JP4397786B2 - 熱分析センサー並びに熱分析センサーを製造する方法 - Google Patents

熱分析センサー並びに熱分析センサーを製造する方法 Download PDF

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Publication number
JP4397786B2
JP4397786B2 JP2004313337A JP2004313337A JP4397786B2 JP 4397786 B2 JP4397786 B2 JP 4397786B2 JP 2004313337 A JP2004313337 A JP 2004313337A JP 2004313337 A JP2004313337 A JP 2004313337A JP 4397786 B2 JP4397786 B2 JP 4397786B2
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Japan
Prior art keywords
thermocouple
thermal analysis
connection
substrate
analysis sensor
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Expired - Lifetime
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JP2004313337A
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English (en)
Japanese (ja)
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JP2005134397A (ja
JP2005134397A5 (https=
Inventor
トーマス・ヒューター
ベルンド・ダンハマー
ウース・ニーダーマン
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Mettler Toledo Schweiz GmbH
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Mettler Toledo Schweiz GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/021—Particular circuit arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4806—Details not adapted to a particular type of sample
    • G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
    • G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Saccharide Compounds (AREA)
JP2004313337A 2003-10-28 2004-10-28 熱分析センサー並びに熱分析センサーを製造する方法 Expired - Lifetime JP4397786B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03103996A EP1528392B1 (de) 2003-10-28 2003-10-28 Thermoanalytischer Sensor und Verfahren zu dessen Herstellung

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009208847A Division JP4970512B2 (ja) 2003-10-28 2009-09-10 熱分析センサー並びに熱分析センサーを製造する方法

Publications (3)

Publication Number Publication Date
JP2005134397A JP2005134397A (ja) 2005-05-26
JP2005134397A5 JP2005134397A5 (https=) 2007-10-18
JP4397786B2 true JP4397786B2 (ja) 2010-01-13

Family

ID=34400568

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JP2004313337A Expired - Lifetime JP4397786B2 (ja) 2003-10-28 2004-10-28 熱分析センサー並びに熱分析センサーを製造する方法
JP2009208847A Expired - Lifetime JP4970512B2 (ja) 2003-10-28 2009-09-10 熱分析センサー並びに熱分析センサーを製造する方法

Family Applications After (1)

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JP2009208847A Expired - Lifetime JP4970512B2 (ja) 2003-10-28 2009-09-10 熱分析センサー並びに熱分析センサーを製造する方法

Country Status (6)

Country Link
US (2) US7258482B2 (https=)
EP (3) EP1715331B1 (https=)
JP (2) JP4397786B2 (https=)
CN (3) CN101514969B (https=)
AT (1) ATE371862T1 (https=)
DE (1) DE50308077D1 (https=)

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KR100690926B1 (ko) * 2006-02-03 2007-03-09 삼성전자주식회사 마이크로 열유속 센서 어레이
JP2008089474A (ja) * 2006-10-03 2008-04-17 Rigaku Corp 熱分析装置のセンサユニットおよびその製造方法
GB0814452D0 (en) * 2008-08-07 2008-09-10 Melexis Nv Laminated temperature sensor
EP2485025B1 (en) * 2009-10-02 2016-08-03 Imagineering, Inc. Heat flux measurement device, and heat flux measurement method
JP5642525B2 (ja) 2010-02-02 2014-12-17 株式会社日立ハイテクサイエンス 示差走査熱量計
GB201112430D0 (en) * 2011-07-20 2011-08-31 Melexis Tessenderlo Nv IR sensor design
DE102013102088B3 (de) * 2013-03-04 2014-07-17 Netzsch-Gerätebau GmbH Verfahren und Vorrichtung zur Materialanalyse
US9964454B2 (en) 2013-03-22 2018-05-08 Waters Technologies Corporation Thermopile differential scanning calorimeter sensor
EP2921833B1 (de) * 2014-03-18 2016-12-28 Mettler-Toledo GmbH Thermoanalytischer Sensor und Verfahren zu dessen Herstellung
US9335231B2 (en) * 2014-03-25 2016-05-10 Mks Instruments, Inc. Micro-Pirani vacuum gauges
US9891114B2 (en) * 2014-05-28 2018-02-13 Hamilton Sundstrand Corporation Flexible laminated thermocouple
CN104132744B (zh) * 2014-07-23 2017-02-15 电子科技大学 一种双环形集成热电堆传感器
US10910543B2 (en) * 2015-05-21 2021-02-02 Karl Joseph Steutermann Thermo-electric device to provide electrical power
JP6355600B2 (ja) * 2015-08-12 2018-07-11 株式会社リガク 熱分析装置用センサユニットおよび熱分析装置
US10818561B2 (en) * 2016-01-28 2020-10-27 Applied Materials, Inc. Process monitor device having a plurality of sensors arranged in concentric circles
JP6500841B2 (ja) * 2016-05-25 2019-04-17 株式会社デンソー 熱流測定装置
KR102674590B1 (ko) * 2016-08-23 2024-06-13 에스케이하이닉스 주식회사 반도체시스템
DE102018113417A1 (de) * 2018-06-06 2019-12-12 Netzsch - Gerätebau Gesellschaft mit beschränkter Haftung Messanordnung und Verfahren für eine thermische Analyse einer Probe
WO2020086280A2 (en) * 2018-10-22 2020-04-30 Waters Technologies Corporation High sample throughput differential scanning calorimeter
DE102019206214A1 (de) * 2019-04-30 2020-11-05 Linseis Messgeräte GmbH Differentialkalorimeter mit hoher Sensitivität
CN110118927B (zh) * 2019-05-30 2021-07-16 重庆蓝岸通讯技术有限公司 高速控制芯片热分布自检结构及监测系统
CN111879443A (zh) * 2020-07-14 2020-11-03 西安近代化学研究所 火箭发动机内气-液两相热流密度测量工装
CN114964565B (zh) * 2022-05-25 2025-07-22 中国计量大学 一种面向差示扫描量热的立体型热流传感器及其制备工艺
EP4343295A1 (en) * 2022-09-26 2024-03-27 Mettler-Toledo GmbH Sensor assembly for a differential scanning calorimeter
US12424068B2 (en) * 2023-09-14 2025-09-23 Brian Michael Coyle Multilevel fire detector
CN119915401A (zh) * 2025-04-07 2025-05-02 绵阳为仪科技有限公司 一种三维热分析传感器

