JP4465720B2 - 光学系、露光装置、および露光方法 - Google Patents
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Description
前記複屈折旋光素子には、ほぼ円偏光状態の光束が入射することを特徴とする光学系を提供する。
4 偏光状態切換手段
4a 1/4波長板
4b 1/2波長板
4c デポラライザ
5,50 回折光学素子(光束変換素子)
6 アフォーカルレンズ
8 円錐アキシコン系
9 ズームレンズ
10 マイクロフライアイレンズ
11 偏光モニター
11a ビームスプリッター
12 コンデンサー光学系
13 マスクブラインド
14 結像光学系
21 複屈折素子
22 旋光素子
23 複屈折旋光素子
M マスク
PL 投影光学系
W ウェハ
Claims (29)
- レンズ開口内の進相軸分布をほぼ円周方向の分布またはほぼ半径方向の分布にするための複屈折素子と、該複屈折素子の後側に配置されて前記レンズ開口内の偏光状態を回転させるための旋光素子とを備えていることを特徴とする光学系。
- 前記複屈折素子は、一軸性結晶材料により形成され且つ結晶光学軸が光軸とほぼ平行に配置された光透過部材を有し、
前記光透過部材には、ほぼ円偏光状態でほぼ球面波の光束が入射することを特徴とする請求項1に記載の光学系。 - 前記複屈折素子は、立方晶系の結晶材料により形成された少なくとも一対の光透過部材を有し、
前記一対の光透過部材は、レンズ開口内の進相軸分布がほぼ円周方向の分布またはほぼ半径方向の分布となるように位置決めされ、
前記一対の光透過部材には、ほぼ円偏光状態でほぼ球面波の光束が入射することを特徴とする請求項1に記載の光学系。 - 前記一対の光透過部材は、結晶方位<111>が光軸とほぼ平行で且つ他の結晶方位が前記光軸を中心として約60度だけ相対回転した状態で配置されていることを特徴とする請求項3に記載の光学系。
- 前記一対の光透過部材は、結晶方位<100>が光軸とほぼ平行で且つ他の結晶方位が前記光軸を中心として約45度だけ相対回転した状態で配置されていることを特徴とする請求項3に記載の光学系。
- 前記複屈折素子は、前記光学系の瞳の近傍に配置されて光軸に関してほぼ回転対称な内部応力を有する光透過部材を有し、
前記光透過部材には、ほぼ円偏光状態の光束が入射することを特徴とする請求項1に記載の光学系。 - 前記旋光素子は、入射角のばらつきが10度以内である光束が入射する位置に配置されていることを特徴とする請求項1乃至6のいずれか1項に記載の光学系。
- 前記旋光素子は、前記レンズ開口内の偏光状態を約45度回転させることを特徴とする請求項1乃至7のいずれか1項に記載の光学系。
- 前記光学系は、第1面の像を第2面上に形成するための投影光学系を有することを特徴とする請求項1乃至8のいずれか1項に記載の光学系。
- 前記投影光学系は、前記第1面側にほぼテレセントリックに構成され、
前記複屈折素子は、前記第1面側にほぼテレセントリックな光路中に配置されていることを特徴とする請求項9に記載の光学系。 - 前記光学系は、被照射面をほぼテレセントリックに照明するための照明光学系を有することを特徴とする請求項1乃至8のいずれか1項に記載の光学系。
- 前記複屈折素子は、前記照明光学系の光路中において、前記被照射面と光学的に共役な位置またはその近傍に配置されていることを特徴とする請求項11に記載の光学系。
- 前記光学系は、第1面をほぼテレセントリックに照明するための照明光学系と、前記第1面の像を第2面上に形成するための投影光学系とを有することを特徴とする請求項1乃至8のいずれか1項に記載の光学系。
- 前記複屈折素子は、前記照明光学系の光路中に配置され、
前記旋光素子は、前記投影光学系の光路中に配置されていることを特徴とする請求項13に記載の光学系。 - 前記複屈折素子は、前記照明光学系の光路中において、前記第1面の近傍、あるいは前記第1面と光学的に共役な位置またはその近傍に配置されていることを特徴とする請求項14に記載の光学系。
- 直線複屈折性と旋光性とを有する光学材料により形成され且つ光学軸が光軸とほぼ平行に配置された複屈折旋光素子を備え、
前記複屈折旋光素子には、ほぼ円偏光状態の光束が入射することを特徴とする光学系。 - 前記複屈折旋光素子は、ほぼ球面波の光束が入射する位置に配置され、入射光束の外周領域の光束をレンズ開口においてほぼ円周方向に振動するほぼ直線偏光状態の光束に変換するための所要の厚さを有することを特徴とする請求項16に記載の光学系。
- 前記複屈折旋光素子は、右廻りの旋光性を有する光学材料により形成された第1光透過部材と、左廻りの旋光性を有する光学材料により形成された第2光透過部材とを有することを特徴とする請求項16または17に記載の光学系。
- 前記光学系は、第1面の像を第2面上に形成するための投影光学系を有することを特徴とする請求項16乃至18のいずれか1項に記載の光学系。
- 前記投影光学系は、前記第1面側にほぼテレセントリックに構成され、
前記複屈折旋光素子は、前記第1面側にほぼテレセントリックな光路中に配置されていることを特徴とする請求項19に記載の光学系。 - 前記投影光学系は、前記第2面側にほぼテレセントリックに構成され、
前記複屈折旋光素子は、前記第2面側にほぼテレセントリックな光路中に配置されていることを特徴とする請求項19に記載の光学系。 - 前記光学系は、被照射面をほぼテレセントリックに照明するための照明光学系を有することを特徴とする請求項16乃至18のいずれか1項に記載の光学系。
