JP4389240B2 - 反射防止膜を作製する方法 - Google Patents

反射防止膜を作製する方法 Download PDF

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Publication number
JP4389240B2
JP4389240B2 JP2000557167A JP2000557167A JP4389240B2 JP 4389240 B2 JP4389240 B2 JP 4389240B2 JP 2000557167 A JP2000557167 A JP 2000557167A JP 2000557167 A JP2000557167 A JP 2000557167A JP 4389240 B2 JP4389240 B2 JP 4389240B2
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membrane
polymer
film
support
refractive index
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Expired - Fee Related
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Japanese (ja)
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JP2002519728A (ja
JP2002519728A5 (https=
Inventor
ウルリッヒ スタイナー
ステファン ヴァルハイム
エリック シェファー
ステファン エッガート
ユールゲン ムリネック
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ユニヴェルシテート コンスタンツ
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3405—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface

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  • Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Optical Filters (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2000557167A 1998-06-30 1999-06-29 反射防止膜を作製する方法 Expired - Fee Related JP4389240B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19829172.8 1998-06-30
DE19829172A DE19829172A1 (de) 1998-06-30 1998-06-30 Verfahren zur Herstellung von Antireflexschichten
PCT/EP1999/004491 WO2000000854A1 (de) 1998-06-30 1999-06-29 Verfahren zur herstellung von antireflexschichten

Publications (3)

Publication Number Publication Date
JP2002519728A JP2002519728A (ja) 2002-07-02
JP2002519728A5 JP2002519728A5 (https=) 2009-09-17
JP4389240B2 true JP4389240B2 (ja) 2009-12-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000557167A Expired - Fee Related JP4389240B2 (ja) 1998-06-30 1999-06-29 反射防止膜を作製する方法

Country Status (8)

Country Link
US (1) US6605229B2 (https=)
EP (1) EP1092164B1 (https=)
JP (1) JP4389240B2 (https=)
AT (1) ATE235066T1 (https=)
AU (1) AU4902399A (https=)
DE (2) DE19829172A1 (https=)
ES (1) ES2195588T3 (https=)
WO (1) WO2000000854A1 (https=)

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EP1506140A1 (de) 2002-05-21 2005-02-16 Interfloat Corporation Verfahren und verwendung einer vorrichtung zur beschichtung von plattenförmigen substraten
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JP5348843B2 (ja) * 2003-10-07 2013-11-20 ハネウエル・インターナシヨナル・インコーポレーテツド 集積回路用途の被覆およびハードマスク組成物、これらの製造方法および使用
DE102004015177B4 (de) 2004-03-27 2006-05-18 Forschungszentrum Karlsruhe Gmbh Verfahren zur Strukturierung eines Elements, das ein reflektierendes Substrat und eine Antireflexschicht umfasst
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JP6413888B2 (ja) 2015-03-30 2018-10-31 Jsr株式会社 パターン形成用組成物、パターン形成方法及びブロック共重合体
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Also Published As

Publication number Publication date
ATE235066T1 (de) 2003-04-15
DE19829172A1 (de) 2000-01-05
DE59904643D1 (de) 2003-04-24
WO2000000854A1 (de) 2000-01-06
EP1092164B1 (de) 2003-03-19
US20010024684A1 (en) 2001-09-27
JP2002519728A (ja) 2002-07-02
US6605229B2 (en) 2003-08-12
ES2195588T3 (es) 2003-12-01
AU4902399A (en) 2000-01-17
EP1092164A1 (de) 2001-04-18

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