JP4459419B2 - 可動電極と固定電極を有するデバイスの駆動装置 - Google Patents

可動電極と固定電極を有するデバイスの駆動装置 Download PDF

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JP4459419B2
JP4459419B2 JP2000314633A JP2000314633A JP4459419B2 JP 4459419 B2 JP4459419 B2 JP 4459419B2 JP 2000314633 A JP2000314633 A JP 2000314633A JP 2000314633 A JP2000314633 A JP 2000314633A JP 4459419 B2 JP4459419 B2 JP 4459419B2
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magnetic material
latching
magnetic field
conductor
disposed
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JP2001176369A5 (enExample
JP2001176369A (ja
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ジョン ビショップ デビッド
ジン スンゴー
キム ジュンサン
ジー．ラミレス アイニッサ
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アルカテル−ルーセント ユーエスエー インコーポレーテッド
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K99/00—Subject matter not provided for in other groups of this subclass
    • H02K99/20—Motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S310/00—Electrical generator or motor structure
    • Y10S310/06—Printed-circuit motors and components

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Electromagnets (AREA)
JP2000314633A 1999-10-15 2000-10-16 可動電極と固定電極を有するデバイスの駆動装置 Expired - Fee Related JP4459419B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/418874 1999-10-15
US09/418,874 US6124650A (en) 1999-10-15 1999-10-15 Non-volatile MEMS micro-relays using magnetic actuators

Publications (3)

Publication Number Publication Date
JP2001176369A JP2001176369A (ja) 2001-06-29
JP2001176369A5 JP2001176369A5 (enExample) 2007-11-29
JP4459419B2 true JP4459419B2 (ja) 2010-04-28

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JP2000314633A Expired - Fee Related JP4459419B2 (ja) 1999-10-15 2000-10-16 可動電極と固定電極を有するデバイスの駆動装置

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US (1) US6124650A (enExample)
EP (1) EP1093141B1 (enExample)
JP (1) JP4459419B2 (enExample)
CA (1) CA2323025C (enExample)
DE (1) DE60016692T2 (enExample)

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US6987027B2 (en) * 2002-08-23 2006-01-17 The Regents Of The University Of California Microscale vacuum tube device and method for making same
US6998946B2 (en) * 2002-09-17 2006-02-14 The Board Of Trustees Of The University Of Illinois High cycle deflection beam MEMS devices
JP2006524880A (ja) * 2002-09-18 2006-11-02 マグフュージョン， インコーポレイテッド 積層電気機械構造の組み立て方法
JP4294590B2 (ja) * 2002-09-25 2009-07-15 エヌエックスピー ビー ヴィ 電気機械マイクロスイッチ装置
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US7202765B2 (en) 2003-05-14 2007-04-10 Schneider Electric Industries Sas Latchable, magnetically actuated, ground plane-isolated radio frequency microswitch
US7202764B2 (en) * 2003-07-08 2007-04-10 International Business Machines Corporation Noble metal contacts for micro-electromechanical switches
US7215229B2 (en) * 2003-09-17 2007-05-08 Schneider Electric Industries Sas Laminated relays with multiple flexible contacts
JP4561072B2 (ja) 2003-09-30 2010-10-13 株式会社日立製作所 Ｍｅｍｓスイッチを有する半導体装置
US20050083157A1 (en) * 2003-10-15 2005-04-21 Magfusion, Inc. Micro magnetic latching switches and methods of making same
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US7342473B2 (en) * 2004-04-07 2008-03-11 Schneider Electric Industries Sas Method and apparatus for reducing cantilever stress in magnetically actuated relays
KR100574510B1 (ko) * 2004-05-11 2006-04-27 삼성전자주식회사 멤스 공정을 이용한 자기부상 구조물 및 그 제조방법
JP2006179252A (ja) * 2004-12-21 2006-07-06 Fujitsu Component Ltd スイッチデバイス
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US7482899B2 (en) * 2005-10-02 2009-01-27 Jun Shen Electromechanical latching relay and method of operating same
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Also Published As

Publication number Publication date
EP1093141A3 (en) 2003-04-09
DE60016692T2 (de) 2005-12-15
CA2323025A1 (en) 2001-04-15
DE60016692D1 (de) 2005-01-20
US6124650A (en) 2000-09-26
EP1093141A2 (en) 2001-04-18
EP1093141B1 (en) 2004-12-15
CA2323025C (en) 2003-07-29
JP2001176369A (ja) 2001-06-29

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