on the Y-axis guide rail 70 so as not to interfere with the first index feed base 510. A second index feed base 520 movable along the second index feed base 520, and a second notch feed disposed so as to be movable in a direction perpendicular to the holding surface 20 of the chuck table 2 with respect to the second index feed base 520 A base 521 and a second spindle 522 mounted on the second cutting feed base 521 and provided with a second cutting blade 522a are provided.

  The second index feed base 520 is formed in an inverted L-shaped cross section in which a side portion 520b hangs down from one end of the flat plate portion 520a to the other side surface of the support frame 4, and the side portion 520b includes a second A second notch feed mechanism 55 for driving the notch feed base 521 in the notch feed direction is provided. The side portion 520b is disposed on the opposite side of the X-axis direction from the side portion 520a constituting the first index feed base 520.

  The flat plate portion 520a of the second index feed base 520 in plan view is orthogonal to the base end side 523 having the longitudinal direction in the Y-axis direction and the base end side 523 from one end of the base end side 523 in the horizontal direction. The first long side 524 protrudes in the X-axis direction which is the direction and the X-axis direction is the longitudinal direction, and protrudes in the same direction as the first long side 524 from the middle of the base end side 523 and the X-axis direction is the longitudinal direction. The second long side 525 is formed.

  A first index feed mechanism 54 for moving the second cutting means 52 in the Y-axis direction is disposed on the upper surface side of the flat plate portion 510a constituting the first index feed base 510. In the first index feed mechanism 54, a ball screw 516 extending in the Y-axis direction is rotatably supported by two support portions 517, and one end of the ball screw 516 is connected to a motor 518. A nut 526 is screwed onto the ball screw 516, and the nut 526 is fixed to the second long side 525 constituting the flat plate portion 520 a of the second index feed base 520.

  The lower surface of the flat plate portion 520a is in sliding contact with the Y-axis guide rail 70, and when the motor 518 rotates the ball screw 516, the second index feed base 520 is guided by the Y-axis guide rail 70 in the Y-axis direction. It is configured to move. The second long side 525 constituting the second index feed base 520 is located between the first long side 514 and the second long side 515 constituting the first index feed base 510. The second long side 525 is movable in the Y-axis direction by the distance between the first long side 514 and the second long side 515. That is, the first index feed base 510 and the second index feed base 520 are disposed on the Y-axis guide rail 70 with a predetermined interval so as to move relatively in the Y-axis direction by a predetermined distance. ing.

  The second notch feed mechanism 55 includes a pair of Z-axis guide rails 550 extending in the Z-axis direction, a ball screw 551 disposed in a direction parallel to the Z-axis guide rail 550, and one end of the ball screw 551. The motor 552 is connected. A nut (not shown) provided in the second cut feed base 521 is screwed into the ball screw 551, and one side surface of the second cut feed base 521 is connected to the Z-axis guide rail 550. It is in sliding contact. The second cut feed mechanism 55 can move the second cut feed base 521 in the Z-axis direction along the Z-axis guide rail 550 by causing the motor 552 to rotate the ball screw 551, thereby The second spindle 522 can be cut and fed in the Z-axis direction.

  The first spindle 512 is connected to the lower end of the first cut feed base 511, and the second spindle 522 is connected to the lower end of the second cut feed base 521. The spindles 522 are arranged in parallel in the opening 42 of the gate-shaped support frame 4 in a suspended state.

  The second cutting unit 6 has the same configuration as the first cutting unit 5. That is, the second cutting unit 6 includes third cutting means 61 and fourth cutting means 62 supported by the support frame 4 in a suspended state.

  The third cutting means 61 has a nut (not shown) that is screwed into the ball screw 71b, and a lower portion is slidably in contact with the Y-axis guide rail 70 and is movably disposed on the Y-axis guide rail 70. An index feed base 610, a third cut feed base 611 movably disposed in a direction perpendicular to the holding surface 20 of the chuck table 2 with respect to the third index feed base 610, and a third And a third spindle 612 having a third cutting blade 612a attached to the cutting feed base 611.

  As shown in FIGS. 1 and 2, the third index feed base 610 is formed in an inverted L-shaped cross section in which the side portion 610 b hangs down from one end of the flat plate portion 610 a to one side surface of the support frame 4. The side portion 610b is provided with a third infeed mechanism 63 that drives the third infeed base 611 in the infeed direction. A nut (not shown) provided in the flat plate portion 610a is screwed into the ball screw 71b, the lower portion of the flat plate portion 610a is in sliding contact with the Y-axis guide rail 70, and the motor 72b rotates the ball screw 71b to make the third. The indexing feed base 610 is guided by the Y-axis guide rail 70 and moved in the Y-axis direction, and the third spindle 612 is also moved in the Y-axis direction.

