DE60016692D1 - Nicht-flüchtigen MEMS mikro-relais mit magnetischen Betätigern - Google Patents

Nicht-flüchtigen MEMS mikro-relais mit magnetischen Betätigern

Info

Publication number
DE60016692D1
DE60016692D1 DE60016692T DE60016692T DE60016692D1 DE 60016692 D1 DE60016692 D1 DE 60016692D1 DE 60016692 T DE60016692 T DE 60016692T DE 60016692 T DE60016692 T DE 60016692T DE 60016692 D1 DE60016692 D1 DE 60016692D1
Authority
DE
Germany
Prior art keywords
relays
volatile
mems micro
magnetic actuators
actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60016692T
Other languages
English (en)
Other versions
DE60016692T2 (de
Inventor
David John Bishop
Sungho Jin
Jungsang Kim
Ainissa G Ramirez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23659903&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60016692(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of DE60016692D1 publication Critical patent/DE60016692D1/de
Publication of DE60016692T2 publication Critical patent/DE60016692T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K99/00—Subject matter not provided for in other groups of this subclass
    • H02K99/20—Motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S310/00—Electrical generator or motor structure
    • Y10S310/06—Printed-circuit motors and components

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Electromagnets (AREA)
DE60016692T 1999-10-15 2000-10-09 Nicht-flüchtigen MEMS mikro-relais mit magnetischen Betätigern Expired - Lifetime DE60016692T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/418,874 US6124650A (en) 1999-10-15 1999-10-15 Non-volatile MEMS micro-relays using magnetic actuators
US418874 1999-10-15

Publications (2)

Publication Number Publication Date
DE60016692D1 true DE60016692D1 (de) 2005-01-20
DE60016692T2 DE60016692T2 (de) 2005-12-15

Family

ID=23659903

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60016692T Expired - Lifetime DE60016692T2 (de) 1999-10-15 2000-10-09 Nicht-flüchtigen MEMS mikro-relais mit magnetischen Betätigern

Country Status (5)

Country Link
US (1) US6124650A (de)
EP (1) EP1093141B1 (de)
JP (1) JP4459419B2 (de)
CA (1) CA2323025C (de)
DE (1) DE60016692T2 (de)

