FR2826504B1 - Actionneur magnetique a temps de reponse reduit - Google Patents

Actionneur magnetique a temps de reponse reduit

Info

Publication number
FR2826504B1
FR2826504B1 FR0108324A FR0108324A FR2826504B1 FR 2826504 B1 FR2826504 B1 FR 2826504B1 FR 0108324 A FR0108324 A FR 0108324A FR 0108324 A FR0108324 A FR 0108324A FR 2826504 B1 FR2826504 B1 FR 2826504B1
Authority
FR
France
Prior art keywords
response time
magnetic actuator
reduced response
reduced
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0108324A
Other languages
English (en)
Other versions
FR2826504A1 (fr
Inventor
Claire Divoux
Pierre Gaud
Jerome Delamare
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0108324A priority Critical patent/FR2826504B1/fr
Priority to PCT/FR2002/002176 priority patent/WO2003001548A1/fr
Priority to EP02758514A priority patent/EP1399938B1/fr
Priority to US10/482,095 priority patent/US6859122B2/en
Priority to DE60202769T priority patent/DE60202769T2/de
Publication of FR2826504A1 publication Critical patent/FR2826504A1/fr
Application granted granted Critical
Publication of FR2826504B1 publication Critical patent/FR2826504B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00Details of electromagnetic relays
    • H01H50/005Details of electromagnetic relays using micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00Details of electromagnetic relays
    • H01H50/16Magnetic circuit arrangements
    • H01H50/36Stationary parts of magnetic circuit, e.g. yoke
    • H01H50/42Auxiliary magnetic circuits, e.g. for maintaining armature in, or returning armature to, position of rest, for damping or accelerating movement
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49075Electromagnet, transformer or inductor including permanent magnet or core
FR0108324A 2001-06-25 2001-06-25 Actionneur magnetique a temps de reponse reduit Expired - Fee Related FR2826504B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0108324A FR2826504B1 (fr) 2001-06-25 2001-06-25 Actionneur magnetique a temps de reponse reduit
PCT/FR2002/002176 WO2003001548A1 (fr) 2001-06-25 2002-06-24 Actionneur magnetique a temps de reponse reduit
EP02758514A EP1399938B1 (fr) 2001-06-25 2002-06-24 Actionneur magnetique a temps de reponse reduit
US10/482,095 US6859122B2 (en) 2001-06-25 2002-06-24 Magnetic actuator with short response time
DE60202769T DE60202769T2 (de) 2001-06-25 2002-06-24 Magnetischer betätiger mit vermindertem zeitverhalten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0108324A FR2826504B1 (fr) 2001-06-25 2001-06-25 Actionneur magnetique a temps de reponse reduit

Publications (2)

Publication Number Publication Date
FR2826504A1 FR2826504A1 (fr) 2002-12-27
FR2826504B1 true FR2826504B1 (fr) 2003-09-12

Family

ID=8864712

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0108324A Expired - Fee Related FR2826504B1 (fr) 2001-06-25 2001-06-25 Actionneur magnetique a temps de reponse reduit

Country Status (5)

Country Link
US (1) US6859122B2 (fr)
EP (1) EP1399938B1 (fr)
DE (1) DE60202769T2 (fr)
FR (1) FR2826504B1 (fr)
WO (1) WO2003001548A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2824417B1 (fr) * 2001-05-03 2004-05-14 Commissariat Energie Atomique Actionneur magnetique bistable
JP2006223081A (ja) * 2005-01-14 2006-08-24 Matsushita Electric Ind Co Ltd アクチュエータ構造およびそれを用いたアクチュエータブロック、ならびに電子機器
US9284183B2 (en) 2005-03-04 2016-03-15 Ht Microanalytical, Inc. Method for forming normally closed micromechanical device comprising a laterally movable element
US7839242B1 (en) * 2006-08-23 2010-11-23 National Semiconductor Corporation Magnetic MEMS switching regulator
US8665041B2 (en) * 2008-03-20 2014-03-04 Ht Microanalytical, Inc. Integrated microminiature relay
US8378766B2 (en) * 2011-02-03 2013-02-19 National Semiconductor Corporation MEMS relay and method of forming the MEMS relay
EP2492928A3 (fr) * 2011-02-22 2017-08-30 ASML Netherlands BV Actionneur électromagnétique, appareil à platine et appareil lithographique
EP2963497B1 (fr) * 2014-06-30 2019-10-16 Dr. Johannes Heidenhain GmbH Entraînement pour une table XY et ladite table
FR3050339B1 (fr) 2016-04-15 2020-08-28 Enerbee Generateur d'electricite comprenant un convertisseur magneto-electrique et son procede de fabrication

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0287435A (ja) * 1988-09-22 1990-03-28 Fujitsu Ltd 有極電磁継電器
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6094116A (en) * 1996-08-01 2000-07-25 California Institute Of Technology Micro-electromechanical relays
US6124650A (en) * 1999-10-15 2000-09-26 Lucent Technologies Inc. Non-volatile MEMS micro-relays using magnetic actuators

Also Published As

Publication number Publication date
DE60202769D1 (de) 2005-03-03
FR2826504A1 (fr) 2002-12-27
US6859122B2 (en) 2005-02-22
EP1399938B1 (fr) 2005-01-26
EP1399938A1 (fr) 2004-03-24
US20040246082A1 (en) 2004-12-09
WO2003001548A1 (fr) 2003-01-03
DE60202769T2 (de) 2006-01-12

Similar Documents

Publication Publication Date Title
DE60135181D1 (de) Elektromagnetischer Aktuator
DE60127908D1 (de) Robotersteuerung
DE60213539D1 (de) Magnetischer Sensor
DE60141630D1 (de) Positionierungs-servosteuerung
ATA10432001A (de) Magnetsetzroboter
DE60132694D1 (de) Magnetventil
FR2841683B1 (fr) Actionneur magnetique
DE60206597D1 (de) Magnetventil
DE60239334D1 (de) Magnetsensor
DE60111901D1 (de) Wegeventil mit Magnetsensor
DE60106341D1 (de) Ladungsbewegungssteuerklappe
NO20025340D0 (no) Aktuatoranordning
DE60125698D1 (de) Elektromagnetische Ventilsteuerung
FR2816102B1 (fr) Actionneur a billes
DE60131246D1 (de) Magnetischer Positionsgeber
FR2826504B1 (fr) Actionneur magnetique a temps de reponse reduit
DE60111004D1 (de) Stellantrieb
DE50211821D1 (de) Magnetventil
DE50200822D1 (de) Magnetventil
DE50207981D1 (de) Elektromagnetischer Stellantrieb
DE50005975D1 (de) Magnetventil
DE10085450T1 (de) Dynamisch-symmetrischer Betätiger
FR2824417B1 (fr) Actionneur magnetique bistable
DE50204029D1 (de) Passiver magnetischer positionssensor
FR2819624B1 (fr) Actionneur electromagnetique

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20130228