  The third cutting feed mechanism 63 includes a pair of Z-axis guide rails 630 extending in the Z-axis direction, a ball screw 631 extending in a direction parallel to the Z-axis guide rail 530, and one end of the ball screw 631. The motor 632 is connected to the motor 632. A nut (not shown) provided in the third cut feed base 611 is screwed into the ball screw 631, and one side surface side of the third cut feed base 611 is connected to the Z-axis guide rail 630. It is in sliding contact. The third notch feed mechanism 63 can move the third notch feed base 611 in the Z-axis direction along the Z-axis guide rail 630 by causing the motor 632 to rotate the ball screw 631. Three spindles 612 can be cut and fed in the Z-axis direction.

  The flat plate portion 610a of the third index feed base 610 in plan view is formed in a U shape, and has a base end side 613 whose longitudinal direction is the Y-axis direction and a base end side from one end of the base end side 613. A first long side 614 that protrudes in the X-axis direction that is a direction perpendicular to the horizontal direction with respect to 613 and has the X-axis direction as a longitudinal direction, and in the same direction as the first long side 614 from the middle of the base end side 613 A second long side 615 that protrudes and has the X-axis direction as a longitudinal direction is formed.

  The fourth cutting means 62 has a lower portion slidably in contact with the Y-axis guide rail 70 so as to be movable on the Y-axis guide rail 70, so that the fourth cutting means 62 does not interfere with the third index feed base 610. A fourth index feed base 620 movable along the fourth index feed base 620, and a fourth notch feed disposed so as to be movable in a direction perpendicular to the holding surface 20 of the chuck table 2 with respect to the fourth index feed base 620. A base 621 and a fourth spindle 622 equipped with a fourth cutting blade 622a mounted on the fourth cut feed base 621 are provided.

  The fourth index feed base 620 is formed in an inverted L-shaped cross section in which a side portion 620b hangs down from one end of the flat plate portion 620a to the other side surface of the support frame 4, and the side portion 620b includes a fourth A fourth notch feed mechanism 65 for driving the notch feed base 621 in the notch feed direction is provided. The side portion 620b is disposed on the opposite side of the X-axis direction from the side portion 620a constituting the third indexing feed base 620.

  The flat plate portion 620a of the fourth index feed base 620 in plan view is orthogonal to the base end side 623 having the longitudinal direction in the Y-axis direction and the base end side 623 from one end of the base end side 623 in the horizontal direction. The first long side 624 that protrudes in the X-axis direction that is the direction and has the X-axis direction as the longitudinal direction, and projects from the middle of the base end side 623 in the same direction as the first long side 624 and that has the X-axis direction as the longitudinal direction. The second long side 625 is formed.

  On the upper surface side of the flat plate portion 610a constituting the third index feed base 610, a second index feed mechanism 64 for moving the fourth cutting means 62 in the Y-axis direction is disposed. In the second index feed mechanism 64, a ball screw 616 extending in the Y-axis direction is rotatably supported by two support portions 617, and one end of the ball screw 616 is connected to the motor 618. A nut 626 is screwed onto the ball screw 616, and the nut 626 is fixed to the second long side 625 constituting the flat plate portion 620 a of the fourth index feed base 620.

  The lower surface of the flat plate portion 620a is in sliding contact with the Y-axis guide rail 70. When the motor 618 rotates the ball screw 616, the fourth index feed base 620 is guided by the Y-axis guide rail 70 in the Y-axis direction. It is configured to move. The second long side 625 constituting the fourth index feed base 620 is located between the first long side 614 and the second long side 615 constituting the third index feed base 610. The second long side 625 is movable in the Y-axis direction by the distance between the first long side 614 and the second long side 615. That is, the third index feed base 610 and the fourth index feed base 620 are disposed on the Y-axis guide rail 70 with a predetermined interval so as to move relatively in the Y-axis direction by a predetermined distance. ing.

  The fourth cut feed mechanism 65 includes a pair of Z-axis guide rails 650 extending in the Z-axis direction, a ball screw 651 extending in a direction parallel to the Z-axis guide rail 650, and one end of the ball screw 651. The motor 652 is connected. A nut (not shown) provided in the fourth cut feed base 621 is screwed into the ball screw 651, and one side surface side of the fourth cut feed base 621 is connected to the Z-axis guide rail 650. It is in sliding contact. The fourth notch feed mechanism 65 can move the fourth notch feed base 621 in the Z-axis direction along the Z-axis guide rail 650 by causing the motor 652 to rotate the ball screw 651. The four spindles 622 can be cut and fed in the Z-axis direction.