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US3511959A (en) 1968-02-16 1970-05-12 Varian Associates Microwave cavity having a varied impedance transmission line microwave energy seal around the access door opening
US3607445A (en) * 1968-02-19 1971-09-21 Rdf Corp Thermal apparatus
GB1357217A (en) * 1971-07-09 1974-06-19 Best Products Ltd Multi-junction thermocouples
US4110124A (en) * 1975-09-22 1978-08-29 Engelhard Minerals & Chemicals Corporation Thick film thermocouples
JPS57113332A (en) * 1980-12-30 1982-07-14 Horiba Ltd Compensating thermopile detector
CH678579A5 (https=) * 1989-04-24 1991-09-30 Mettler Toledo Ag
JPH05223763A (ja) * 1992-02-12 1993-08-31 Rigaku Corp 熱電対を用いた熱分析装置
US5288147A (en) * 1992-11-09 1994-02-22 Ta Instruments, Inc. Thermopile differential thermal analysis sensor
US5695283A (en) * 1994-07-01 1997-12-09 Wahl Instruments, Inc. Compensating infrared thermopile detector
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DE19738567A1 (de) * 1997-09-04 1999-03-11 Rowe Recan Vertriebs Und Produ Einrichtung zur Abdichtung von Bauteilen gegen Schadstoffemissionen
DE69811890T2 (de) * 1998-10-01 2003-11-06 Mettler-Toledo Gmbh, Greifensee Einzellenkalorimeter
DE60024774T2 (de) * 2000-02-03 2006-09-07 Mettler-Toledo Gmbh Modulationsverfahren und Vorrichtung für die Thermoanalyse eines Materials
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DE10227182B4 (de) * 2002-06-18 2013-01-31 Mettler-Toledo Ag Probenhalter für die Differenz-Thermoanalyse

Also Published As

Publication number Publication date
CN101514969A (zh) 2009-08-26
CN101514970A (zh) 2009-08-26
US7473029B2 (en) 2009-01-06
EP1528392B1 (de) 2007-08-29
EP1528392A1 (de) 2005-05-04
JP2005134397A (ja) 2005-05-26
ATE371862T1 (de) 2007-09-15
EP1715331B1 (de) 2013-08-21
EP1715332A3 (de) 2007-04-11
CN1611931B (zh) 2010-08-04
CN101514969B (zh) 2012-04-04
JP2010014725A (ja) 2010-01-21
CN101514970B (zh) 2011-04-27
JP4970512B2 (ja) 2012-07-11
US7258482B2 (en) 2007-08-21
US20070253462A1 (en) 2007-11-01
US20050169344A1 (en) 2005-08-04
DE50308077D1 (de) 2007-10-11
EP1715332A2 (de) 2006-10-25
CN1611931A (zh) 2005-05-04
EP1715331A3 (de) 2007-04-11
EP1715331A2 (de) 2006-10-25

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