CA2323025C - Non-volatile mems micro-relays using magnetic actuators - Google Patents
Non-volatile mems micro-relays using magnetic actuators Download PDFInfo
- Publication number
- CA2323025C CA2323025C CA002323025A CA2323025A CA2323025C CA 2323025 C CA2323025 C CA 2323025C CA 002323025 A CA002323025 A CA 002323025A CA 2323025 A CA2323025 A CA 2323025A CA 2323025 C CA2323025 C CA 2323025C
- Authority
- CA
- Canada
- Prior art keywords
- magnetic material
- latchable
- magnetic field
- accordance
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 94
- 239000000696 magnetic material Substances 0.000 claims abstract description 85
- 239000004020 conductor Substances 0.000 claims abstract description 51
- 230000005415 magnetization Effects 0.000 claims abstract description 42
- 239000000463 material Substances 0.000 claims abstract description 17
- 230000008859 change Effects 0.000 claims abstract description 8
- 230000004044 response Effects 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims description 14
- 239000010408 film Substances 0.000 claims description 9
- 229910017110 Fe—Cr—Co Inorganic materials 0.000 claims description 4
- 230000005294 ferromagnetic effect Effects 0.000 claims description 4
- 229910020598 Co Fe Inorganic materials 0.000 claims description 3
- 229910002519 Co-Fe Inorganic materials 0.000 claims description 3
- 229910003271 Ni-Fe Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910017881 Cu—Ni—Fe Inorganic materials 0.000 claims description 2
- 229910007744 Zr—N Inorganic materials 0.000 claims description 2
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 2
- 229910017104 Fe—Al—Ni—Co Inorganic materials 0.000 claims 1
- 230000010287 polarization Effects 0.000 abstract description 6
- 238000006073 displacement reaction Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 description 11
- 241000212384 Bifora Species 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910002551 Fe-Mn Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- 229910018619 Si-Fe Inorganic materials 0.000 description 1
- 229910008289 Si—Fe Inorganic materials 0.000 description 1
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- -1 based on Cu Chemical class 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910000777 cunife Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910000586 vicalloy Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K99/00—Subject matter not provided for in other groups of this subclass
- H02K99/20—Motors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
- H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S310/00—Electrical generator or motor structure
- Y10S310/06—Printed-circuit motors and components
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- Electromagnets (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/418,874 US6124650A (en) | 1999-10-15 | 1999-10-15 | Non-volatile MEMS micro-relays using magnetic actuators |
| US09/418,874 | 1999-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2323025A1 CA2323025A1 (en) | 2001-04-15 |
| CA2323025C true CA2323025C (en) | 2003-07-29 |
Family
ID=23659903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002323025A Expired - Fee Related CA2323025C (en) | 1999-10-15 | 2000-10-06 | Non-volatile mems micro-relays using magnetic actuators |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6124650A (enExample) |
| EP (1) | EP1093141B1 (enExample) |
| JP (1) | JP4459419B2 (enExample) |
| CA (1) | CA2323025C (enExample) |