  The third spindle 612 is connected to the lower end of the third cut feed base 611, and the fourth spindle 622 is connected to the lower end of the fourth cut feed base 621. The spindles 622 are arranged in parallel in the opening 42 of the portal support frame 4 in a suspended state.

  The Y-axis guide rail 70 in the example of FIG. 1 includes the first index feed base 510, the second index feed base 520, the third index feed base 610, and the fourth index feed base 620. However, the Y-axis guide rail may be individually slidably contacted with each index feed base.

In the cutting apparatus 1 configured as described above, the first cutting unit 5 and the second cutting unit 6 are provided on the Y-axis guide rail 70 disposed on the upper surface of the erection part 41 of the portal support frame 4. Since it can move along, the device does not become huge and the rigidity is improved. Therefore, since the cutting unit 5 includes two cutting means 51 and 52, the cutting unit 6 includes two cutting means 61 and 62, and the apparatus as a whole can include four cutting means 51, the four cutting means 51, Productivity can be improved by performing cutting of a workpiece in parallel using 52, 61, and 62.
Further, since each of the spindles 512, 522, 612, 622 constituting the cutting means 51, 52, 61, 62 is arranged in parallel in the opening 42 of the gate-shaped support frame 4 in a suspended state, each spindle This makes it easier to adjust the position and perform maintenance, and can reduce the time required for such work.
Further, since the first cutting unit 5 and the second cutting unit 6 are arranged facing each other in the direction along the Y-axis guide rail 70, the moving distance of the chuck table 2 is not increased, and the chuck table 2 A plurality of parts of the workpiece can be cut in parallel by one cutting feed, and productivity can be improved.

  Both the first cutting means 51 and the second cutting means 52 are driven in the Y-axis direction by the unit feed mechanism 7, but the second cutting means 52 is also driven by the first index feed mechanism 54. Since the second cutting means 52 is driven in the axial direction, the second cutting means 52 moves independently of the first cutting means 51 within a predetermined range in the Y-axis direction, depending on the movement of the first cutting means 51. You can also. Similarly, the third cutting means 61 and the fourth cutting means 62 are both driven in the Y-axis direction by the unit feed mechanism 7, but the fourth cutting means 62 is also driven by the second index feed mechanism 64. Since the fourth cutting means 62 is driven in the Y-axis direction, the fourth cutting means 62 moves independently of the third cutting means 61 within a predetermined range in the Y-axis direction, depending on the movement of the third cutting means 61. You can also.

  The workpiece is held on the chuck table 2 shown in FIG. An example of the workpiece is a semiconductor wafer W shown in FIG. In this semiconductor wafer W, devices D are formed in regions partitioned by division lines (hereinafter referred to as “lines”) L1, L2,... Ln−1, Ln formed vertically and horizontally on the surface W1. Configured. Each line is formed so that the interval between adjacent lines (line interval) is equal.

  The position of the first cutting blade 512 a constituting the first cutting means 51 in the Y-axis direction is controlled by a motor 72 a constituting the unit feed mechanism 7. On the other hand, the position of the second cutting blade 522 a constituting the second cutting means 52 in the Y-axis direction is controlled by the motor 72 a and the motor 518 constituting the unit feed mechanism 7. The positions of the first cutting blade 512a and the second cutting blade 522a in the Y-axis direction can be the same position or different positions. When the first cutting blade 512a and the second cutting blade 522a are sequentially applied to one division line to perform two-stage cutting (step cut), the first cutting blade 512a and the second cutting blade 512a The position of the cutting blade 522a in the Y-axis direction is the same position. On the other hand, in the case where the first cutting blade 512a and the second cutting blade 522a are applied to different scheduled division lines to perform parallel cutting (dual cutting), the first cutting blade 512a and the second cutting blade The position of 522a in the Y-axis direction is set to a different position (for example, a position shifted by one index).

  The position of the third cutting blade 612 a constituting the third cutting means 61 in the Y-axis direction is controlled by a motor 72 b constituting the unit feed mechanism 7. On the other hand, the position of the fourth cutting blade 622 a constituting the fourth cutting means 62 in the Y-axis direction is controlled by the motor 72 b and the motor 618 constituting the unit feed mechanism 7. The positions of the third cutting blade 612a and the fourth cutting blade 622a in the Y-axis direction may be the same position or different positions. When performing step cut, the third cutting blade 612a and the fourth cutting blade 622a have the same position in the Y-axis direction. On the other hand, in the case where the third cutting blade 612a and the fourth cutting blade 622a are applied to different division lines to perform parallel cutting, the Y-axis of the third cutting blade 612a and the fourth cutting blade 622a is used. The direction position is a different position.

