JP4308666B2 - デジタルマイクロミラーハウジングの開口エッジ - Google Patents

デジタルマイクロミラーハウジングの開口エッジ Download PDF

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Publication number
JP4308666B2
JP4308666B2 JP2003564639A JP2003564639A JP4308666B2 JP 4308666 B2 JP4308666 B2 JP 4308666B2 JP 2003564639 A JP2003564639 A JP 2003564639A JP 2003564639 A JP2003564639 A JP 2003564639A JP 4308666 B2 JP4308666 B2 JP 4308666B2
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JP
Japan
Prior art keywords
layer
chromium
photoresist
lid
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003564639A
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English (en)
Japanese (ja)
Other versions
JP2005516256A (ja
JP2005516256A5 (enExample
Inventor
ショッキー、スティーブン・エム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Publication of JP2005516256A publication Critical patent/JP2005516256A/ja
Publication of JP2005516256A5 publication Critical patent/JP2005516256A5/ja
Application granted granted Critical
Publication of JP4308666B2 publication Critical patent/JP4308666B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/005—Diaphragms

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2003564639A 2002-01-30 2003-01-28 デジタルマイクロミラーハウジングの開口エッジ Expired - Fee Related JP4308666B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/066,139 US6667837B1 (en) 2002-01-30 2002-01-30 Method and apparatus for configuring an aperture edge
PCT/US2003/002567 WO2003065104A1 (en) 2002-01-30 2003-01-28 Aperture edge in a digital micromirror housing

Publications (3)

Publication Number Publication Date
JP2005516256A JP2005516256A (ja) 2005-06-02
JP2005516256A5 JP2005516256A5 (enExample) 2006-02-02
JP4308666B2 true JP4308666B2 (ja) 2009-08-05

Family

ID=27658644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003564639A Expired - Fee Related JP4308666B2 (ja) 2002-01-30 2003-01-28 デジタルマイクロミラーハウジングの開口エッジ

Country Status (7)

Country Link
US (1) US6667837B1 (enExample)
EP (1) EP1470444A1 (enExample)
JP (1) JP4308666B2 (enExample)
KR (1) KR100612172B1 (enExample)
CN (1) CN1602439A (enExample)
TW (1) TWI229581B (enExample)
WO (1) WO2003065104A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974517B2 (en) * 2001-06-13 2005-12-13 Raytheon Company Lid with window hermetically sealed to frame, and a method of making it
US6745449B2 (en) * 2001-11-06 2004-06-08 Raytheon Company Method and apparatus for making a lid with an optically transmissive window
US6988338B1 (en) 2002-10-10 2006-01-24 Raytheon Company Lid with a thermally protected window
US7161727B2 (en) * 2003-03-24 2007-01-09 Memphis Eye & Cataract Associates Ambulatory Surgery Center Digital micromirror device having a window transparent to ultraviolet (UV) light
US7046419B2 (en) * 2004-08-13 2006-05-16 Hewlett-Packard Development Company, L.P. External aperturing for digital micromirror devices
US7459095B2 (en) * 2004-10-21 2008-12-02 Corning Incorporated Opaque chrome coating suitable for etching
EP1802452B1 (en) * 2004-10-21 2013-12-25 Corning Incorporated Optical element with an opaque chrome coating having an aperture and method of making same
US7184201B2 (en) * 2004-11-02 2007-02-27 Texas Instruments Incorporated Digital micro-mirror device having improved contrast and method for the same
KR100772039B1 (ko) * 2004-12-24 2007-10-31 엘지전자 주식회사 스캐닝 마이크로미러 패키지 및 그 제조 방법과, 이를사용한 광 스캐닝 장치
KR100713132B1 (ko) * 2005-05-27 2007-05-02 삼성전자주식회사 프로젝터
US7348193B2 (en) 2005-06-30 2008-03-25 Corning Incorporated Hermetic seals for micro-electromechanical system devices
KR100667291B1 (ko) * 2005-07-27 2007-01-12 삼성전자주식회사 마이크로 미러 소자 패키지 및 그 제조방법
US8064122B2 (en) * 2007-03-15 2011-11-22 Asml Holding N.V. Apertured window for enabling flexible illumination overfill of patterning devices
US20140097913A1 (en) 2012-10-09 2014-04-10 Mesaplexx Pty Ltd Multi-mode filter
US11522107B2 (en) * 2015-03-05 2022-12-06 Xiamen Sanan Optoelectronics Technology Co., Ltd. Light emitting diode and fabrication method thereof
US11111133B1 (en) 2017-01-30 2021-09-07 Mirrorcle Technologies, Inc. MEMS actuators with improved performance and cooling

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US5392155A (en) * 1988-06-17 1995-02-21 Tamari; Vladimir F. De-diffraction methods
US5264393A (en) 1988-11-25 1993-11-23 Fuji Photo Film Co., Ltd. Solid state image pickup device and method of manufacturing the same
US5095664A (en) 1990-01-30 1992-03-17 Massachusetts Institute Of Technology Optical surface polishing method
US5326426A (en) * 1991-11-14 1994-07-05 Tam Andrew C Undercut membrane mask for high energy photon patterning
US5458716A (en) 1994-05-25 1995-10-17 Texas Instruments Incorporated Methods for manufacturing a thermally enhanced molded cavity package having a parallel lid
US5907425A (en) * 1995-12-19 1999-05-25 The Board Of Trustees Of The Leland Stanford Junior University Miniature scanning confocal microscope
US5939785A (en) * 1996-04-12 1999-08-17 Texas Instruments Incorporated Micromechanical device including time-release passivant
DE19816230C2 (de) * 1997-04-11 2001-11-29 Advantest Corp Abschirmgehäuse
DE60041330D1 (de) 1999-12-22 2009-02-26 Matsushita Electric Works Ltd Methode zur erzeugung von chips aus dünnen plättchen pyroelektrischen materials
US6583921B2 (en) 1999-12-28 2003-06-24 Texas Instruments Incorporated Micromechanical device and method for non-contacting edge-coupled operation

Also Published As

Publication number Publication date
JP2005516256A (ja) 2005-06-02
KR100612172B1 (ko) 2006-08-14
WO2003065104A1 (en) 2003-08-07
EP1470444A1 (en) 2004-10-27
US6667837B1 (en) 2003-12-23
TWI229581B (en) 2005-03-11
KR20040079961A (ko) 2004-09-16
TW200408334A (en) 2004-05-16
CN1602439A (zh) 2005-03-30

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