| DE (1) | DE60016692T2 (enExample) |
Families Citing this family (78)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6496612B1 (en) | 1999-09-23 | 2002-12-17 | Arizona State University | Electronically latching micro-magnetic switches and method of operating same |
| US7027682B2 (en) | 1999-09-23 | 2006-04-11 | Arizona State University | Optical MEMS switching array with embedded beam-confining channels and method of operating same |
| US6469602B2 (en) * | 1999-09-23 | 2002-10-22 | Arizona State University | Electronically switching latching micro-magnetic relay and method of operating same |
| US6853067B1 (en) | 1999-10-12 | 2005-02-08 | Microassembly Technologies, Inc. | Microelectromechanical systems using thermocompression bonding |
| US7057246B2 (en) * | 2000-08-23 | 2006-06-06 | Reflectivity, Inc | Transition metal dielectric alloy materials for MEMS |
| US20020096421A1 (en) * | 2000-11-29 | 2002-07-25 | Cohn Michael B. | MEMS device with integral packaging |
| US6785038B2 (en) | 2001-01-17 | 2004-08-31 | Optical Coating Laboratory, Inc. | Optical cross-connect with magnetic micro-electro-mechanical actuator cells |
| US6801681B2 (en) | 2001-01-17 | 2004-10-05 | Optical Coating Laboratory, Inc. | Optical switch with low-inertia micromirror |
| JP2004533710A (ja) * | 2001-01-18 | 2004-11-04 | アリゾナ ステイト ユニバーシティ | 永久磁石のアライメント要件が緩和されたマイクロ磁気ラッチスイッチ |
| US6970616B2 (en) * | 2001-03-18 | 2005-11-29 | Touchdown Technologies, Inc. | Optical cross-connect assembly |
| US20020183011A1 (en) * | 2001-03-19 | 2002-12-05 | Superconductor Technologies, Inc. | Method and apparatus for combined receive and transmit subsystems in cellular communication systems |
| US6639493B2 (en) * | 2001-03-30 | 2003-10-28 | Arizona State University | Micro machined RF switches and methods of operating the same |
| EP1383708A1 (en) * | 2001-04-17 | 2004-01-28 | Telefonaktiebolaget LM Ericsson (publ) | Printed circuit board integrated switch |
| US20030025580A1 (en) * | 2001-05-18 | 2003-02-06 | Microlab, Inc. | Apparatus utilizing latching micromagnetic switches |
| EP1389340A4 (en) * | 2001-05-23 | 2009-08-05 | Univ Illinois | INCREASED ONCHIP INDUCTIVITY AND METHOD FOR THE PRODUCTION THEREOF |
| US20020196110A1 (en) * | 2001-05-29 | 2002-12-26 | Microlab, Inc. | Reconfigurable power transistor using latching micromagnetic switches |
| US6607305B2 (en) | 2001-06-04 | 2003-08-19 | Wisconsin Alumni Research Foundation | Bi-directional micromechanical latching linear actuator |
| FR2826504B1 (fr) * | 2001-06-25 | 2003-09-12 | Commissariat Energie Atomique | Actionneur magnetique a temps de reponse reduit |
| US7057251B2 (en) * | 2001-07-20 | 2006-06-06 | Reflectivity, Inc | MEMS device made of transition metal-dielectric oxide materials |
| JP3750574B2 (ja) * | 2001-08-16 | 2006-03-01 | 株式会社デンソー | 薄膜電磁石およびこれを用いたスイッチング素子 |
| US20030173957A1 (en) * | 2001-08-29 | 2003-09-18 | Microlab, Inc. | Micro magnetic proximity sensor |
| US6750745B1 (en) * | 2001-08-29 | 2004-06-15 | Magfusion Inc. | Micro magnetic switching apparatus and method |
| US6778046B2 (en) | 2001-09-17 | 2004-08-17 | Magfusion Inc. | Latching micro magnetic relay packages and methods of packaging |
| US7301334B2 (en) * | 2001-09-17 | 2007-11-27 | Schneider Electric Industries Sas | Micro magnetic proximity sensor system |
| GB0123521D0 (en) * | 2001-10-01 | 2001-11-21 | Gill Michael J | Electrical apparatus |
| US6919784B2 (en) * | 2001-10-18 | 2005-07-19 | The Board Of Trustees Of The University Of Illinois | High cycle MEMS device |