  When step cutting is performed by sequentially applying two types of cutting blades to each line of the semiconductor wafer W, for example, the first cutting blade 512a and the third spindle 612 that configure the first spindle 512 are configured. As the third cutting blade 612a, a material suitable for cutting the resin coated on the surface W1 of the semiconductor wafer W is used. On the other hand, the second cutting blade 522a constituting the second spindle 522 and the fourth cutting blade 622a constituting the fourth spindle 622 are made of materials suitable for cutting the semiconductor material constituting the semiconductor wafer W. used.

  As shown in FIG. 4, the positions of the first cutting blade 512a and the second cutting blade 522a in the Y-axis direction are matched, and the third cutting blade 612a and the fourth cutting blade 622a are positioned in the Y-axis direction. Match. In the illustrated example, the first cutting blade 512a and the second cutting blade 522a are positioned on the extension of the line L1, and the third cutting blade 612a and the fourth cutting blade 622a are positioned on the extension of the line Ln.

  The cutting means 51, 52, 61 and 62 are lowered while rotating the four cutting blades 512a, 522a, 612a and 622a, respectively, and the chuck table 2 is moved in the X-axis direction to perform cutting feed. At this time, the first cutting means 51 and the third cutting blade 51a and the third cutting blade 612a are positioned so that the positions in the Z-axis direction of the lower ends of the first cutting blade 512a and the third cutting blade 612a are located midway in the thickness direction of the semiconductor wafer W. The height of the cutting means 61 is controlled. On the other hand, the lower ends of the second cutting blade 522a and the fourth cutting blade 622a are made to substantially coincide with the height of the back surface of the semiconductor wafer W.

  When cutting feed in the X-axis direction of the chuck table 2 holding the semiconductor wafer W is performed in this state, first, the first cutting blade 512a cuts into the line L1, and the third cutting blade 612a cuts into the line Ln. Grooves are formed on the surface along the lines L1 and Ln. When the chuck table 2 is further cut and fed in the same direction, the second cutting blade 522a and the fourth cutting blade 622a are cut into the groove, and are completely cut along the lines 1 and n.

  Next, the first index feed mechanism 54 and the second index feed mechanism 64 are not operated, and the motor 72a and the motor 72b of the unit feed mechanism 7 move the first cutting unit 5 and the second cutting unit 6 to each other. Index and feed by the line interval in the direction in which they approach each other. Then, the first cutting blade 512a and the second cutting blade 522a are positioned on the extension of the line L2 in the X-axis direction, and the third cutting blade 612a and the fourth cutting blade 622a are in the line Ln-1. Positioned on the extension in the X-axis direction.

  After the chuck table 2 is cut and fed in the X-axis direction in this state, the grooves along the line L2 and the line Ln-1 are formed by the first cutting blade 512a and the third cutting blade 612a. Then, complete cutting along the line L2 and the line Ln-1 is performed by the second cutting blade 522a and the fourth cutting blade 622a.

  In this way, by cutting sequentially while feeding the first cutting unit 5 and the second cutting unit 6 in the direction approaching the Y-axis direction, all the lines facing the X-axis direction are cut. . When there is a possibility of contact when the first cutting unit 5 and the second cutting unit 6 are brought close to each other when cutting a line near the center formed on the semiconductor wafer W, either one of the cutting units is used. Cut using.

  When all the lines facing the X-axis direction are cut, the chuck table 2 is rotated 90 degrees to perform the same cutting. Then, all the lines are cut vertically and horizontally and divided into individual devices D.

  In the above operation example, the semiconductor wafer is cut, but the workpiece is not limited to the semiconductor wafer. Further, the shape of the workpiece is not limited. Further, by controlling the positional relationship and operation of each cutting means 51, 52, 61, 62 according to the shape of the workpiece, cutting is performed with the most efficient cutting procedure corresponding to the shape of the workpiece. be able to.

