JP4360941B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4360941B2 JP4360941B2 JP2004059885A JP2004059885A JP4360941B2 JP 4360941 B2 JP4360941 B2 JP 4360941B2 JP 2004059885 A JP2004059885 A JP 2004059885A JP 2004059885 A JP2004059885 A JP 2004059885A JP 4360941 B2 JP4360941 B2 JP 4360941B2
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- semiconductor chip
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- electrode pad
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- electrode
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Description
図1は、参考形態の多段チップ積層構造を示す断面図である。
以下、半導体チップをフェイスダウン方式で二段積層する実施形態について説明する。
102 基板
104 半導体チップ
106 半導体チップ
108 再配線付シリコンスペーサー
112 電極パッド
114 バンプ電極
116 電極パッド(バンプ電極)
118 電極パッド
120 ワイヤー
128 貫通電極
130 補強材
132 封止樹脂層
134 アンダーフィル樹脂層
136 電極パッド
138 半田ボール
142 再配線層
200 半導体装置
300 半導体装置
411 第一の半導体チップ
412 第一の半導体チップの表面
413 第一の半導体チップのバンプ
414 絶縁フィルム
415 フィルム
416 配線パターン
417 第二の半導体チップ
418 第二の半導体チップの表面
419 第二の半導体チップのバンプ
420 配線パターン
423 接続部
424 接続部
425 接続部
426 接続部
427 接続部
802 バリアメタル膜
804 シード金属膜
806 銅めっき膜
1100 半導体装置
1102 基板
1104 半導体チップ
1106 半導体チップ
1108 シリコンスペーサー
1112 電極パッド
1114 電極パッド
1116 電極パッド
1120 ワイヤー
Claims (5)
- 基板と、
前記基板の上部に設けられた第一の半導体素子と、
前記第一の半導体素子の上部に設けられた第二の半導体素子と、
前記第一の半導体素子と前記第二の半導体素子との間に設けられ、前記第一の半導体素子の外周縁よりも外方向へ張り出した張出部分を有する板状スペーサーと、
を備え、
前記第一の半導体素子の上面に第一及び第二の電極パッドがそれぞれ設けられており、
前記基板の上面に第三の電極パッドが設けられており、
前記第二の半導体素子の下面に第四の電極パッドが設けられており、
前記スペーサーは、
前記張出部分の上部に、前記第二の半導体素子の外周縁よりも外側に位置するように設けられた第五の電極パッドと、
前記第一の電極パッドと前記第五の電極パッドとを接続する配線と、
当該スペーサーを貫通し、前記第二の電極パッドと前記第四の電極パッドとを接続する貫通電極と、
を有し、
前記第五の電極パッドは、前記第三の電極パッドにワイヤーボンディングにより接続しており、
前記スペーサーの前記貫通電極は、前記第二の電極パッドと前記第四の電極パッドとに対してそれぞれ直接に接続されていることを特徴とする半導体装置。 - 請求項1に記載の半導体装置において、
前記スペーサーの配線は、前記スペーサーを貫通する第二の貫通電極を含むことを特徴とする半導体装置。 - 請求項1または2に記載の半導体装置において、
前記スペーサーは、シリコン基板であることを特徴とする半導体装置。 - 請求項1乃至3いずれかに記載の半導体装置において、
前記基板上に、前記スペーサーを前記張出部分において支持する補強材をさらに備えることを特徴とする半導体装置。 - 請求項1乃至4いずれかに記載の半導体装置において、
前記第二の半導体素子の上面に第六の電極パッドが設けられており、
前記第五の電極パッドは、前記第六の電極パッドにワイヤーボンディングにより接続していることを特徴とする半導体装置。
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JP2004059885A JP4360941B2 (ja) | 2004-03-03 | 2004-03-03 | 半導体装置 |
US11/070,089 US7196407B2 (en) | 2004-03-03 | 2005-03-03 | Semiconductor device having a multi-chip stacked structure and reduced thickness |
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JP2004059885A JP4360941B2 (ja) | 2004-03-03 | 2004-03-03 | 半導体装置 |
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JP4593951B2 (ja) * | 2004-03-29 | 2010-12-08 | ルネサスエレクトロニクス株式会社 | マルチチップパッケージの製造方法 |
KR100573302B1 (ko) * | 2004-10-07 | 2006-04-24 | 삼성전자주식회사 | 와이어 본딩을 이용한 패키지 스택 및 그 제조 방법 |
KR100639701B1 (ko) * | 2004-11-17 | 2006-10-30 | 삼성전자주식회사 | 멀티칩 패키지 |
KR100593703B1 (ko) * | 2004-12-10 | 2006-06-30 | 삼성전자주식회사 | 돌출부 와이어 본딩 구조 보강용 더미 칩을 포함하는반도체 칩 적층 패키지 |
KR100665217B1 (ko) * | 2005-07-05 | 2007-01-09 | 삼성전기주식회사 | 반도체 멀티칩 패키지 |
