JP4444380B2 - 放射線検出装置の製造方法 - Google Patents

放射線検出装置の製造方法 Download PDF

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Publication number
JP4444380B2
JP4444380B2 JP25990797A JP25990797A JP4444380B2 JP 4444380 B2 JP4444380 B2 JP 4444380B2 JP 25990797 A JP25990797 A JP 25990797A JP 25990797 A JP25990797 A JP 25990797A JP 4444380 B2 JP4444380 B2 JP 4444380B2
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Japan
Prior art keywords
photoelectric conversion
single crystal
substrate
layer
phosphor
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Expired - Fee Related
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JP25990797A
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Japanese (ja)
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JPH11101895A (ja
JPH11101895A5 (https=
Inventor
和昭 田代
良和 宮澤
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Canon Inc
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Canon Inc
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Priority to JP25990797A priority Critical patent/JP4444380B2/ja
Publication of JPH11101895A publication Critical patent/JPH11101895A/ja
Publication of JPH11101895A5 publication Critical patent/JPH11101895A5/ja
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  • Measurement Of Radiation (AREA)
  • Conversion Of X-Rays Into Visible Images (AREA)
JP25990797A 1997-09-25 1997-09-25 放射線検出装置の製造方法 Expired - Fee Related JP4444380B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25990797A JP4444380B2 (ja) 1997-09-25 1997-09-25 放射線検出装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25990797A JP4444380B2 (ja) 1997-09-25 1997-09-25 放射線検出装置の製造方法

Publications (3)

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JPH11101895A JPH11101895A (ja) 1999-04-13
JPH11101895A5 JPH11101895A5 (https=) 2005-06-23
JP4444380B2 true JP4444380B2 (ja) 2010-03-31

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JP25990797A Expired - Fee Related JP4444380B2 (ja) 1997-09-25 1997-09-25 放射線検出装置の製造方法

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6553092B1 (en) * 2000-03-07 2003-04-22 Koninklijke Philips Electronics, N.V. Multi-layer x-ray detector for diagnostic imaging
WO2002023220A1 (en) 2000-09-11 2002-03-21 Hamamatsu Photonics K.K. Scintillator panel, radiation image sensor and methods of producing them
WO2002023219A1 (en) * 2000-09-11 2002-03-21 Hamamatsu Photonics K.K. Scintillator panel, radiation image sensor and methods of producing them
JP4593806B2 (ja) * 2001-02-09 2010-12-08 キヤノン株式会社 放射線検出装置の製造方法、蛍光板の製造方法及び放射線検出装置の製造装置
WO2007023670A1 (ja) * 2005-08-23 2007-03-01 Konica Minolta Medical & Graphic, Inc. 放射線画像変換パネル及びその製造方法
JP7155025B2 (ja) * 2019-01-25 2022-10-18 株式会社ディスコ ウエーハの加工方法

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Publication number Publication date
JPH11101895A (ja) 1999-04-13

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