- 前記複屈折旋光素子は、前記照明光学系の光路中において、前記被照射面の近傍、あるいは前記被照射面と光学的に共役な位置またはその近傍に配置されていることを特徴とする請求項22に記載の光学系。
- 前記照明光学系は、所定の光強度分布を有する二次光源を照明瞳面に形成し、
前記二次光源の前記所定の光強度分布は、前記照明瞳上の領域であって光軸を含む瞳中心領域での光強度が該瞳中心領域の周囲の領域での光強度よりも小さく設定されていることを特徴とする請求項11乃至15、22および23のいずれか1項に記載の光学系。 - 前記二次光源の前記所定の光強度分布は、輪帯状または多極状の光強度分布を有することを特徴とする請求項24に記載の光学系。
- 請求項1乃至25のいずれか1項に記載の光学系を備え、該光学系を介してマスクのパターンを感光性基板上に露光することを特徴とする露光装置。
- 転写用のパターンを、請求項1乃至25のいずれか1項に記載の光学系を介して、感光性基板上に露光することを特徴とする露光方法。
- 転写用のパターンを、請求項1乃至25のいずれか1項に記載の光学系を介して、感光性基板上に露光することを特徴とするデバイスの製造方法。
- 前記光学系はリソグラフィー用光学系であることを特徴とする請求項1乃至25のいずれか1項に記載の光学系。
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JP2004018226 | 2004-01-27 | ||
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JP2004338749 | 2004-11-24 | ||
JP2004338749 | 2004-11-24 | ||
PCT/JP2005/000406 WO2005071718A1 (ja) | 2004-01-27 | 2005-01-14 | 光学系、露光装置、および露光方法 |
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EP (1) | EP1720199B1 (ja) |
JP (1) | JP4465720B2 (ja) |
KR (1) | KR101249205B1 (ja) |
AT (1) | ATE536632T1 (ja) |
HK (1) | HK1095209A1 (ja) |
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EP3226073A3 (en) | 2003-04-09 | 2017-10-11 | Nikon Corporation | Exposure method and apparatus, and method for fabricating device |
TWI609409B (zh) | 2003-10-28 | 2017-12-21 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
TWI512335B (zh) * | 2003-11-20 | 2015-12-11 | 尼康股份有限公司 | 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法 |
KR101295439B1 (ko) | 2004-01-16 | 2013-08-09 | 칼 짜이스 에스엠티 게엠베하 | 편광변조 광학소자 |
US20070019179A1 (en) | 2004-01-16 | 2007-01-25 | Damian Fiolka | Polarization-modulating optical element |
US8270077B2 (en) | 2004-01-16 | 2012-09-18 | Carl Zeiss Smt Gmbh | Polarization-modulating optical element |
TWI395068B (zh) | 2004-01-27 | 2013-05-01 | 尼康股份有限公司 | 光學系統、曝光裝置以及曝光方法 |
TWI614795B (zh) | 2004-02-06 | 2018-02-11 | Nikon Corporation | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
JP4497968B2 (ja) * | 2004-03-18 | 2010-07-07 | キヤノン株式会社 | 照明装置、露光装置及びデバイス製造方法 |
US7324280B2 (en) | 2004-05-25 | 2008-01-29 | Asml Holding N.V. | Apparatus for providing a pattern of polarization |
US7271874B2 (en) * | 2004-11-02 | 2007-09-18 | Asml Holding N.V. | Method and apparatus for variable polarization control in a lithography system |
