CN1611931A - 热分析传感器以及制造热分析传感器的方法 - Google Patents
热分析传感器以及制造热分析传感器的方法 Download PDFInfo
- Publication number
- CN1611931A CN1611931A CN200410087946.2A CN200410087946A CN1611931A CN 1611931 A CN1611931 A CN 1611931A CN 200410087946 A CN200410087946 A CN 200410087946A CN 1611931 A CN1611931 A CN 1611931A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 238000000034 method Methods 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims abstract description 91
- 239000000463 material Substances 0.000 claims abstract description 84
- 238000009413 insulation Methods 0.000 claims description 37
- 230000015572 biosynthetic process Effects 0.000 claims description 36
- 238000005755 formation reaction Methods 0.000 claims description 36
- 239000011229 interlayer Substances 0.000 claims description 35
- 239000011800 void material Substances 0.000 claims description 11
- 239000010410 layer Substances 0.000 claims description 10
- 239000006071 cream Substances 0.000 claims description 5
- 238000007639 printing Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 239000006112 glass ceramic composition Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 8
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 239000000523 sample Substances 0.000 description 15
- 239000012530 fluid Substances 0.000 description 8
- 239000013074 reference sample Substances 0.000 description 8
- 230000014509 gene expression Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000007707 calorimetry Methods 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000006091 Macor Substances 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 229910052574 oxide ceramic Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 230000002650 habitual effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002076 thermal analysis method Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/021—Particular circuit arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4806—Details not adapted to a particular type of sample
- G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
- G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Saccharide Compounds (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
Description
Claims (30)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03103996A EP1528392B1 (de) | 2003-10-28 | 2003-10-28 | Thermoanalytischer Sensor und Verfahren zu dessen Herstellung |
EP03103996.9 | 2003-10-28 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910126618.1A Division CN101514969B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126619.6A Division CN101514970B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1611931A true CN1611931A (zh) | 2005-05-04 |
CN1611931B CN1611931B (zh) | 2010-08-04 |
Family
ID=34400568
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200410087946.2A Active CN1611931B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126618.1A Active CN101514969B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126619.6A Active CN101514970B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910126618.1A Active CN101514969B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
CN200910126619.6A Active CN101514970B (zh) | 2003-10-28 | 2004-10-27 | 热分析传感器以及制造热分析传感器的方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7258482B2 (zh) |
EP (3) | EP1715331B1 (zh) |
JP (2) | JP4397786B2 (zh) |
CN (3) | CN1611931B (zh) |
AT (1) | ATE371862T1 (zh) |
DE (1) | DE50308077D1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104931523A (zh) * | 2014-03-18 | 2015-09-23 | 梅特勒-托利多公开股份有限公司 | 热分析传感器和制造该传感器的方法 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100690926B1 (ko) * | 2006-02-03 | 2007-03-09 | 삼성전자주식회사 | 마이크로 열유속 센서 어레이 |
JP2008089474A (ja) * | 2006-10-03 | 2008-04-17 | Rigaku Corp | 熱分析装置のセンサユニットおよびその製造方法 |
GB0814452D0 (en) * | 2008-08-07 | 2008-09-10 | Melexis Nv | Laminated temperature sensor |
US9127988B2 (en) * | 2009-10-02 | 2015-09-08 | Imagineering, Inc. | Heat flux measurement apparatus and heat flux measurement method |
JP5642525B2 (ja) | 2010-02-02 | 2014-12-17 | 株式会社日立ハイテクサイエンス | 示差走査熱量計 |
GB201112430D0 (en) * | 2011-07-20 | 2011-08-31 | Melexis Tessenderlo Nv | IR sensor design |
DE102013102088B3 (de) * | 2013-03-04 | 2014-07-17 | Netzsch-Gerätebau GmbH | Verfahren und Vorrichtung zur Materialanalyse |
CN105209872B (zh) | 2013-03-22 | 2019-02-19 | 沃特世科技公司 | 热电堆差示扫描量热仪传感器 |
US9335231B2 (en) * | 2014-03-25 | 2016-05-10 | Mks Instruments, Inc. | Micro-Pirani vacuum gauges |
US9891114B2 (en) * | 2014-05-28 | 2018-02-13 | Hamilton Sundstrand Corporation | Flexible laminated thermocouple |
CN104132744B (zh) * | 2014-07-23 | 2017-02-15 | 电子科技大学 | 一种双环形集成热电堆传感器 |
US10910543B2 (en) * | 2015-05-21 | 2021-02-02 | Karl Joseph Steutermann | Thermo-electric device to provide electrical power |
