CN1611931B - 热分析传感器以及制造热分析传感器的方法 - Google Patents
热分析传感器以及制造热分析传感器的方法 Download PDFInfo
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- CN1611931B CN1611931B CN200410087946.2A CN200410087946A CN1611931B CN 1611931 B CN1611931 B CN 1611931B CN 200410087946 A CN200410087946 A CN 200410087946A CN 1611931 B CN1611931 B CN 1611931B
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- 238000000034 method Methods 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title abstract description 5
- 239000000463 material Substances 0.000 claims abstract description 82
- 239000000758 substrate Substances 0.000 claims abstract description 79
- 238000009413 insulation Methods 0.000 claims description 36
- 230000015572 biosynthetic process Effects 0.000 claims description 34
- 238000005755 formation reaction Methods 0.000 claims description 34
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- 238000013461 design Methods 0.000 description 3
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- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/021—Particular circuit arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4806—Details not adapted to a particular type of sample
- G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
- G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Saccharide Compounds (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
Description
Claims (23)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03103996A EP1528392B1 (de) | 2003-10-28 | 2003-10-28 | Thermoanalytischer Sensor und Verfahren zu dessen Herstellung |
EP03103996.9 | 2003-10-28 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910126618.1A Division CN101514969B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126619.6A Division CN101514970B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1611931A CN1611931A (zh) | 2005-05-04 |
CN1611931B true CN1611931B (zh) | 2010-08-04 |
Family
ID=34400568
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200410087946.2A Active CN1611931B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126618.1A Active CN101514969B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126619.6A Active CN101514970B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910126618.1A Active CN101514969B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126619.6A Active CN101514970B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7258482B2 (zh) |
EP (3) | EP1715331B1 (zh) |
JP (2) | JP4397786B2 (zh) |
CN (3) | CN1611931B (zh) |
AT (1) | ATE371862T1 (zh) |
DE (1) | DE50308077D1 (zh) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100690926B1 (ko) * | 2006-02-03 | 2007-03-09 | 삼성전자주식회사 | 마이크로 열유속 센서 어레이 |
JP2008089474A (ja) * | 2006-10-03 | 2008-04-17 | Rigaku Corp | 熱分析装置のセンサユニットおよびその製造方法 |
GB0814452D0 (en) * | 2008-08-07 | 2008-09-10 | Melexis Nv | Laminated temperature sensor |
US9127988B2 (en) * | 2009-10-02 | 2015-09-08 | Imagineering, Inc. | Heat flux measurement apparatus and heat flux measurement method |
JP5642525B2 (ja) | 2010-02-02 | 2014-12-17 | 株式会社日立ハイテクサイエンス | 示差走査熱量計 |
GB201112430D0 (en) * | 2011-07-20 | 2011-08-31 | Melexis Tessenderlo Nv | IR sensor design |
DE102013102088B3 (de) * | 2013-03-04 | 2014-07-17 | Netzsch-Gerätebau GmbH | Verfahren und Vorrichtung zur Materialanalyse |
CN105209872B (zh) | 2013-03-22 | 2019-02-19 | 沃特世科技公司 | 热电堆差示扫描量热仪传感器 |
EP2921833B1 (de) | 2014-03-18 | 2016-12-28 | Mettler-Toledo GmbH | Thermoanalytischer Sensor und Verfahren zu dessen Herstellung |
US9335231B2 (en) * | 2014-03-25 | 2016-05-10 | Mks Instruments, Inc. | Micro-Pirani vacuum gauges |
US9891114B2 (en) * | 2014-05-28 | 2018-02-13 | Hamilton Sundstrand Corporation | Flexible laminated thermocouple |
CN104132744B (zh) * | 2014-07-23 | 2017-02-15 | 电子科技大学 | 一种双环形集成热电堆传感器 |
US10910543B2 (en) * | 2015-05-21 | 2021-02-02 | Karl Joseph Steutermann | Thermo-electric device to provide electrical power |
JP6355600B2 (ja) * | 2015-08-12 | 2018-07-11 | 株式会社リガク | 熱分析装置用センサユニットおよび熱分析装置 |
US10818561B2 (en) * | 2016-01-28 | 2020-10-27 | Applied Materials, Inc. | Process monitor device having a plurality of sensors arranged in concentric circles |
JP6500841B2 (ja) * | 2016-05-25 | 2019-04-17 | 株式会社デンソー | 熱流測定装置 |
KR102674590B1 (ko) * | 2016-08-23 | 2024-06-13 | 에스케이하이닉스 주식회사 | 반도체시스템 |
DE102018113417A1 (de) * | 2018-06-06 | 2019-12-12 | Netzsch - Gerätebau Gesellschaft mit beschränkter Haftung | Messanordnung und Verfahren für eine thermische Analyse einer Probe |
EP3870961B1 (en) * | 2018-10-22 | 2024-03-06 | Waters Technologies Corporation | High sample throughput differential scanning calorimeter |
DE102019206214A1 (de) * | 2019-04-30 | 2020-11-05 | Linseis Messgeräte GmbH | Differentialkalorimeter mit hoher Sensitivität |
