JP4382867B1 - ターゲット構造及びターゲット構造の製造方法 - Google Patents

ターゲット構造及びターゲット構造の製造方法 Download PDF

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Publication number
JP4382867B1
JP4382867B1 JP2009011919A JP2009011919A JP4382867B1 JP 4382867 B1 JP4382867 B1 JP 4382867B1 JP 2009011919 A JP2009011919 A JP 2009011919A JP 2009011919 A JP2009011919 A JP 2009011919A JP 4382867 B1 JP4382867 B1 JP 4382867B1
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Japan
Prior art keywords
target
flow path
fluid flow
fixed
backing plate
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Expired - Fee Related
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JP2009011919A
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English (en)
Japanese (ja)
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JP2010168621A (ja
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順 上野
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Priority to JP2009011919A priority Critical patent/JP4382867B1/ja
Application granted granted Critical
Publication of JP4382867B1 publication Critical patent/JP4382867B1/ja
Priority to KR1020107019956A priority patent/KR101059940B1/ko
Priority to PCT/JP2010/050555 priority patent/WO2010084857A1/ja
Priority to CN2010800012070A priority patent/CN101960043A/zh
Priority to TW99101819A priority patent/TW201033388A/zh
Publication of JP2010168621A publication Critical patent/JP2010168621A/ja
Expired - Fee Related legal-status Critical Current
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP2009011919A 2009-01-22 2009-01-22 ターゲット構造及びターゲット構造の製造方法 Expired - Fee Related JP4382867B1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009011919A JP4382867B1 (ja) 2009-01-22 2009-01-22 ターゲット構造及びターゲット構造の製造方法
KR1020107019956A KR101059940B1 (ko) 2009-01-22 2010-01-19 타겟 구조 및 타겟 구조의 제조 방법
PCT/JP2010/050555 WO2010084857A1 (ja) 2009-01-22 2010-01-19 ターゲット構造及びターゲット構造の製造方法
CN2010800012070A CN101960043A (zh) 2009-01-22 2010-01-19 靶构造及靶构造的制造方法
TW99101819A TW201033388A (en) 2009-01-22 2010-01-22 Target structure and method for manufacturing target structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009011919A JP4382867B1 (ja) 2009-01-22 2009-01-22 ターゲット構造及びターゲット構造の製造方法

Publications (2)

Publication Number Publication Date
JP4382867B1 true JP4382867B1 (ja) 2009-12-16
JP2010168621A JP2010168621A (ja) 2010-08-05

Family

ID=41549762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009011919A Expired - Fee Related JP4382867B1 (ja) 2009-01-22 2009-01-22 ターゲット構造及びターゲット構造の製造方法

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Country Link
JP (1) JP4382867B1 (enExample)
KR (1) KR101059940B1 (enExample)
CN (1) CN101960043A (enExample)
TW (1) TW201033388A (enExample)
WO (1) WO2010084857A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102501045A (zh) * 2011-10-20 2012-06-20 宁波江丰电子材料有限公司 镍靶材组件的加工方法及加工装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103080369B (zh) * 2010-07-23 2015-01-21 吉坤日矿日石金属株式会社 在靶的背面具有沟的磁性材料溅射靶
JP5721815B2 (ja) * 2011-04-12 2015-05-20 株式会社アルバック ターゲット及びターゲットの製造方法
KR101079621B1 (ko) * 2011-06-30 2011-11-03 박경일 타겟과 백킹 플레이트의 비접착식 체결구조
CN104588807B (zh) * 2013-10-31 2016-07-20 宁波江丰电子材料股份有限公司 背板的形成方法和背板
WO2017016575A1 (en) * 2015-07-24 2017-02-02 Applied Materials, Inc. Cooling and utilization optimization of heat sensitive bonded metal targets
KR20180068335A (ko) * 2015-11-12 2018-06-21 허니웰 인터내셔널 인코포레이티드 냉각 구조물을 갖는 스퍼터 타겟 배킹 플레이트 어셈블리
CN108018534B (zh) * 2017-12-12 2020-12-11 中国电子科技集团公司第四十八研究所 一种用于装夹靶材的磁控溅射镀膜装夹装置
TWI687534B (zh) * 2018-09-07 2020-03-11 住華科技股份有限公司 背板、使用其之濺射靶材及其使用方法
JP7362327B2 (ja) * 2019-07-18 2023-10-17 東京エレクトロン株式会社 ターゲット構造体及び成膜装置
CN110828021B (zh) * 2019-11-04 2024-09-06 中国原子能科学研究院 一种用于医用同位素生产靶的水冷机构
CN111455335B (zh) * 2020-04-24 2022-10-21 河北恒博新材料科技股份有限公司 一种平面靶材的绑定方法
CN112323026A (zh) * 2020-10-29 2021-02-05 珠海和泽科技有限公司 靶材背板及其制作方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59009549D1 (de) * 1989-06-05 1995-09-28 Balzers Hochvakuum Verfahren zum Kühlen von Targets sowie Kühleinrichtung für Targets.
JPH0625839A (ja) * 1992-01-10 1994-02-01 Sony Corp スパッタ装置及びカソード
JP3747447B2 (ja) * 1996-11-08 2006-02-22 ソニー株式会社 スパッタ装置
JP2000026962A (ja) * 1998-07-09 2000-01-25 Matsushita Electric Ind Co Ltd スパッタリング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102501045A (zh) * 2011-10-20 2012-06-20 宁波江丰电子材料有限公司 镍靶材组件的加工方法及加工装置
CN102501045B (zh) * 2011-10-20 2014-10-08 宁波江丰电子材料股份有限公司 镍靶材组件的加工方法及加工装置

Also Published As

Publication number Publication date
WO2010084857A1 (ja) 2010-07-29
TW201033388A (en) 2010-09-16
CN101960043A (zh) 2011-01-26
TWI359202B (enExample) 2012-03-01
JP2010168621A (ja) 2010-08-05
KR20100114923A (ko) 2010-10-26
KR101059940B1 (ko) 2011-08-29

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