JP4393968B2 - 配線の作製方法及び半導体装置の作製方法 - Google Patents

配線の作製方法及び半導体装置の作製方法 Download PDF

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Publication number
JP4393968B2
JP4393968B2 JP2004311240A JP2004311240A JP4393968B2 JP 4393968 B2 JP4393968 B2 JP 4393968B2 JP 2004311240 A JP2004311240 A JP 2004311240A JP 2004311240 A JP2004311240 A JP 2004311240A JP 4393968 B2 JP4393968 B2 JP 4393968B2
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Prior art keywords
electrode
film
plasma treatment
wiring
insulating film
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JP2004311240A
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Japanese (ja)
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JP2005159328A (ja
JP2005159328A5 (enExample
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慎志 前川
孝司 村中
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Publication of JP2005159328A5 publication Critical patent/JP2005159328A5/ja
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  • Liquid Crystal (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Thin Film Transistor (AREA)
JP2004311240A 2003-10-28 2004-10-26 配線の作製方法及び半導体装置の作製方法 Expired - Fee Related JP4393968B2 (ja)

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JP2004311240A JP4393968B2 (ja) 2003-10-28 2004-10-26 配線の作製方法及び半導体装置の作製方法

Applications Claiming Priority (2)

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JP2003368030 2003-10-28
JP2004311240A JP4393968B2 (ja) 2003-10-28 2004-10-26 配線の作製方法及び半導体装置の作製方法

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JP2005159328A JP2005159328A (ja) 2005-06-16
JP2005159328A5 JP2005159328A5 (enExample) 2006-05-11
JP4393968B2 true JP4393968B2 (ja) 2010-01-06

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Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4618087B2 (ja) * 2004-10-15 2011-01-26 セイコーエプソン株式会社 仕切部材の形成方法、カラーフィルター用仕切部材の形成方法
JP2007043113A (ja) * 2005-06-30 2007-02-15 Semiconductor Energy Lab Co Ltd 半導体装置、半導体装置の作製方法
JP4761199B2 (ja) * 2005-09-29 2011-08-31 セイコーエプソン株式会社 半導体素子用電極の製造方法、トランジスタの製造方法、およびｐｉｎダイオードの製造方法
KR20070053060A (ko) 2005-11-19 2007-05-23 삼성전자주식회사 표시장치와 이의 제조방법
TWI338189B (en) * 2006-01-13 2011-03-01 Hon Hai Prec Ind Co Ltd Substrate structure and method of manufacturing thin film pattern layer using the same
JP4542527B2 (ja) * 2006-06-30 2010-09-15 株式会社フューチャービジョン 白色の色度差を低減した表示装置とその製造方法
JP2008130866A (ja) * 2006-11-22 2008-06-05 Seiko Epson Corp 表面改質方法およびパターン形成方法
JPWO2009096525A1 (ja) * 2008-02-01 2011-05-26 日本電気株式会社 薄膜トランジスタ
JP5560629B2 (ja) * 2009-09-04 2014-07-30 コニカミノルタ株式会社 薄膜トランジスタの製造方法
US11114517B2 (en) 2018-03-28 2021-09-07 Sakai Display Products Corporation Organic EL display apparatus and method of manufacturing organic EL display apparatus
JP6867738B2 (ja) * 2018-04-20 2021-05-12 堺ディスプレイプロダクト株式会社 有機ｅｌデバイスの製造方法

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JP2005159328A (ja) 2005-06-16

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