1: Cutting device 2: Chuck table 20: Holding surface 3: Cutting feed mechanism 30: X-axis guide rail 31: Ball screw 32: Motor 33: X-axis moving base 4: Support frame 40: Wall portion 41: Installation portion 42: Opening 5: First cutting unit 51: First cutting means 510: First index feed base 510a: Flat plate portion 510b: Side portion 511: First cut feed base 512: First spindle 512a: First One cutting blade 513: proximal end 514: first long side 515: second long side 54: index feed mechanism 516: ball screw 517: support portion 518: motor 52: second cutting means 520: second Index feed base 520a: Flat plate portion 520b: Side portion 521: Second cut feed base 522: Second spindle 522a: Second cutting blade 523: Base end 5 4: First long side 525: Second long side 526: Nut 53: First cut feed mechanism 530: Z-axis guide rail 531: Ball screw 532: Motor 55: Second cut feed mechanism 550: Z-axis guide Rail 551: Ball screw 552: Motor 6: Second cutting unit 61: Third cutting means 610: Third index feed base 610a: Flat plate portion 610b: Side portion 611: Third cut feed base 612: First Third spindle 612a: third cutting blade 613: proximal end 614: first long side 615: second long side 64: index feed mechanism 616: ball screw 617: support portion 618: motor 62: fourth cutting Means 620: Fourth index feed base 620a: Flat plate portion 620b: Side portion 6211: Fourth cut feed base 622: Fourth spindle 622a : Fourth cutting blade 623: Base end side 624: First long side 625: Second long side 626: Nut 63: Third cutting feed mechanism 63
630: Z-axis guide rail 631: Ball screw 632: Motor 65: Fourth cutting feed mechanism 650: Z-axis guide rail 651: Ball screw 652: Motor 7: Unit feed mechanism 70: Y-axis guide rail 71a, 71b: Ball screw 72a, 72b: motor

Claims (1)

An X-axis guide rail extending in the X-axis direction; a chuck table having a holding surface that is movably disposed along the X-axis guide rail and holds a workpiece; and A cutting feed mechanism that cuts and feeds along the rail, a portal-type support frame that includes an opening that is disposed across the X-axis guide rail and allows movement of the chuck table;
A Y-axis guide rail extending in a direction orthogonal to the X-axis guide rail on the upper surface of the portal-shaped support frame, and movably disposed along the Y-axis guide rail and held by the chuck table In a cutting apparatus comprising a first cutting unit and a second cutting unit for cutting a workpiece,
The first cutting unit includes a first cutting means having a first cutting blade and a second cutting means having a second cutting blade arranged in parallel so as to be movable along the Y-axis guide rail. Installed and configured,
The first cutting means includes a first index feed base that is movably disposed on the Y-axis guide rail, and hangs down from the first index feed base to one side surface of the support frame. A first notch feed base disposed on the side portion so as to be movable in a direction perpendicular to the holding surface of the chuck table, and a first cutting blade mounted on the first notch feed base. A first spindle provided with,
The second cutting means includes a second index feed base that is movably disposed along the Y-axis guide rail at a position that does not interfere with the first index feed base, and the second index feed base. A second notch feed base disposed on a side portion hanging from the feed base to the other side surface of the support frame so as to be movable in a direction perpendicular to the holding surface of the chuck table; A second spindle with a second cutting blade mounted on the cutting feed base of
The first index feed base and the second index feed base are disposed on the Y-axis guide rail at a predetermined interval so as to move relative to each other in a predetermined distance in the Y-axis direction,
The first spindle and the second spindle are suspended and arranged in parallel to the opening of the gate-shaped support frame;
In the second cutting unit, a third cutting means having a third cutting blade and a fourth cutting means having a fourth cutting blade are arranged in parallel so as to be movable along the Y-axis guide rail. Installed and configured,
The third cutting means includes a third index feed base that is movably disposed on the Y-axis guide rail, and hangs down from the third index feed base to one side of the support frame. A third cutting feed base disposed on the side portion movably in a direction perpendicular to the holding surface of the chuck table, and a third cutting blade mounted on the third cutting feed base. A third spindle provided with,
The fourth cutting means includes a fourth index feed base that is movably disposed along the Y-axis guide rail at a position that does not interfere with the third index feed base, and the fourth index feed base. A fourth notch feed base disposed on a side portion hanging from the feed base to the other side surface of the support frame so as to be movable in a direction perpendicular to the holding surface of the chuck table; A fourth spindle having a fourth cutting blade mounted on the cutting feed base of
The third index feed base and the fourth index feed base are disposed on the Y-axis guide rail at a predetermined interval so as to move relatively in a predetermined distance Y-axis direction,
The third spindle and the fourth spindle are suspended and arranged in parallel with the opening of the gate-shaped support frame;
The first cutting unit and the second cutting unit are disposed to face each other along the Y-axis guide rail.

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