| US20030107460A1 (en) * | 2001-12-10 | 2003-06-12 | Guanghua Huang | Low voltage MEM switch |
| US6754510B2 (en) * | 2001-12-13 | 2004-06-22 | Superconductor Technologies, Inc. | MEMS-based bypass system for use with a HTS RF receiver |
| US20030169135A1 (en) * | 2001-12-21 | 2003-09-11 | Jun Shen | Latching micro-magnetic switch array |
| US6836194B2 (en) * | 2001-12-21 | 2004-12-28 | Magfusion, Inc. | Components implemented using latching micro-magnetic switches |
| US20030179057A1 (en) * | 2002-01-08 | 2003-09-25 | Jun Shen | Packaging of a micro-magnetic switch with a patterned permanent magnet |
| KR100439423B1 (ko) | 2002-01-16 | 2004-07-09 | 한국전자통신연구원 | 마이크로전자기계 액튜에이터 |
| US20030137374A1 (en) * | 2002-01-18 | 2003-07-24 | Meichun Ruan | Micro-Magnetic Latching switches with a three-dimensional solenoid coil |
| US20030179058A1 (en) * | 2002-01-18 | 2003-09-25 | Microlab, Inc. | System and method for routing input signals using single pole single throw and single pole double throw latching micro-magnetic switches |
| US20030222740A1 (en) * | 2002-03-18 | 2003-12-04 | Microlab, Inc. | Latching micro-magnetic switch with improved thermal reliability |
| US6753747B2 (en) * | 2002-04-01 | 2004-06-22 | Intel Corporation | Integrated microsprings for high speed switches |
| DE10214523B4 (de) * | 2002-04-02 | 2007-10-11 | Infineon Technologies Ag | Mikromechanisches Bauelement mit magnetischer Aktuation |
| US6924966B2 (en) * | 2002-05-29 | 2005-08-02 | Superconductor Technologies, Inc. | Spring loaded bi-stable MEMS switch |
| US6795697B2 (en) | 2002-07-05 | 2004-09-21 | Superconductor Technologies, Inc. | RF receiver switches |
| US7012266B2 (en) | 2002-08-23 | 2006-03-14 | Samsung Electronics Co., Ltd. | MEMS-based two-dimensional e-beam nano lithography device and method for making the same |
| AU2003304297A1 (en) * | 2002-08-23 | 2005-01-21 | Sungho Jin | Article comprising gated field emission structures with centralized nanowires and method for making the same |
| US6987027B2 (en) * | 2002-08-23 | 2006-01-17 | The Regents Of The University Of California | Microscale vacuum tube device and method for making same |
| US6998946B2 (en) * | 2002-09-17 | 2006-02-14 | The Board Of Trustees Of The University Of Illinois | High cycle deflection beam MEMS devices |
| JP2006524880A (ja) * | 2002-09-18 | 2006-11-02 | マグフュージョン， インコーポレイテッド | 積層電気機械構造の組み立て方法 |
| JP4294590B2 (ja) * | 2002-09-25 | 2009-07-15 | エヌエックスピー ビー ヴィ | 電気機械マイクロスイッチ装置 |
| US20040121505A1 (en) | 2002-09-30 | 2004-06-24 | Magfusion, Inc. | Method for fabricating a gold contact on a microswitch |
| US7202765B2 (en) | 2003-05-14 | 2007-04-10 | Schneider Electric Industries Sas | Latchable, magnetically actuated, ground plane-isolated radio frequency microswitch |
| US7202764B2 (en) * | 2003-07-08 | 2007-04-10 | International Business Machines Corporation | Noble metal contacts for micro-electromechanical switches |
| US7215229B2 (en) * | 2003-09-17 | 2007-05-08 | Schneider Electric Industries Sas | Laminated relays with multiple flexible contacts |
| JP4561072B2 (ja) | 2003-09-30 | 2010-10-13 | 株式会社日立製作所 | Ｍｅｍｓスイッチを有する半導体装置 |
| US20050083157A1 (en) * | 2003-10-15 | 2005-04-21 | Magfusion, Inc. | Micro magnetic latching switches and methods of making same |
| US7183884B2 (en) * | 2003-10-15 | 2007-02-27 | Schneider Electric Industries Sas | Micro magnetic non-latching switches and methods of making same |
