JP4440182B2 - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
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- JP4440182B2 JP4440182B2 JP2005222905A JP2005222905A JP4440182B2 JP 4440182 B2 JP4440182 B2 JP 4440182B2 JP 2005222905 A JP2005222905 A JP 2005222905A JP 2005222905 A JP2005222905 A JP 2005222905A JP 4440182 B2 JP4440182 B2 JP 4440182B2
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- JP
- Japan
- Prior art keywords
- space
- processing
- gas
- heat treatment
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
12 下部チャンバ
20 ガス導入部
25 機構部供給口
30 処理空間
35 パンチング板
60 機構部空間
61 機構部
80 排気口
90 連通部分
W 基板
Claims (2)
- 基板に熱処理を行う熱処理装置であって、
前記熱処理を行うための処理空間と、
前記処理空間において基板を保持する保持手段と、
前記保持手段を駆動させるのに使用される機構部と、
前記処理空間と連通され、前記機構部が配置される機構部空間と、
前記処理空間に処理ガスを供給するための処理ガス供給手段と、
前記処理空間と前記機構部空間との連通部分から排気する排気口と、
を備え、
前記連通部分の流体抵抗は、前記処理空間および前記機構部空間の流体抵抗よりも大きく、
前記排気口と前記連通部分との接続部分には、気体の通過方向に垂直な気体通過可能面積が前記排気口よりも大きい排気案内部を形成することを特徴とする熱処理装置。 - 請求項1記載の熱処理装置において、
前記機構部空間に不活性ガスを供給するための不活性ガス供給手段をさらに備えることを特徴とする熱処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005222905A JP4440182B2 (ja) | 2005-08-01 | 2005-08-01 | 熱処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005222905A JP4440182B2 (ja) | 2005-08-01 | 2005-08-01 | 熱処理装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19409699A Division JP3732358B2 (ja) | 1999-07-08 | 1999-07-08 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005354102A JP2005354102A (ja) | 2005-12-22 |
JP4440182B2 true JP4440182B2 (ja) | 2010-03-24 |
Family
ID=35588227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005222905A Expired - Fee Related JP4440182B2 (ja) | 2005-08-01 | 2005-08-01 | 熱処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4440182B2 (ja) |
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2005
- 2005-08-01 JP JP2005222905A patent/JP4440182B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2005354102A (ja) | 2005-12-22 |
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