CN110118927B (zh) * | 2019-05-30 | 2021-07-16 | 重庆蓝岸通讯技术有限公司 | 高速控制芯片热分布自检结构及监测系统 |
CN111879443A (zh) * | 2020-07-14 | 2020-11-03 | 西安近代化学研究所 | 火箭发动机内气-液两相热流密度测量工装 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5033866A (en) * | 1989-04-24 | 1991-07-23 | Mettler Toledo Ag | Multiple thermocouple sensor |
US5288147A (en) * | 1992-11-09 | 1994-02-22 | Ta Instruments, Inc. | Thermopile differential thermal analysis sensor |
EP0900893A2 (de) * | 1997-09-04 | 1999-03-10 | ROWE recan Vertriebs- und Produktions GmbH | Einrichtung zur Abdichtung von Bauteilen gegen Schadstoffemissionen und/oder zur Entfernung von Schadstoffen aus Bauteilen sowie Verfahren zur Entfernung von Schadstoffen |
US6318890B1 (en) * | 1998-10-01 | 2001-11-20 | Mettler-Toledo Gmbh | Single cell calorimeter |
US6508585B2 (en) * | 1995-12-29 | 2003-01-21 | Seiko Instruments Inc. | Differential scanning calorimeter |
US6583391B2 (en) * | 2000-02-03 | 2003-06-24 | Mettler-Toledo Gmbh | Modulation method and apparatus for thermally analyzing a material |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3511959A (en) | 1968-02-16 | 1970-05-12 | Varian Associates | Microwave cavity having a varied impedance transmission line microwave energy seal around the access door opening |
US3607445A (en) * | 1968-02-19 | 1971-09-21 | Rdf Corp | Thermal apparatus |
GB1357217A (en) * | 1971-07-09 | 1974-06-19 | Best Products Ltd | Multi-junction thermocouples |
US4110124A (en) * | 1975-09-22 | 1978-08-29 | Engelhard Minerals & Chemicals Corporation | Thick film thermocouples |
JPS57113332A (en) * | 1980-12-30 | 1982-07-14 | Horiba Ltd | Compensating thermopile detector |
JPH05223763A (ja) * | 1992-02-12 | 1993-08-31 | Rigaku Corp | 熱電対を用いた熱分析装置 |
US5695283A (en) * | 1994-07-01 | 1997-12-09 | Wahl Instruments, Inc. | Compensating infrared thermopile detector |
GB0129288D0 (en) * | 2001-12-07 | 2002-01-23 | Univ Glasgow | Thermoelectric sensor |
DE10227182B4 (de) * | 2002-06-18 | 2013-01-31 | Mettler-Toledo Ag | Probenhalter für die Differenz-Thermoanalyse |
-
2003
- 2003-10-28 AT AT03103996T patent/ATE371862T1/de not_active IP Right Cessation
- 2003-10-28 EP EP06118822.3A patent/EP1715331B1/de not_active Expired - Lifetime
- 2003-10-28 EP EP03103996A patent/EP1528392B1/de not_active Expired - Lifetime
- 2003-10-28 EP EP06118823A patent/EP1715332A3/de not_active Withdrawn
- 2003-10-28 DE DE50308077T patent/DE50308077D1/de not_active Expired - Lifetime
-
2004
- 2004-10-27 CN CN200410087946.2A patent/CN1611931B/zh active Active
- 2004-10-27 US US10/973,900 patent/US7258482B2/en active Active
- 2004-10-27 CN CN200910126618.1A patent/CN101514969B/zh active Active
- 2004-10-27 CN CN200910126619.6A patent/CN101514970B/zh active Active
- 2004-10-28 JP JP2004313337A patent/JP4397786B2/ja active Active
-
2007
- 2007-06-21 US US11/812,728 patent/US7473029B2/en active Active
-
2009
- 2009-09-10 JP JP2009208847A patent/JP4970512B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5033866A (en) * | 1989-04-24 | 1991-07-23 | Mettler Toledo Ag | Multiple thermocouple sensor |
US5288147A (en) * | 1992-11-09 | 1994-02-22 | Ta Instruments, Inc. | Thermopile differential thermal analysis sensor |
US6508585B2 (en) * | 1995-12-29 | 2003-01-21 | Seiko Instruments Inc. | Differential scanning calorimeter |
EP0900893A2 (de) * | 1997-09-04 | 1999-03-10 | ROWE recan Vertriebs- und Produktions GmbH | Einrichtung zur Abdichtung von Bauteilen gegen Schadstoffemissionen und/oder zur Entfernung von Schadstoffen aus Bauteilen sowie Verfahren zur Entfernung von Schadstoffen |
US6318890B1 (en) * | 1998-10-01 | 2001-11-20 | Mettler-Toledo Gmbh | Single cell calorimeter |
US6583391B2 (en) * | 2000-02-03 | 2003-06-24 | Mettler-Toledo Gmbh | Modulation method and apparatus for thermally analyzing a material |
Also Published As
Publication number | Publication date |
---|---|
EP1715331A3 (de) | 2007-04-11 |
DE50308077D1 (de) | 2007-10-11 |
JP4397786B2 (ja) | 2010-01-13 |
EP1715332A2 (de) | 2006-10-25 |
EP1528392B1 (de) | 2007-08-29 |
EP1528392A1 (de) | 2005-05-04 |
US7473029B2 (en) | 2009-01-06 |
EP1715331B1 (de) | 2013-08-21 |
US20050169344A1 (en) | 2005-08-04 |
JP2010014725A (ja) | 2010-01-21 |
CN101514969B (zh) | 2012-04-04 |
EP1715331A2 (de) | 2006-10-25 |
US20070253462A1 (en) | 2007-11-01 |
CN101514970A (zh) | 2009-08-26 |
JP4970512B2 (ja) | 2012-07-11 |
CN101514969A (zh) | 2009-08-26 |
CN101514970B (zh) | 2011-04-27 |
JP2005134397A (ja) | 2005-05-26 |
CN1611931A (zh) | 2005-05-04 |
EP1715332A3 (de) | 2007-04-11 |
ATE371862T1 (de) | 2007-09-15 |
US7258482B2 (en) | 2007-08-21 |
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