JP4381783B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- JP4381783B2 JP4381783B2 JP2003391953A JP2003391953A JP4381783B2 JP 4381783 B2 JP4381783 B2 JP 4381783B2 JP 2003391953 A JP2003391953 A JP 2003391953A JP 2003391953 A JP2003391953 A JP 2003391953A JP 4381783 B2 JP4381783 B2 JP 4381783B2
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- spindle
- suspension
- axis direction
- chuck table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000725 suspension Substances 0.000 claims description 63
- 230000007246 mechanism Effects 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 238000005452 bending Methods 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Machine Tool Units (AREA)
- Dicing (AREA)
Description
以下に,本発明の第1の実施形態にかかる切削装置として構成されたダイシング装置について説明する。本実施形態にかかるダイシング装置は,スピンドルの長さが過度に長くならないようにするべく,吊持部および吊持部支持手段等によって切削手段を吊持して移動させる構造を採用するとともに,この吊持部支持手段を片持ち梁型に構成することを特徴としている。
12:被加工物
20:切削手段
22:切削ブレード
24:スピンドル
30:チャックテーブル
40:吊持部
50:支持部材
51:梁部
52:支柱部
54:第2のガイドレール
56:第2のボールスクリュー
58:第2の電動モータ
Claims (2)
- 被加工物を保持するチャックテーブルと;
スピンドルの一端に装着された切削ブレードによって前記被加工物を切削する切削手段と;
前記切削手段を吊持する吊持部と;
前記吊持部を前記スピンドルの軸方向に移動可能に支持する吊持部支持手段と,
前記吊持部を前記スピンドルの軸方向に移動させる駆動手段と;
を備え,
前記吊持部支持手段は,前記スピンドルの軸方向に延長した梁部と,前記切削ブレードとは反対側の前記梁部の端部を支持する支柱部とからなる片持ち梁型の支持部材と;
前記梁部に設けられ,前記吊持部と係合し,前記スピンドルの軸方向への前記吊持部の移動をガイドするガイドレールと;
を備えることを特徴とする,切削装置。 - 前記チャックテーブルは,前記梁部の下部を,前記スピンドルの軸方向に対して略直交する方向に移動可能であることを特徴とする,請求項1に記載の切削装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003391953A JP4381783B2 (ja) | 2003-11-21 | 2003-11-21 | 切削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003391953A JP4381783B2 (ja) | 2003-11-21 | 2003-11-21 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005153046A JP2005153046A (ja) | 2005-06-16 |
JP4381783B2 true JP4381783B2 (ja) | 2009-12-09 |
Family
ID=34718813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003391953A Expired - Lifetime JP4381783B2 (ja) | 2003-11-21 | 2003-11-21 | 切削装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4381783B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104275750A (zh) * | 2014-09-30 | 2015-01-14 | 广东摩德娜科技股份有限公司 | 多刀进给切割的陶瓷砖切割机 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITFI20060153A1 (it) * | 2006-06-16 | 2007-12-17 | Paolino Bacci Srl | Macchina utensile e centro di lavoro per pezzi di legno e simili |
JP2008140981A (ja) * | 2006-12-01 | 2008-06-19 | Disco Abrasive Syst Ltd | 加工装置 |
JP2008288257A (ja) * | 2007-05-15 | 2008-11-27 | Disco Abrasive Syst Ltd | 切削装置 |
JP5385063B2 (ja) * | 2009-09-08 | 2014-01-08 | オークマ株式会社 | 工作機械 |
JP5990040B2 (ja) * | 2012-06-06 | 2016-09-07 | 株式会社ディスコ | 切削装置 |
-
2003
- 2003-11-21 JP JP2003391953A patent/JP4381783B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104275750A (zh) * | 2014-09-30 | 2015-01-14 | 广东摩德娜科技股份有限公司 | 多刀进给切割的陶瓷砖切割机 |
Also Published As
Publication number | Publication date |
---|---|
JP2005153046A (ja) | 2005-06-16 |
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