JP4362758B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP4362758B2
JP4362758B2 JP2003297475A JP2003297475A JP4362758B2 JP 4362758 B2 JP4362758 B2 JP 4362758B2 JP 2003297475 A JP2003297475 A JP 2003297475A JP 2003297475 A JP2003297475 A JP 2003297475A JP 4362758 B2 JP4362758 B2 JP 4362758B2
Authority
JP
Japan
Prior art keywords
glass substrate
propulsive force
width direction
transport
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003297475A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005067770A (ja
JP2005067770A5 (enrdf_load_stackoverflow
Inventor
淑照 池畑
隆佳 大野
雄一 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2003297475A priority Critical patent/JP4362758B2/ja
Priority to TW093123790A priority patent/TWI295658B/zh
Priority to US10/920,843 priority patent/US7344350B2/en
Priority to KR1020040065862A priority patent/KR101112509B1/ko
Priority to CN200410057621XA priority patent/CN1583531B/zh
Priority to CN2010101029988A priority patent/CN101767720B/zh
Publication of JP2005067770A publication Critical patent/JP2005067770A/ja
Publication of JP2005067770A5 publication Critical patent/JP2005067770A5/ja
Application granted granted Critical
Publication of JP4362758B2 publication Critical patent/JP4362758B2/ja
Priority to KR1020110049465A priority patent/KR101152708B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2003297475A 2003-08-21 2003-08-21 搬送装置 Expired - Fee Related JP4362758B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2003297475A JP4362758B2 (ja) 2003-08-21 2003-08-21 搬送装置
TW093123790A TWI295658B (en) 2003-08-21 2004-08-09 Transporting apparatus
US10/920,843 US7344350B2 (en) 2003-08-21 2004-08-18 Transporting apparatus with air-supplying support means and drive-force application means
CN200410057621XA CN1583531B (zh) 2003-08-21 2004-08-20 输送装置
KR1020040065862A KR101112509B1 (ko) 2003-08-21 2004-08-20 반송 시스템
CN2010101029988A CN101767720B (zh) 2003-08-21 2004-08-20 输送装置
KR1020110049465A KR101152708B1 (ko) 2003-08-21 2011-05-25 반송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003297475A JP4362758B2 (ja) 2003-08-21 2003-08-21 搬送装置

Publications (3)

Publication Number Publication Date
JP2005067770A JP2005067770A (ja) 2005-03-17
JP2005067770A5 JP2005067770A5 (enrdf_load_stackoverflow) 2008-04-24
JP4362758B2 true JP4362758B2 (ja) 2009-11-11

Family

ID=34403318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003297475A Expired - Fee Related JP4362758B2 (ja) 2003-08-21 2003-08-21 搬送装置

Country Status (1)

Country Link
JP (1) JP4362758B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5194813B2 (ja) * 2008-01-15 2013-05-08 株式会社Ｉｈｉ 浮上搬送装置
JP2010143733A (ja) * 2008-12-19 2010-07-01 Sumitomo Heavy Ind Ltd 基板ハンドリングシステム及び基板ハンドリング方法
KR101205832B1 (ko) * 2009-11-27 2012-11-29 세메스 주식회사 기판 이송 유닛과, 이를 이용한 기판 이송 방법

Also Published As

Publication number Publication date
JP2005067770A (ja) 2005-03-17

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