| US7342473B2 (en) * | 2004-04-07 | 2008-03-11 | Schneider Electric Industries Sas | Method and apparatus for reducing cantilever stress in magnetically actuated relays |
| KR100574510B1 (ko) * | 2004-05-11 | 2006-04-27 | 삼성전자주식회사 | 멤스 공정을 이용한 자기부상 구조물 및 그 제조방법 |
| JP2006179252A (ja) * | 2004-12-21 | 2006-07-06 | Fujitsu Component Ltd | スイッチデバイス |
| ES2374057T3 (es) * | 2005-03-18 | 2012-02-13 | Réseaux Mems | Actuadores e interruptores mems. |
| US20060222871A1 (en) * | 2005-03-31 | 2006-10-05 | Bonhote Christian R | Method for lowering deposition stress, improving ductility, and enhancing lateral growth in electrodeposited iron-containing alloys |
| US7692521B1 (en) * | 2005-05-12 | 2010-04-06 | Microassembly Technologies, Inc. | High force MEMS device |
| US7528691B2 (en) * | 2005-08-26 | 2009-05-05 | Innovative Micro Technology | Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture |
| US7482899B2 (en) * | 2005-10-02 | 2009-01-27 | Jun Shen | Electromechanical latching relay and method of operating same |
| US20070171205A1 (en) * | 2006-01-24 | 2007-07-26 | Steinberg Dan A | Keyboard having magnet-actuted switches |
| US8174343B2 (en) * | 2006-09-24 | 2012-05-08 | Magvention (Suzhou) Ltd. | Electromechanical relay and method of making same |
| US20080197964A1 (en) * | 2007-02-21 | 2008-08-21 | Simpler Networks Inc. | Mems actuators and switches |
| US7893798B2 (en) * | 2007-05-09 | 2011-02-22 | Innovative Micro Technology | Dual substrate MEMS plate switch and method of manufacture |
| US8068002B2 (en) * | 2008-04-22 | 2011-11-29 | Magvention (Suzhou), Ltd. | Coupled electromechanical relay and method of operating same |
| US8445306B2 (en) * | 2008-12-24 | 2013-05-21 | International Business Machines Corporation | Hybrid MEMS RF switch and method of fabricating same |
| US8143978B2 (en) * | 2009-02-23 | 2012-03-27 | Magvention (Suzhou), Ltd. | Electromechanical relay and method of operating same |
| US8159320B2 (en) * | 2009-09-14 | 2012-04-17 | Meichun Ruan | Latching micro-magnetic relay and method of operating same |
| DE102010002818B4 (de) * | 2010-03-12 | 2017-08-31 | Robert Bosch Gmbh | Verfahren zur Herstellung eines mikromechanischen Bauelementes |
| US8635765B2 (en) * | 2011-06-15 | 2014-01-28 | International Business Machines Corporation | Method of forming micro-electrical-mechanical structure (MEMS) |
| US20130207754A1 (en) * | 2012-02-14 | 2013-08-15 | U.S. Government As Represented By The Secretary Of The Army | Magnetic flux switch |
| DE102012216997A1 (de) * | 2012-09-21 | 2014-03-27 | M-Invest GmbH | Elektrisches schaltelement und herstellungsverfahren desselben |
| KR101444552B1 (ko) * | 2012-12-21 | 2014-10-30 | 삼성전기주식회사 | 자성체 시트, 자성체 시트의 제조방법 및 자성체 시트를 포함하는 무접점 전력 충전 장치 |
| US9105841B2 (en) | 2013-03-12 | 2015-08-11 | International Business Machines Corporation | Forming magnetic microelectromechanical inductive components |
| EP3160897A4 (en) * | 2014-06-27 | 2018-01-24 | Intel Corporation | Magnetic nanomechanical devices for stiction compensation |
| US10132699B1 (en) | 2014-10-06 | 2018-11-20 | National Technology & Engineering Solutions Of Sandia, Llc | Electrodeposition processes for magnetostrictive resonators |
| US10825628B2 (en) * | 2017-07-17 | 2020-11-03 | Analog Devices Global Unlimited Company | Electromagnetically actuated microelectromechanical switch |
| JP6950613B2 (ja) * | 2018-04-11 | 2021-10-13 | Tdk株式会社 | 磁気作動型ｍｅｍｓスイッチ |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5206983A (en) * | 1991-06-24 | 1993-05-04 | Wisconsin Alumni Research Foundation | Method of manufacturing micromechanical devices |
