JP4351644B2 - 相変化材料を含む半導体構造 - Google Patents
相変化材料を含む半導体構造 Download PDFInfo
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- JP4351644B2 JP4351644B2 JP2005077513A JP2005077513A JP4351644B2 JP 4351644 B2 JP4351644 B2 JP 4351644B2 JP 2005077513 A JP2005077513 A JP 2005077513A JP 2005077513 A JP2005077513 A JP 2005077513A JP 4351644 B2 JP4351644 B2 JP 4351644B2
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- 239000012782 phase change material Substances 0.000 title claims description 133
- 239000004065 semiconductor Substances 0.000 title claims description 37
- 239000012071 phase Substances 0.000 claims description 41
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- 239000010410 layer Substances 0.000 description 84
- 238000000034 method Methods 0.000 description 39
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- 229910021332 silicide Inorganic materials 0.000 description 20
- 239000000463 material Substances 0.000 description 19
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 19
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- 125000006850 spacer group Chemical group 0.000 description 13
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- 229910052785 arsenic Inorganic materials 0.000 description 7
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
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- 229910003811 SiGeC Inorganic materials 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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- RXCVUXLCNLVYIA-UHFFFAOYSA-N orthocarbonic acid Chemical compound OC(O)(O)O RXCVUXLCNLVYIA-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/685—Hi-Lo semiconductor devices, e.g. memory devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
- G11C11/5678—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using amorphous/crystalline phase transition storage elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Memories (AREA)
Description
エミッタ、ベース、およびコレクタを有し、ベースが絶縁層に隣接する下面を有する、トランジスタと、
相変化材料でできているベース・コンタクトとを含む。
第1のドープ領域を含み1組の第2のドープ領域がその両側に配置された基板と、
第1のドープ領域上に配置された相変化材料と、
相変化材料上に配置された導体とを含む半導体装置であり、相変化材料が第1の相のときには半導体構造がバイポーラ接合トランジスタ(BJT)として動作し、相変化材料が第2の相のときには半導体構造が電界効果トランジスタ(FET)として動作する。
SOI基板のSi含有層の第1の導電領域上に、誘電性スペーサがその両側に配置された犠牲ゲートを形成するステップと、
Si含有層内の第1の導電領域に当接させて第2の導電領域を形成するステップと、
ゲート・バイア(gate via)を設けるために犠牲ゲートを除去するステップと、
ゲート・バイアの少なくとも一部分内に相変化材料ライナを形成するステップと、
相変化材料ライナ上にゲート導体を形成するステップとを含む。
シリコン・オン・インシュレータ基板上に形成されたメモリ領域およびロジック領域を含み、ロジック領域が少なくとも1つのゲート領域を含み、メモリ領域が複数の犠牲ゲート領域を含む、初期構造を設けるステップと、
エクステンション領域用ドーパントをロジック領域に注入するステップと、
メモリ領域およびロジック領域上に、メモリ領域内の複数の犠牲ゲートおよびロジック領域内の少なくとも1つの犠牲ゲートの上面と同一平面をなす誘電体層を形成するステップと、
ロジック領域上にエッチ・ストップ層を形成するステップと、
ロジック領域をエッチ・ストップ層によって保護しながら、メモリ領域内の複数の犠牲ゲートから少なくとも1つの犠牲ゲートを除去してゲート・バイアを形成するステップと、
ゲート・バイアの少なくとも一部分内に相変化材料ライナを形成するステップと、
ゲート導体を相変化材料ライナの上に形成するステップと、
メモリ領域およびロジック領域に相互接続配線を提供するステップとを含む。
15 相変化メモリ装置
16 シリコン含有上部層(SOI層)
17 相変化材料ライナ
18 絶縁層
19 エミッタ、ソース
20 ベース、チャネル
21 コレクタ、ドレイン
22 ゲート
23 スペーサ
24 可変抵抗器
25 ベース・コンタクト
26 エミッタ・コンタクト
27 コレクタ・コンタクト
28 シリコン・オン・インシュレータ基板
29 バルク・シリコン含有下部層
30 データ点
31 データ点
35 ロジック領域
36 ゲート領域
37 犠牲ゲート領域
38 ゲート電極
39 ゲート誘電体
40 メモリ領域
41 ゲート誘電体
42 ゲート電極
43 第1のスペーサ
44 メモリ・ブロック・マスク
45 ソース/ドレイン・エクステンション領域
46 ソース/ドレイン領域
47 第2のスペーサ
48 シリサイド領域
49 誘電体層
51 誘電体膜
52 ロジック領域ブロック・マスク
55 ポリシリコン層
61 金属シリサイド
62 上部誘電体層
63 バイア・ホール
64 相互接続部
85 SOI域(Rx)
86 ゲート領域(PC)
87 コレクタおよびベース・コンタクト(CA)領域
88 金属層(M1)
90 トレンチ分離領域
Claims (4)
- 第1のドープ領域とその両側に位置する1組の第2のドープ領域とを含む基板と、
前記第1のドープ領域上に配置された相変化材料と、
前記相変化材料上に配置された導体とを含む半導体構造であって、前記相変化材料が第1の相のときには前記半導体構造がバイポーラ接合トランジスタとして動作し、前記相変化材料が第2の相のときには前記半導体構造が電界効果トランジスタとして動作する、半導体構造。 - 前記相変化材料が、カルコゲナイド合金を含む、請求項1に記載の半導体構造。
- 前記第1の相が結晶固相を含み、前記第2の相が非晶質固相を含む、請求項1に記載の半導体構造。
- 前記相変化材料が、前記基板から放射される熱によって前記第1の相または前記第2の相に相変化される、請求項1に記載の半導体構造。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/708,667 US7005665B2 (en) | 2004-03-18 | 2004-03-18 | Phase change memory cell on silicon-on insulator substrate |
Publications (2)
Publication Number | Publication Date |
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JP2005268802A JP2005268802A (ja) | 2005-09-29 |
JP4351644B2 true JP4351644B2 (ja) | 2009-10-28 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005077513A Expired - Fee Related JP4351644B2 (ja) | 2004-03-18 | 2005-03-17 | 相変化材料を含む半導体構造 |
Country Status (3)
Country | Link |
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US (1) | US7005665B2 (ja) |
JP (1) | JP4351644B2 (ja) |
CN (1) | CN100399599C (ja) |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100505709B1 (ko) * | 2003-09-08 | 2005-08-03 | 삼성전자주식회사 | 상 변화 메모리 장치의 파이어링 방법 및 효율적인파이어링을 수행할 수 있는 상 변화 메모리 장치 |
US8363446B2 (en) * | 2005-01-10 | 2013-01-29 | Ovonyx, Inc. | Multilevel variable resistance memory cell utilizing crystalline programming states |
US7923724B2 (en) * | 2005-01-10 | 2011-04-12 | Ovonyx, Inc. | Phase change memory that switches between crystalline phases |
JP4884784B2 (ja) * | 2005-01-28 | 2012-02-29 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法及び半導体装置 |
US20060172067A1 (en) | 2005-01-28 | 2006-08-03 | Energy Conversion Devices, Inc | Chemical vapor deposition of chalcogenide materials |
KR100962623B1 (ko) * | 2005-09-03 | 2010-06-11 | 삼성전자주식회사 | 상변화 물질층 형성 방법, 이를 이용한 상변화 메모리 유닛및 상변화 메모리 장치의 제조 방법 |
CN101292299B (zh) * | 2005-10-17 | 2013-02-06 | 瑞萨电子株式会社 | 半导体器件 |
JP4950490B2 (ja) * | 2005-12-28 | 2012-06-13 | 株式会社東芝 | 不揮発性スイッチング素子およびその製造方法ならびに不揮発性スイッチング素子を有する集積回路 |
CN100517065C (zh) * | 2006-03-01 | 2009-07-22 | 中国科学院上海微系统与信息技术研究所 | 一种制作相变存储器用的湿法刻蚀液及其湿法刻蚀工艺 |
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