JP6355600B2 (ja) * | 2015-08-12 | 2018-07-11 | 株式会社リガク | 熱分析装置用センサユニットおよび熱分析装置 |
US10818561B2 (en) * | 2016-01-28 | 2020-10-27 | Applied Materials, Inc. | Process monitor device having a plurality of sensors arranged in concentric circles |
JP6500841B2 (ja) * | 2016-05-25 | 2019-04-17 | 株式会社デンソー | 熱流測定装置 |
KR102674590B1 (ko) * | 2016-08-23 | 2024-06-13 | 에스케이하이닉스 주식회사 | 반도체시스템 |
DE102018113417A1 (de) * | 2018-06-06 | 2019-12-12 | Netzsch - Gerätebau Gesellschaft mit beschränkter Haftung | Messanordnung und Verfahren für eine thermische Analyse einer Probe |
EP3870961B1 (en) * | 2018-10-22 | 2024-03-06 | Waters Technologies Corporation | High sample throughput differential scanning calorimeter |
DE102019206214A1 (de) * | 2019-04-30 | 2020-11-05 | Linseis Messgeräte GmbH | Differentialkalorimeter mit hoher Sensitivität |
CN110118927B (zh) * | 2019-05-30 | 2021-07-16 | 重庆蓝岸通讯技术有限公司 | 高速控制芯片热分布自检结构及监测系统 |
CN111879443A (zh) * | 2020-07-14 | 2020-11-03 | 西安近代化学研究所 | 火箭发动机内气-液两相热流密度测量工装 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3511959A (en) | 1968-02-16 | 1970-05-12 | Varian Associates | Microwave cavity having a varied impedance transmission line microwave energy seal around the access door opening |
US3607445A (en) * | 1968-02-19 | 1971-09-21 | Rdf Corp | Thermal apparatus |
GB1357217A (en) * | 1971-07-09 | 1974-06-19 | Best Products Ltd | Multi-junction thermocouples |
US4110124A (en) * | 1975-09-22 | 1978-08-29 | Engelhard Minerals & Chemicals Corporation | Thick film thermocouples |
JPS57113332A (en) * | 1980-12-30 | 1982-07-14 | Horiba Ltd | Compensating thermopile detector |
CH678579A5 (zh) * | 1989-04-24 | 1991-09-30 | Mettler Toledo Ag | |
JPH05223763A (ja) * | 1992-02-12 | 1993-08-31 | Rigaku Corp | 熱電対を用いた熱分析装置 |
US5288147A (en) * | 1992-11-09 | 1994-02-22 | Ta Instruments, Inc. | Thermopile differential thermal analysis sensor |
US5695283A (en) * | 1994-07-01 | 1997-12-09 | Wahl Instruments, Inc. | Compensating infrared thermopile detector |
US5965606A (en) * | 1995-12-29 | 1999-10-12 | Allergan Sales, Inc. | Methods of treatment with compounds having RAR.sub.α receptor specific or selective activity |
DE19738567A1 (de) * | 1997-09-04 | 1999-03-11 | Rowe Recan Vertriebs Und Produ | Einrichtung zur Abdichtung von Bauteilen gegen Schadstoffemissionen |
EP0990893B1 (en) * | 1998-10-01 | 2003-03-05 | Mettler-Toledo GmbH | Single cell calorimeter |
DE60024774T2 (de) * | 2000-02-03 | 2006-09-07 | Mettler-Toledo Gmbh | Modulationsverfahren und Vorrichtung für die Thermoanalyse eines Materials |
GB0129288D0 (en) * | 2001-12-07 | 2002-01-23 | Univ Glasgow | Thermoelectric sensor |
DE10227182B4 (de) * | 2002-06-18 | 2013-01-31 | Mettler-Toledo Ag | Probenhalter für die Differenz-Thermoanalyse |
-
2003
- 2003-10-28 AT AT03103996T patent/ATE371862T1/de not_active IP Right Cessation
- 2003-10-28 EP EP06118822.3A patent/EP1715331B1/de not_active Expired - Lifetime
- 2003-10-28 EP EP03103996A patent/EP1528392B1/de not_active Expired - Lifetime
- 2003-10-28 EP EP06118823A patent/EP1715332A3/de not_active Withdrawn
- 2003-10-28 DE DE50308077T patent/DE50308077D1/de not_active Expired - Lifetime
-
2004
- 2004-10-27 CN CN200410087946.2A patent/CN1611931B/zh active Active
- 2004-10-27 US US10/973,900 patent/US7258482B2/en active Active
- 2004-10-27 CN CN200910126618.1A patent/CN101514969B/zh active Active
- 2004-10-27 CN CN200910126619.6A patent/CN101514970B/zh active Active
- 2004-10-28 JP JP2004313337A patent/JP4397786B2/ja active Active
-
2007
- 2007-06-21 US US11/812,728 patent/US7473029B2/en active Active
-
2009
- 2009-09-10 JP JP2009208847A patent/JP4970512B2/ja active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104931523A (zh) * | 2014-03-18 | 2015-09-23 | 梅特勒-托利多公开股份有限公司 | 热分析传感器和制造该传感器的方法 |
CN104931523B (zh) * | 2014-03-18 | 2019-06-11 | 梅特勒-托莱多有限公司 | 热分析传感器和制造该传感器的方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1715331A3 (de) | 2007-04-11 |
DE50308077D1 (de) | 2007-10-11 |
JP4397786B2 (ja) | 2010-01-13 |
EP1715332A2 (de) | 2006-10-25 |
EP1528392B1 (de) | 2007-08-29 |
EP1528392A1 (de) | 2005-05-04 |
US7473029B2 (en) | 2009-01-06 |
EP1715331B1 (de) | 2013-08-21 |
US20050169344A1 (en) | 2005-08-04 |
JP2010014725A (ja) | 2010-01-21 |
CN101514969B (zh) | 2012-04-04 |
EP1715331A2 (de) | 2006-10-25 |
US20070253462A1 (en) | 2007-11-01 |
CN101514970A (zh) | 2009-08-26 |
JP4970512B2 (ja) | 2012-07-11 |
CN101514969A (zh) | 2009-08-26 |
CN101514970B (zh) | 2011-04-27 |
JP2005134397A (ja) | 2005-05-26 |
EP1715332A3 (de) | 2007-04-11 |
ATE371862T1 (de) | 2007-09-15 |
CN1611931B (zh) | 2010-08-04 |
US7258482B2 (en) | 2007-08-21 |
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