AU4902399A - Method for producing anti-reflection coatings - Google Patents

Method for producing anti-reflection coatings

Info

Publication number
AU4902399A
AU4902399A AU49023/99A AU4902399A AU4902399A AU 4902399 A AU4902399 A AU 4902399A AU 49023/99 A AU49023/99 A AU 49023/99A AU 4902399 A AU4902399 A AU 4902399A AU 4902399 A AU4902399 A AU 4902399A
Authority
AU
Australia
Prior art keywords
reflection coating
producing anti
reflection coatings
relates
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU49023/99A
Other languages
English (en)
Inventor
Stefan Eggert
Jurgen Mlynek
Erik Schaffer
Ullrich Steiner
Stefan Walheim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Konstanz
Original Assignee
Universitaet Konstanz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Konstanz filed Critical Universitaet Konstanz
Publication of AU4902399A publication Critical patent/AU4902399A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3405—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Composite Materials (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Optical Filters (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)
AU49023/99A 1998-06-30 1999-06-29 Method for producing anti-reflection coatings Abandoned AU4902399A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19829172 1998-06-30
DE19829172A DE19829172A1 (de) 1998-06-30 1998-06-30 Verfahren zur Herstellung von Antireflexschichten
PCT/EP1999/004491 WO2000000854A1 (de) 1998-06-30 1999-06-29 Verfahren zur herstellung von antireflexschichten

Publications (1)

Publication Number Publication Date
AU4902399A true AU4902399A (en) 2000-01-17

Family

ID=7872505

Family Applications (1)

Application Number Title Priority Date Filing Date
AU49023/99A Abandoned AU4902399A (en) 1998-06-30 1999-06-29 Method for producing anti-reflection coatings

Country Status (8)

Country Link
US (1) US6605229B2 (https=)
EP (1) EP1092164B1 (https=)
JP (1) JP4389240B2 (https=)
AT (1) ATE235066T1 (https=)
AU (1) AU4902399A (https=)
DE (2) DE19829172A1 (https=)
ES (1) ES2195588T3 (https=)
WO (1) WO2000000854A1 (https=)

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US8992786B2 (en) * 2010-04-30 2015-03-31 Corning Incorporated Anti-glare surface and method of making
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US20140268348A1 (en) * 2013-03-13 2014-09-18 Intermolecular Inc. Anti-Reflective Coatings with Porosity Gradient and Methods for Forming the Same
CN109263151B (zh) 2013-12-19 2021-02-05 3M创新有限公司 多层复合材料制品
US9347890B2 (en) 2013-12-19 2016-05-24 Kla-Tencor Corporation Low-noise sensor and an inspection system using a low-noise sensor
JP6398695B2 (ja) 2013-12-26 2018-10-03 Jsr株式会社 下地膜形成用組成物及び自己組織化リソグラフィープロセス
KR102238922B1 (ko) 2013-12-26 2021-04-12 제이에스알 가부시끼가이샤 하지막 형성용 조성물 및 자기 조직화 리소그래피 방법
US9748294B2 (en) 2014-01-10 2017-08-29 Hamamatsu Photonics K.K. Anti-reflection layer for back-illuminated sensor
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US9410901B2 (en) 2014-03-17 2016-08-09 Kla-Tencor Corporation Image sensor, an inspection system and a method of inspecting an article
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JP2016033107A (ja) * 2014-07-29 2016-03-10 キヤノン株式会社 相分離ガラス膜の製造方法、多孔質ガラス膜の製造方法、ガラス部材、撮像装置
JP6413888B2 (ja) 2015-03-30 2018-10-31 Jsr株式会社 パターン形成用組成物、パターン形成方法及びブロック共重合体
TW201700595A (zh) 2015-04-01 2017-01-01 Jsr股份有限公司 圖案形成用組成物及圖案形成方法
US9860466B2 (en) 2015-05-14 2018-01-02 Kla-Tencor Corporation Sensor with electrically controllable aperture for inspection and metrology systems
US20170082783A1 (en) * 2015-06-25 2017-03-23 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Processing of superhydrophobic, infrared transmissive, anti-reflective nanostructured surfaces
KR20180112778A (ko) 2016-02-08 2018-10-12 제이에스알 가부시끼가이샤 콘택트 홀 패턴의 형성 방법 및 조성물
US10778925B2 (en) 2016-04-06 2020-09-15 Kla-Tencor Corporation Multiple column per channel CCD sensor architecture for inspection and metrology
US10313622B2 (en) 2016-04-06 2019-06-04 Kla-Tencor Corporation Dual-column-parallel CCD sensor and inspection systems using a sensor
JP6955176B2 (ja) 2016-07-06 2021-10-27 Jsr株式会社 膜形成用組成物、膜形成方法及び自己組織化リソグラフィープロセス
WO2018008481A1 (ja) 2016-07-07 2018-01-11 Jsr株式会社 パターン形成用組成物及びパターン形成方法
US10691019B2 (en) 2016-10-07 2020-06-23 Jsr Corporation Pattern-forming method and composition
US10725209B2 (en) * 2017-01-17 2020-07-28 The Penn State Research Foundation Broadband and omnidirectional polymer antireflection coatings
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Also Published As

Publication number Publication date
DE59904643D1 (de) 2003-04-24
ATE235066T1 (de) 2003-04-15
JP2002519728A (ja) 2002-07-02
DE19829172A1 (de) 2000-01-05
ES2195588T3 (es) 2003-12-01
US20010024684A1 (en) 2001-09-27
EP1092164A1 (de) 2001-04-18
US6605229B2 (en) 2003-08-12
WO2000000854A1 (de) 2000-01-06
JP4389240B2 (ja) 2009-12-24
EP1092164B1 (de) 2003-03-19

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase