JP4416808B2 - 無電解メッキ装置及び無電解メッキ方法 - Google Patents
無電解メッキ装置及び無電解メッキ方法 Download PDFInfo
- Publication number
- JP4416808B2 JP4416808B2 JP2007114964A JP2007114964A JP4416808B2 JP 4416808 B2 JP4416808 B2 JP 4416808B2 JP 2007114964 A JP2007114964 A JP 2007114964A JP 2007114964 A JP2007114964 A JP 2007114964A JP 4416808 B2 JP4416808 B2 JP 4416808B2
- Authority
- JP
- Japan
- Prior art keywords
- plating
- heat exchanger
- plating solution
- tank
- electroless plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/168—Control of temperature, e.g. temperature of bath, substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Chemically Coating (AREA)
Description
120a、120b バスケット
130、230 供給部
131、231 第1ノズル部
132、232 第2ノズル部
140 熱交換器
170 補助槽
Claims (7)
- メッキ槽と、
前記メッキ槽の底面に隣接するように配置される熱交換器と、
前記熱交換器に隣接するように配置されて前記熱交換器に向かってメッキ液を供給する供給部と
を含み、
前記熱交換器は板形状からなり、
前記供給部は前記熱交換器の上面に隣接して配置される第1ノズル部と、前記熱交換器の下面に隣接して配置される第2ノズル部を含み、
前記第1ノズル部から供給されるメッキ液は前記熱交換器の上面に沿って移動し、前記第2ノズル部から供給されるメッキ液は前記熱交換器の下面に沿って移動することを特徴とする無電解メッキ装置。 - 前記メッキ槽の内部に供給されたメッキ液を前記供給部に再供給する循環部をさらに含む請求項1に記載の無電解メッキ装置。
- 前記メッキ槽の内部に配置されてメッキ対象物を収容するバスケットをさらに含むことを特徴とする請求項1または2に記載の無電解メッキ装置。
- 前記供給部は、前記熱交換器の一端部に隣接するように配置されることを特徴とする請求項1から3のいずれかに記載の無電解メッキ装置。
- 前記熱交換器の表面温度は、90℃ないし100℃であることを特徴とする請求項1から4のいずれかに記載の無電解メッキ装置。
- 対象物にメッキ液を提供して無電解メッキを行う方法であって、
メッキ槽に前記対象物を提供する段階と、
前記メッキ槽の底面から前記メッキ液を供給する段階と、
前記メッキ槽の底面に配置される熱交換器により前記メッキ液に熱を供給する段階と、
及び
熱の供給を受けた前記メッキ液を前記対象物に提供する段階と、
を含み、
前記メッキ液の供給は、
前記熱交換器の上面に隣接するように配置される第1ノズル部と、前記熱交換器の下面に隣接するように配置される第2ノズル部により行われ、
前記第1ノズル部から供給されるメッキ液は前記熱交換器の上面に沿って移動し、前記第2ノズル部から供給されるメッキ液は前記熱交換器の下面に沿って移動することを特徴とする無電解メッキ方法。 - 前記熱交換器の表面温度は90℃ないし100℃であることを特徴とする請求項6に記載の無電解メッキ方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070009517A KR100846318B1 (ko) | 2007-01-30 | 2007-01-30 | 무전해 도금장치 및 무전해 도금방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008184687A JP2008184687A (ja) | 2008-08-14 |
JP4416808B2 true JP4416808B2 (ja) | 2010-02-17 |
Family
ID=39727925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007114964A Expired - Fee Related JP4416808B2 (ja) | 2007-01-30 | 2007-04-25 | 無電解メッキ装置及び無電解メッキ方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4416808B2 (ja) |
KR (1) | KR100846318B1 (ja) |
CN (1) | CN101235494B (ja) |
TW (1) | TWI360585B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101153537B1 (ko) * | 2010-09-10 | 2012-06-11 | 삼성전기주식회사 | 인쇄회로기판 도금 장치 |
TWI485286B (zh) | 2011-11-16 | 2015-05-21 | Ebara Corp | Electroless plating and electroless plating |
CN103602963A (zh) * | 2013-12-03 | 2014-02-26 | 昆山亿诚化工容器有限公司 | 一种新型电镀设备 |
KR101816028B1 (ko) | 2015-01-23 | 2018-01-08 | 코닝정밀소재 주식회사 | 금속 접합기판 |
CN107231754B (zh) * | 2017-06-29 | 2019-10-22 | 深圳崇达多层线路板有限公司 | 一种改善在线路板制造过程中产生的金属化孔不良的方法 |
CN110408916B (zh) * | 2019-08-26 | 2021-08-17 | 惠州市安泰普表面处理科技有限公司 | 化学镀镍方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3075409B2 (ja) * | 1989-10-30 | 2000-08-14 | イビデン株式会社 | 無電解メッキ装置 |
CN2399403Y (zh) * | 1999-12-16 | 2000-10-04 | 张贵洲 | 合金镀槽 |
CN2601259Y (zh) * | 2003-01-30 | 2004-01-28 | 中国第一汽车集团公司 | 水浴加热化学镀设备 |
-
2007
- 2007-01-30 KR KR1020070009517A patent/KR100846318B1/ko not_active IP Right Cessation
- 2007-04-03 TW TW096111852A patent/TWI360585B/zh not_active IP Right Cessation
- 2007-04-25 JP JP2007114964A patent/JP4416808B2/ja not_active Expired - Fee Related
- 2007-06-01 CN CN2007101073940A patent/CN101235494B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101235494A (zh) | 2008-08-06 |
CN101235494B (zh) | 2010-09-29 |
TWI360585B (en) | 2012-03-21 |
JP2008184687A (ja) | 2008-08-14 |
KR100846318B1 (ko) | 2008-07-15 |
TW200831702A (en) | 2008-08-01 |
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