JP2003177548A5 - - Google Patents

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Publication number
JP2003177548A5
JP2003177548A5 JP2001375759A JP2001375759A JP2003177548A5 JP 2003177548 A5 JP2003177548 A5 JP 2003177548A5 JP 2001375759 A JP2001375759 A JP 2001375759A JP 2001375759 A JP2001375759 A JP 2001375759A JP 2003177548 A5 JP2003177548 A5 JP 2003177548A5
Authority
JP
Japan
Prior art keywords
light
reflection
irradiation apparatus
light source
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001375759A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003177548A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001375759A priority Critical patent/JP2003177548A/ja
Priority claimed from JP2001375759A external-priority patent/JP2003177548A/ja
Publication of JP2003177548A publication Critical patent/JP2003177548A/ja
Publication of JP2003177548A5 publication Critical patent/JP2003177548A5/ja
Pending legal-status Critical Current

Links

JP2001375759A 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置 Pending JP2003177548A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001375759A JP2003177548A (ja) 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001375759A JP2003177548A (ja) 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置

Publications (2)

Publication Number Publication Date
JP2003177548A JP2003177548A (ja) 2003-06-27
JP2003177548A5 true JP2003177548A5 (enExample) 2005-07-21

Family

ID=19184072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001375759A Pending JP2003177548A (ja) 2001-12-10 2001-12-10 反射遮光型のシャッタを備えた光照射装置

Country Status (1)

Country Link
JP (1) JP2003177548A (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07280719A (ja) * 1994-04-12 1995-10-27 Hitachi Electron Eng Co Ltd Ｃｖｄ装置用微粒子検出器
JPH1027751A (ja) * 1996-07-11 1998-01-27 Nikon Corp 照明装置及びこれを用いた露光装置
JPH11233423A (ja) * 1998-02-06 1999-08-27 Canon Inc 露光用シャッタおよび露光装置ならびにディバイス製造方法
JP3575281B2 (ja) * 1998-05-27 2004-10-13 ウシオ電機株式会社 光照射装置のシャッター機構

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