JP4932203B2 (ja) * | 2005-09-20 | 2012-05-16 | 芝浦メカトロニクス株式会社 | ペースト塗布装置及びペースト塗布方法 |
US7605476B2 (en) * | 2005-09-27 | 2009-10-20 | Stmicroelectronics S.R.L. | Stacked die semiconductor package |
US8093717B2 (en) * | 2005-12-09 | 2012-01-10 | Intel Corporation | Microstrip spacer for stacked chip scale packages, methods of making same, methods of operating same, and systems containing same |
DE102006016345A1 (de) * | 2006-04-05 | 2007-10-18 | Infineon Technologies Ag | Halbleitermodul mit diskreten Bauelementen und Verfahren zur Herstellung desselben |
US20070290321A1 (en) * | 2006-06-14 | 2007-12-20 | Honeywell International Inc. | Die stack capacitors, assemblies and methods |
KR101489325B1 (ko) | 2007-03-12 | 2015-02-06 | 페어차일드코리아반도체 주식회사 | 플립-칩 방식의 적층형 파워 모듈 및 그 파워 모듈의제조방법 |
DE102007018914B4 (de) * | 2007-04-19 | 2019-01-17 | Infineon Technologies Ag | Halbleiterbauelement mit einem Halbleiterchipstapel und Verfahren zur Herstellung desselben |
TW200933868A (en) * | 2008-01-28 | 2009-08-01 | Orient Semiconductor Elect Ltd | Stacked chip package structure |
US7842548B2 (en) * | 2008-04-22 | 2010-11-30 | Taiwan Semconductor Manufacturing Co., Ltd. | Fixture for P-through silicon via assembly |
US9293350B2 (en) * | 2008-10-28 | 2016-03-22 | Stats Chippac Ltd. | Semiconductor package system with cavity substrate and manufacturing method therefor |
KR101004684B1 (ko) * | 2008-12-26 | 2011-01-04 | 주식회사 하이닉스반도체 | 적층형 반도체 패키지 |
US20100314730A1 (en) * | 2009-06-16 | 2010-12-16 | Broadcom Corporation | Stacked hybrid interposer through silicon via (TSV) package |
CN103620762B (zh) * | 2011-10-21 | 2016-08-17 | 松下电器产业株式会社 | 半导体装置 |
CN103650131B (zh) * | 2012-03-14 | 2016-12-21 | 松下电器产业株式会社 | 半导体装置 |
KR101418399B1 (ko) | 2014-03-28 | 2014-07-11 | 페어차일드코리아반도체 주식회사 | 플립-칩 방식의 적층형 파워 모듈 및 그 파워 모듈의 제조방법 |
JP7034706B2 (ja) * | 2017-12-27 | 2022-03-14 | キオクシア株式会社 | 半導体装置 |
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US6005778A (en) * | 1995-06-15 | 1999-12-21 | Honeywell Inc. | Chip stacking and capacitor mounting arrangement including spacers |
JP4213281B2 (ja) | 1999-02-25 | 2009-01-21 | ローム株式会社 | チップオンチップ型半導体装置 |
JP4570809B2 (ja) * | 2000-09-04 | 2010-10-27 | 富士通セミコンダクター株式会社 | 積層型半導体装置及びその製造方法 |
US6900528B2 (en) * | 2001-06-21 | 2005-05-31 | Micron Technology, Inc. | Stacked mass storage flash memory package |
JP3674777B2 (ja) | 2001-09-21 | 2005-07-20 | シャープ株式会社 | 固体撮像装置 |
US20040061213A1 (en) * | 2002-09-17 | 2004-04-01 | Chippac, Inc. | Semiconductor multi-package module having package stacked over die-up flip chip ball grid array package and having wire bond interconnect between stacked packages |
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US7196407B2 (en) | 2007-03-27 |
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