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US6754510B2 (en) * 2001-12-13 2004-06-22 Superconductor Technologies, Inc. MEMS-based bypass system for use with a HTS RF receiver
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US6836194B2 (en) * 2001-12-21 2004-12-28 Magfusion, Inc. Components implemented using latching micro-magnetic switches
US20030179057A1 (en) * 2002-01-08 2003-09-25 Jun Shen Packaging of a micro-magnetic switch with a patterned permanent magnet
KR100439423B1 (ko) 2002-01-16 2004-07-09 한국전자통신연구원 마이크로전자기계 액튜에이터
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US20030137374A1 (en) * 2002-01-18 2003-07-24 Meichun Ruan Micro-Magnetic Latching switches with a three-dimensional solenoid coil
US20030222740A1 (en) * 2002-03-18 2003-12-04 Microlab, Inc. Latching micro-magnetic switch with improved thermal reliability
US6753747B2 (en) * 2002-04-01 2004-06-22 Intel Corporation Integrated microsprings for high speed switches
DE10214523B4 (de) * 2002-04-02 2007-10-11 Infineon Technologies Ag Mikromechanisches Bauelement mit magnetischer Aktuation
US6924966B2 (en) * 2002-05-29 2005-08-02 Superconductor Technologies, Inc. Spring loaded bi-stable MEMS switch
US6795697B2 (en) 2002-07-05 2004-09-21 Superconductor Technologies, Inc. RF receiver switches
US7012266B2 (en) 2002-08-23 2006-03-14 Samsung Electronics Co., Ltd. MEMS-based two-dimensional e-beam nano lithography device and method for making the same
AU2003302019A1 (en) * 2002-08-23 2004-06-15 The Regents Of The University Of California Improved microscale vacuum tube device and method for making same
US6864162B2 (en) * 2002-08-23 2005-03-08 Samsung Electronics Co., Ltd. Article comprising gated field emission structures with centralized nanowires and method for making the same
US6998946B2 (en) * 2002-09-17 2006-02-14 The Board Of Trustees Of The University Of Illinois High cycle deflection beam MEMS devices
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US20040121505A1 (en) 2002-09-30 2004-06-24 Magfusion, Inc. Method for fabricating a gold contact on a microswitch
US7202765B2 (en) 2003-05-14 2007-04-10 Schneider Electric Industries Sas Latchable, magnetically actuated, ground plane-isolated radio frequency microswitch
US7202764B2 (en) * 2003-07-08 2007-04-10 International Business Machines Corporation Noble metal contacts for micro-electromechanical switches
US7215229B2 (en) * 2003-09-17 2007-05-08 Schneider Electric Industries Sas Laminated relays with multiple flexible contacts
JP4561072B2 (ja) 2003-09-30 2010-10-13 株式会社日立製作所 Ｍｅｍｓスイッチを有する半導体装置
US20050083157A1 (en) * 2003-10-15 2005-04-21 Magfusion, Inc. Micro magnetic latching switches and methods of making same
US7183884B2 (en) * 2003-10-15 2007-02-27 Schneider Electric Industries Sas Micro magnetic non-latching switches and methods of making same
US7342473B2 (en) * 2004-04-07 2008-03-11 Schneider Electric Industries Sas Method and apparatus for reducing cantilever stress in magnetically actuated relays
KR100574510B1 (ko) * 2004-05-11 2006-04-27 삼성전자주식회사 멤스 공정을 이용한 자기부상 구조물 및 그 제조방법
JP2006179252A (ja) * 2004-12-21 2006-07-06 Fujitsu Component Ltd スイッチデバイス
CA2600081C (en) * 2005-03-18 2014-12-30 Simpler Networks Inc. Mems actuators and switches
US20060222871A1 (en) * 2005-03-31 2006-10-05 Bonhote Christian R Method for lowering deposition stress, improving ductility, and enhancing lateral growth in electrodeposited iron-containing alloys
US7692521B1 (en) * 2005-05-12 2010-04-06 Microassembly Technologies, Inc. High force MEMS device
US7528691B2 (en) * 2005-08-26 2009-05-05 Innovative Micro Technology Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture
US7482899B2 (en) * 2005-10-02 2009-01-27 Jun Shen Electromechanical latching relay and method of operating same
US20070171205A1 (en) * 2006-01-24 2007-07-26 Steinberg Dan A Keyboard having magnet-actuted switches
US8174343B2 (en) * 2006-09-24 2012-05-08 Magvention (Suzhou) Ltd. Electromechanical relay and method of making same
US20080197964A1 (en) * 2007-02-21 2008-08-21 Simpler Networks Inc. Mems actuators and switches
US7893798B2 (en) * 2007-05-09 2011-02-22 Innovative Micro Technology Dual substrate MEMS plate switch and method of manufacture
US8068002B2 (en) * 2008-04-22 2011-11-29 Magvention (Suzhou), Ltd. Coupled electromechanical relay and method of operating same
US8445306B2 (en) * 2008-12-24 2013-05-21 International Business Machines Corporation Hybrid MEMS RF switch and method of fabricating same
US8143978B2 (en) * 2009-02-23 2012-03-27 Magvention (Suzhou), Ltd. Electromechanical relay and method of operating same
US8159320B2 (en) 2009-09-14 2012-04-17 Meichun Ruan Latching micro-magnetic relay and method of operating same
DE102010002818B4 (de) * 2010-03-12 2017-08-31 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Bauelementes
US8635765B2 (en) * 2011-06-15 2014-01-28 International Business Machines Corporation Method of forming micro-electrical-mechanical structure (MEMS)
US20130207754A1 (en) * 2012-02-14 2013-08-15 U.S. Government As Represented By The Secretary Of The Army Magnetic flux switch
DE102012216997A1 (de) * 2012-09-21 2014-03-27 M-Invest GmbH Elektrisches schaltelement und herstellungsverfahren desselben
KR101444552B1 (ko) * 2012-12-21 2014-10-30 삼성전기주식회사 자성체 시트, 자성체 시트의 제조방법 및 자성체 시트를 포함하는 무접점 전력 충전 장치
US9105841B2 (en) * 2013-03-12 2015-08-11 International Business Machines Corporation Forming magnetic microelectromechanical inductive components
KR102236803B1 (ko) 2014-06-27 2021-04-06 인텔 코포레이션 정지마찰 보상을 위한 자기 나노기계적 디바이스들
US10132699B1 (en) 2014-10-06 2018-11-20 National Technology & Engineering Solutions Of Sandia, Llc Electrodeposition processes for magnetostrictive resonators
US10825628B2 (en) * 2017-07-17 2020-11-03 Analog Devices Global Unlimited Company Electromagnetically actuated microelectromechanical switch
JP6950613B2 (ja) * 2018-04-11 2021-10-13 Tdk株式会社 磁気作動型ｍｅｍｓスイッチ

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US5629918A (en) * 1995-01-20 1997-05-13 The Regents Of The University Of California Electromagnetically actuated micromachined flap
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FR2742917B1 (fr) * 1995-12-22 1998-02-13 Suisse Electronique Microtech Dispositif miniature pour executer une fonction predeterminee, notamment microrelais
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JP2998680B2 (ja) * 1997-02-27 2000-01-11 日本電気株式会社 高周波リレー
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Also Published As

Publication number Publication date
CA2323025A1 (en) 2001-04-15
DE60016692T2 (de) 2005-12-15
EP1093141B1 (de) 2004-12-15
JP2001176369A (ja) 2001-06-29
EP1093141A3 (de) 2003-04-09
EP1093141A2 (de) 2001-04-18
JP4459419B2 (ja) 2010-04-28
CA2323025C (en) 2003-07-29
US6124650A (en) 2000-09-26

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Legal Events

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8364 No opposition during term of opposition