EP2009678A4 (en) * | 2006-04-17 | 2011-04-06 | Nikon Corp | OPTICAL LIGHTING DEVICE, EXPOSURE DEVICE AND COMPONENT MANUFACTURING METHOD |
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JP2007220767A (ja) * | 2006-02-15 | 2007-08-30 | Canon Inc | 露光装置及びデバイス製造方法 |
JP2008041710A (ja) | 2006-08-01 | 2008-02-21 | Fujitsu Ltd | 照明光学装置、露光方法及び設計方法 |
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CN101681123B (zh) | 2007-10-16 | 2013-06-12 | 株式会社尼康 | 照明光学系统、曝光装置以及元件制造方法 |
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JP2010004008A (ja) | 2007-10-31 | 2010-01-07 | Nikon Corp | 光学ユニット、照明光学装置、露光装置、露光方法、およびデバイス製造方法 |
US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
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2005
- 2005-01-12 TW TW094100816A patent/TWI395068B/zh not_active IP Right Cessation
- 2005-01-14 KR KR1020067017241A patent/KR101249205B1/ko not_active IP Right Cessation
- 2005-01-14 AT AT05703645T patent/ATE536632T1/de active
- 2005-01-14 JP JP2005517228A patent/JP4465720B2/ja not_active Expired - Fee Related
- 2005-01-14 WO PCT/JP2005/000406 patent/WO2005071718A1/ja active Application Filing
- 2005-01-14 EP EP05703645A patent/EP1720199B1/en not_active Not-in-force
- 2005-01-14 US US10/587,254 patent/US8436983B2/en not_active Expired - Fee Related
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- 2007-03-05 HK HK07102423.6A patent/HK1095209A1/xx not_active IP Right Cessation
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- 2010-02-05 US US12/656,637 patent/US8339578B2/en not_active Expired - Fee Related
- 2010-02-05 US US12/656,639 patent/US8351021B2/en not_active Expired - Fee Related
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Also Published As
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KR101249205B1 (ko) | 2013-04-03 |
EP1720199A4 (en) | 2007-10-31 |
US8339578B2 (en) | 2012-12-25 |
KR20060129409A (ko) | 2006-12-15 |
US20070296941A1 (en) | 2007-12-27 |
US20100142051A1 (en) | 2010-06-10 |
US8351021B2 (en) | 2013-01-08 |
EP1720199A1 (en) | 2006-11-08 |
HK1095209A1 (en) | 2007-04-27 |
JPWO2005071718A1 (ja) | 2007-12-27 |
TW200528934A (en) | 2005-09-01 |
US20100141921A1 (en) | 2010-06-10 |
EP1720199B1 (en) | 2011-12-07 |
ATE536632T1 (de) | 2011-12-15 |
WO2005071718A1 (ja) | 2005-08-04 |
US20100141926A1 (en) | 2010-06-10 |
US8436983B2 (en) | 2013-05-07 |
TWI395068B (zh) | 2013-05-01 |
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