| US5629918A (en) * | 1995-01-20 | 1997-05-13 | The Regents Of The University Of California | Electromagnetically actuated micromachined flap |
| US5644177A (en) * | 1995-02-23 | 1997-07-01 | Wisconsin Alumni Research Foundation | Micromechanical magnetically actuated devices |
| FR2742917B1 (fr) * | 1995-12-22 | 1998-02-13 | Suisse Electronique Microtech | Dispositif miniature pour executer une fonction predeterminee, notamment microrelais |
| US5945898A (en) * | 1996-05-31 | 1999-08-31 | The Regents Of The University Of California | Magnetic microactuator |
| JP2998680B2 (ja) * | 1997-02-27 | 2000-01-11 | 日本電気株式会社 | 高周波リレー |
| CH691559A5 (fr) * | 1997-04-21 | 2001-08-15 | Asulab Sa | Micro-contacteur magnétique et son procédé de fabrication. |
| DE19813128A1 (de) * | 1998-03-25 | 1999-09-30 | Kuhnke Gmbh Kg H | Elektromagnetisches Relais |
-
1999
- 1999-10-15 US US09/418,874 patent/US6124650A/en not_active Expired - Lifetime
-
2000
- 2000-10-06 CA CA002323025A patent/CA2323025C/en not_active Expired - Fee Related
- 2000-10-09 DE DE60016692T patent/DE60016692T2/de not_active Expired - Lifetime
- 2000-10-09 EP EP00308867A patent/EP1093141B1/en not_active Expired - Lifetime
- 2000-10-16 JP JP2000314633A patent/JP4459419B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1093141A3 (en) | 2003-04-09 |
| DE60016692T2 (de) | 2005-12-15 |
| CA2323025A1 (en) | 2001-04-15 |
| DE60016692D1 (de) | 2005-01-20 |
| US6124650A (en) | 2000-09-26 |
| EP1093141A2 (en) | 2001-04-18 |
| EP1093141B1 (en) | 2004-12-15 |
| JP4459419B2 (ja) | 2010-04-28 |
| JP2001176369A (ja) | 2001-06-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2323025C (en) | Non-volatile mems micro-relays using magnetic actuators | |
| KR100298254B1 (ko) | 마이크로패브리케이션 제조가 가능한 자기 릴레이 시스템 및 방법b | |
| US6366186B1 (en) | Mems magnetically actuated switches and associated switching arrays | |
| Chin | Permanent magnet films for applications in microelectromechanical systems | |
| Niarchos | Magnetic MEMS: key issues and some applications | |
| US5889452A (en) | Miniature device for executing a predetermined function, in particular microrelay | |
| KR20030028451A (ko) | 전자적으로 스위칭하는 래칭 마이크로-마그네틱 릴레이 및그 동작방법 | |
| US7642885B2 (en) | Electromechanical latching relay and method of operating same | |
| Taylor et al. | Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices | |
| Fullin et al. | A new basic technology for magnetic micro-actuators | |
| US7142078B2 (en) | Magnetic levitation actuator | |
| US8581678B2 (en) | Method and apparatus for electromagnetic actuation | |
| US20040183382A1 (en) | Mobile magnet actuator | |
| US8143978B2 (en) | Electromechanical relay and method of operating same | |
| US20060082427A1 (en) | Method and apparatus for reducing cantilever stress in magnetically actuated relays | |
| EP1667187A1 (en) | Passive magnetic latch | |
| US7049915B2 (en) | Bistable magnetic actuator | |
| KR20070117546A (ko) | 전자석 컨트롤을 이용한 마이크로 시스템 | |
| US20020196112A1 (en) | Electronically switching latching micro-magnetic relay and method of operating same | |
| US3919676A (en) | Permanent-magnet type relay | |
| JP3591881B2 (ja) | 小型リレー | |
| WO2004051684A1 (en) | Large air gap actuator | |
| Zmood et al. | Smart magnetic structures for MEMS | |
| JP4288567B2 (ja) | 磁気駆動型機構デバイス及びその製造方法 | |
| Tabib-Azar | Magnetic Microactuators |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20181009 |